Polishing pressure head pressurization driving and fixing structure and pressurization mechanism

Abstract

The utility model provides a polishing pressure head pressurization driving and fixing structure and a pressurization mechanism, and relates to the technical field of semiconductor polishing processing, the polishing pressure head pressurization driving and fixing structure comprises a pressurization fixing part, a rotating center part and a connecting part; wherein the pressurizing fixing part is arranged above the polishing disc and is used for mounting the pressurizing mechanism; the rotating center part is arranged on one side of the pressurizing and fixing part, and the pressurizing and fixing part can turn over by taking the rotating center part as a rotating center; the connecting part is used for connecting the pressurizing fixing part and the rotating center part, the pressurizing fixing part is assembled on the connecting part, and the connecting part is rotationally connected with the rotating center part; the pressurizing fixing part is provided with a first position in a working state and a second position used for replacing the workpiece after being turned over. The defects that in the prior art, the structure is complex and the manufacturing cost is high when the position of the pressurization fixing part is adjusted are overcome.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of diamond semiconductor polishing processing, in particular to a polishing pressure head pressurizing driving fixing structure and a pressurizing mechanism. BACKGROUND

[0002] When a diamond wafer is used as a wafer substrate, the surface roughness Ra of the diamond wafer is required to be lower than 3 nm, and the surface type precision is submicron, that is, the surface of the diamond wafer needs to reach the level of super-smoothness, super-flatness and defectlessness. Therefore, a diamond polisher is needed to grind and polish the surface of the diamond wafer.

[0003] In the related art, the diamond polisher comprises a plurality of polishing pressure heads, a polishing disc and an eccentric driving mechanism. The polishing pressure heads press the diamond on the polishing disc, and the eccentric driving mechanism drives the polishing disc to eccentrically rotate to polish the diamond. In the polishing task of the diamond wafer, the height adjustment of the polishing pressure head is realized by the air cylinder, so that the operator can complete the taking and placing operation of the diamond wafer on the polishing disc.

[0004] In the related art, the position adjustment of the polishing pressure head by the air cylinder has the defects of relatively complex structure and high manufacturing cost. CONTENT OF THE INVENTION

[0005] The application aims to provide a polishing pressure head pressurizing driving fixing structure and a pressurizing mechanism, and aims to solve the defects of relatively complex structure and high manufacturing cost in the position adjustment of the polishing pressure head in the related art.

[0006] Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will become apparent to those skilled in the art upon examination of the following or can be learned by practice of the application.

[0007] According to a first aspect of the application, a polishing pressure head pressurizing driving fixing structure is provided, comprising: a pressurizing fixing part, a rotating center part and a connecting part; wherein,

[0008] The pressurizing fixing part is arranged above the polishing disc and is used for mounting the pressurizing mechanism;

[0009] The rotating center part is arranged on one side of the pressurizing fixing part, and the pressurizing fixing part can be flipped with the rotating center part as the rotation center;

[0010] The connecting part is used for connecting the pressurizing fixing part and the rotating center part, the pressurizing fixing part is assembled on the connecting part, and the connecting part is rotationally connected with the rotating center part;

[0011] The pressurizing fixing part has a first position in a working state and a second position for replacing the workpiece after being flipped.

[0012] In an exemplary embodiment of the present application, the connecting portion comprises:

[0013] A positioning plate is arranged on one side of the pressurizing fixing portion and used for bearing the pressurizing fixing portion;

[0014] A rotating connecting plate is arranged between the rotating center portion and the positioning plate, one side of the rotating connecting plate is fixedly connected with the positioning plate, and the other side is rotationally connected with the rotating center portion.

[0015] In an exemplary embodiment of the present application, a first locking portion for locking the pressurizing fixing portion in the first position is further included.

[0016] In an exemplary embodiment of the present application, the first locking portion comprises:

[0017] A locking pin is arranged below the rotating connecting plate and can approach or move away from the rotating connecting plate;

[0018] An adjusting member is arranged between the rotating connecting plate and the locking pin and used for adjusting the position of the locking pin and enabling the locking pin to be fixed relative to the rotating connecting plate after the position adjustment;

[0019] A fixing pin can slide along the horizontal direction and is arranged between the locking pin and the rotating connecting plate and can abut against the upper surface of the locking pin to form a locking state.

[0020] In an exemplary embodiment of the present application, the adjusting member is arranged as an elbow clamping locking lever, the lever body part of the elbow clamping locking lever penetrates to below the rotating connecting plate and is fixedly connected with the locking pin, the handle part of the elbow clamping locking lever is arranged above the rotating connecting plate, and turning the handle part of the elbow clamping locking lever can enable the lever body part of the elbow clamping locking lever to slide relative to the rotating connecting plate.

