Sheet carrier and sheet conveying apparatus

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a sheet carrier and a sheet carrying device, and solves the problem that the distribution uniformity of passivation gas in the sheet carrier is poor, so that the passivation uniformity of a plurality of sheet materials is poor. The sheet carrier comprises a cavity, the cavity is provided with a first containing cavity and a first opening which are identical and communicated, the first containing cavity is used for containing a plurality of sheet materials, and passivation gas can enter and exit from the first containing cavity through the first opening. In addition, one face of the cavity is a gas inlet and outlet face, the gas inlet and outlet face is provided with a plurality of gas holes, under the condition that the multiple sheet-shaped materials are located in the first containing cavity, the cross sections of the multiple sheet-shaped materials all face the gas inlet and outlet face, and passivation gas enters the first containing cavity through the gas holes. Through the two gas inlet modes, the distribution uniformity of the passivation gas in the first containing cavity is further improved, and therefore the passivation uniformity of the multiple flaky materials is further improved.

Description

Technical Field

[0001] This disclosure relates to the fields of photovoltaic and semiconductor technology, and specifically to a sheet carrier and sheet handling device. Background Technology

[0002] Currently, in the photovoltaic and semiconductor industries, silicon wafers are typically cut into two or more pieces to improve the conversion efficiency of products made from silicon wafers, thereby reducing costs and increasing efficiency. After being cut, silicon wafers have cross-sections. To ensure product conversion efficiency, the industry uses passivation equipment to passivate these cross-sections. If a silicon wafer with a cross-section is placed directly into the passivation equipment, the non-cross-sections will be exposed. Passivation gas will diffuse to these non-cross-sections, causing plating smearing. Therefore, the industry often uses carriers to hold multiple silicon wafers and shield the non-cross-sections.

[0003] However, the air intake method of the carriers in related technologies mostly adopts the side gap of the carrier, which results in poor uniformity of the distribution of passivation gas in the carrier, thus leading to poor passivation uniformity of multiple silicon wafers. Utility Model Content

[0004] In view of this, the present disclosure provides a sheet carrier and a sheet handling device, which solves the problem that the passivation uniformity of multiple sheet materials is poor due to the poor distribution uniformity of the passivation gas in the sheet carrier.

[0005] In a first aspect, embodiments of this disclosure provide a sheet carrier, comprising: a cavity having a first receiving cavity configured to receive a plurality of stacked sheet materials; wherein the cavity is detachable or has an access channel for the sheet materials to enter and exit the first receiving cavity; wherein the cavity further has a first opening communicating with the first receiving cavity to allow passivating gas to enter and exit the first receiving cavity through the first opening; wherein one surface of the cavity is an inlet / outlet surface, the inlet / outlet surface having a plurality of vents, the vents communicating with the first receiving cavity and the outside of the cavity to allow the passivating gas to enter and exit the first receiving cavity through the plurality of vents; wherein, when the plurality of sheet materials are located in the first receiving cavity, the plurality of sheet materials are stacked along a first direction, with the cross-section of the sheet materials facing the inlet / outlet surface.

[0006] In some embodiments, when the cavity is detachable, the inlet / outlet surface is detachable so that the sheet material can enter and exit the first receiving cavity when the inlet / outlet surface is detached; or, when the cavity has the inlet / outlet channel, the cavity includes: a bottom plate; a top plate, disposed opposite to the bottom plate, the top plate forming the inlet / outlet surface, a gap between the cross-section of the sheet material and the top plate forming a gas flow space; a first side plate connecting the bottom plate and the top plate; a second side plate, disposed opposite to the first side plate and connecting the bottom plate and the top plate, wherein the bottom plate, the top plate, the first side plate, and the second side plate form the inlet / outlet channel, and the plane of the inlet / outlet channel is perpendicular to the first direction; a third side plate, disposed opposite to the inlet / outlet channel, connecting the first side plate and the second side plate, and connected to the bottom plate, wherein the third side plate and the top plate form the first opening.

