On-line detection device for developing etching machine

Abstract

The utility model discloses an online detection device for a developing etching machine, which comprises a detection frame, a detection transmission module and a lifting adjusting plate are arranged on the detection frame, a plurality of lifting modules are arranged on the detection transmission module, and a tray for bearing a substrate to be detected is arranged on each lifting module; the lifting adjusting plate is used for making contact with the lifting module so as to control the tray to ascend at the feeding end to receive the to-be-detected substrate and descend at the discharging end to release the to-be-detected substrate; a feeding conveying module is arranged at the inlet end of the detection frame, and a discharging conveying module is arranged at the outlet end of the detection frame. The height position of the base plate is controlled through the lifting adjusting plate and the lifting module, the moving speed of the base plate in the horizontal direction is controlled in the height increasing and decreasing process, so that the conveying speed of the base plate is adjusted, meanwhile, the tray is in a continuous working state all the time, and the base plate continuously moves forwards; therefore, continuous operation of the whole system is guaranteed, the advantages of both integrated equipment and split equipment are considered, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of etching equipment, in particular to a developing and etching machine online detection device. BACKGROUND

[0002] In the prior art, DES whole line has two structure forms of integral connection and split connection between the developing section and the etching section. The main defect of the integral connection type structure is that the intermediate detection plate section after developing is too short, and since the substrate is in a conveying state, the product cannot be effectively checked and repaired, but it has higher production efficiency. The split connection has the advantages that the product can be collected after developing, which is beneficial to checking and repairing; but it reduces the production efficiency of the whole production line. CONTENT OF THE UTILITY MODEL

[0003] The main purpose of the present application is to provide a developing and etching machine online detection device, which aims to solve the defect of low production efficiency in the prior art.

[0004] The present application achieves the above-mentioned purpose through the following technical solutions:

[0005] A developing and etching machine online detection device, comprising a detection frame;

[0006] A detection conveying module is arranged on the detection frame, and a plurality of lifting modules are arranged on the detection conveying module. Each lifting module is provided with a tray for carrying a substrate to be detected.

[0007] A lifting adjusting plate is arranged on the detection frame, and the lifting adjusting plate is provided with a lifting module contact for controlling the tray to rise to pick up the substrate to be detected at the feeding end and to descend to release the substrate to be detected at the discharging end.

[0008] A feeding conveying module is arranged at the inlet end of the detection frame, and a discharging conveying module is arranged at the outlet end of the detection frame.

[0009] Optionally, the detection conveying module comprises a driving roller and a driven roller, and the driving roller and the driven roller are connected in series through a transmission belt. Each lifting module is arranged on the conveying belt.

[0010] Optionally, the lifting module comprises a base mounted on the conveying belt, a telescopic rod is slidingly arranged on the base, one end of the telescopic rod is connected with the tray, and an adjusting slot is arranged on the base in the axial direction of the base. An adjusting rod connected with the telescopic rod is slidingly arranged in the adjusting slot. The adjusting rod is in contact with the lifting adjusting plate.

[0011] Optionally, a linear motion bearing is further arranged between the base and the telescopic rod; a connecting screw hole is arranged on the outer circumferential surface of the telescopic rod, and the adjusting rod is connected with the connecting screw hole.

[0012] Optionally, the top surface of the lifting adjusting plate is a lifting adjusting surface for controlling the height position of the tray, and an adjusting roller is arranged on the adjusting rod and is attached to the lifting adjusting surface.

[0013] Optionally, a limiting plate is further arranged on the detection frame, the limiting plate is arranged directly below the lifting adjusting plate, and the top surface of the limiting plate and the bottom surface of the lifting adjusting plate are matched with the limiting groove of the adjusting roller.

[0014] Optionally, the lifting adjusting surface comprises an ascending section, a detection section and a descending section, and the ascending section, the detection section and the descending section are smoothly connected; the detection section is horizontally arranged, the ascending section is used for controlling the tray to ascend at the feeding end to pick up the to-be-detected substrate, and the descending section is used for controlling the tray to descend at the discharging end to release the to-be-detected substrate.