[0021] In an exemplary embodiment of the present application, the rotating center portion is arranged as a rotating shaft, and the axis of the rotating shaft is arranged along the horizontal direction.

[0022] In an exemplary embodiment of the present application, a base and a fixing seat are further included, the fixing seat is fixedly arranged on the upper surface of the base, and the rotating shaft penetrates the fixing seat along the horizontal direction.

[0023] In an exemplary embodiment of the present application, a wrench is fixedly arranged on the top of the positioning plate.

[0024] In an exemplary embodiment of the present application, a second locking portion is further included for locking the pressurizing fixing portion in the second position.

[0025] In an exemplary embodiment of the present application, the second locking portion includes a first plug and a second plug, the first plug is installed on the rotating connecting plate, and the first plug is capable of being plugged with the second plug when the pressurizing fixing portion rotates to the second position.

[0026] According to a second aspect of the present application, a press head structure includes the press head pressurizing driving fixing structure as described above.

[0027] In an exemplary embodiment of the present application, the press head structure includes:

[0028] A universal inner ring shaft is installed below the pressurizing fixing portion.

[0029] A universal middle ring is sleeved outside the bottom of the universal inner ring shaft, an inner ring shaft is arranged between the universal inner ring shaft and the universal middle ring along a first direction, and the universal inner ring shaft and the universal middle ring are rotationally connected along the first direction.

[0030] A universal outer ring is sleeved outside the universal middle ring, an outer ring shaft is arranged between the universal middle ring and the universal outer ring along a second direction, the universal middle ring and the universal outer ring are rotationally connected along the second direction, and the second direction and the first direction are staggered in the same plane.

[0031] In an exemplary embodiment of the present application, the first direction and the second direction are perpendicular to each other in the same horizontal plane.

[0032] In an exemplary embodiment of the present application, the press head structure further includes:

[0033] A rotating joint is arranged directly above the universal inner ring shaft and is used for plugging with the top of the universal inner ring shaft.

[0034] A driving rotating structure is arranged on one side of the rotating joint and is used for providing rotating power for the universal inner ring shaft.

[0035] In an exemplary embodiment of the present application, the center of gravity of the press head structure is located at the center of the bottom of the universal inner ring shaft.

[0036] The exemplary embodiments of the present application can have the following partial or all beneficial effects:

[0037] 1. In the polishing pressure head pressurizing driving fixing structure provided by the example embodiment of the present application, the pressurizing fixing part can be assembled to one side of the rotating center part through the connecting part, so that the staff can turn the pressurizing fixing part around the rotating center part; therefore, when the workpiece needs to be polished, the staff can turn the pressurizing fixing part to the first position, so that the pressurizing fixing part can press the workpiece on the polishing disc to complete the polishing of the workpiece; when the workpiece needs to be taken or placed on the polishing disc, the staff can turn the pressurizing fixing part around the rotating center part away from the polishing disc, so that the pressurizing fixing part is turned to the second position, at this time, the pressurizing fixing part can have a certain gap with the polishing disc, so as to facilitate the staff to take or place the diamond sheet. Through the above structure, the staff can adjust the position of the pressurizing fixing part by manually turning, so as to realize the taking or placing of the diamond sheet, without using the air cylinder, effectively simplifying the structure of the pressurizing fixing part adjusting position, and reducing the manufacturing cost thereof;

[0038] 2. In the polishing pressure head pressurizing driving fixing structure provided by the example embodiment of the present application, the pressurizing fixing part can be locked at the first position through the first locking part, so that the pressurizing fixing part is in the stable first position, so as to ensure that the pressurizing fixing part can stably press the workpiece on the polishing disc;

[0039] 3. In the polishing pressure head pressurizing driving fixing structure provided by the example embodiment of the present application, the pressurizing fixing part can be locked at the second position through the second locking part, so that the pressurizing fixing part can stably remain at the second position after turning, without the staff holding the pressurizing fixing part for a long time, thereby providing convenience for the staff when taking or placing the workpiece.