[0007] In some embodiments, the cavity further includes: a baffle plate located on the side of the top plate away from the first receiving cavity and connected to the top plate, configured to cover an edge region of the top plate, wherein the baffle plate has a second opening extending through the baffle plate in a second direction, the second opening being configured to expose a plurality of the air holes in a central region of the top plate, wherein the second direction is perpendicular to the first direction.

[0008] In some embodiments, the shape of the second opening projected onto the baffle plate includes an elongated shape, the length direction of which is perpendicular to the first direction.

[0009] In some embodiments, the side of the first side plate near the access channel has a first edge region, the first edge region being located on the side of the first side plate near the first receiving cavity, and the side of the second side plate near the access channel has a second edge region, the second edge region being located on the side of the second side plate near the first receiving cavity and being disposed opposite to the first edge region, wherein the vertical distance between the first edge region and the second edge region in a third direction gradually increases in a direction opposite to the first direction, wherein the third direction is perpendicular to the first direction.

[0010] In some embodiments, the first side plate has a first clearance groove on the side near the first receiving cavity, the first clearance groove being located on the side of the first side plate near the top plate and extending along the first direction; and / or, the second side plate has a second clearance groove on the side near the first receiving cavity, the second clearance groove being located on the side of the second side plate near the top plate and extending along the first direction.

[0011] In some embodiments, the side of the first side plate near the bottom plate has a third edge region located on the side of the first side plate away from the first receiving cavity, and the side of the second side plate near the bottom plate has a fourth edge region located on the side of the second side plate away from the first receiving cavity, wherein the vertical distance between the third edge region and the fourth edge region in the third direction gradually decreases along a second direction, wherein the second direction is perpendicular to the first direction and the third direction, respectively.

[0012] In some embodiments, the sheet carrier further includes: a first pad, separately disposed from the cavity, capable of being placed in the first receiving cavity, and configured to carry the sheet material; wherein a first surface of the first pad contacts the sheet material, and a second surface of the first pad can contact the third side plate; and / or, a second pad, separately disposed from the cavity, capable of being placed in the first receiving cavity, wherein, in the case that the first receiving cavity contains multiple sheets of the sheet material stacked together, the second pad is located on the side of the outermost sheet material away from the third side plate.

[0013] In some embodiments, the first surface of the second pad has at least one ventilation groove, one end of which extends to the edge of the second pad, wherein when the second pad is in contact with the sheet material, the first surface of the second pad faces the sheet material.

[0014] Secondly, embodiments of this disclosure provide a sheet handling device, comprising: the sheet carrier described in the first aspect, configured to hold a plurality of stacked sheet materials; a boat having at least one second receiving cavity configured to receive the sheet carrier, wherein the boat has a third opening communicating with the second receiving cavity, a passivating gas entering the second receiving cavity through the third opening, and the third opening being adjacent to a first opening or access channel of the sheet carrier.

[0015] The sheet carrier provided in this embodiment includes a cavity having a first receiving cavity and a first opening that are interconnected. The first receiving cavity is used to receive multiple stacked sheet materials. Passivating gas enters and exits the first receiving cavity through the first opening and passivates the cross-section of the sheet materials. Additionally, one side of the cavity is an inlet / outlet surface with several vents. The cross-section of the sheet materials faces the inlet / outlet surface, and the passivating gas enters the first receiving cavity through the vents to passivate the cross-section of the sheet materials. This sheet carrier employs two air intake methods: one from the side of the multiple sheet materials and the other from the top of the multiple sheet materials. This further improves the uniformity of the passivating gas distribution within the first receiving cavity, thereby further improving the passivation uniformity of the multiple sheet materials. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this disclosure.

[0017] Figure 2 The diagram shown is a structural schematic of a sheet carrier and sheet material provided in an embodiment of this disclosure.

