Transfer device of wafer box

Abstract

The utility model provides a wafer cassette transfer device which comprises a base, an abutting assembly arranged in the center of the top of the base and rotating assemblies rotationally arranged on the base, a lifting structure is arranged at the bottom of the base, the rotating assemblies are arranged on the two sides of the abutting assembly, and clamping assemblies are arranged on the sides, away from the base, of the rotating assemblies. The driving structure is arranged in the center of the top of the base, the sliding structure is arranged on the driving structure in a sliding mode, the abutting structures are in threaded connection to the two sides, facing the rotating assembly, of the sliding structure, and the sides, facing the rotating assembly, of the abutting structures are obliquely arranged; the rotating shaft structures are rotationally arranged on the two sides of the abutting assembly, the rotating wheel seat structures are arranged on the rotating shaft structures, the rotating wheel structures are arranged on the sides, facing the abutting assembly, of the tops of the rotating seat structures, and the rotating wheel seat structures are arranged on the two sides of the abutting assembly.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a wafer cassette transfer device. Background Technology

[0002] In the semiconductor industry, wet cleaning refers to the process of using various chemical reagents to react or dissolve impurities and oil adsorbed on the surface of the object being cleaned, or using physical measures such as ultrasound, heating, and vacuuming, to desorb (desorb) the impurities from the surface of the object being cleaned, and then rinsing with a large amount of high-purity deionized water to obtain a clean surface.

[0003] During this process, the product needs to be placed in the corresponding tank for cleaning.

[0004] In existing technologies, wet cleaning requires operators to manually place wafer cassettes into the cleaning tank for cleaning and remove them from the cleaning tank to place them into another cleaning tank for cleaning. However, manual handling requires wearing protective gear, which takes a long time and affects work efficiency. Furthermore, when wafers need to be transferred to the next cleaning tank after completing the previous cleaning step, operators also need to manually transfer the wafers, which is time-consuming and labor-intensive. Utility Model Content

[0005] Therefore, the purpose of this utility model is to provide a wafer cassette transfer device that can effectively solve the shortcomings of the prior art.

[0006] A wafer cassette transfer device includes a base, an abutment assembly disposed at the top center of the base, and a rotating assembly rotatably disposed on the base and rotated by the abutment assembly. A lifting structure for raising and lowering the base is disposed at the bottom of the base. The rotating assembly is disposed on both sides of the abutment assembly. A clamping assembly for clamping the wafer cassette is disposed on the side of the rotating assembly away from the base. The rotating assembly is used to open or close the clamping assembly.

[0007] The abutting component includes a drive structure disposed at the top center of the base, a sliding structure slidably disposed on the drive structure, and abutting structures threadedly connected to both sides of the sliding structure facing the rotating component. The abutting structure is used to abut against the rotating component and the abutting structure is inclined to one side facing the rotating component.

[0008] The rotating assembly includes a rotating shaft structure rotatably disposed on both sides of the abutment assembly, a rotating wheel seat structure disposed on the rotating shaft structure, and a rotating wheel structure disposed on the top of the rotating seat structure facing the abutment assembly for abutting the abutment structure. The rotating wheel seat structure is disposed on both sides of the abutment assembly.

[0009] Furthermore, sidewalls are provided at both ends of the base facing the direction of travel of the sliding structure, and the rotating shaft structure is rotatably mounted on the sidewalls via bearings, with one end of the rotating shaft structure away from the base penetrating through the sidewall.

[0010] Furthermore, the clamping assembly includes a jaw, a connecting block disposed on the top of the jaw, a fixing block threaded onto the connecting block for fixing the connecting block onto the rotating shaft structure, and a clearance position for avoiding the wafer cassette is provided on the jaw.

[0011] Furthermore, a spring-loaded assembly is also provided on the rotating shaft structure. The spring-loaded assembly includes a spring-loaded seat structure disposed on the side of the rotating wheel seat structure away from the clamping assembly and a connecting rod structure disposed on the side of the spring-loaded seat structure away from the rotating wheel seat structure. The two connecting rod structures are elastically connected.

[0012] Furthermore, grooves are provided on the connecting rod structure, and the grooves of the two connecting rod structures are respectively connected to the two ends of the elastic structure.

