Novel processing carrier for vacuum coating equipment

Abstract

The utility model relates to the technical field of thin film deposition, in particular to a novel processing carrier for vacuum coating equipment. The novel machining carrier for the vacuum coating equipment comprises a first bearing plate and a second bearing plate, the first bearing plate is provided with a first bearing groove, the first bearing groove is suitable for bearing a to-be-machined workpiece, the first bearing groove penetrates through the first bearing plate in the thickness direction of the first bearing plate, and the second bearing plate is suitable for bearing the to-be-machined workpiece. The second bearing plate is provided with a second bearing groove, the second bearing groove is used for bearing the first bearing plate and the to-be-machined part, and the second bearing groove is connected with the side, away from the to-be-machined part, of the first bearing plate. Wherein the first bearing plate and the second bearing plate are detachably connected. When the novel processing carrier for the vacuum coating equipment is used for operating the to-be-processed workpiece, the to-be-processed workpiece cannot be scratched.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition technical field, especially in a kind of novel processing carrier for vacuum coating equipment. BACKGROUND

[0002] With the progress of science and technology, large single-piece plate ALD (atomic layer deposition) coating equipment has been widely used in many industrial fields, such as flat panel displays, solar panels, optical lenses and other fields. The core of such equipment is to efficiently and uniformly deposit a thin film on the upper surface of a large-size plate workpiece, thereby improving the performance of the plate workpiece or adding new functions. The mainstream approach on the current market is to use a carrier to fix the plate workpiece and bring it into the coating cavity for coating operation.

[0003] In order to ensure that the film deposited on the upper surface of the plate workpiece is not affected or damaged during automated handling, the loading and unloading of the plate workpiece is generally carried out by a through hole pre-set at the bottom of the carrier and a jacking mechanism. The specific steps are generally as follows: first, the carrier carrying the plate workpiece is moved to a specified position, and a plurality of jacking columns pass through the through holes on the carrier to jack the plate workpiece to a certain height, so that the plate workpiece is separated from the carrier; then, a pre-set suction cup or mechanical arm is inserted into the bottom of the plate workpiece, and after the plate workpiece is adsorbed or lifted up, it is moved a certain distance upward, so that the plate workpiece is separated from the jacking column, and the jacking column is lowered to the initial position; finally, the suction cup or mechanical arm drives the plate workpiece to move in a specified direction to a pre-set position.

[0004] However, since the contact area between the jacking column and the plate workpiece is relatively small, the jacking column is prone to scratching the plate workpiece during jacking the plate workpiece. UTILITY MODEL CONTENTS

[0005] The main purpose of the utility model is to provide a novel processing carrier for vacuum coating equipment, which aims to solve the technical problem that the existing carrier easily damages the plate workpiece when carrying the plate workpiece.

[0006] To achieve the above-mentioned purpose, the utility model provides a novel processing carrier for vacuum coating equipment, which comprises:

[0007] A first carrying plate is provided with a first receiving groove, and the first receiving groove is adapted to receive a workpiece to be processed. Along the thickness direction of the first carrying plate, the first receiving groove penetrates the first carrying plate;

[0008] A second carrying plate is provided with a second receiving groove, and the second receiving groove is used to receive the first carrying plate and the workpiece to be processed. The second receiving groove and the first carrying plate are joined away from the side of the workpiece to be processed.

[0009] The first bearing plate and the second bearing plate are detachably connected.

[0010] In some embodiments, the first bearing plate is provided with a first connecting hole, and the second bearing plate is provided with a second connecting hole, which are correspondingly arranged.

[0011] The first connecting hole and the second connecting hole are adapted to be provided with a connecting member to connect the first bearing plate and the second bearing plate together.

[0012] In some embodiments, the first bearing plate is provided with a first connecting portion, and the second bearing plate is provided with a second connecting portion, which are correspondingly arranged.

[0013] The first connecting portion is capable of being clamped to the second connecting portion to connect the first bearing plate and the second bearing plate together.

[0014] In some embodiments, the first bearing plate is provided with a first magnetic attraction portion, and the second bearing plate is provided with a second magnetic attraction portion, which are correspondingly arranged.