[0040] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0041] The drawings herein are incorporated into the specification and form part of the specification, show embodiments consistent with the present application, and together with the specification serve to explain the principles of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0042] Figure 1 A schematic view of a polishing pressure head pressurizing driving fixing structure in an embodiment of the present application is shown;

[0043] Figure 2 A schematic view of a polishing pressure head pressurizing driving fixing structure in an embodiment of the present application is shown;

[0044] Figure 3 Fig. 9 shows a sectional view of the polishing pressure head pressurizing driving fixing structure in the second position in an embodiment of the present application;

[0045] Figure 4 Fig. 10 shows a sectional view of the fixing pin structure when the polishing pressure head pressurizing driving fixing structure is in the second position in an embodiment of the present application;

[0046] Figure 5 Fig. 11 shows a side view of the pressurizing mechanism when it is installed in the pressurizing fixing part in an embodiment of the present application;

[0047] Figure 6 Fig. 12 shows a schematic view of the pressure head structure in an embodiment of the present application;

[0048] Figure 7 Fig. 13 shows a schematic view of the self-adapting universal structure in an embodiment of the present application;

[0049] Figure 8 Fig. 14 shows a partial schematic view of the positional relationship of the rotating joint, the speed-reducing motor, the gear box and the bearing seat in an embodiment of the present application.

[0050] BRIEF DESCRIPTION OF THE DRAWINGS

[0051] 1, pressurizing fixing part; 2, rotating center part; 3, connecting part; 31, positioning plate; 311, wrench; 32, rotating connecting plate; 4, first locking part; 41, locking pin; 42, adjusting piece; 43, fixing pin; 5, base; 6, fixing seat; 7, second locking part; 71, plug-in pin; 72, plug-in block; 721, plug-in hole; 8, pressure head structure; 9, self-adapting universal structure; 1-1, retaining ring; 1-2, pressing plate; 1-3, cooling plate; 1-4, quick plug; 2-1, universal outer ring; 2-2, universal middle ring; 2-3, universal inner ring shaft; 2-4, outer ring shaft; 2-5, inner ring shaft; 2-6, outer ring fixing pin; 2-7, inner ring fixing pin; 3-1, bearing; 3-2, bearing seat; 3-3, driven gear; 3-4, gear box; 3-5, rotating joint; 3-6, speed-reducing motor; 3-7, driving gear. DETAILED DESCRIPTION

[0052] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings. Example embodiments, however, can be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided as non-limiting examples so that this disclosure will fully convey the scope of the example embodiments to those skilled in the art. Like reference numerals refer to like elements throughout the figures, which are not necessarily to scale, with the detailed description below explaining the principles of the example embodiments. Certain terminology can also be used in the following description for the purpose of reference only, and thus is not intended to be limiting.

[0053] Although relative terms are used in this description, such as "upper," "lower," to describe one component's relationship to another component, these terms are used herein solely for convenience and are in no way limiting. It is to be understood that these terms are intended to encompass different positional relationships of an apparatus in its various alternate positions, where such terms are used merely for purposes of illustration and not limitation. For example, if an apparatus in one position is turned over in its alternate position, then a component that was denoted as at the "upper" side in the first position can be said to be at the "lower" side in the altered -position. The same applies to the term "on," which encompasses direct and indirect contact in an apparatus.

[0054] The terms "one," "a," "an," and "the" are used to mean that "at least one" or "one or more" unless otherwise indicated. The terms "including" and "having" are used to mean "comprising" and "including" and also mean "consisting essentially of." The term "first," "second," and the like, are used merely as labels, and are not intended to impose numerical requirements on their objects.

[0055] Referring to Figure 1 and Figure 2 The embodiment of the present application provides a polishing pressure head pressurizing driving fixing structure, comprising: a pressurizing fixing part 1, a rotating center part 2 and a connecting part 3; wherein,

[0056] The pressurizing fixing part 1 is arranged above a polishing disc, and is used for pressing a workpiece on the polishing disc;

[0057] The rotating center part 2 is arranged on one side of the pressurizing fixing part 1, and the pressurizing fixing part 1 can be flipped with the rotating center part 2 as a rotating center;

[0058] The connecting part 3 is used for connecting the pressurizing fixing part 1 and the rotating center part 2, the pressurizing fixing part 1 is assembled on the connecting part 3, and the connecting part 3 is rotationally connected with the rotating center part 2;

[0059] The pressurizing fixing part 1 has a first position in a working state and a second position used for replacing the workpiece after being flipped.

[0060] In the embodiment of the present application, the pressurizing fixing part 1 is used for a pressurizing mechanism, and the pressurizing mechanism is used for pressing the workpiece on the polishing disc, in the present application, the workpiece is taken as a diamond piece, but is not limited thereto.