[0013] Furthermore, a flat opening is provided on the rotating shaft structure, the flat opening is provided on both sides of the abutment component, and the rotating wheel seat structure and the spring seat structure are provided on the flat opening.

[0014] Furthermore, the drive structure includes a drive component disposed at the center of the top of the base and a stop plate connected to the output end of the drive component.

[0015] Furthermore, the sliding structure includes a slide rail disposed on the top of the driving component, a sliding component slidably disposed on the slide rail and connected at one end to the abutment plate, and an adjustment component threadedly connected to the sliding component for fixing the position of the abutment structure.

[0016] Furthermore, the adjusting component is provided with a waist-shaped hole for adjusting the position of the adjusting component.

[0017] Furthermore, a steering structure for adjusting the orientation of the base is provided at the bottom of the lifting structure.

[0018] The beneficial effects of this utility model are as follows: the driving structure drives the abutment structure set on the sliding structure to move away from the clamping component, so that the side of the abutment structure set at an inclination pushes the rotating wheel structure to flip towards the side away from the abutment component. Then, the rotating wheel seat structure drives the rotating shaft structure to flip towards the side away from the abutment component, thereby driving the clamping component set on the side of the rotating component away from the base to close and clamp the wafer cassette. Then, the lifting structure simultaneously drives the base, rotating shaft structure and clamping component to take the wafer cassette out of or into the cleaning tank. This avoids the need for manual removal or placement of the wafer cassette from or into the cleaning tank, so that the operator does not need to wear protective equipment, saving time and increasing work efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the wafer cassette transfer device in an embodiment of this utility model;

[0020] Figure 2 This is a schematic diagram of the overall structure of the abutment component in an embodiment of this utility model;

[0021] Explanation of key component symbols:

[0022] base 10 Rotating component 30 Lifting structure 11 Rotating shaft structure 31 sidewall 12 Rotary seat structure 32 bearings 13 Rotary structure 33 Steering structure 14 Clamping components 40 Abutment components 20 gripper 41 Drive structure 21 Connecting block 42 Drive components 211 Fixed block 43 Board 212 Give way 44 Sliding structure 22 rebound component 50 slide rail 221 springback structure 51 sliding parts 222 Linkage structure 52 Adjustment components 223 groove 53 Waist-shaped hole 224 elastic structure 54 Support structure 23 flat mouth 60

[0023] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0024] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0025] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0027] Please see Figures 1 to 2 The wafer cassette transfer device in this embodiment includes a base 10, an abutment component 20 disposed on the top center 10 of the base, and a rotating component 30 rotatably disposed on the base 10 and rotated by the abutment component 20. A lifting structure 11 for raising and lowering the base 10 is disposed at the bottom of the base 10. The rotating component 30 is disposed on both sides of the abutment component 20. A clamping component 40 for clamping the wafer cassette is disposed on the side of the rotating component 30 away from the base 10. The rotating component 30 is used to open or close the clamping component 40.

[0028] The abutting component 20 includes a drive structure 21 disposed at the top center of the base 10, a sliding structure 22 slidably disposed on the drive structure 21, and an abutting structure 23 threadedly connected to both sides of the sliding structure 22 facing the rotating component 30. The abutting structure 23 is used to abut against the rotating component 30 and the abutting structure 23 is inclined to one side facing the rotating component 30.

[0029] The rotating assembly 30 includes a rotating shaft structure 31 rotatably disposed on both sides of the abutting assembly 20, a rotating wheel seat structure 32 disposed on the rotating shaft structure 31, and a rotating wheel structure 33 disposed on the top of the rotating seat structure 32 facing the abutting assembly 20 for abutting the abutting structure 23. The rotating wheel seat structure 32 is disposed on both sides of the abutting assembly 20.

[0030] Understandably, the drive structure 21 drives the abutment structure 23, which is mounted on the sliding structure 22, to move away from the clamping assembly 40. This causes the inclined side of the abutment structure 23 to push the rotating wheel structure 33 to flip away from the abutment assembly 20. Consequently, the rotating wheel seat structure 32 drives the rotating shaft structure 31 to flip away from the abutment assembly 20. This causes the clamping assembly 40, which is mounted on the rotating assembly 30 away from the base 10, to retract and clamp the wafer cassette. Then, the lifting structure 11 simultaneously drives the base 10, the rotating shaft structure 31, and the clamping assembly 40 to remove or place the wafer cassette from the cleaning tank. This avoids the need for manual removal or placement of the wafer cassette from the cleaning tank, eliminating the need for operators to wear protective gear, saving time, and increasing work efficiency.