[0015] Optionally, a plurality of detection lamps for enhancing light are further arranged on the detection frame, and each detection lamp is arranged above the detection section in sequence along the substrate conveying direction.

[0016] Optionally, the feeding conveying module comprises a first frame and a plurality of feeding rollers, and the discharging conveying module comprises a second frame and a plurality of discharging rollers; each feeding roller is arranged on the first frame in sequence along the conveying direction; and each discharging roller is arranged on the second frame in sequence.

[0017] Optionally, the outlet end of the first frame is provided with a first avoiding gap for avoiding the tray, and a supporting rod is rotatably arranged in the first avoiding gap; and the inlet end of the second frame is provided with a second avoiding gap for avoiding the tray, and a supporting rod is arranged in the second avoiding gap.

[0018] Compared with the prior art, the application has the following beneficial effects:

[0019] The application comprises a detection frame, the detection frame is provided with a detection conveying module and a lifting adjusting plate, a plurality of lifting modules are arranged on the detection conveying module, each lifting module is provided with a tray for bearing a to-be-detected substrate; the lifting adjusting plate is provided with a lifting module contact surface for controlling the tray to ascend at the feeding end to pick up the to-be-detected substrate and to descend at the discharging end to release the to-be-detected substrate; the inlet end of the detection frame is provided with a feeding conveying module, and the outlet end is provided with a discharging conveying module.

[0020] In use, the substrate to be detected is transported to the entrance end of the detection frame by the feeding conveying module, the detection conveying module controls the reciprocating movement of each lifting module between the entrance end and the exit end of the detection frame, when entering the entrance end, the lifting adjusting plate controls the lifting module to rise, thereby pushing the position of the tray, and taking the substrate to be detected, and then continuing to rise until entering the detection area of the detection frame, after the staff completes the sorting, the normal substrate enters the exit end of the detection frame with the tray, in the exit end, under the control of the lifting adjusting plate and the gravity of the substrate itself, the lifting module controls the tray to descend, thereby placing the substrate on the output conveying module;

[0021] The detection device described in the application is arranged between the developing section and the etching section, so that the two different functional areas are connected in series through the detection device, compared with the integrated connection structure in the prior art, the substrate can be effectively monitored, so that unqualified products can be timely rejected, and the yield of products is improved;

[0022] Secondly, the length of the area for substrate detection on the entire production line is prolonged through the arrangement of the detection frame, so that sufficient time is reserved for the inspection of the staff;

[0023] In the detection process of the application, the height position of the substrate is controlled through the cooperation of the lifting adjusting plate and the lifting module, in the process of height rising and falling, the moving speed of the substrate in the horizontal direction is controlled, so that the conveying speed of the substrate is adjusted, the best balance between the inspection and conveying speed is achieved, the advantages of the integrated and split type devices in the prior art are considered, and the production efficiency of the product is improved.

[0024] Finally, in the working process of the detection device described in the application, the tray is always in a continuous working state, that is, in the entire detection process, the substrate will continuously move forward without stopping, so as to ensure the continuous operation of the entire system and improve the production efficiency of the product. BRIEF DESCRIPTION OF DRAWINGS

[0025] Fig. 1 A structural schematic view of an online detection device of a developing and etching machine is provided for the embodiment 1 of the application;

[0026] Fig. 2 An exploded view of an online detection device of a developing and etching machine is provided for the embodiment 1 of the application;

[0027] Fig. 3 A sectional view of an online detection device of a developing and etching machine is provided for the embodiment 1 of the application;

[0028] Fig. 4 A structural schematic view of a lifting module is provided for the embodiment 1 of the application;

[0029] Label: 1-detection frame, 2-tray, 3-lift adjustment plate, 4-driving roller, 5-driven roller, 6-conveying belt, 7-base, 8-telescopic rod, 9-adjusting slot, 10-adjusting rod, 11-linear motion bearing, 12-connection screw hole, 13-adjusting roller, 14-limiting plate, 15-limiting groove, 16-detection lamp, 17-first frame, 18-feeding roller, 19-second frame, 20-discharging roller, 21-first avoiding notch, 22-supporting rod, 23-second avoiding notch, 301-lift adjustment surface, 3011-rising section, 3012-detection section, 3013-descending section.