[0061] Further, the first position is defined as that the pressurizing fixing part 1 is vertically arranged above the polishing disc, at this time, the pressure head structure can accurately press the workpiece on the polishing disc with stable and uniform pressure, and the efficiency and accuracy of the polishing process are ensured.

[0062] The second position only needs to ensure that the pressurizing fixing part 1 can reserve enough space with the polishing disc after rotating around the rotating center part 2, so as to ensure that the workpiece can be smoothly taken and placed. The specific position and number of the second position are not specially limited in the application. In the embodiment of the application, the pressurizing fixing part 1 is rotated by 45 degrees away from the polishing disc around the rotating center part 2 as the second position, which not only meets the requirement of taking and placing the workpiece, but also takes into account the convenience of operation and the rationality of the layout of the equipment.

[0063] In the embodiment of the application, the pressurizing fixing part 1 is assembled on one side of the rotating center part 2 through the connecting part 3, so that the staff can flexibly turn the pressurizing fixing part 1. When the workpiece is polished, the staff only needs to adjust the pressurizing fixing part 1 to the first position, and the pressure head structure can stably press the workpiece on the polishing disc, so as to realize accurate polishing of the workpiece. When the workpiece needs to be taken and placed on the polishing disc, the staff can rotate the pressurizing fixing part 1 away from the polishing disc around the rotating center part 2 to the second position. At this time, a safety gap can be formed between the pressurizing fixing part 1 and the polishing disc, which provides sufficient space for taking and placing the workpiece, and ensures the safety and efficiency of the operation. Through the above structure, the complexity of position adjustment of the pressurizing fixing part 1 is simplified, the dependence on additional driving devices such as air cylinders is avoided, and the manufacturing cost of the equipment is significantly reduced.

[0064] In the embodiment of the application, the connecting part 3 includes a positioning plate 31 and a rotating connecting plate 32. The pressurizing fixing part 1 is installed on one side of the positioning plate 31 away from the rotating center part 2. The rotating connecting plate 32 is arranged between the positioning plate 31 and the rotating center part 2. One side of the rotating connecting plate 32 close to the positioning plate 31 is fixedly connected with the positioning plate 31, and the other side of the rotating connecting plate 32 close to the rotating center part 2 is rotationally connected with the rotating center part 2. Specifically, when the pressurizing fixing part 1 is in the first position, the positioning plate 31 is arranged in the vertical direction, and the rotating connecting plate 32 is arranged in the horizontal direction. The positioning plate 31 plays a role of assembling the pressurizing fixing part 1, and the rotating connecting plate 32 realizes the connection between the positioning plate 31 and the rotating center part 2, so that the pressurizing fixing part 1 can rotate around the rotating center part 2 as the center and the rotating connecting plate 32 as the radius. Thus, the pressurizing fixing part 1 can be adjusted between the first position and the second position.

[0065] In the embodiment of the present application, the base 5 and the fixing seat 6 are further included, the fixing seat 6 is fixed to the upper surface of the base 5 in the vertical direction, the rotating center part 2 is provided as a rotating shaft, the rotating shaft penetrates through the fixing seat 6 in the horizontal direction, and the rotating shaft can be fixedly connected with the fixing seat 6 or rotatably connected with the fixing seat 6. If the rotating shaft is fixedly connected with the fixing seat 6, the rotating connecting plate 32 and the rotating shaft should be rotatably connected; if the rotating shaft is rotatably connected with the fixing seat 6, the rotating connecting plate 32 and the rotating shaft should be fixedly connected. The top of the fixing seat 6 is fixedly provided with a wrench 311, and the staff can hold the wrench 311 to rotate when it is necessary to rotate the pressurizing fixing part 1, thereby providing convenience for the rotating work of the staff.

[0066] In the embodiment of the present application, the diamond polishing press head pressurizing driving fixing structure further includes a first locking part 4 for locking the pressurizing fixing part 1 in the first position. The first locking part 4 can make the pressurizing fixing part 1 have good stability when it is located in the first position and cannot be accidentally rotated, and when it is necessary to rotate the pressurizing fixing part 1, only the first locking part 4 needs to be unlocked.

[0067] Referring to Figure 2 and Figure 3 , in the embodiment of the present application, the first locking part 4 includes:

[0068] The locking pin 41 is located below the rotating connecting plate 32 and can approach or move away from the rotating connecting plate 32;

[0069] The adjusting part 42 is arranged between the rotating connecting plate 32 and the locking pin 41, is used for adjusting the position of the locking pin 41, and can make the locking pin 41 be fixed relative to the rotating connecting plate 32 after the position adjustment;

[0070] The fixing pin 43 can slide in the horizontal direction and is arranged between the locking pin 41 and the rotating connecting plate 32, and can abut against the upper surface of the locking pin 41 to form a locking state.