[0015] The first magnetic attraction portion is capable of being magnetically connected to the second magnetic attraction portion to connect the first bearing plate and the second bearing plate together.

[0016] In some embodiments, the first bearing plate is provided with a reinforcing rib, which is arranged in the first receiving groove and extends from one end of the first receiving groove to the other end of the first receiving groove along the length direction of the first bearing plate.

[0017] The second bearing plate is provided with a connecting groove for accommodating the reinforcing rib.

[0018] In some embodiments, the reinforcing rib is located at the middle position of the first receiving groove along the width direction of the first bearing plate.

[0019] In some embodiments, the first bearing plate is provided with a first hoisting portion adapted to be connected to a hoisting mechanism for hoisting the first bearing plate towards or away from the second bearing plate.

[0020] In some embodiments, the first bearing plate extends outwardly with an extension portion along the circumferential direction of the first bearing plate, and the first hoisting portion is arranged on the extension portion.

[0021] When the first bearing plate and the second bearing plate are engaged, the extension portion protrudes from the second bearing plate.

[0022] In some embodiments, the second carrier plate is provided with a through hole, the through hole is adapted to pass through a hoisting mechanism, the hoisting mechanism is configured to pass through the through hole to hoist the first carrier plate.

[0023] In some embodiments, the second carrier plate is provided with a second hoisting part, the second hoisting part is adapted to connect a hoisting mechanism, the hoisting mechanism is used for hoisting the second carrier plate.

[0024] Correspondingly, the utility model also proposes a coating equipment, including the novel processing carrier for vacuum coating equipment in any one embodiment of the utility model, the novel processing carrier for vacuum coating equipment is used for shifting the piece to be processed.

[0025] Compared with the prior art, the utility model has the beneficial effects that:

[0026] In the technical scheme of the utility model, when the piece to be processed is fed to the novel processing carrier for vacuum coating equipment, first, the first carrier plate and the second carrier plate are in a separated state, and the first carrier plate is hoisted to a specified position by using the hoisting mechanism; then, the bottom of the piece to be processed is held by using the mechanical arm or the suction cup, and the mechanical arm or the suction cup is driven to move towards the first carrier plate, so that the mechanical arm or the suction cup carries the piece to be processed to a certain distance above the first carrier plate; then, the mechanical arm or the suction cup is continuously driven to move towards the first carrier plate until the mechanical arm or the suction cup places the piece to be processed in the first receiving groove, after the piece to be processed is positioned in the first receiving groove, the mechanical arm or the suction cup no longer holds the piece to be processed, and moves away from the first carrier plate until completely separates from the first carrier plate; finally, the hoisting mechanism is driven, so that the hoisting mechanism drives the first carrier plate and the piece to be processed to move towards the second carrier plate until the side, away from the piece to be processed, of the first carrier plate is engaged in the second receiving groove, and one feeding is completed.

[0027] When the piece to be processed is unloaded from the novel processing carrier for vacuum coating equipment, first, the first carrier plate is hoisted by using the hoisting mechanism, so that the first carrier plate and the second carrier plate are separated, and the first carrier plate is hoisted to a specified position by using the hoisting mechanism; then, the bottom of the piece to be processed (the upper surface of the piece to be processed has completed coating) is held by using the mechanical arm or the suction cup, and the mechanical arm or the suction cup is driven to move away from the first carrier plate, so that the mechanical arm or the suction cup carries the piece to be processed to separate from the first receiving groove; then, the mechanical arm or the suction cup is continuously driven to move away from the first carrier plate until the mechanical arm or the suction cup shifts the piece to be processed to a unloading position, and one unloading is completed.

[0028] The first bearing groove penetrates the first bearing plate, so that the mechanical arm or the suction cup has sufficient operation space when lifting the workpiece from the bottom, thereby facilitating increase of the contact area of the mechanical arm or the suction cup and the bottom of the workpiece, preventing the mechanical arm or the suction cup from scratching the workpiece due to the too small contact area of the mechanical arm or the suction cup and the bottom of the workpiece, and facilitating improvement of the connection stability between the mechanical arm or the suction cup and the workpiece, and realizing smooth feeding and discharging of the workpiece. In addition, since the mechanical arm or the suction cup lifts the bottom of the workpiece, when the workpiece is transferred, the mechanical arm or the suction cup will not damage the plating layer on the upper surface of the workpiece.

