Substrate film tearing and grinding combined work all-in-one machine

The automated design of the integrated substrate film removal and grinding machine solves the problems of high cost and low equipment utilization of manual operation, realizes the seamless connection of automated substrate film removal and grinding, and improves equipment efficiency and substrate protection.

CN223905461UActive Publication Date: 2026-02-13SHANGHAI JI YAO TECH CO LTD
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Patent Information

Application Number
CN202520471818.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-18
Publication Date
2026-02-13
Estimated Expiration
2035-03-18

AI Technical Summary

Technical Problem

Existing substrate peeling and polishing processes involve high manual operation costs, low equipment space and time utilization, and high risks of substrate damage and contamination.

Method used

The system adopts an integrated machine for substrate film removal and grinding, equipped with a fully automatic substrate film removal machine and a feeding and unloading transfer machine, which are connected in parallel with two grinding machines to achieve automated operation. It also incorporates an intelligent embedded thin film pressure sensor and temperature probe to adjust the grinding parameters in real time.

Benefits of technology

It achieves seamless automation of substrate film removal and grinding, reduces labor costs, improves equipment utilization and film removal efficiency, reduces substrate damage, and saves on equipment investment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model provides a substrate film tearing and grinding combined work all-in-one machine, which relates to the technical field of the semiconductor packaging test industry, and comprises a substrate film tearing machine and a substrate, one side of the substrate film tearing machine is provided with a feeding transfer machine, one side of the feeding transfer machine is provided with a first grinding machine and a second grinding machine, the other end of the first grinding machine is provided with a first temporary storage machine, and the other end of the second grinding machine is provided with a second temporary storage machine. A first temporary storage machine is arranged at one end of the first grinding machine, a second temporary storage machine is arranged at the other end of the second grinding machine, a discharging transfer machine is arranged at the other end of the first temporary storage machine and the other end of the second temporary storage machine, and a discharging machine is arranged at the other end of the discharging transfer machine. The labor cost is greatly saved; and one film tearing machine is connected with two grinding machines in parallel, so that the overall time and space utilization rate of the equipment is improved, and the equipment investment cost is also reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor packaging test industry especially relates to a base plate tear film, grinding combined work integrated machine. BACKGROUND

[0002] According to the aluminum base plate tear film equipment of Chinese patent number CN103600573B discloses including: work table, feeding transmission assembly and tear film component, be provided with transmission area and tear film area on the work table, the feeding transmission assembly includes feeding transmission drive part and a plurality of feeding transmission rolling axle, each feeding transmission rolling axle interval setting is on the transmission area, tear film component includes tear film rotary lever, tear film rotary drive part, tear film separating plate and a plurality of tear film adhesion axle sleeve, tear film rotary lever rotationally installs on tear film area, tear film separating plate installs on the side of tear film rotary lever, each tear film adhesion axle sleeve interval sleeve joint is on tear film rotary lever, tear film rotary lever and feeding transmission assembly between setting tear film transmission gap, tear film separating plate is provided with a plurality of separating abutting blocks.

[0003] The above-mentioned comparative document and prior art have the following technical problems: for the demand of tearing film and grinding of the base plate, the industry generally adopts the following method: first, manually tear off the film on the back of the base plate, then use the Magazine feeding machine to feed the base plate after tearing off the film into the grinding machine for grinding, and then use the Magazine unloading machine to recycle the base plate after tearing film and grinding. However, this way of tearing film and grinding of the base plate not only has high labor cost, but also needs to be equipped with a set of Magazine feeding / unloading machine for each base plate grinding machine, which has low utilization rate of time and space. Moreover, since the manual operation is involved in the transportation of the base plate many times, the base plate may be damaged or contaminated, causing certain loss. SUMMARY

[0004] The utility model discloses a kind of base plate tear film, grinding combined work integrated machine to solve the shortcomings in prior art.

