Developing solution spraying device of uniform glue developing machine

Abstract

The utility model discloses a developing solution spraying device of a uniform glue developing machine, which belongs to the technical field of uniform glue developing machines and comprises a bottom plate, a plurality of upright posts are fixedly connected to the top surface of the bottom plate, a worktable is fixedly connected to the top ends of the upright posts, and a rotating pipe is rotatably connected to the middle of the worktable. The top end of the rotating pipe extends to the top of the workbench and is fixedly connected with a rotating box. According to the utility model, the first gear is driven by the second motor to rotate intermittently, the rotating pipe and the rotating box are driven to rotate intermittently by the meshing transmission between the first gear and the second gear, and the wafer is placed on the inner support annular column intermittently, and is supported by the inner support annular column. The wafer is intermittently moved to the position below the scanning type spraying nozzle to spray the developing solution, and the function of continuously spraying the wafer is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of uniform glue developing machine, more specifically, relate to a kind of developing liquid spraying device of uniform glue developing machine. BACKGROUND

[0002] Uniform glue developing machine is the equipment that completes all photolithography processes except exposure, including the coating of photolithography material, baking, developing, the cleaning of wafer back and the deionized water flushing of wafer surface for immersion process etc.

[0003] Through the retrieval, the utility model patent with disclosure number CN218213789U discloses a kind of developing liquid spraying device of uniform glue developing machine, including workbench, bearing frame and placing rack etc., workbench front side is connected with bearing frame, workbench top is connected with the placing rack for placing wafer;The electric slide rail of the patent can drive scanning type spray nozzle to move left and right, to realize that developing liquid is evenly sprayed onto wafer.But the above-mentioned patent still has following insufficient: staff needs to put wafer in placing rack by hand into the inside of protective cover, reciprocating operation is not good in convenience;It is not convenient to guarantee the position of wafer placement, positioning spray liquid is carried out each time by scanning type spray nozzle, affect the effect of spraying.Therefore we propose a kind of developing liquid spraying device of uniform glue developing machine. UTILITY MODEL CONTENT

[0004] In view of the problems in the prior art, the utility model aims at providing a kind of developing liquid spraying device of uniform glue developing machine.

[0005] To solve the above problems, the utility model adopts the following technical solutions:

[0006] A kind of developing liquid spraying device of uniform glue developing machine, including bottom plate, the top surface of the bottom plate is fixedly connected with multiple stand columns, the top of multiple stand columns is fixedly connected with workbench, the middle part of the workbench is rotatably connected with rotating tube, the top of the rotating tube extends to the top of workbench and is fixedly connected with rotating box, the inner chamber of the rotating box is provided with two groups of outer limit ring columns, the inner chamber of the rotating box is provided with two groups of inner support ring columns, the top of the bottom plate is provided with liquid supply mechanism, the bottom of the workbench is provided with drive mechanism, the top of the workbench and above the rotating box are fixedly connected with protective box, the inner wall of the protective box is fixedly connected with two support seats, reciprocating screw rod is rotatably connected between two support seats, slide rod is fixedly sleeved between two support seats, the outer side of reciprocating screw rod is threadedly sleeved with moving seat, moving seat and slide rod are movably sleeved, the inside of one support seat is provided with first motor, the output shaft of the first motor is connected with the end portion of reciprocating screw rod, the bottom surface of moving seat is fixedly connected with scanning type spray nozzle.

[0007] As a preferred scheme of the utility model, the driving mechanism includes the second motor fixedly installed at the bottom surface of the workbench, the output shaft of the second motor is fixedly sleeved with the first gear, the side portion of the first gear is meshed with the transmission of the second gear, and the second gear is fixedly sleeved at the outside of the bottom end of the rotating pipe.