[0031] Furthermore, sidewalls 12 are provided at both ends of the base 10 facing the traveling direction of the sliding structure 22, and the rotating shaft structure 31 is rotatably mounted on the sidewall 12 via a bearing 13, with one end of the rotating shaft structure 31 away from the base 10 penetrating through the sidewall 12.

[0032] Furthermore, the clamping assembly 40 includes a jaw 41, a connecting block 42 disposed on the top of the jaw 41, a fixing block 43 threadedly connected to the connecting block 42 for fixing the connecting block 42 to the rotating shaft structure 31, and a clearance position 44 for avoiding the wafer cassette is provided on the jaw 41.

[0033] Furthermore, a spring-loaded assembly 50 is also provided on the rotating shaft structure 31. The spring-loaded assembly 50 includes a spring-loaded seat structure 51 disposed on the side of the rotating wheel seat structure 32 away from the clamping assembly 40 and a connecting rod structure 52 disposed on the side of the spring-loaded seat structure 51 away from the rotating wheel seat structure 32. The two connecting rod structures 52 are elastically connected.

[0034] Furthermore, a groove 53 is provided on the connecting rod structure 52, and the grooves 53 of the two connecting rod structures 52 are respectively connected to the two ends of the elastic structure 54.

[0035] Understandably, when the clamped wafer cassette needs to be released, the drive structure 21 drives the abutment structure 23, which is mounted on the sliding structure 22, to move toward the clamping assembly 40. This causes the inclined side of the abutment structure 23 to gradually disengage from the rotary wheel structure 33. Through the contraction of the elastic structure 54, the rotary wheel structure 33 flips toward the side closer to the abutment assembly 20. This, in turn, drives the rotary shaft structure 31 to flip toward the side closer to the abutment assembly 20 via the rotary wheel seat structure 32. This causes the clamping assembly 40, which is mounted on the side of the rotating assembly 30 away from the base 10, to release the wafer cassette.

[0036] Furthermore, a flat opening 60 is provided on the rotating shaft structure 31, and the flat opening 60 is disposed on both sides of the abutment component 20. The rotating wheel seat structure 32 and the spring seat structure 51 are disposed on the flat opening 60.

[0037] Understandably, by setting the flat opening 60, the rotary seat structure 32 and the spring seat structure 51 are placed on the flat opening 60, and then the rotary seat structure 32 and the spring seat structure 51 are fixed on the rotary seat structure 31 through the flat opening 60, so as to prevent the rotary seat structure 32 and the spring seat structure 51 from slipping on the rotary shaft structure 31 when the rotary shaft structure 31 rotates.

[0038] Furthermore, the drive structure 21 includes a drive component 211 disposed at the top center of the base 10 and a stop plate 212 connected to the output end of the drive component 211.

[0039] Furthermore, the sliding structure 22 includes a slide rail 221 disposed on the top of the driving component 211, a sliding component 222 slidably disposed on the slide rail 221 and connected at one end to the abutment plate 212, and an adjustment component 223 threadedly connected to the sliding component 222 for fixing the position of the abutment structure 23.

[0040] Furthermore, the adjusting component 223 is provided with an oblong hole 224 for adjusting the position of the adjusting component 223.

[0041] Understandably, by moving the abutment 212 through the driving component 211, the adjusting component 223 on the sliding component 222 is driven to slide on the slide rail 221, thereby causing the abutment structure 23 fixed on the adjusting component 223 to move synchronously.

[0042] Furthermore, a steering structure 14 for adjusting the orientation of the base 10 is provided at the bottom of the lifting structure 11.

[0043] Understandably, by providing a steering structure 14 at the bottom of the lifting structure 11 for adjusting the orientation of the base 10, the wafers in the wafer cassette can be moved to the next cleaning tank after the previous cleaning step is completed by adjusting the orientation of the base 10 through the steering mechanism 14.