[0005] To achieve the above object, the utility model adopts the following technical scheme: a kind of base plate tear film, grinding combined work integrated machine, including base plate tear film machine and base plate, the side of the base plate tear film machine is equipped with feeding transfer machine, the side of the feeding transfer machine is equipped with first grinding machine and second grinding machine, the other end of the first grinding machine is equipped with first temporary storage machine, the other end of the second grinding machine is equipped with second temporary storage machine, the other end of the first temporary storage machine and second temporary storage machine is equipped with unloading transfer machine, the other end of the unloading transfer machine is equipped with unloading machine.

[0006] Preferably, the front of the substrate film tearing machine is provided with a magazine feeding window, the bottom of the magazine feeding window is provided with a waste film collection opening and closing door, the side of the substrate film tearing machine is provided with a film tearing machine discharge port, and the top of the substrate film tearing machine is provided with an alarm.

[0007] Preferably, one side of the feeding transfer machine is provided with a feeding substrate inlet, the inside of the feeding transfer machine is provided with a first feeding substrate transmission moving platform and a second feeding substrate transmission moving platform, the other side of the feeding transfer machine is provided with a first feeding substrate outlet and a second feeding substrate outlet, the feeding substrate inlet is communicated with the film tearing machine discharge port, the first feeding substrate transmission moving platform is communicated with the first feeding substrate outlet, the second feeding substrate transmission moving platform is communicated with the second feeding substrate outlet, the first feeding substrate outlet is communicated with the first grinding machine, and the second feeding substrate outlet is communicated with the second grinding machine.

[0008] Preferably, one side of the first temporary storage machine is provided with a first temporary storage machine inlet, the inside of the first temporary storage machine is provided with a lifting substrate temporary storage box, the other side of the first temporary storage machine is provided with a first temporary storage machine outlet, the first temporary storage machine inlet is communicated with the first grinding machine, the first temporary storage machine and the second temporary storage machine have the same structure, and the second temporary storage machine outlet of the second temporary storage machine is communicated with the second grinding machine.

[0009] Preferably, one side of the feeding transfer machine is provided with a first feeding substrate inlet and a second feeding substrate inlet, the inside of the feeding transfer machine is provided with a first feeding substrate transmission moving platform and a second feeding substrate transmission moving platform, the other side of the feeding transfer machine is provided with a feeding substrate outlet, the first feeding substrate inlet is communicated with the first temporary storage machine outlet of the first temporary storage machine, and the second feeding substrate inlet is communicated with the second temporary storage machine outlet of the second temporary storage machine.

[0010] Preferably, the back of the feeding machine is provided with a feeding substrate inlet, one side of the feeding machine is provided with an empty magazine feeding window, the bottom of the empty magazine feeding window is provided with a magazine discharge window, and the feeding substrate inlet is communicated with the feeding substrate outlet.

[0011] Preferably, one side of the substrate is provided with a notch, the surface of the notch is provided with a film, and the other side of the substrate is provided with a two-dimensional code.

[0012] Beneficial effects

[0013] The utility model discloses, adopted online work system, this set of online work system configuration a full -automatic substrate film tearing machine, utilize a loading transfer machine, make it and two grinding machines are parallelly connected, utilize a unloading transfer machine, make two grinding machines and a magazine unloading machine parallelly connected, utilize this set of online work system, can realize the automation work of substrate film tearing, grinding, greatly save the artificial cost, and one film tearing machine is parallelly connected two grinding machines, improve the time and space utilization of equipment whole, also reduce the equipment investment cost.

[0014] The utility model discloses, adopted substrate film tearing machine, this set of online work system configuration a full -automatic substrate film tearing machine, compared with traditional manual film tearing, greatly improve the film tearing efficiency and substrate damage rate.