[0018] Figure 3 The image shown is a rear view of a sheet carrier provided in an embodiment of this disclosure.

[0019] Figure 4 The diagram shown is a structural schematic of a top plate provided in an embodiment of this disclosure.

[0020] Figure 5 The diagram shown is a structural schematic of a sheet carrier provided in another embodiment of this disclosure.

[0021] Figure 6 The diagram shown is a structural schematic of a sheet carrier provided in another embodiment of this disclosure.

[0022] Figure 7 The diagram shown is a structural schematic of the first side plate provided in an embodiment of this disclosure.

[0023] Figure 8 The image shown is a top view of a first side plate and a second side plate provided in an embodiment of this disclosure.

[0024] Figure 9 The image shown is a front view of a sheet carrier and sheet material provided in an embodiment of this disclosure.

[0025] Figure 10 As shown Figure 9 The image shows a magnified view of the sheet carrier and sheet material in region A.

[0026] Figure 11 As shown Figure 9 The image shows a magnified view of the sheet carrier and sheet material in region B.

[0027] Figure 12 The image shown is a rear view of a sheet carrier provided in another embodiment of this disclosure.

[0028] Figure 13 The diagram shown is a structural schematic of a first pad, a second pad, and a sheet material provided in an embodiment of this disclosure.

[0029] Figure 14 The diagram shown is a structural schematic of a sheet carrier provided in another embodiment of this disclosure.

[0030] Figure 15 The diagram shown is a structural schematic of a second pad provided in an embodiment of this disclosure.

[0031] Figure 16 The diagram shown is a structural schematic of a sheet handling device provided in an embodiment of this disclosure.

[0032] Figure 17 As shown Figure 16 The image shows a partial enlarged view of the sheet handling device in region C.

[0033] Figure label:

[0034] 1. Sheet material handling device; 10. Sheet material carrier; 100. Cavity; 1001. First receiving cavity; 1011. Gap; 1002. Air inlet / outlet surface; 1012. Air hole; 101. Inlet / outlet channel; 102. First opening; 110. Bottom plate; 120. Top plate; 1210. First sub-top plate; 1220. Reinforcing rib; 1201. Edge region of top plate; 1202. Middle region of top plate; 130. First side plate; 1301. First edge region; 1302. First clearance groove; 1303. Third edge region; 140. Second side plate; 1401. Second edge region; 1402. Second clearance groove ; 1403, Fourth edge region; 1314, Nameplate mounting slot; 150, Third side plate; 160, Cover plate; 1601, Second opening; 200, First pad; 201, First surface of the first pad; 202, Second surface of the first pad; 300, Second pad; 301, First surface of the second pad; 302, Second surface of the second pad; 3010, Ventilation groove; 400, Handle; 500, Nameplate; 20, Boat; 2001, Second receiving cavity; 2002, Third opening; 2, Sheet material; 21, Cross-section of sheet material; X1, First direction; X2, Second direction; X3, Third direction. Detailed Implementation

[0035] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0036] Figure 1 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this disclosure. Figure 2 The diagram shown is a structural schematic of a sheet carrier and sheet material provided in an embodiment of this disclosure. Figure 3 The image shown is a rear view of a sheet carrier provided according to an embodiment of this disclosure. Figures 1 to 3 As shown, the sheet carrier 10 includes a cavity 100, which has a first receiving cavity 1001 configured to receive multiple stacked sheet materials 2. The cavity 100 is detachable or has an access channel 101 for the sheet materials 2 to enter and exit the first receiving cavity 1001. The cavity 100 also has a first opening 102 communicating with the first receiving cavity 1001, allowing passivating gas to enter and exit the first receiving cavity 1001 through the first opening 102. One side of the cavity 100 is an inlet / outlet surface 1002, which has a plurality of vents 1012 communicating with the first receiving cavity 1001 and the outside of the cavity 100, allowing passivating gas to enter and exit the first receiving cavity 1001 through the vents 1012. When multiple sheet materials 2 are located in the first receiving cavity 1001, the multiple sheet materials 2 are stacked along the first direction X1, and the cross-section 21 of the sheet materials faces the air inlet / outlet surface 1002.