[0030] The purposes, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0032] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), and if the specific posture changes, the directional indications will also change accordingly.

[0033] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood in a broad sense, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be direct connection, or indirect connection through an intermediate medium; can be internal communication of two elements or interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0034] In addition, if the embodiments of the utility model have the description of "first", "second" and the like, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can be explicitly or implicitly included at least one of the features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. For example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, also not within the protection scope required by the utility model.

[0035] Embodiment 1

[0036] Reference Figs. 1 to 4 The embodiment is disclosed as an optional embodiment of the application, which discloses an online detection device of developing etching machine, which comprises a detection frame 1, along the length direction of the detection frame 1, one end of the detection frame 1 is an inlet end, and the other end is an outlet end.

[0037] A detection conveying module is further arranged on the detection frame 1, the detection conveying module comprises a driving roller 4 and a driven roller 5, and the driving roller 4 and the driven roller 5 are connected in series through a transmission belt; a plurality of lifting modules are further arranged on the surface of the transmission belt, and the spacing of each lifting module is determined according to the length and conveying speed of the to-be-detected substrate.

[0038] The structure of each lifting module is completely same, and each lifting module comprises a base 7 and a telescopic rod 8, the base 7 is installed on the conveying belt 6, the base 7 is in a cylindrical structure as a whole, an adjusting sliding groove 9 is further arranged in the lower half of the base 7 along the axial direction of the base 7, and the adjusting sliding groove 9 penetrates through the base 7 and the external environment; a linear motion bearing 11 is arranged in the upper half of the base 7.

[0039] The bottom end of the telescopic rod 8 is inserted into the base 7, and the telescopic rod 8 is slidably connected with the linear motion bearing 11.

[0040] A connecting screw hole 12 is arranged at the bottom of the telescopic rod 8, an adjusting rod 10 is slidably arranged in the adjusting sliding groove 9, one end of the adjusting rod 10 is screw-connected with the connecting screw hole 12, the other end of the adjusting rod 10 extends along the radial direction of the base 7, and an adjusting roller 13 is further arranged at the end.

[0041] The detection frame 1 is further provided with a lifting adjusting plate 3, which is in a flat structure as a whole, and the top surface of the lifting adjusting plate 3 is a lifting adjusting surface 301, which comprises an ascending section 3011, a detection section 3012 and a descending section 3013, which are smoothly connected; the detection section 3012 is horizontally arranged, the ascending section 3011 is used to control the tray 2 to ascend at the feeding end to pick up the substrate to be detected, and the descending section 3013 is used to control the tray 2 to descend at the discharging end to release the substrate to be detected; the adjusting roller 13 is attached to the lifting adjusting surface 301.

[0042] The top end of the telescopic rod 8 is connected with a tray 2, which is used to carry the substrate.

[0043] Further, the detection frame 1 is provided with a feeding conveying module at the inlet end, and a discharging conveying module at the outlet end, the feeding conveying module comprises a first frame 17 and a plurality of feeding rollers 18, the discharging conveying module comprises a second frame 19 and a plurality of discharging rollers 20, and along the conveying direction, each feeding roller 18 is arranged on the first frame 17 in sequence; each discharging roller is arranged on the second frame 19 in sequence.

