Extreme ultraviolet light generator cavity shell

Abstract

The utility model discloses an extreme ultraviolet light generator cavity shell which comprises a first shell, the long side direction of the first shell is defined as the x direction, the short side direction of the first shell is defined as the y direction, a second shell which is vertically overturned is hung on the side face of the x direction of the first shell, and a third shell which is vertically overturned is hung on the side face of the y direction of the first shell. The x-direction side face and the y-direction side face of the first shell are each provided with three connecting pieces, and the first shell is detachably connected with the second shell and the third shell through the connecting pieces. According to the utility model, after the second shell and the third shell are vertically overturned, the height of the shell is used as a wide edge, and at the moment, the second shell and the third shell are assembled on the side wall of the first shell, so that the occupied area and the volume of the whole extreme ultraviolet light generator are reduced by optimizing the space; as a quick-mounting structure, the connecting piece is convenient to align, mount and dismount, so that the mounting speed and efficiency between the shells are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of extreme ultraviolet light, specifically relates to a kind of extreme ultraviolet light generator cavity shell. BACKGROUND

[0002] The extreme ultraviolet light generator is a kind of equipment for generating extreme ultraviolet light (EUV). EUV light usually refers to ultraviolet light with a wavelength between 10 and 121 nanometers, with shorter wavelengths and higher energy than deep ultraviolet light (DUV). Due to its unique properties, EUV light is widely used in high-tech fields such as semiconductor manufacturing, materials science, and photolithography.

[0003] In the existing extreme ultraviolet light generator, multiple cavities are provided inside the protective cover. Generally, the shells of each cavity are connected horizontally and spread out flat, which can also result in a larger footprint and volume of the entire machine. In addition, the integrated fixed manner between the shells of each cavity can also make it less convenient to replace the components inside the cavity when they fail. SUMMARY

[0004] The purpose of the utility model is to solve the problems in the background art and to provide an extreme ultraviolet light generator cavity shell.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] An extreme ultraviolet light generator cavity shell includes a first shell, the long side direction of the first shell is defined as x direction, and the short side direction is defined as y direction. A vertically inverted second shell is suspended on the x direction side of the first shell, and a vertically inverted third shell is suspended on the y direction side of the first shell. Three connecting pieces are provided on the x direction side and y direction side of the first shell, and the first shell is detachably connected to the second shell and the third shell through the connecting pieces.

[0007] As a further solution of the utility model: a positioning groove is formed on the x direction side and y direction side of the first shell.

[0008] As a further solution of the utility model: a first assembly groove is formed in the direction of the cavity of the first shell in the positioning groove.

[0009] As a further solution of the utility model: a threaded hole is formed around the positioning groove.

[0010] As a further solution of the utility model: a boss structure is provided on the suspension surface of the second shell.

[0011] As a further solution of the utility model: a second assembly groove is formed on the boss structure.

[0012] As a further scheme of the utility model: the second assembly groove is provided with a fixing hole around.

[0013] As a further scheme of the utility model: the suspension surface of the second shell and the suspension surface of the third shell are same in structure.

[0014] As a further scheme of the utility model: the connecting piece includes a positioning disc, and a first positioning column is arranged on one side of the positioning disc.

[0015] As a further scheme of the utility model: a second positioning column is arranged on the other side of the positioning disc.

[0016] The utility model has the advantages of:

[0017] (1) in the utility model, the high of the shell is as the wide side after the vertical overturning of the second shell and the third shell, at this time, the second shell and the third shell are assembled on the side wall of the first shell, and the floor area and the volume of the extreme ultraviolet light generator complete machine are reduced by optimizing the space.

[0018] (2) in the utility model, the connecting piece is a quick mounting structure, which is convenient to align, install and disassemble, improves the installation speed and efficiency between the shells, when the internal components (in the cavity) need to be replaced due to failure, the more rapid disassembly and assembly between the shells also facilitate the maintenance and replacement of the internal components. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model will be further described below in combination with the drawings.