[0037] The sheet carrier 10 adopts two air intake methods: side air intake from multiple sheet materials 2 and top air intake from multiple sheet materials 2. This further improves the uniformity of passivation gas distribution in the first receiving cavity 1001, thereby further improving the passivation uniformity of the multiple sheet materials 2.

[0038] For example, a plurality of vents 1012 are evenly arranged to improve the uniformity of air entering and exiting through the air inlet / outlet surface 1002.

[0039] For example, a plurality of vents 1012 are evenly arranged in the middle region of the inlet and outlet surfaces 1002 to further improve the uniformity of the distribution of passivation gas in the first receiving cavity 1001.

[0040] For example, the arrangement density of the plurality of pores 1012 in the middle region of the inlet / outlet surface 1002 is greater than the arrangement density in the edge region of the inlet / outlet surface 1002 near the inlet / outlet channel 101 or the first opening 102, so as to further improve the uniformity of the distribution of passivation gas in the first receiving cavity 1001.

[0041] For example, the cross-sectional shape of the cavity 100 can be rectangular, parallelogram, or other polygonal or irregular shapes. For example, the cross-sectional shape of the inlet / outlet channel 101 can be rectangular, trapezoidal, or other polygonal or irregular shapes. For example, the cross-sectional shape of the first opening 102 can be rectangular, trapezoidal, or other polygonal or irregular shapes.

[0042] For example, the sheet material 2 can be a silicon wafer, a solar panel, a glass substrate, etc.

[0043] In some embodiments, when the cavity 100 is detachable, the air inlet / outlet surface 1002 is detachable so that when the air inlet / outlet surface 1002 is in a detached state, the sheet material 2 can enter and exit the first receiving cavity 1001.

[0044] In some embodiments, such as Figures 1 to 3 As shown, the cavity 100 includes a bottom plate 110, a top plate 120, a first side plate 130, a second side plate 140, and a third side plate 150. The top plate 120 is disposed opposite to the bottom plate 110, and the top plate 120 forms an inlet / outlet surface 1002. A gap 1011 is formed between the cross-section 21 of the sheet material and the top plate 120, forming a gas flow space. The first side plate 130 connects the bottom plate 110 and the top plate 120. The second side plate 140 is disposed opposite to the first side plate 130 and connects the bottom plate 110 and the top plate 120. The bottom plate 110, the top plate 120, the first side plate 130, and the second side plate 140 form an inlet / outlet channel 101, and the plane of the inlet / outlet channel 101 is perpendicular to the first direction X1. The third side plate 150 is disposed opposite to the inlet / outlet channel 101, connects the first side plate 130 and the second side plate 140, and is connected to the bottom plate 110. A first opening 102 is formed between the third side plate 150 and the top plate 120. The structure of the cavity 100 is simple.

[0045] For example, the interconnected boards are connected in a detachable manner to facilitate the replacement and maintenance of each board.

[0046] Exemplarily, the top plate 120 includes a first sub-top plate 1210 and a reinforcing rib 1220. The first sub-top plate 1210 is connected to a first side plate 130 and a second side plate 140, respectively, and has a plurality of vents 1012. The reinforcing rib 1220 is located on the side of the first sub-top plate 1210 away from the first receiving cavity 1001 and is connected to the first sub-top plate 1210. The mechanical strength of the top plate 120 is further improved by providing the reinforcing rib 1220.

[0047] For example, the reinforcing rib 1220 and the first sub-top plate 1210 can be an integral structure or a separate structure. For example, as... Figure 1 and Figure 5 As shown, the reinforcing rib 1220 is a long rod-shaped structure, and the reinforcing rib 1220 extends along the first direction X1.