[0008] As a preferred scheme of the utility model, the liquid supply mechanism includes the liquid storage tank fixedly connected at the top surface of the bottom plate, the top surface of the liquid storage tank is fixedly installed with the liquid pumping pump, both ends of the liquid pumping pump are fixedly connected with the liquid pumping hoses respectively, the bottom end of one liquid pumping hose extends to the inner cavity of the liquid storage tank, the end portion of the other liquid pumping hose is movably sleeved to the inner cavity of the protection box and connected with the scanning type spraying nozzle, and the top surface of the liquid storage tank is screwedly installed with the threaded plug.

[0009] As a preferred scheme of the utility model, the front surface of the protection box is fixedly sleeved with the perspective plate, and the front surface of the protection box is fixedly installed with the control panel.

[0010] As a preferred scheme of the utility model, the top surface of the bottom plate and below the rotating pipe are placed with the collecting box, and the two sides of the collecting box are provided with the handles respectively.

[0011] As a preferred scheme of the utility model, the inner cavity of the rotating box is provided with the conical groove.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] (1) In the utility model, the first gear is intermittently rotated by the second motor, the rotating pipe and the rotating box are intermittently rotated by the meshing transmission between the first gear and the second gear, the wafer is intermittently placed on the inner supporting annular column, the wafer is supported by the inner supporting annular column, the wafer is intermittently moved below the scanning type spraying nozzle for spraying the developing liquid, and the function of continuously spraying the wafer is realized.

[0014] (2) In the utility model, the two groups of outer limiting annular columns and the two groups of inner supporting annular columns are arranged in the inner cavity of the rotating box, the wafer is supported by the inner supporting annular column, the wafer is limited by the inner supporting annular column, the wafer can be moved below the scanning type spraying nozzle each time, the quality of spraying the wafer is ensured, and the utility is good. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the whole structure schematic view of the utility model;

[0016] Figure 2 It is the structure schematic view of the protection box of the utility model;

[0017] Figure 3It is the cross section schematic view of the protection box of the utility model;

[0018] Figure 4 It is the cross section schematic view of the rotating box of the utility model.

[0019] Mark explanation in drawing:

[0020] 1, bottom plate; 2, stand; 3, workbench; 4, rotating pipe; 5, rotating box; 6, conical groove; 7, outer limit ring column; 8, inner support ring column; 9, protection box; 10, support seat; 11, reciprocating screw rod; 12, sliding rod; 13, moving seat; 14, scanning type spraying nozzle; 15, first motor; 16, liquid supply mechanism; 17, driving mechanism; 18, second motor; 19, first gear; 20, second gear; 21, liquid storage tank; 22, liquid pumping pump; 23, liquid pumping hose; 24, threaded plug; 25, perspective board; 26, control panel; 27, collection box; 28, handle. DETAILED DESCRIPTION

[0021] The technical schemes in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0022] In the description of the utility model, it needs to be explained that the terms "upper", "lower", "inner", "outer", "top / bottom end" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and is not intended to indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0023] In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "provided with", "sleeved / connected", "connected" and the like should be broadly understood, for example, "connected" can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, and can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0024] Embodiment:

[0025] Please refer toFigures 1-4 The utility model provides a developing solution spraying device of a uniform coating developing machine, including the bottom plate 1, the top surface fixed connection of bottom plate 1 has a plurality of stand 2, the top of a plurality of stand 2 is fixedly connected with workbench 3, the middle part rotationally connected of workbench 3 has rotating tube 4, and the top of rotating tube 4 extends to the top of workbench 3 and is fixedly connected with rotating box 5, and the inner chamber of rotating box 5 is provided with two groups of outer limit ring column 7, and the inner chamber of rotating box 5 is provided with two groups of inner support ring column 8, the top of bottom plate 1 is provided with liquid supply mechanism 16, and the bottom of workbench 3 is provided with drive mechanism 17, and the top of workbench 3 and the top of rotating box 5 are fixedly connected with protection box 9, and the inner wall of protection box 9 is fixedly connected with two support seat 10, and the rotationally connected of two support seat 10 has reciprocating screw rod 11, and the fixed sleeve of two support seat 10 has slide rod 12, and the outer side screw thread sleeve of reciprocating screw rod 11 has moving seat 13, and moving seat 13 and slide rod 12 are movably sleeved, and the inside of one support seat 10 is provided with first motor 15, and the output shaft of first motor 15 is connected with the end of reciprocating screw rod 11, and the bottom of moving seat 13 is fixedly connected with scanning type spraying nozzle 14.