[0029] The novel processing carrier for a vacuum plating device can ensure the structural integrity of the workpiece during feeding and discharging and plating, and prevent the workpiece from being damaged during feeding and discharging and plating. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained according to the structures shown in the drawings without creative labor for those skilled in the art.

[0031] Figure 1 The overall structure explosion view of the novel processing carrier for a vacuum plating device provided by an embodiment of the present application is shown in the figure.

[0032] Figure 2 The overall structure schematic view of the novel processing carrier for a vacuum plating device provided by an embodiment of the present application is shown in the figure.

[0033] Figure 3 The structure schematic view of the first bearing plate in the novel processing carrier for a vacuum plating device provided by an embodiment of the present application is shown in the figure.

[0034] Figure 4 The structure schematic view of the second bearing plate in the novel processing carrier for a vacuum plating device provided by an embodiment of the present application is shown in the figure.

[0035] Explanation of reference numerals:

[0036] 10, novel processing carrier for a vacuum plating device;

[0037] 100, first bearing plate;

[0038] 110, first bearing groove; 120, reinforcing rib; 130, extension;

[0039] 131, first lifting part;

[0040] 200, second bearing plate;

[0041] 210, second receiving groove; 220, connecting groove; 230, second hoisting part;

[0042] 300, workpiece to be processed;

[0043] X, length direction of the first bearing plate;

[0044] Y, width direction of the first bearing plate;

[0045] Z, thickness direction of the first bearing plate.

[0046] The implementation, functional features and advantages of the utility model will be further described with reference to the drawings in combination with embodiments. DETAILED DESCRIPTION

[0047] The technical solutions in the embodiments of the utility model will be clearly and completely described in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0048] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0049] In addition, if the embodiments of the utility model involve descriptions of "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features with "first" and "second" can explicitly or implicitly include at least one feature. In addition, if "and / or", "and / or" or "and / or" appears in the entire text, it means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, and when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0050] With the progress of science and technology, large single wafer ALD (atomic layer deposition) coating equipment has been widely used in many industrial fields, such as flat panel displays, solar panels, optical lenses and other fields. The core of such equipment is to efficiently and uniformly deposit a thin film on the upper surface of a large-size wafer workpiece, thereby improving the performance or adding new functions of the wafer workpiece. The mainstream approach on the current market is to use a carrier to fix the wafer workpiece and bring it into the coating cavity for coating operation.

[0051] In order to ensure that the film deposited on the upper surface of the wafer workpiece will not be affected or damaged during automated handling, the current wafer workpiece loading and unloading is generally carried out by a through hole pre-set at the bottom of the carrier and a jacking mechanism. The specific steps are generally as follows: first, the carrier carrying the wafer workpiece is moved to a specified position, a plurality of jacking columns pass through the through holes on the carrier to jack the wafer workpiece to a certain height, so that the wafer workpiece is separated from the carrier; then, a pre-set suction cup or a mechanical arm is inserted into the bottom of the wafer workpiece, and after the wafer workpiece is adsorbed or lifted up, the wafer workpiece is moved a certain distance upward, so that the wafer workpiece is separated from the jacking column, and the jacking column is lowered to the initial position; finally, the suction cup or the mechanical arm drives the wafer workpiece to move to a pre-set position along a specified direction.

[0052] However, since the contact area between the jacking column and the wafer workpiece is relatively small, the jacking column is easy to scratch the wafer workpiece during jacking the wafer workpiece.