[0048] In some embodiments, the cavity 100 further includes a baffle 160 located on the side of the top plate 120 away from the first receiving cavity 1001 and connected to the top plate 120. The baffle 160 is configured to cover the edge region 1201 of the top plate. The baffle 160 has a second opening 1601 extending through the baffle 160 along a second direction X2, the second opening 1601 being configured to expose a plurality of vents 1012 in the middle region 1202 of the top plate, the second direction X2 being perpendicular to the first direction X1.

[0049] The edge region 1201 of the top plate is blocked by a baffle plate 160, and the second opening 1601 of the baffle plate 160 exposes multiple vents 1012 in the middle region 1202 of the top plate, so that the passivating gas can only enter the middle region 1202 of the top plate through the second opening 1601, thereby controlling the amount of passivating gas entering the top plate 120; at the same time, the passivating gas can only enter the middle region of the first receiving cavity 1001 through the multiple vents 1012 in the middle region 1202 of the top plate, thereby controlling the amount of passivating gas entering the middle region of the first receiving cavity 1001.

[0050] For example, such as Figure 4 and Figure 5 As shown, there are two baffles 160, which are located on both sides of the reinforcing rib 1220 and connected to the first sub-top plate 1210 respectively. Each baffle 160 has a second opening 1601, which is located in the middle area of ​​the baffle 160 to expose a plurality of vents 1012 in the middle area of ​​the first sub-top plate 1210.

[0051] For example, the shield 160 is detachably connected to the first sub-top plate 1210 to facilitate replacement and maintenance of the shield 160.

[0052] In some embodiments, the shape of the second opening 1601 projected onto the baffle 160 includes an elongated shape, the length direction of which is perpendicular to the first direction X1.

[0053] The above configuration enables the exposure of multiple pores 1012 corresponding to the extension direction of the sheet material cross-section 21, further improving the uniformity of passivation gas distribution in the middle region of the first receiving cavity 1001 along the extension direction of the sheet material cross-section 21, thereby further improving the passivation uniformity of each sheet material cross-section 21 located in the middle region of the first receiving cavity 1001.

[0054] In some embodiments, such as Figures 6 to 8As shown, the first side plate 130 has a first edge region 1301 on the side near the inlet / outlet channel 101, and the first edge region 1301 is located on the side of the first side plate 130 near the first receiving cavity 1001. The second side plate 140 has a second edge region 1401 on the side near the inlet / outlet channel 101, and the second edge region 1401 is located on the side of the second side plate 140 near the first receiving cavity 1001 and is disposed opposite to the first edge region 1301. The vertical distance between the first edge region 1301 and the second edge region 1401 in the third direction X3 gradually increases in a direction opposite to the first direction X1, and the third direction X3 is perpendicular to the first direction X1.

[0055] The above configuration allows the size of the inlet / outlet channel 101 in the third direction X3 to be gradually increased in the direction opposite to the first direction X1, so that the inlet / outlet channel 101 has more space in the third direction X3, so that the sheet material 2 can smoothly enter the first receiving cavity 1001 through the inlet / outlet channel 101, avoiding the side of the sheet material 2 from colliding with the first side plate 130 or the second side plate 140 and causing the sheet material 2 to break.

[0056] In some embodiments, such as Figure 9 and Figure 10 As shown, the first side plate 130 has a first clearance groove 1302 on the side near the first receiving cavity 1001. The first clearance groove 1302 is located on the side of the first side plate 130 near the top plate 120 and extends along the first direction X1.

[0057] Since the edge of the sheet material 21 is prone to chipping or breakage when it comes into contact with other structures, the first clearance groove 1302 is provided so that when the sheet material 2 is placed in the first receiving cavity 1001, there is a greater distance between the edge of the sheet material 21 and the side of the first side plate 130 near the first receiving cavity 1001, thus avoiding contact between the edge of the sheet material 21 and the first side plate 130 as much as possible.