[0044] In summary, the wafer cassette transfer device in the above embodiments of this utility model uses a drive structure to move the abutment structure on the sliding structure away from the clamping component. This causes the inclined side of the abutment structure to push the rotating wheel structure to flip towards the side away from the abutment component. Then, the rotating wheel seat structure drives the rotating shaft structure to flip towards the side away from the abutment component. This causes the clamping component on the side of the rotating component away from the base to close and clamp the wafer cassette. Finally, the lifting structure simultaneously drives the base, rotating shaft structure, and clamping component to remove or place the wafer cassette from the cleaning tank. This avoids the need for manual removal or placement of the wafer cassette from the cleaning tank, eliminating the need for operators to wear protective gear, saving time, and increasing work efficiency.

[0045] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0046] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A wafer cassette transfer device, characterized in that, The device includes a base, an abutment assembly disposed at the top center of the base, and a rotating assembly rotatably disposed on the base and rotated by the abutment assembly. A lifting structure for raising and lowering the base is disposed at the bottom of the base. The rotating assembly is disposed on both sides of the abutment assembly. A clamping assembly for clamping a wafer cassette is disposed on the side of the rotating assembly away from the base. The rotating assembly is used to open or close the clamping assembly. The abutting component includes a drive structure disposed at the top center of the base, a sliding structure slidably disposed on the drive structure, and abutting structures threadedly connected to both sides of the sliding structure facing the rotating component. The abutting structure is used to abut against the rotating component and the abutting structure is inclined to one side facing the rotating component. The rotating assembly includes a rotating shaft structure rotatably disposed on both sides of the abutment assembly, a rotating wheel seat structure disposed on the rotating shaft structure, and a rotating wheel structure disposed on the top of the rotating wheel seat structure facing the abutment assembly for abutting the abutment structure. The rotating wheel seat structure is disposed on both sides of the abutment assembly.

2. The wafer cassette transfer apparatus according to claim 1, characterized in that, Sidewalls are provided at both ends of the base facing the direction of travel of the sliding structure. The rotating shaft structure is rotatably mounted on the sidewalls via bearings, and the end of the rotating shaft structure away from the base passes through the sidewall.

3. The wafer cassette transfer apparatus according to claim 1, characterized in that, The clamping assembly includes a jaw, a connecting block disposed on the top of the jaw, and a fixing block threaded onto the connecting block for fixing the connecting block onto the rotating shaft structure. The jaw is provided with a clearance position for avoiding the wafer cassette.

4. The wafer cassette transfer apparatus according to claim 1, characterized in that, A spring-loaded assembly is also provided on the rotating shaft structure. The spring-loaded assembly includes a spring-loaded seat structure disposed on the side of the rotating wheel seat structure away from the clamping assembly and a connecting rod structure disposed on the side of the spring-loaded seat structure away from the rotating wheel seat structure. The two connecting rod structures are elastically connected.

5. The wafer cassette transfer apparatus according to claim 4, characterized in that, The connecting rod structure has grooves, and the grooves of the two connecting rod structures are respectively connected to the two ends of the elastic structure.

6. The wafer cassette transfer apparatus according to claim 5, characterized in that, A flat opening is provided on the rotating shaft structure, and the flat opening is located on both sides of the abutment component. The rotating wheel seat structure and the spring seat structure are located on the flat opening.

7. The wafer cassette transfer apparatus according to claim 1, characterized in that, The drive structure includes a drive component disposed at the center of the top of the base and a stop plate connected to the output end of the drive component.

8. The wafer cassette transfer apparatus according to claim 7, characterized in that, The sliding structure includes a slide rail disposed on the top of the driving component, a sliding component slidably disposed on the slide rail and connected at one end to the abutment plate, and an adjustment component threadedly connected to the sliding component for fixing the position of the abutment structure.

9. The wafer cassette transfer apparatus according to claim 8, characterized in that, The adjusting component is provided with a waist-shaped hole for adjusting the position of the adjusting component.

10. The wafer cassette transfer apparatus according to claim 1, characterized in that, A steering structure for adjusting the orientation of the base is provided at the bottom of the lifting structure.

Images