[0053] Therefore, in order to solve the technical problem that the wafer workpiece is easily damaged when the existing carrier carries the wafer workpiece, with reference to Figures 1 to 4 An embodiment of the present application provides a novel processing carrier 10 for a vacuum coating equipment, which can carry silicon wafers and the like, and is used for transferring the silicon wafers into the coating equipment for thin film deposition operation. The novel processing carrier 10 for the vacuum coating equipment includes a first carrying plate 100 and a second carrying plate 200. The first carrying plate 100 is provided with a first receiving groove 110, which is adapted to receive a workpiece 300 (for example, the workpiece 300 can be a silicon wafer) and penetrates the first carrying plate 100 along the thickness direction Z of the first carrying plate 100. The second carrying plate 200 is provided with a second receiving groove 210 for receiving the first carrying plate 100 and the workpiece 300, and the second receiving groove 210 and the first carrying plate 100 are joined away from the side of the workpiece 300. Wherein, the first carrying plate 100 and the second carrying plate 200 are detachably connected.

[0054] Specifically, when the workpiece 300 is fed to the novel processing carrier 10 for the vacuum coating equipment in the embodiment, first, the first bearing plate 100 and the second bearing plate 200 are in a separated state, and the first bearing plate 100 is hoisted to a designated position by the hoisting mechanism; then, the bottom of the workpiece 300 is held by the mechanical arm or the suction cup, and the mechanical arm or the suction cup is driven to move towards the first bearing plate 100, so that the mechanical arm or the suction cup carries the workpiece 300 to move to a certain distance above the first bearing plate 100; then, the mechanical arm or the suction cup continues to be driven to move towards the first bearing plate 100 until the workpiece 300 is placed in the first receiving groove 110, after the workpiece 300 is positioned in the first receiving groove 110, the mechanical arm or the suction cup no longer holds the workpiece 300, and moves away from the first bearing plate 100 until it is completely separated from the first bearing plate 100; finally, the hoisting mechanism is driven to move the first bearing plate 100 and the workpiece 300 towards the second bearing plate 200 until the side of the first bearing plate 100 away from the workpiece 300 is engaged in the second receiving groove 210, completing one feeding.

[0055] When the workpiece 300 is unloaded from the novel processing carrier 10 for the vacuum coating equipment, first, the first bearing plate 100 is hoisted by the hoisting mechanism, so that the first bearing plate 100 and the second bearing plate 200 are separated, and the first bearing plate 100 is hoisted to a designated position by the hoisting mechanism; then, the bottom of the workpiece 300 (the upper surface of the workpiece 300 has completed coating) is held by the mechanical arm or the suction cup, and the mechanical arm or the suction cup is driven to move away from the first bearing plate 100, so that the mechanical arm or the suction cup carries the workpiece 300 away from the first receiving groove 110; then, the mechanical arm or the suction cup continues to be driven to move away from the first bearing plate 100 until the workpiece 300 is transferred to the unloading position, completing one unloading.

[0056] In the embodiment, the first receiving groove 110 penetrates through the first bearing plate 100, so that the mechanical arm or the suction cup has enough operating space when holding the workpiece 300 from the bottom, thereby facilitating to increase the contact area between the mechanical arm or the suction cup and the bottom of the workpiece 300, preventing the mechanical arm or the suction cup from scratching the workpiece 300 due to the small contact area with the bottom of the workpiece 300, and facilitating to improve the connection stability between the mechanical arm or the suction cup and the workpiece 300, realizing the smooth feeding and unloading of the workpiece 300. In addition, since the mechanical arm or the suction cup holds the bottom of the workpiece 300, when the workpiece 300 is transferred, the mechanical arm or the suction cup will not damage the coating layer on the upper surface of the workpiece 300.

[0057] In some embodiments, the first bearing plate 100 is provided with a first connecting hole, the second bearing plate 200 is provided with a second connecting hole, and the second connecting hole and the first connecting hole are correspondingly arranged. The first connecting hole and the second connecting hole are adapted to pass through a connecting piece to connect the first bearing plate 100 and the second bearing plate 200 together. For example, the first connecting hole and the second connecting hole can be pin holes, and the connecting piece can be a positioning pin.