[0015] The utility model discloses, adopted loading transfer machine and unloading transfer machine, through a loading transfer machine and a unloading transfer machine, make a film tearing machine and a magazine unloading machine, with two grinding machines parallelly connected, this kind of equipment parallelly connected mode not only realized seamless link between two processes of substrate film tearing and grinding, full -automatic work, and improved two processes in the time and space utilization of equipment whole, saved the artificial and equipment investment cost. DRAWINGS

[0016] Figure 1 It is the work system layout of the utility model;

[0017] Figure 2 It is the structure schematic drawing of full -automatic substrate film tearing machine of the utility model;

[0018] Figure 3 It is the structure schematic drawing of loading transfer machine of the utility model;

[0019] Figure 4 It is the structure schematic drawing of substrate temporary storage machine of the utility model;

[0020] Figure 5 It is the structure schematic drawing of unloading transfer machine of the utility model;

[0021] Figure 6 It is the structure schematic drawing of unloading machine of the utility model;

[0022] Figure 7 It is the schematic diagram of frame belt notch substrate of the utility model.

[0023] Legend:

[0024] 1, substrate film tearing machine; 101, Magazine loading window; 102, waste film collection opening and closing door; 103, film tearing machine discharge port; 2, loading transfer machine; 201, loading substrate inlet; 202, first loading substrate transmission moving platform; 203, second loading substrate transmission moving platform; 204, first loading substrate discharge port; 205, second loading substrate discharge port; 3, first grinding machine; 4, second grinding machine; 5, first temporary storage machine; 501, first temporary storage machine inlet; 502, lifting substrate temporary storage box; 503, first temporary storage machine discharge port; 6, second temporary storage machine; 7, unloading transfer machine; 701, first unloading substrate inlet; 702, second unloading substrate inlet; 703, first unloading substrate transmission moving platform; 704, second unloading substrate transmission moving platform; 705, unloading substrate discharge port; 8, unloading machine; 801, unloading substrate inlet; 802, empty Magazine loading window; 803, Magazine unloading window; 9, substrate; 901, notch; 902, film; 903, two-dimensional code. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, purposes and effects realized by the present application easy to understand, the following will further describe the present application in combination with specific embodiments and drawings. However, the following embodiments are only preferred embodiments of the present application, and are not all. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative labor are all within the protection scope of the present application.

[0026] The specific embodiments of the present application will be described below in combination with the drawings. Embodiment one:

[0028] Reference Figures 1-7The utility model provides a kind of substrate film tearing, grinding combined work integrated machine, including substrate film tearing machine 1 and substrate 9, the front of substrate film tearing machine 1 is equipped with Magazine feeding window 101, the bottom of Magazine feeding window 101 is equipped with waste film collection opening and closing door 102, the side of substrate film tearing machine 1 is equipped with film tearing machine discharge port 103, the top of substrate film tearing machine 1 is equipped with alarm, Magazine feeding window 101: from the lower layer of window into the Magazine equipped with substrate 9 to be torn film, machine automatically sends it into film tearing machine, then substrate 9 in Magazine is torn film and is handled;After the substrate 9 in the magazine is completely processed by the film tearing, the machine automatically stores the empty magazine on the upper storage table of the window, supporting the removal at any time. The waste film collection opening and closing door 102 has a waste film collection space inside. After the collection is full, the device alarms and prompts to open the door to clean the waste film. The film tearing machine discharge port 103 pushes the substrate 9 out of the discharge port after the film tearing machine finishes tearing the film of the substrate 9 and sends it into the feeding inlet of the feeding transfer machine 2. One side of the substrate 9 is provided with a notch 901, and the surface of the notch 901 is provided with a film 902. The other side of the substrate 9 is provided with a two-dimensional code 903. One side of the substrate film tearing machine 1 is provided with the feeding transfer machine 2. One side of the feeding transfer machine 2 is provided with the first grinding machine 3 and the second grinding machine 4. One side of the feeding transfer machine 2 is provided with the feeding substrate inlet 201. The inside of the feeding transfer machine 2 is provided with the first feeding substrate transmission moving platform 202 and the second feeding substrate transmission moving platform 203. The other side of the feeding transfer machine 2 is provided with the first feeding substrate discharge port 204 and the second feeding substrate discharge port 205. The feeding substrate inlet 201 communicates with the film tearing machine discharge port 103. The first feeding substrate transmission moving platform 202 communicates with the first feeding substrate discharge port 204. The second feeding substrate transmission moving platform 203 communicates with the second feeding substrate discharge port 205. The first feeding substrate discharge port 204 communicates with the first grinding machine 3. The second feeding substrate discharge port 205 communicates with the second grinding machine 4. The feeding substrate inlet 201 is aligned with the film tearing machine discharge port 103. The substrate 9 after tearing the film enters the feeding transfer machine 2 from the inlet, and then is transmitted into the grinding machine by the transmission moving platform. The first feeding substrate transmission moving platform 202 transmits the substrate 9 after tearing the film from the discharge port into the first grinding machine 3. The second feeding substrate transmission moving platform 203 transmits the substrate 9 after tearing the film from the discharge port into the second grinding machine 4. The first feeding substrate discharge port 204 is aligned with the first grinding machine 3 inlet. The second feeding substrate discharge port 205 is aligned with the second grinding machine 4 inlet. The other end of the first grinding machine 3 is provided with the first temporary storage machine 5. The other end of the second grinding machine 4 is provided with the second temporary storage machine 6. One side of the first temporary storage machine 5 is provided with the first temporary storage machine inlet 501. The inside of the first temporary storage machine 5 is provided with the lifting substrate temporary storage box 502. The other side of the first temporary storage machine 5 is provided with the first temporary storage machine discharge port 503. The first temporary storage machine inlet 501 communicates with the first grinding machine 3. The first temporary storage machine 5 and the second temporary storage machine 6 have the same structure. The second temporary storage machine discharge port of the second temporary storage machine 6 communicates with the second grinding machine 4. The first temporary storage machine inlet 501 is aligned with the grinding machine discharge port. Each grinding machine corresponds to a substrate temporary storage machine. After the grinding in the grinding machine is completed, the substrate 9 is sent into the substrate temporary storage machine. The substrate temporary storage lifting box 502 is not moved when the unloading transfer machine 7 is normally working, and is used as a part of the transmission track to send the substrate 9 from the temporary storage machine into the unloading transfer machine 7.When the material blocking problem occurs in the unloading and transplanting machine 7, the temporary storage box will lift and store the substrate 9. After the fault is removed, the substrate 9 is put down again to continue normal operation. The first temporary machine discharge port 503 is aligned with the feeding port of the unloading and transplanting machine 7. The substrate 9 in the temporary machine is transmitted into the unloading and transplanting machine 7 from here. The other end of the first temporary machine 5 and the second temporary machine 6 is provided with an unloading and transplanting machine 7. One side of the unloading and transplanting machine 7 is provided with a first unloading substrate feeding port 701 and a second unloading substrate feeding port 702. The inside of the unloading and transplanting machine 7 is provided with a first unloading substrate transmission moving platform 703 and a second unloading substrate transmission moving platform 704. The other side of the unloading and transplanting machine 7 is provided with an unloading substrate discharge port 705. The first unloading substrate feeding port 701 is communicated with the first temporary machine discharge port 503 of the first temporary machine 5. The second unloading substrate feeding port 702 is communicated with the second temporary machine discharge port of the second temporary machine 6. The first unloading substrate feeding port 701 is used for the substrate 9 after grinding in the first grinding machine 3. The substrate 9 is fed into the unloading and transplanting machine 7 from the first unloading substrate feeding port 701 after passing through the first temporary machine 5. Then the substrate 9 is transmitted into the unloading machine 8 by the first unloading substrate transmission moving platform 703. The second unloading substrate feeding port 702 is used for the substrate 9 after grinding in the second grinding machine 4. The substrate 9 is fed into the unloading and transplanting machine 7 from the second unloading substrate feeding port 702 after passing through the second temporary machine 6. Then the substrate 9 is transmitted into the unloading machine 8 by the second unloading substrate transmission moving platform 704. The first unloading substrate transmission moving platform 703 is used for transmitting the substrate 9 after grinding in the first grinding machine 3 from the unloading and transplanting machine 7 discharge port into the Magazine unloading machine 8. The second unloading substrate transmission moving platform 704 is used for transmitting the substrate 9 after grinding in the second grinding machine 4 from the unloading and transplanting machine 7 discharge port into the Magazine unloading machine. The unloading substrate discharge port 705 is aligned with the substrate feeding port of the Magazine unloading machine 8. The other end of the unloading and transplanting machine 7 is provided with the unloading machine 8. The back of the unloading machine 8 is provided with an unloading substrate feeding port 801. One side of the unloading machine 8 is provided with an empty Magazine feeding window 802. The bottom of the empty Magazine feeding window 802 is provided with a Magazine discharge window 803. The unloading substrate feeding port 801 is communicated with the unloading substrate discharge port 705. The unloading substrate feeding port 801 is aligned with the unloading and transplanting machine 701 discharge port. The substrate 9 after film tearing and grinding is fed into the Magazine unloading machine 8 from here for recycling. The empty Magazine feeding window 802 is used for putting the empty Magazine into the substrate 9 for recycling. The Magazine discharge window 803 is used for supporting the Magazine after recycling the substrate 9 to be taken away at any time. An online working system is adopted. The online working system is configured with a full-automatic substrate film tearing machine 1. An feeding and transplanting machine 2 is used to connect two grinding machines in parallel.Recycle a unloading transfer machine 7, parallel two grinding machines and a Magazine unloading machine 8, using this set of online working system, can realize the automatic work of substrate film tearing, grinding, greatly saves the labor cost, and a film tearing machine is connected with two grinding machines, which improves the time and space utilization rate of the whole equipment, and reduces the equipment investment cost. Embodiment two:

[0030] Referring to Figure 1 , intelligent embedded design can exist in the system, film pressure sensors and temperature probes are embedded in key positions such as grinding heads and transmission belts, real-time feedback data is fed back to the AI control system, the grinding head pressure is automatically adjusted based on the thickness detection result, drawer type structure is adopted in key components (such as motors and filters), quick replacement is supported, and downtime is reduced.

[0031] In summary:

[0032] 1. An online working system is adopted to realize parallel connection between machines, and the online working system can realize automatic substrate film tearing and grinding, greatly saves labor cost, and a film tearing machine is connected with two grinding machines, which improves the time and space utilization rate of the whole equipment, and reduces the equipment investment cost.

[0033] 2. The substrate film tearing machine 1 is adopted to realize full-automatic substrate film tearing machine 1, which greatly improves the film tearing efficiency and substrate damage rate compared with traditional manual film tearing.

[0034] 3. The feeding transfer machine 2 and the discharging transfer machine 7 are adopted to realize parallel connection, which not only realizes seamless connection between substrate film tearing and grinding processes and automatic work in the whole process, but also improves the time and space utilization rate of the whole equipment in the two processes and saves labor and equipment investment cost.

[0035] In the utility model, unless another definite provision and limitation, first feature is "on" or "under" second feature, can include that first and second features are direct contact, also can include that first and second features are not direct contact but contact through other features between them. Moreover, first feature "on", "above" and "upper surface" of second feature includes that first feature is directly above and obliquely above second feature, or only indicates that the horizontal height of first feature is higher than second feature. First feature "under", "below" and "lower surface" of second feature includes that first feature is directly below and obliquely below second feature, or only indicates that the horizontal height of first feature is less than second feature.