[0071] Specifically, the locking pin 41 has a locking position and an unlocking position in the moving process, the locking position is located above the unlocking position, and the adjusting part 42 can drive the locking pin 41 to move between the locking position and the unlocking position.

[0072] The fixing pin 43 is arranged in the fixing seat 6 and is in sliding connection with the fixing seat 6 in the direction close to or away from the positioning plate 31. Further, a spring can be arranged in the fixing pin 43, which can exert a spring force on the fixing pin 43 in the direction of the positioning plate 31. Therefore, when the user pulls the fixing pin 43, the fixing pin 43 can be moved in the direction away from the positioning plate 31, so that the end of the fixing pin 43 can be moved away from the upper side of the locking pin 41. After the fixing pin 43 is released, the spring can release the spring force to drive the fixing pin 43 to move towards the positioning plate 31, and the end can be moved to the upper side of the locking pin 41. Further, the fixing pin 43 can be provided with a locking structure, which can be locked with the fixing seat 6 by rotating when the fixing pin 43 is pulled out, so that the spring cannot release the spring force. After the fixing pin 43 is rotated again, the fixing pin 43 and the fixing seat 6 can be unlocked, so that the spring can release the spring force to drive the fixing pin 43 to move towards the positioning plate 31. Of course, the above is only to provide convenience for the operation of the staff, and is not restrictive.

[0073] When it is needed to lock the pressurizing fixing part 1 at the first position, the staff only needs to operate the adjusting part 42 to move the locking pin 41 upwards to the locking position, so that the fixing pin 43 and the locking pin 41 can be abutted to achieve the locking state, so as to ensure that the pressurizing fixing part 1 can have good stability when located at the first position. When it is needed to rotate the pressurizing fixing part 1, the staff only needs to first move the locking pin 41 downwards through the adjusting part 42, then pull out the fixing pin 43, and then lock the fixing pin 43 with the fixing seat 6 by rotating, so that the pressurizing fixing part 1 can be rotated.

[0074] In the embodiment of the present application, the adjusting part 42 is arranged as an elbow clamp locking rod, which is installed on the rotating connecting plate 32. The rod body part of the elbow clamp locking rod penetrates to the lower side of the rotating connecting plate 32 and is fixedly connected with the locking pin 41. The handle part of the elbow clamp locking rod is arranged above the rotating connecting plate 32. When the staff turns down the handle part of the elbow clamp locking rod, the rod body part of the elbow clamp locking rod can drive the locking pin 41 to move upwards to the locking position. When the staff turns up the handle part of the elbow clamp locking rod, the rod body part of the elbow clamp locking rod can drive the locking pin 41 to move downwards to the unlocking position. The above is only an exemplary description of the first locking part 4, and is not restrictive.

[0075] In the embodiment of the present application, the diamond polishing press head pressurizing driving fixing structure further comprises a second locking part 7 for locking the pressurizing fixing part 1 at the second position. The second locking part 7 can lock the pressurizing fixing part 1 at the second position, so as to ensure that the pressurizing fixing part 1 can have good stability at the second position when the staff takes and places the workpiece. When it is needed to rotate the pressurizing fixing part 1, the second locking part 7 only needs to be unlocked.

[0076] Referring to Figure 1 and Figure 4 Further, the second locking part 7 comprises a first plug-in part and a second plug-in part, the first plug-in part is installed on the rotating connecting plate 32, and the first plug-in part can form a plug-in cooperation with the second plug-in part when the pressing fixing part 1 is rotated to the second position.

[0077] In the embodiment of the present application, the first plug-in part is a plug-in pin 71, the plug-in pin 71 penetrates through the rotating connecting plate 32 and is in sliding connection with the rotating connecting plate 32, the plug-in pin 71 is internally provided with a spring, when the plug-in pin 71 is pulled outward, the plug-in pin 71 moves upwards relative to the rotating connecting plate 32, the spring is stretched and stored energy, when the plug-in pin 71 is released, the spring can release elastic force to drive the end of the plug-in pin 71 to move below the rotating connecting plate 32.