[0058] Specifically, in the present embodiment, after the first bearing plate 100 and the second bearing plate 200 are joined by the hoisting mechanism, the first connecting hole and the second connecting hole can be naturally aligned, and then the first bearing plate 100 and the second bearing plate 200 can be stably connected by the connecting piece passing through the first connecting hole and the second connecting hole, so that the first bearing plate 100 and the second bearing plate 200 can form a stable whole.

[0059] Through the above connection mode, the connection stability between the first bearing plate 100 and the second bearing plate 200 can be ensured. By using the second bearing plate 200, the non-coating surface of the workpiece 300 can be effectively protected when the new type of processing carrier 10 for the vacuum coating equipment moves.

[0060] In some embodiments, the first bearing plate 100 is provided with a first connecting part, the second bearing plate 200 is provided with a second connecting part, and the second connecting part and the first connecting part are correspondingly arranged. The first connecting part can be clamped to the second connecting part to connect the first bearing plate 100 and the second bearing plate 200 together. For example, the first connecting part can be a connecting groove, and the second connecting part can be a connecting protrusion. Alternatively, the first connecting part can be a connecting protrusion, and the second connecting part can be a connecting groove.

[0061] Specifically, in the present embodiment, after the first bearing plate 100 and the second bearing plate 200 are joined by the hoisting mechanism, the first connecting part can be clamped to the second connecting part, so that the first bearing plate 100 and the second bearing plate 200 can form a stable whole, thereby facilitating the transfer of the workpiece 300 by the new type of processing carrier 10 for the vacuum coating equipment.

[0062] Through the above connection mode, the connection steps of the first bearing plate 100 and the second bearing plate 200 can be reduced, the connection efficiency of the first bearing plate 100 and the second bearing plate 200 can be improved, and the connection tightness and reliability of the first bearing plate 100 and the second bearing plate 200 can be ensured.

[0063] In some embodiments, the first bearing plate 100 is provided with a first magnetic attraction part, the second bearing plate 200 is provided with a second magnetic attraction part, and the second magnetic attraction part and the first magnetic attraction part are correspondingly arranged. The first magnetic attraction part can be magnetically connected to the second magnetic attraction part to connect the first bearing plate 100 and the second bearing plate 200 together.

[0064] Specifically, in the present embodiment, after the first bearing plate 100 and the second bearing plate 200 are connected by the hoisting mechanism, the first magnetic attraction part can be magnetically connected to the second magnetic attraction part, so that the first bearing plate 100 and the second bearing plate 200 can form a stable whole, thereby facilitating the transfer of the new processing carrier 10 for the vacuum coating equipment to the workpiece 300 to be processed.

[0065] Through the above connection mode, when the first bearing plate 100 is close to the second bearing plate 200, it can be automatically attracted to the second bearing plate 200, which is beneficial to improve the connection accuracy and efficiency of the first bearing plate 100 and the second bearing plate 200, and can ensure the connection tightness and reliability of the first bearing plate 100 and the second bearing plate 200.

[0066] In some embodiments, referring to Figures 1 to 4 , the first bearing plate 100 is provided with a reinforcing rib 120, the reinforcing rib 120 is arranged in the first bearing groove 110, and along the length direction X of the first bearing plate 100, the reinforcing rib 120 extends from one end (along a straight line) of the first bearing groove 110 to the other end of the first bearing groove 110. The second bearing plate 200 is provided with a connecting groove 220 for accommodating the reinforcing rib 120.

[0067] Specifically, in the present embodiment, by arranging the reinforcing rib 120 on the first bearing plate 100, the structural strength of the first bearing plate 100 can be improved, and the first bearing plate 100 can be prevented from being twisted and deformed under external force (for example, the first bearing plate 100 is subjected to the lifting force applied by the hoisting mechanism), thereby facilitating to ensure the fit between the workpiece 300 and the first bearing groove 110.

[0068] When the first bearing plate 100 and the second bearing plate 200 are connected, the reinforcing rib 120 can be accommodated in the connecting groove 220. By using the above matching structure, on the one hand, the contact surface between the non-coating surface of the workpiece 300 and the second bearing plate 200 can be ensured to be flat, and the placement effect of the workpiece 300 in the first bearing groove 110 can be improved; on the other hand, the reinforcing rib 120 is clamped in the connecting groove 220, which can improve the connection stability of the first bearing plate 100 and the second bearing plate 200.