[0058] In some embodiments, such as Figure 9 and Figure 11 As shown, the second side plate 140 has a second clearance groove 1402 on the side near the first receiving cavity 1001. The second clearance groove 1402 is located on the side of the second side plate 140 near the top plate 120 and extends along the first direction X1.

[0059] By providing the second clearance groove 1402, when the sheet material 2 is placed in the first receiving cavity 1001, there is a greater distance between the edge of the cross-section 21 of the sheet material and the side of the second side plate 140 near the first receiving cavity 1001, thus avoiding contact between the edge of the cross-section 21 of the sheet material and the second side plate 140 as much as possible, which would cause chipping or breakage of the sheet material 2.

[0060] In some embodiments, such as Figure 6 and Figure 9 As shown, the first side plate 130 has a third edge region 1303 on the side near the bottom plate 110, and the third edge region 1303 is located on the side of the first side plate 130 away from the first receiving cavity 1001. The second side plate 140 has a fourth edge region 1403 on the side near the bottom plate 110, and the fourth edge region 1403 is located on the side of the second side plate 140 away from the first receiving cavity 1001. The vertical distance between the third edge region 1303 and the fourth edge region 1403 in the third direction X3 gradually decreases along the second direction X2, and the second direction X2 is perpendicular to the first direction X1 and the third direction X3, respectively.

[0061] The above configuration allows for a gradual reduction in the dimensions of the first side plate 130 and the second side plate 140 in the second direction X2, and in the third direction X3. This results in a larger space being reserved between the first side plate 130 and the second side plate 140 and the boat 20 when the sheet carrier 10 is placed on the boat 20. This facilitates the smooth placement of the sheet carrier 10 on the boat 20 and minimizes the risk of collisions between the first side plate 130 and the second side plate 140 and the boat 20, which could cause the sheet carrier 10 to shake. Consequently, the breakage of the sheet material 2 due to shaking of the sheet carrier 10 is minimized.

[0062] In some embodiments, such as Figure 12 and Figure 13 As shown, the sheet carrier 10 also includes a first pad 200, which is separately disposed from the cavity 100. The first pad 200 can be placed in the first receiving cavity 1001 and is configured to support the sheet material 2. The first surface 201 of the first pad is in contact with the sheet material 2, and the second surface 202 of the first pad is in contact with the third side plate 150.

[0063] The first pad 200 is used to shield the surface of the sheet material 2 to reduce the phenomenon of plating around the surface of the sheet material 2.

[0064] In addition, when the first pad 200 and the sheet material 2 are simultaneously placed in the first receiving cavity 1001, the sheet placement assembly contacts the second surface 202 of the first pad to avoid the sheet placement assembly directly contacting the surface of the sheet material 2, thereby avoiding the appearance of marks on the surface of the sheet material 2 or even the breakage of the sheet material 2 due to excessive force applied by the sheet placement assembly to the sheet material 2.

[0065] In some embodiments, such as Figure 1 , Figure 13 and Figure 14 As shown, the sheet carrier 10 also includes a second pad 300, which is separately disposed from the cavity 100. The second pad 300 can be placed in the first receiving cavity 1001. When the first receiving cavity 1001 accommodates multiple stacked sheet materials 2, the second pad 300 is located on the side of the outermost sheet material 2 away from the third side plate 150.

[0066] The surface of the outermost sheet material 2 is shielded by the second pad 300 to reduce the plating phenomenon on the surface of the outermost sheet material 2.

[0067] In addition, when the second pad 300 and the sheet material 2 are removed from the first receiving cavity 1001 at the same time, the sheet removal and placement assembly contacts the second surface 302 of the second pad to avoid the sheet removal and placement assembly directly contacting the surface of the outermost sheet material 2, thereby avoiding the appearance of marks on the surface of the outermost sheet material 2 or even the breakage of the sheet material 2 due to excessive force applied to the sheet material 2 by the sheet removal and placement assembly.