[0078] The second plug-in part is a plug-in block 72, the plug-in block 72 is sleeved on the rotating shaft and located on one side of the fixed seat 6, the plug-in block 72 is fixed relative to the fixed seat 6, and a plug-in hole 721 capable of forming a plug-in cooperation with the plug-in pin 71 is formed in the side wall of the plug-in block 72. When the worker rotates the pressing fixing part 1, the plug-in pin 71 can be pulled outward, when the pressing fixing part 1 is rotated to the second position, at this time, the plug-in pin 71 is just aligned with the plug-in hole 721, the plug-in pin 71 can be inserted into the plug-in hole 721 by releasing the plug-in pin 71, so that the pressing fixing part 1 can be fixed at the second position. The above is only an exemplary description of the second locking part 7, and is not limited.

[0079] Referring to Figure 5 In the embodiment of the present application, a pressing mechanism is also disclosed, which is suitable for the polishing pressure head pressing driving fixing structure.

[0080] In the embodiment of the present application, the pressing mechanism comprises:

[0081] A pressure head structure 8 for pressing on the upper surface of the workpiece;

[0082] An adaptive universal structure 9 installed above the pressure head structure 8 for adjusting the inclination angle of the pressure head structure 8 and for transmitting rotary power to the pressure head structure 8.

[0083] The adaptive universal structure 9 and the rotating main shaft constitute a universal structure, which has the advantages of compact structure, simple installation and smooth operation, can automatically adjust the inclination state of the pressure head structure 8 according to the situation of the workpiece surface when the pressure head structure 8 is pressed to the workpiece surface, thereby improving the adhesion of the pressure head structure 8 to the workpiece surface when the workpiece is pressed, and further improving the processing quality of the workpiece.

[0084] Referring toFigure 5 and Figure 6 As shown in the embodiment of this application, the pressure head structure 8 includes:

[0085] The pressure plate 1-2 has a vacuum hole on its lower surface, which can adsorb the workpiece. The lower surface of the pressure plate 1-2 is fixed with a retaining ring 1-1 for fixing the position of the workpiece. The workpiece is located inside the retaining ring 1-1. The retaining ring 1-1 restricts the workpiece and prevents the workpiece from sliding out from under the pressure plate 1-2 during grinding.

[0086] Cooling plate 1-3 is sleeved on the outside of pressure plate 1-2. The interior of cooling plate 1-3 has a labyrinth-shaped cooling water channel structure. When the workpiece is being processed, cooling water is introduced into the labyrinth-shaped cooling water channel to cool the pressure plate 1-2.

[0087] Reference Figure 5 and Figure 7 As shown in the embodiment of this application, the adaptive gimbal structure 9 includes:

[0088] Universal inner ring shaft 2-3;

[0089] Universal middle ring 2-2 is sleeved on the outside of the bottom of the universal inner ring shaft 2-5. The universal inner ring shaft 2-3 and the universal middle ring 2-2 are connected by the inner ring shaft 2-5 along the first direction. The universal inner ring shaft 2-3 and the universal middle ring 2-2 are rotatably connected along the first direction.

[0090] The universal outer ring 2-1 is sleeved on the outside of the universal middle ring 2-2. An outer ring shaft 2-4 passes through the universal middle ring 2-2 and the universal outer ring 2-1 along the second direction. The universal middle ring 2-2 and the universal outer ring 2-1 are rotatably connected along the second direction. The second direction and the first direction are offset from each other in the same plane. The universal outer ring 2-1 is fixedly connected to the pressure plate 1-2.

[0091] Reference Figure 6 and Figure 7 As shown, specifically, a quick-connect plug 1-4 is fixed to the top of the pressure plate 1-2, and the pressure plate 1-2 is connected and fixed to the bottom of the universal outer ring 2-1 through the quick-connect plug 1-4. An inner ring fixing pin 2-7 is inserted downwards above the end of the inner ring shaft 2-5 of the universal middle ring 2-2, with the bottom of the inner ring fixing pin 2-7 inserted into the end of the inner ring shaft 2-5, thereby fixing the universal middle ring 2-2 to the inner ring shaft 2-5 and ensuring the stability of the inner ring shaft 2-5 during operation. An outer ring fixing pin 2-6 is inserted above the outer ring shaft 2-4 of the universal outer ring 2-1, and the outer ring fixing pin 2-6 is inserted into the end of the outer ring shaft 2-4 in the same manner, thereby ensuring the stability of the outer ring shaft 2-4 during operation.