[0069] In some embodiments, referring to Figure 1 and Figure 3The reinforcing rib 120 is located at the middle position of the first receiving groove 110 along the width direction Y of the first bearing plate 100.

[0070] Specifically, in the embodiment, the reinforcing rib 120 is arranged at the middle position of the first receiving groove 110, which can balance the stress load of the first bearing plate 100 and ensure that the first bearing plate 100 can uniformly distribute stress when bearing the lateral force, thereby avoiding damage or deformation of the first bearing plate 100 due to stress concentration. When external force acts on the first bearing plate 100, the reinforcing rib 120 can significantly enhance the bending resistance and deformation resistance of the position, so that the first bearing plate 100 can bear greater load without deformation, thereby ensuring the stability and reliability of the overall structure of the first bearing plate 100.

[0071] In some embodiments, referring to Figures 1 to 3 The first bearing plate 100 is provided with a first hoisting part 131. For example, the first hoisting part 131 can be a lifting ring, or the first hoisting part 131 can be a lifting hole. The first hoisting part 131 is suitable for connecting a hoisting mechanism for hoisting the first bearing plate 100 towards or away from the second bearing plate 200.

[0072] Specifically, in the embodiment, after the workpiece 300 is arranged in the first receiving groove 110, the first bearing plate 100 can be hoisted towards the second bearing plate 200 by the hoisting mechanism until the first bearing plate 100 and the second bearing plate 200 are stably connected, ensuring that the workpiece 300 can be stably transferred. After the upper surface of the workpiece 300 is coated, the first bearing plate 100 can be hoisted away from the second bearing plate 200 by the hoisting mechanism until the first bearing plate 100 and the second bearing plate 200 are completely separated, ensuring that the workpiece 300 can be lifted by a mechanical arm or a suction cup and transferred to a lower position.

[0073] In order to ensure the stability of the hoisting mechanism when hoisting the first bearing plate 100, the first bearing plate 100 can be symmetrically provided with a plurality of first hoisting parts 131.

[0074] In some embodiments, referring to Figure 2 Along the circumferential direction of the first bearing plate 100, the first bearing plate 100 extends outwardly with an extension part 130, and the first hoisting part 131 is arranged on the extension part 130. When the first bearing plate 100 and the second bearing plate 200 are joined, the extension part 130 protrudes from the second bearing plate 200.

[0075] Specifically, in the embodiment, the first hoisting part 131 protrudes from the second bearing plate 200, whether hoisting the first bearing plate 100 from above by the hoisting mechanism or hoisting the first bearing plate 100 from below by the hoisting mechanism, will not interfere with the second bearing plate 200, ensuring that the first bearing plate 100 can be smoothly hoisted, realizing the smooth separation of the first bearing plate 100 and the second bearing plate 200, and completing the blanking operation of the workpiece 300 to be processed.

[0076] Alternatively, in some embodiments, the second bearing plate 200 is provided with a through hole, and the hoisting mechanism is configured to pass through the through hole to hoist the first bearing plate 100. Specifically, in the embodiment, when hoisting the first bearing plate 100 by the hoisting mechanism, the hoisting mechanism can pass through the through hole and contact the first bearing plate 100, thereby smoothly hoisting the first bearing plate 100, avoiding interference between the first bearing plate 100 and the second bearing plate 200 during hoisting, and affecting the smooth progress of the hoisting process.

[0077] In some embodiments, referring to Figure 1 and Figure 4 , the second bearing plate 200 is provided with a second hoisting part 230. Exemplarily, for example, the second hoisting part 230 can be an eye ring, or the second hoisting part 230 can be a lifting hole. The second hoisting part 230 is adapted to connect the hoisting mechanism, and the hoisting mechanism is used to hoist the second bearing plate 200.