[0068] In some embodiments, such as Figure 13 and Figure 15 As shown, the first surface 301 of the second pad has at least one ventilation groove 3010, and the first surface 301 of the second pad is disposed opposite to the second surface 302 of the second pad. One end of the ventilation groove 3010 extends to the edge of the second pad 300. When the second pad 300 is in contact with the sheet material 2, the first surface 301 of the second pad faces the sheet material 2.

[0069] By providing a ventilation groove 3010 on the first surface 301 of the second pad, with one end of the ventilation groove 3010 extending to the edge of the second pad 300, gas can flow from the edge of the second pad 300 into the ventilation groove 3010 when the second pad 300 is in contact with the sheet material 2. This ensures that the first surface 301 of the second pad and the surface of the outermost sheet material 2 are in a non-vacuum state, thereby preventing the outermost sheet material 2 from being taken away when the second pad 300 is removed, and thus preventing the sheet material 2 from falling and being damaged during the process of being taken away by the second pad 300.

[0070] Figure 16 The diagram shown is a structural schematic of a sheet handling device according to an embodiment of this disclosure. Figure 2 , Figure 16 and Figure 17 As shown, the sheet handling device 1 includes the sheet carrier 10 and boat 20 mentioned in the above embodiments. The sheet carrier 10 is configured to hold multiple stacked sheet materials 2. The boat 20 has at least one second receiving cavity 2001, which is configured to receive the sheet carrier 10. The boat 20 has a third opening 2002, which communicates with the second receiving cavity 2001, and passivating gas enters the second receiving cavity 2001 through the third opening 2002. The third opening 2002 is disposed adjacent to the first opening 102 or the inlet / outlet channel 101 of the sheet carrier 10.

[0071] For example, such as Figure 16 As shown, the boat 20 has multiple second receiving cavities 2001, which respectively accommodate multiple sheet carriers 10, thereby improving the handling efficiency of the sheet handling device 1.

[0072] For example, such as Figure 14 As shown, the sheet carrier 10 also includes two handles 400, which are located on opposite edges of the top plate 120 and extend from the access channel 101 toward the third side plate 150. The carrier transport assembly moves the sheet carrier 10 by gripping the two handles 400. Furthermore, by rationally setting the number and position of the handles 400, the stability of the carrier transport assembly in moving the sheet carrier 10 is improved.

[0073] For example, the side of the first side plate 130 away from the first receiving cavity 1001 and the side of the second side plate 140 away from the first receiving cavity 1001 both have nameplate mounting grooves 1314. The sheet carrier 10 also includes a nameplate 500, which is disposed in the nameplate mounting groove 1314 and is detachably connected to the first side plate 130 or the second side plate 140.

[0074] Since the sheet handling device 1 includes the sheet carrier 10, all the technical features and effects of the sheet handling device 1 including the sheet carrier 10 will not be described in detail here.

[0075] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0076] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0077] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0078] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0079] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0080] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A sheet carrier, characterized in that, include: The cavity has a first receiving cavity and is configured to receive multiple stacked sheet materials; The cavity is detachable or has an access channel for the sheet material to enter and exit the first receiving cavity; The cavity further has a first opening communicating with the first receiving cavity, so that the passivating gas can enter and exit the first receiving cavity through the first opening; One side of the cavity is an air inlet / outlet surface, which has several air holes. The air holes connect the first receiving cavity and the outside of the cavity, so that the passivating gas can pass through the several air holes to enter and exit the first receiving cavity. In the case where multiple sheets of the sheet material are located in the first receiving cavity, the multiple sheets of the sheet material are stacked along the first direction, and the cross-section of the sheet material faces the air inlet / outlet surface.