[0092] The inner ring shaft 2-5 enables the universal middle ring 2-2 to swing along the first direction with the bottom of the universal inner ring shaft 2-5, and the outer ring shaft 2-4 enables the universal outer ring 2-1 to swing along the second direction with the universal middle ring 2-2, so that the universal outer ring 2-1 can be tilted at any angle through the swing of the universal middle ring 2-2 and the swing of the universal outer ring 2-1, and since the universal outer ring 2-1 is fixed with the pressing plate 1-2, the pressing plate 1-2 can be adjusted at any angle of inclination, so that the pressing plate 1-2 can be in close contact with the upper surface of the workpiece, thereby ensuring the stability of the workpiece on the grinding stone.

[0093] Referring to Figure 5 and Figure 7 , further, in the present application, the first direction and the second direction are arranged in a perpendicular relationship in the same plane, so that the rotation axes of the inner ring shaft 2-5 and the outer ring shaft 2-4 are perpendicular to each other, and thus the self-adaptive universal structure 9 forms a cross-shaped universal structure, which can make the pressing plate 1-2 swing more smoothly and improve the stability of the pressing plate 1-2 when pressing the workpiece.

[0094] Referring to Figure 5 and Figure 8 , in the embodiment of the present application, the pressing mechanism further comprises:

[0095] The rotary joint 3-5 is arranged above the universal inner ring shaft 2-3 and is used to form a plug-in fit with the top of the universal inner ring shaft 2-3;

[0096] The drive rotation structure is arranged on one side of the rotary joint 3-5 and is used to provide a rotation power for the universal inner ring shaft 2-3.

[0097] The rotary joint 3-5 is configured to supply cooling water, which provides continuous input and output of cooling water for the pressing head structure 8, thereby ensuring temperature control during processing.

[0098] The drive rotation structure comprises a speed reducer 3-6 and a gear box 3-4, the gear box 3-4 is provided with a driving gear 3-7 and a driven gear 3-3 which are in mesh with each other, the output end of the speed reducer 3-6 is fixedly connected with the driving gear 3-7, and the driven gear 3-3 is fixedly connected with the top of the universal inner ring shaft 2-3. The driving gear 3-7 is driven to rotate by the speed reducer 3-6, and the driving gear 3-7 drives the driven gear 3-3 to rotate, so that the driven gear 3-3 can drive the self-adaptive universal structure 9 and the pressing head structure 8 to rotate together.

[0099] A bearing 3-1 seat is fixedly arranged below the gear box 3-4, the bearing 3-1 is installed in the bearing 3-1 seat, and the top of the universal inner ring shaft 2-3 is inserted into the bearing 3-1 from the bottom of the bearing 3-1 seat, and the bearing 3-1 seat is used to improve the stability of the universal inner ring shaft 2-3 during rotation.

[0100] It is particularly crucial that the overall center of gravity of the pressing mechanism should be arranged at the center of the pressure head structure 8, so as to ensure that the workpiece can be uniformly stressed when the pressure head structure 8 presses the workpiece, thereby achieving a higher quality machining effect.

[0101] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the specification and examples be considered as exemplary only, with the true scope and spirit of the application being indicated by the following claims.

Claims

1. A polishing press head pressurization drive fixing structure characterized by comprising: The utility model relates to a polishing device for polishing disc, comprising: A pressing fixed part (1), a rotating center part (2) and a connecting part (3), wherein, The pressing fixed part (1) is arranged above the polishing disc and is used for mounting a pressing mechanism; The rotating center part (2) is arranged on one side of the pressing fixed part (1), and the pressing fixed part (1) can be flipped with the rotating center part (2) as the rotating center; The connecting part (3) is used for connecting the pressing fixed part (1) and the rotating center part (2), the pressing fixed part (1) is assembled on the connecting part (3), and the connecting part (3) is rotatably connected with the rotating center part (2); The pressing fixed part (1) has a first position in a working state and a second position used for replacing a workpiece after being flipped.

2. The fixed structure for driving a presser of a polishing head according to claim 1, wherein The connecting part (3) comprises: A positioning plate (31) arranged on one side of the pressing fixed part (1) and used for bearing the pressing fixed part (1); A rotating connecting plate (32) arranged between the rotating center part (2) and the positioning plate (31), one side of the rotating connecting plate (32) is fixedly connected with the positioning plate (31), and the other side is rotatably connected with the rotating center part (2).

3. The fixed structure for driving a presser of a polishing head according to claim 2, wherein Further comprising a first locking part (4) used for locking the pressing fixed part (1) in the first position.