[0078] Specifically, in the embodiment, the second hoisting part 230 is hoisted by the hoisting mechanism, which can transfer the second bearing plate 200 into the coating equipment, and realize coating on the upper surface of the workpiece 300 to be processed. In order to ensure the stability of the hoisting mechanism during hoisting of the second bearing plate 200, the second bearing plate 200 can be symmetrically provided with a plurality of second hoisting parts 230.

[0079] Correspondingly, the utility model also provides another embodiment of a coating equipment, which comprises the novel processing carrier 10 for vacuum coating equipment in any of the above embodiments. Through the novel processing carrier 10 for vacuum coating equipment, the workpiece 300 to be processed can be transferred into the coating equipment, and coating of the workpiece 300 to be processed in the coating equipment can be realized.

[0080] Specifically, in the embodiment, the novel processing carrier 10 for vacuum coating equipment is applied, which can ensure the structural integrity of the workpiece 300 to be processed during feeding and discharging, and coating, and prevent the workpiece 300 to be processed from being damaged during feeding and discharging, and coating.

[0081] Thanks to the improvement of the novel processing carrier 10 for vacuum coating equipment, the coating equipment of the embodiment has the same technical effects as the novel processing carrier 10 for vacuum coating equipment, which will not be described here.

[0082] It should be noted that the other contents of the novel processing carrier 10 for the vacuum coating equipment and the coating equipment disclosed in the utility model can be seen from the prior art, and will not be described here.

[0083] The above is only the preferred embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation made by using the utility model specification and the attached drawings contents, or direct / indirect application in other related technical fields under the utility model concept of the utility model is included in the patent protection range of the utility model.

Claims

1. A novel processing carrier for vacuum coating equipment, characterized in that, include: A first bearing plate is provided with a first receiving groove, which is suitable for receiving the workpiece. The first receiving groove penetrates the first bearing plate along its thickness direction. The second support plate is provided with a second receiving groove, which is used to receive the first support plate and the workpiece to be processed, and the second receiving groove is engaged with the side of the first support plate away from the workpiece to be processed. The first support plate and the second support plate are detachably connected.

2. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The first support plate is provided with a first connecting hole, and the second support plate is provided with a second connecting hole, the second connecting hole and the first connecting hole being provided correspondingly; The first connecting hole and the second connecting hole are adapted to accommodate connectors to connect the first support plate and the second support plate together.

3. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The first support plate is provided with a first connecting part, and the second support plate is provided with a second connecting part, with the second connecting part and the first connecting part being provided correspondingly; The first connecting part can be engaged with the second connecting part to connect the first support plate and the second support plate together.

4. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The first support plate is provided with a first magnetic attraction part, and the second support plate is provided with a second magnetic attraction part, with the second magnetic attraction part and the first magnetic attraction part being provided correspondingly; The first magnetic part can be magnetically connected to the second magnetic part to connect the first carrier plate and the second carrier plate together.

5. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The first bearing plate is provided with reinforcing ribs, which are disposed in the first receiving groove and extend from one end of the first receiving groove to the other end along the length direction of the first bearing plate. The second support plate is provided with a connecting groove, which is used to accommodate the reinforcing rib.

6. The novel processing carrier for vacuum coating equipment according to claim 5, characterized in that, Along the width direction of the first bearing plate, the reinforcing rib is located at the middle position of the first receiving groove.

7. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The first bearing plate is provided with a first lifting part, which is adapted to connect to a lifting mechanism. The lifting mechanism is used to lift the first bearing plate toward or away from the second bearing plate.

8. The novel processing carrier for vacuum coating equipment according to claim 7, characterized in that, Along the circumferential direction of the first bearing plate, the first bearing plate extends outward with an extension portion, and the first hoisting portion is disposed on the extension portion; When the first support plate and the second support plate are joined, the extension protrudes from the second support plate.

9. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The second support plate is provided with a through hole, which is adapted to allow a hoisting mechanism to pass through. The hoisting mechanism is configured to pass through the through hole to hoist the first support plate.

10. The novel processing carrier for vacuum coating equipment according to claim 1, characterized in that, The second bearing plate is provided with a second lifting part, which is adapted to connect to a lifting mechanism, and the lifting mechanism is used to lift the second bearing plate.

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