2. The sheet carrier according to claim 1, characterized in that, When the cavity is detachable, the air inlet and outlet surfaces are also detachable, so that when the air inlet and outlet surfaces are in a detached state, the sheet material can enter and exit the first receiving cavity; Alternatively, if the cavity has the inlet / outlet channel, the cavity includes: Base plate; A top plate is disposed opposite to the bottom plate, the top plate forming the air inlet and outlet surface, and there is a gap between the cross section of the sheet material and the top plate, the gap forming a gas flow space; The first side plate connects the bottom plate and the top plate; The second side plate is disposed opposite to the first side plate and connects the bottom plate and the top plate, wherein the bottom plate, the top plate, the first side plate and the second side plate form the access channel, and the plane of the access channel is perpendicular to the first direction; The third side plate is disposed opposite to the access channel and connects the first side plate and the second side plate, and is connected to the bottom plate, wherein the first opening is formed between the third side plate and the top plate.

3. The sheet carrier according to claim 2, characterized in that, The cavity also includes: A baffle, located on the side of the top plate away from the first receiving cavity and connected to the top plate, is configured to cover the edge region of the top plate, wherein the baffle has a second opening extending through the baffle in a second direction, the second opening being configured to expose a plurality of the air holes in the middle region of the top plate, wherein the second direction is perpendicular to the first direction.

4. The sheet carrier according to claim 3, characterized in that, The shape of the second opening in the orthographic projection of the shield includes an elongated shape, the length direction of which is perpendicular to the first direction.

5. The sheet carrier according to claim 2, characterized in that, The first side plate has a first edge region on the side near the access channel, the first edge region being located on the side of the first side plate near the first receiving cavity, and the second side plate has a second edge region on the side near the access channel, the second edge region being located on the side of the second side plate near the first receiving cavity and being disposed opposite to the first edge region, wherein the vertical distance between the first edge region and the second edge region in a third direction gradually increases in a direction opposite to the first direction, wherein the third direction is perpendicular to the first direction.

6. The sheet carrier according to claim 5, characterized in that, The first side plate has a first clearance groove on the side near the first receiving cavity. The first clearance groove is located on the side of the first side plate near the top plate and extends along the first direction. And / or, The second side plate has a second clearance groove on the side near the first receiving cavity. The second clearance groove is located on the side of the second side plate near the top plate and extends along the first direction.

7. The sheet carrier according to claim 6, characterized in that, The first side plate has a third edge region on the side near the bottom plate, the third edge region being located on the side of the first side plate away from the first receiving cavity, and the second side plate has a fourth edge region on the side near the bottom plate, the fourth edge region being located on the side of the second side plate away from the first receiving cavity, wherein the vertical distance between the third edge region and the fourth edge region in the third direction gradually decreases along a second direction, wherein the second direction is perpendicular to the first direction and the third direction, respectively.

8. The sheet carrier according to any one of claims 2 to 7, characterized in that, Also includes: A first pad, separately disposed from the cavity, can be placed in the first receiving cavity and is configured to support the sheet material; wherein, the first surface of the first pad is in contact with the sheet material, and the second surface of the first pad is in contact with the third side plate; And / or, The second pad is separate from the cavity and can be placed in the first receiving cavity. When the first receiving cavity contains multiple sheets of the sheet material stacked on top of each other, the second pad is located on the side of the outermost sheet material away from the third side plate.

9. The sheet carrier according to claim 8, characterized in that, The first surface of the second pad has at least one ventilation groove, one end of which extends to the edge of the second pad, wherein, when the second pad is in contact with the sheet material, the first surface of the second pad faces the sheet material.

10. A sheet material handling device, characterized in that, include: The sheet carrier according to any one of claims 1 to 9 is configured to hold a plurality of stacked sheet materials; The boat has at least one second receiving cavity configured to receive the sheet carrier, wherein the boat has a third opening communicating with the second receiving cavity, through which passivating gas enters the second receiving cavity, and the third opening is adjacent to a first opening or access channel of the sheet carrier.

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