4. The fixed structure for driving a presser of a polishing head according to claim 3, wherein The first locking part (4) comprises: A locking pin (41) located below the rotating connecting plate (32) and capable of approaching or moving away from the rotating connecting plate (32); An adjusting part (42) arranged between the rotating connecting plate (32) and the locking pin (41) and used for adjusting the position of the locking pin (41) and enabling the locking pin (41) to be fixed relative to the rotating connecting plate (32) after position adjustment; A fixed pin (43) capable of sliding along the horizontal direction and arranged between the locking pin (41) and the rotating connecting plate (32) and capable of abutting against the upper surface of the locking pin (41) to form a locking state.

5. The polishing head pressurization drive fixation structure according to claim 4, characterized by The adjusting part (42) is arranged as an elbow clamping locking rod, the elbow clamping locking rod is installed on the rotating connecting plate (32), the rod body part of the elbow clamping locking rod penetrates to below the rotating connecting plate (32) and is fixedly connected with the locking pin (41), the handle part of the elbow clamping locking rod is arranged above the rotating connecting plate (32), and flipping the handle part of the elbow clamping locking rod can enable the rod body part of the elbow clamping locking rod to slide relative to the rotating connecting plate (32).

6. The fixed structure for driving a presser of a polishing press according to claim 2, wherein The rotating center part (2) is arranged as a rotating shaft, and the axis of the rotating shaft is arranged along the horizontal direction.

7. The fixed structure for driving a presser of a polishing press according to claim 6, wherein Further comprising a base (5) and a fixed seat (6), the fixed seat (6) is fixedly arranged on the upper surface of the base (5), and the rotating shaft penetrates the fixed seat (6) along the horizontal direction.

8. The fixed structure for driving a presser of a polishing press according to claim 2, wherein A wrench (311) is fixedly arranged on the top of the positioning plate (31).

9. The fixed structure for driving a presser of a polishing press according to any one of claims 2 to 8, wherein Further comprising a second locking part (7) used for locking the pressing fixed part (1) in the second position.

10. The fixed structure for driving a presser of a polishing head according to claim 9, wherein The second locking part (7) comprises a first plug and a second plug, the first plug is installed on the rotating connecting plate (32), and the first plug can be in plug-in cooperation with the second plug when the pressing fixing part (1) rotates to the second position.

11. A pressurizing mechanism characterized by comprising: The polishing pressure head pressing driving fixing structure is suitable for any one of claims 1-10.

12. A pressurizing mechanism according to claim 11, wherein Comprise: A pressure head structure (8) for pressing on the upper surface of a workpiece; An adaptive universal structure (9) installed above the pressure head structure (8) for adjusting the inclination angle of the pressure head structure (8) and for transmitting rotary power to the pressure head structure (8).

13. A pressurizing mechanism according to claim 12, wherein The pressure head structure (8) comprises a pressure plate (1-2), the lower surface of the pressure plate (1-2) is provided with a vacuum hole capable of adsorbing the workpiece, and the lower surface of the pressure plate (1-2) is fixedly provided with a workpiece position fixing ring (1-1) for fixing the workpiece, the workpiece is located in the fixing ring (1-1), and the outer side of the pressure plate (1-2) is sleeved with a cooling plate (1-3) for cooling the pressure plate (1-2).

14. A pressurizing mechanism according to claim 13, wherein The adaptive universal structure (9) comprises: A universal inner ring shaft (2-3); A universal middle ring (2-2) sleeved on the outer side of the bottom of the universal inner ring shaft (2-3), an inner ring shaft (2-5) is penetratingly arranged between the universal inner ring shaft (2-3) and the universal middle ring (2-2) along a first direction, and the universal inner ring shaft (2-3) and the universal middle ring (2-2) are rotationally connected along the first direction; A universal outer ring (2-1) sleeved on the outer side of the universal middle ring (2-2), an outer ring shaft (2-4) is penetratingly arranged between the universal middle ring (2-2) and the universal outer ring (2-1) along a second direction, the universal middle ring (2-2) and the universal outer ring (2-1) are rotationally connected along the second direction, the second direction and the first direction are staggered in the same plane, and the universal outer ring (2-1) is fixedly connected with the pressure plate (1-2).

15. A pressurizing mechanism according to claim 14, wherein The first direction and the second direction are perpendicular to each other in the same horizontal plane.

16. A pressurizing mechanism according to claim 14, wherein Further comprising: A rotary joint (3-5) arranged directly above the universal inner ring shaft (2-3) and in plug-in cooperation with the top of the universal inner ring shaft (2-3); A driving rotary structure arranged on one side of the rotary joint (3-5) and used for providing rotary power for the universal inner ring shaft (2-3).

17. A pressurizing mechanism according to claim 14, wherein The center of gravity of the pressing mechanism is located at the center of the pressure plate (1-2).

Images