[0036] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only preferred examples of the present application and are not intended to limit the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A substrate film tearing and grinding integrated machine, comprising a substrate film tearing machine (1) and a substrate (9), characterized in that: One side of the substrate film tearing machine (1) is provided with a feeding transfer machine (2), one side of the feeding transfer machine (2) is provided with a first grinding machine (3) and a second grinding machine (4), the other end of the first grinding machine (3) is provided with a first temporary storage machine (5), the other end of the second grinding machine (4) is provided with a second temporary storage machine (6), the other end of the first temporary storage machine (5) and the second temporary storage machine (6) is provided with a discharging transfer machine (7), the other end of the discharging transfer machine (7) is provided with a discharging machine (8).

2. The base plate film tearing and grinding integrated machine according to claim 1, characterized in that: The front of the substrate film tearing machine (1) is provided with a Magazine feeding window (101), the bottom of the Magazine feeding window (101) is provided with a waste film collection opening and closing door (102), the side of the substrate film tearing machine (1) is provided with a film tearing machine discharge port (103), the top of the substrate film tearing machine (1) is provided with an alarm.

3. The base plate film tearing and grinding integrated machine according to claim 1, characterized in that: One side of the feeding transfer machine (2) is provided with a feeding substrate inlet (201), the inside of the feeding transfer machine (2) is provided with a first feeding substrate transmission moving platform (202) and a second feeding substrate transmission moving platform (203), the other side of the feeding transfer machine (2) is provided with a first feeding substrate outlet (204) and a second feeding substrate outlet (205), the feeding substrate inlet (201) is communicated with the film tearing machine discharge port (103), the first feeding substrate transmission moving platform (202) is communicated with the first feeding substrate outlet (204), the second feeding substrate transmission moving platform (203) is communicated with the second feeding substrate outlet (205), the first feeding substrate outlet (204) is communicated with the first grinding machine (3), and the second feeding substrate outlet (205) is communicated with the second grinding machine (4).

4. The base plate film tearing and grinding integrated machine according to claim 1, characterized in that: One side of the first temporary storage machine (5) is provided with a first temporary storage machine inlet (501), the inside of the first temporary storage machine (5) is provided with a lifting substrate temporary storage box (502), the other side of the first temporary storage machine (5) is provided with a first temporary storage machine outlet (503), the first temporary storage machine inlet (501) is communicated with the first grinding machine (3), the first temporary storage machine (5) and the second temporary storage machine (6) are the same structure, and the second temporary storage machine outlet of the second temporary storage machine (6) is communicated with the second grinding machine (4).

5. The base plate film tearing and grinding integrated machine according to claim 1, characterized in that: One side of the discharging transfer machine (7) is provided with a first discharging substrate inlet (701) and a second discharging substrate inlet (702), the inside of the discharging transfer machine (7) is provided with a first discharging substrate transmission moving platform (703) and a second discharging substrate transmission moving platform (704), the other side of the discharging transfer machine (7) is provided with a discharging substrate outlet (705), the first discharging substrate inlet (701) is communicated with the first temporary storage machine (5) first temporary storage machine outlet (503), and the second discharging substrate inlet (702) is communicated with the second temporary storage machine (6) second temporary storage machine outlet.

6. The base plate film tearing and grinding integrated machine according to claim 1, characterized in that: The back of the blanking machine (8) is provided with a blanking substrate feeding port (801), one side of the blanking machine (8) is provided with an empty magazine feeding window (802), the bottom of the empty magazine feeding window (802) is provided with a magazine blanking window (803), and the blanking substrate feeding port (801) is communicated with a blanking substrate discharging port (705).

7. The substrate film tearing and grinding integrated machine according to claim 1, characterized in that: One side of the substrate (9) is provided with a notch (901), the surface of the notch (901) is provided with a film (902), and the other side of the substrate (9) is provided with a two-dimensional code (903).

Citation Information

Patent Citations

  • Film tearing mechanism for glass substrate of liquid crystal display (LCD)

    CN103600573B