[0020] Figure 1 It is the structural schematic diagram of the extreme ultraviolet light generator of the utility model;

[0021] Figure 2 It is the structural schematic diagram of the cavity shell of the extreme ultraviolet light generator of the utility model;

[0022] Figure 3 It is Figure 2 The structural schematic diagram of the first shell in it;

[0023] Figure 4 It is Figure 3 The enlarged view of A in it;

[0024] Figure 5 It is Figure 2 The structural schematic diagram of the second shell in it;

[0025] Figure 6 It is Figure 5 The enlarged view of B in it;

[0026] Figure 7is a structural schematic view of the connecting piece between the first shell and the second shell.

[0027] In the drawings:

[0028] 1, first shell; 11, positioning groove; 12, first assembly groove; 13, threaded hole; 2, second shell; 21, second assembly groove; 22, fixing hole; 3, third shell; 4, connecting piece; 41, positioning disc; 42, first positioning column; 43, second positioning column; 5, protective cover; 6, bottom plate. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0030] Please refer to Figure 1 As shown in the figure, the utility model is an extreme ultraviolet light generator cavity shell, which is suitable for extreme ultraviolet light generator. The extreme ultraviolet light generator is provided with a bottom plate 6, the protective cover 5 is installed on the bottom plate 6, and multiple cavities are arranged in the protective cover 5.

[0031] Please refer to Figure 2 As shown in the figure, the extreme ultraviolet light generator cavity shell comprises a first shell 1, the long edge direction of the first shell 1 is defined as x direction, and the short edge direction is defined as y direction. The vertical flip second shell 2 is hung on the x direction side surface of the first shell 1, and the vertical flip third shell 3 is hung on the y direction side surface of the first shell 1. Because the height of the second shell 2 and the third shell 3 is less than the width, under normal circumstances, the second shell 2 and the third shell 3 are laid flat and installed around the first shell 1, which will cause the floor area and volume of the whole extreme ultraviolet light generator to be large, so that the whole machine is limited by space during carrying, handling and placing.

[0032] In the embodiment, after the second shell 2 and the third shell 3 are vertically flipped, the height of the shell is taken as the wide side, at this time, the second shell 2 and the third shell 3 are assembled on the side wall of the first shell 1, and the floor area and volume of the whole extreme ultraviolet light generator are reduced by optimizing the space.

[0033] Specifically, please refer to Figures 3-4 As shown in the figure, the first shell 1 is provided with a positioning groove 11 on the x direction side surface and the y direction side surface, and a first assembly groove 12 is arranged in the cavity direction of the first shell 1 in the positioning groove 11. Threaded holes 13 are arranged around the positioning groove 11.

[0034] Please refer toFigures 5-6 As shown, the hanging surface of the second shell 2 has the same structure as the hanging surface of the third shell 3. Specifically, the hanging surface of the second shell 2 is provided with a boss structure, which is fitted with the side wall of the first shell 1 when assembled. A second assembly groove 21 is formed on the boss structure, and a fixing hole 22 is formed around the second assembly groove 21. The fixing hole 22 matches the position of the threaded hole 13 on the first shell 1.

[0035] As shown in Figure 2 , Figure 7 As shown, the x-direction side surface and the y-direction side surface of the first shell 1 are each provided with three connecting pieces 4, and the first shell 1 is detachably connected with the second shell 2 and the third shell 3 through the connecting pieces 4.

[0036] Specifically, the connecting piece 4 includes a positioning disc 41, which is matched in shape with the positioning groove 11, so that the positioning disc 41 can be clamped into the positioning groove 11. A first positioning column 42 is arranged on one side of the positioning disc 41, and a second positioning column 43 is arranged on the other side. The first positioning column 42 is inserted into the first assembly groove 12 as a bolt, and the second positioning column 43 is inserted into the second assembly groove 21.