[0026] In the embodiment, the top surface of the inner support ring column 8 is lower than the top surface of the outer limit ring column 7. The wafer is supported by the inner support ring column 8, and the wafer is limited by the side surface of the outer limit ring column 7.

[0027] Specifically, please refer to Figure 2 The drive mechanism 17 includes a second motor 18 fixedly installed on the bottom surface of the workbench 3. The output shaft of the second motor 18 is fixedly sleeved with a first gear 19. The side portion of the first gear 19 is engagedly driven by a second gear 20 fixedly sleeved on the outer side of the bottom end of the rotating tube 4.

[0028] In the embodiment, the second motor 18 drives the first gear 19 to rotate intermittently. The rotating tube 4 and the rotating box 5 are driven to rotate 180 degrees intermittently by the meshing transmission between the first gear 19 and the second gear 20.

[0029] Specifically, please refer to Figures 1 to 3 The liquid supply mechanism 16 includes a liquid storage tank 21 fixedly connected to the top surface of the bottom plate 1. The top surface of the liquid storage tank 21 is fixedly installed with a liquid pumping pump 22. The two ends of the liquid pumping pump 22 are respectively fixedly connected with liquid pumping hoses 23. The bottom end of one liquid pumping hose 23 extends to the inner chamber of the liquid storage tank 21. The end portion of the other liquid pumping hose 23 is movably sleeved into the inner chamber of the protection box 9 and connected with the scanning type spraying nozzle 14. The top surface of the liquid storage tank 21 is screw-installed with a threaded plug 24.

[0030] In the embodiment, the inner chamber of the liquid storage tank 21 is added with developing solution by removing the threaded plug 24.

[0031] Specifically, please refer to Figure 1The front of the protection box 9 is fixedly sleeved with a perspective plate 25, and the front of the protection box 9 is fixedly installed with a control panel 26.

[0032] In the embodiment, the situation in the protection box 9 is observed through the perspective plate 25, and the device is controlled by the control panel 26.

[0033] Specifically, please refer to Figure 1 The top surface of the bottom plate 1 and below the rotating tube 4 is placed with a collecting box 27, and the two sides of the collecting box 27 are respectively provided with a handle 28.

[0034] In the embodiment, the collected developing solution is collected by the collecting box 27, and the collecting box 27 is carried by the handle 28.

[0035] Specifically, please refer to Figure 1 The inner cavity of the rotating box 5 is provided with a tapered groove 6.

[0036] In the embodiment, the falling developing solution is ensured to be gathered into the rotating tube 4 for discharge by the tapered groove 6.

[0037] Working principle: in use, first, the wafer is placed on the top surface of the inner supporting ring column 8, the side surface of the wafer is limited by the side surface of the outer limiting ring column 7, then the first gear 19 is intermittently rotated by starting the second motor 18, the rotating box 5 is rotated by 180 degrees through the meshing transmission between the first gear 19 and the second gear 20, so that the wafer on the inner supporting ring column 8 moves below the scanning type spraying nozzle 14, and the other inner supporting ring column 8 moves to the front of the protection box 9, and other wafers are placed on the inner supporting ring column 8, then the developing solution in the liquid storage tank 21 is pumped into the scanning type spraying nozzle 14 by the liquid pumping hose 23 by starting the liquid pumping pump 22, and the developing solution is sprayed downward, in addition, the reciprocating screw rod 11 is rotated by starting the first motor 15, the moving seat 13 and the scanning type spraying nozzle 14 are reciprocally moved along the axial direction of the slide rod 12 through the thread cooperation between the reciprocating screw rod 11 and the moving seat 13, so that the developing solution is sprayed on the wafer, the excess developing solution is gathered into the rotating tube 4 through the tapered groove 6, the waste liquid is collected by the collecting box 27, finally, when the wafer is sprayed with the developing solution, the sprayed wafer is moved to the outside of the protection box 9 by rotating the rotating box 5 by 180 degrees again, so that the other wafer moves below the scanning type spraying nozzle 14 for spraying, so that the wafer sprayed with the developing solution is taken out and other wafers are placed, so that the wafer is continuously sprayed with the developing solution.