[0044] Meanwhile, the first frame 17 is provided with a first avoiding gap 21 at the outlet end for avoiding the tray 2, and a supporting rod 22 is rotatably arranged in the first avoiding gap 21; the second frame 19 is provided with a second avoiding gap 23 at the inlet end for avoiding the tray 2, and a supporting rod 22 is arranged in the second avoiding gap 23;

[0045] It should be noted that the first frame 17 and the second frame 19 comprise a plurality of connecting rods, each of which is connected end to end to form a rectangular structure, the first avoiding gap 21 refers to shortening the length of one connecting rod along the length direction to form a gap; the supporting rod 22 arranged in the first avoiding gap 21 is connected to the first frame 17 at one end and is in a free state at the other end;

[0046] The second avoiding gap 23 has the same structure as the first avoiding gap 21;

[0047] The first avoiding gap 21 and the second avoiding gap 23 can effectively prevent the tray from interfering with the feeding conveying module or the discharging conveying module, thereby ensuring the normal operation of the equipment;

[0048] It should be pointed out that the number of support rods 22 should not be too much, and the support rods 22 can be arranged at both ends of the first avoiding gap 21 and the second avoiding gap 23 respectively, and the length of the first avoiding gap 21 and the second avoiding gap 23 is 0.8-0.9 times the length of the substrate;

[0049] Since the movement track of the tray 2 in the rising and falling sections 3013 is a slant line with a certain inclination, the length of the first avoiding gap 21 and the second avoiding gap 23 is increased to ensure that the tray 2 does not interfere with the frame and other structures, thereby ensuring the normal operation of the equipment;

[0050] Further, a limiting plate 14 is arranged on the detection frame 1, the limiting plate 14 is in a long strip structure, the limiting plate 14 is arranged below the lifting adjusting plate 3, the top surface of the limiting plate 14 and the bottom surface of the lifting adjusting plate 3 are provided with limiting grooves 15 matched with the adjusting rollers 13;

[0051] When the lifting module runs to the bottom, the adjusting roller 13 is clamped into the limiting groove 15, thereby supporting the adjusting rod 10 by the limiting plate 14, avoiding the telescopic rod 8 from being excessively extended due to gravity, and ensuring the stability and reliability of the equipment structure.

[0052] In use, the substrate to be detected is conveyed to the inlet end of the detection frame by the feeding conveying module, the detection conveying module controls the reciprocating movement of each lifting module between the inlet end and the outlet end of the detection frame, when entering the inlet end, the lifting adjusting plate controls the lifting module to rise, thereby pushing the position of the tray and taking the substrate to be detected, and then continuing to rise until entering the detection area of the detection frame, after the staff completes the sorting, the normal substrate enters the outlet end of the detection frame with the tray, in the outlet end, under the control of the gravity and the lifting adjusting plate, the lifting module controls the tray to descend, thereby placing the substrate on the discharging conveying module for output;

[0053] The detection device described in the present application is arranged between the developing section and the etching section, thereby connecting the two different functional areas through the detection device, compared with the integrated connection structure in the prior art, the substrate can be effectively monitored, thereby timely removing unqualified products and improving the yield of products;

[0054] Secondly, the length of the area for substrate detection on the whole production line is prolonged through the arrangement of the detection frame, thereby reserving sufficient time for the inspection of the staff;

[0055] In the detection process, the height position of the substrate is controlled by the cooperation of the lifting adjusting plate and the lifting module. In the process of height lifting and lowering, the moving speed of the substrate in the horizontal direction is controlled, so as to adjust the conveying speed of the substrate, and the best balance between the detection and conveying speed is achieved. The advantages of the integrated and split type devices in the prior art are considered, and the production efficiency of the product is improved.

[0056] Finally, in the working process of the detection device, the tray is always in a continuous working state, that is, the substrate will continuously move forward during the entire detection process without stopping, thereby ensuring the continuous operation of the entire system and improving the production efficiency of the product.

[0057] The above is only the preferred embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the present application.