[0037] In this embodiment, when the first shell 1 and the second shell 2 (the third shell 3) are assembled, the positioning disc 41 of the connecting piece 4 is first embedded into the positioning groove 11 of the first shell 1, so that the first positioning column 42 is inserted into the first assembly groove 12. Then, the second shell 2 (the third shell 3) is vertically flipped, so that the boss structure on the hanging surface thereof is fitted with the side wall of the first shell 1. During the fitting process, the second positioning column 43 of the connecting piece 4 is inserted into the second assembly groove 21. Three connecting pieces 4 are arranged on each hanging surface of the first shell 1, and three points determine a plane. Finally, a bolt is inserted into the fixing hole 22 and the threaded hole 13 and tightened, so that the first shell 1 and the second shell 2 (the third shell 3) are assembled. When the first shell 1 and the second shell 2 (the third shell 3) are disassembled, only the bolt inserted into the fixing hole 22 and the threaded hole 13 needs to be removed, so that the shells can be separated. The connecting piece 4 serves as a quick assembly structure, which facilitates alignment, installation, and disassembly, improves the installation speed and efficiency between the shells, and facilitates maintenance and replacement of internal components when the components inside the shell (i.e., in the cavity) need to be replaced.

[0038] Because the fitting surface area of the boss structure is smaller than the hanging surface area of the second shell 2 (the third shell 3), the smaller machining reference surface releases stress more quickly in the machining process, and its flatness and accuracy are higher than those of the larger machining reference surface, so the fitting surface of the boss structure is more easily machined into a plane with higher flatness and higher accuracy. Thus, accurate positioning can be achieved in the subsequent assembly of the shells, the assembly accuracy is improved, and the use accuracy problems caused by the shell assembly error of the internal components of the shell are reduced.

[0039] The working principle of the utility model is: when assembling the first shell 1 and the second shell 2 (the third shell 3), the positioning disc 41 of the connecting piece 4 is first embedded into the positioning groove 11 of the first shell 1, and the first positioning column 42 is inserted into the first assembly groove 12. Then the second shell 2 (the third shell 3) is vertically flipped, so that the boss structure on the hanging surface is attached to the side wall of the first shell 1, and in the attachment process, the second positioning column 43 of the connecting piece 4 is inserted into the second assembly groove 21. Three connecting pieces 4 are arranged on each hanging surface of the first shell 1, three points determine a plane, and finally the bolt is inserted into the fixing hole 22 and the threaded hole 13 and is tightened and fixed, at this time, the first shell 1 and the second shell 2 (the third shell 3) are assembled. When disassembling the first shell 1 and the second shell 2 (the third shell 3), only the bolt inserted into the fixing hole 22 and the threaded hole 13 needs to be removed, and the shells can be separated.

[0040] The above describes one embodiment of the utility model in detail, but the content described can only be the preferred embodiment of the utility model, and cannot be considered as limiting the scope of the embodiment of the utility model. Any equivalent changes and improvements made according to the scope of the utility model application should still belong to the scope of the claims of the utility model.

Claims

1. An extreme ultraviolet light generator chamber housing, characterized by, Include: The long side direction of the first shell (1) is defined as x direction, the short side direction is defined as y direction, the x direction side of the first shell (1) hangs the vertically flipped second shell (2), the y direction side of the first shell (1) hangs the vertically flipped third shell (3); The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

2. An extreme ultraviolet light generator chamber housing as claimed in claim 1, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

3. An extreme ultraviolet light generator chamber housing as claimed in claim 2, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

4. An extreme ultraviolet light generator chamber housing as claimed in claim 2, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

5. The extreme ultraviolet light generator chamber housing of claim 1, wherein, The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

6. An extreme ultraviolet light generator chamber housing as claimed in claim 5, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

7. An extreme ultraviolet light generator chamber housing as claimed in claim 6, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

8. The extreme ultraviolet light generator chamber housing of claim 1, wherein, The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

9. The extreme ultraviolet light generator chamber housing of claim 1, wherein, The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4).

10. An extreme ultraviolet light generator chamber housing as claimed in claim 9, characterized in that The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4). The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4). The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4). The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1) and the second shell (2), the third shell (3) are detachably connected through the connecting pieces (4). The x direction side and the y direction side of the first shell (1) are each provided with three connecting pieces (4), and the first shell (1

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