[0038] The above merely describes a preferred embodiment of the present application, and the protection scope of the present application is not limited thereto, and any skilled person in the art, according to the technical scheme and improvement concept of the present application, makes equivalent replacement or change within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A developer spraying device of a uniform coating developing machine comprising a base plate (1), characterized in that: The top surface of the bottom plate (1) is fixedly connected with a plurality of columns (2), the top ends of the plurality of columns (2) are fixedly connected with a workbench (3), the middle part of the workbench (3) is rotatably connected with a rotating pipe (4), the top end of the rotating pipe (4) extends to the top of the workbench (3) and is fixedly connected with a rotating box (5), the inner cavity of the rotating box (5) is provided with two groups of outer limiting annular columns (7), the inner cavity of the rotating box (5) is provided with two groups of inner supporting annular columns (8), the top of the bottom plate (1) is provided with a liquid supply mechanism (16), the bottom of the workbench (3) is provided with a driving mechanism (17), the top of the workbench (3) and above the rotating box (5) is fixedly connected with a protective box (9), the inner wall of the protective box (9) is fixedly connected with two supporting seats (10), the two supporting seats (10) are rotatably connected with a reciprocating screw rod (11), the two supporting seats (10) are fixedly sleeved with a sliding rod (12), the outer side of the reciprocating screw rod (11) is threadedly sleeved with a moving seat (13), the moving seat (13) and the sliding rod (12) are movably sleeved, the inside of one of the supporting seats (10) is provided with a first motor (15), the output shaft of the first motor (15) is connected with the end of the reciprocating screw rod (11), the bottom surface of the moving seat (13) is fixedly connected with a scanning type spraying nozzle (14).

2. The developer spraying device of claim 1, wherein: The driving mechanism (17) comprises a second motor (18) fixedly installed on the bottom surface of the workbench (3), the output shaft of the second motor (18) is fixedly sleeved with a first gear (19), the side of the first gear (19) is engagedly driven by a second gear (20), and the second gear (20) is fixedly sleeved on the outer side of the bottom end of the rotating pipe (4).

3. The device according to claim 1, wherein: The liquid supply mechanism (16) comprises a liquid storage tank (21) fixedly connected to the top surface of the bottom plate (1), a liquid pumping pump (22) fixedly installed on the top surface of the liquid storage tank (21), two liquid pumping hoses (23) fixedly connected to the two ends of the liquid pumping pump (22), the bottom end of one of the liquid pumping hoses (23) extending into the inner cavity of the liquid storage tank (21), the end of the other liquid pumping hose (23) movably sleeving into the inner cavity of the protective box (9) and being connected with the scanning type spraying nozzle (14), and a threaded plug (24) threadedly installed on the top surface of the liquid storage tank (21).

4. The device according to claim 1, wherein: The front surface of the protective box (9) is fixedly sleeved with a perspective plate (25), and the front surface of the protective box (9) is fixedly installed with a control panel (26).

5. The device according to claim 1, wherein: The top surface of the bottom plate (1) and below the rotating pipe (4) is placed with a collecting box (27), and the two sides of the collecting box (27) are respectively provided with handles (28).

6. The device according to claim 1, wherein: The inner cavity of the rotating box (5) is provided with a conical groove (6). The inner cavity of the rotating box (5) is provided with a conical groove (6).

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