Claims

1. An in-line inspection apparatus for a photo-etching machine, characterized by, The utility model relates to a detection frame (1); Detection conveying module, detection conveying module is arranged on detection frame (1), detection conveying module is provided with a plurality of lifting module, each lifting module is provided with the tray (2) for bearing the substrate to be detected on all; Lifting adjustment plate (3) is arranged on detection frame (1), lifting adjustment plate (3) is contacted with lifting module on lifting adjustment plate (3) to control tray (2) on the rising end of material to take the substrate to be detected, and tray (2) is released on the descending end of material to release the substrate to be detected; The top surface of lifting adjustment plate (3) is lifting adjustment surface (301) for controlling the high and low position of tray (2); Lifting adjustment surface (301) includes rising section (3011), detection section (3012) and descending section (3013), rising section (3011), detection section (3012) and descending section (3013) are smoothly connected;Detection section (3012) is horizontally arranged, rising section (3011) is used to control tray (2) on the rising end of material to take the substrate to be detected, and descending section (3013) is used to control tray (2) on the descending end of material to release the substrate to be detected; The inlet end of detection frame (1) is provided with a feeding conveying module;The outlet end of detection frame (1) is also provided with a discharging conveying module.

2. The in-line inspection device for a photo-etching machine according to claim 1, wherein Detection conveying module includes driving roller (4) and driven roller (5), and driving roller (4) and driven roller (5) are connected in series through conveying belt (6);Each lifting module is arranged on conveying belt (6).

3. The in-line inspection device for a photo-etching machine according to claim 2, wherein, The lifting module includes a base (7) mounted on the conveying belt (6), a telescopic rod (8) slidingly arranged on the base (7), one end of the telescopic rod (8) connected with the tray (2), an adjusting sliding groove (9) arranged on the base (7) in the axial direction, an adjusting rod (10) slidingly arranged in the adjusting sliding groove (9) and connected with the telescopic rod (8), and the adjusting rod (10) in contact with the lifting adjustment plate (3).

4. The in-line inspection apparatus for a photo-etching machine according to claim 3, wherein A linear motion bearing (11) is further arranged between the base (7) and the telescopic rod (8), a connecting screw hole (12) is arranged on the outer periphery of the telescopic rod (8), and the adjusting rod (10) is connected with the connecting screw hole (12) by screw thread.

5. The in-line inspection device for a photo-etching machine according to claim 4, wherein, An adjusting roller (13) is arranged on the adjusting rod (10), and the adjusting roller (13) is in contact with the lifting adjustment surface (301).

6. The in-line inspection device for a photo-etching machine according to claim 5, wherein, A limiting plate (14) is further arranged on the detection frame (1), the limiting plate (14) is arranged directly below the lifting adjustment plate (3), the top surface of the limiting plate (14) is in contact with the bottom surface of the lifting adjustment plate (3), and the limiting plate (14) is provided with a limiting groove (15) matched with the adjusting roller (13).

7. The in-line inspection device for a photo-etching machine according to claim 1, wherein A plurality of detection lamps (16) for enhancing light are further arranged on the detection frame (1), and each detection lamp (16) is arranged directly above the detection section (3012) in the direction of substrate conveying.

8. The in-line inspection device for a photo-etching machine according to claim 1, wherein, The feeding conveying module comprises a first frame (17) and a plurality of feeding rollers (18), and the discharging conveying module comprises a second frame (19) and a plurality of discharging rollers (20); along the conveying direction, each feeding roller (18) is arranged on the first frame (17) in sequence; and each discharging roller (20) is arranged on the second frame (19) in sequence.

9. The in-line inspection device for a photo-etching machine according to claim 8, wherein, An outlet end of the first frame (17) is provided with a first avoiding gap (21) for avoiding the tray (2), and a supporting rod (22) is rotatably arranged in the first avoiding gap (21); and an inlet end of the second frame (19) is provided with a second avoiding gap (23) for avoiding the tray (2), and the supporting rod (22) is arranged in the second avoiding gap (23).

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