Air floatation motion platform suitable for coating industry

Abstract

The utility model discloses an air floatation motion platform suitable for the coating industry, which comprises a base station 1, two groups of transverse motion components 2, two groups of longitudinal motion components 3 and a coating component 4, the transverse motion components 2 are respectively arranged on two corresponding sides of the base station 1, and the longitudinal motion components 3 are respectively and fixedly arranged on the transverse motion components 2. The two ends of the coating assembly 4 are fixedly connected with the longitudinal movement assemblies 3 on the two sides of the base table 1 correspondingly. The double-longitudinal movement assembly 3 is rigidly connected with the coating assembly 4, the double-longitudinal movement assembly 3 is placed on the double-transverse movement assembly 2 to be fixedly connected with the double-transverse movement assembly 2, and the double-transverse and double-longitudinal repeated positioning movement structure is adopted, so that the working condition of precise coating can be well realized. The double-longitudinal repeated positioning precision is + / -0.5 microns, the double-transverse repeated positioning precision is + / -0.85 microns, the precision is further improved, the double-longitudinal load is greatly improved, and the installation of large-load coating equipment can be realized.

Description

Technical Field

[0001] This utility model relates to precision production equipment, specifically to an air-floating motion platform suitable for the coating industry. Background Technology

[0002] Existing technologies mostly employ mechanical guide rails and sliders, which generate significant friction during movement. This friction not only consumes energy but also causes wear on moving parts, reducing the platform's lifespan. Furthermore, the minute vibrations generated by friction affect coating accuracy; for example, in perovskite film coating, it may lead to uneven film thickness. Traditional platforms struggle to meet the positioning accuracy requirements for perovskite coating. Precise control of the coating head's position is crucial in perovskite material coating to ensure the formation of a uniform, high-quality perovskite film on the substrate. However, due to factors such as mechanical gaps and transmission errors, the positioning error of traditional platforms can reach the millimeter level, failing to achieve sub-millimeter or even micrometer-level high-precision positioning. In some large-scale perovskite coating processes, the motion platform needs to move the coating head rapidly to improve production efficiency. However, traditional platforms, limited by friction and drive system performance, cannot achieve high speeds and accelerations, thus impacting coating efficiency. Utility Model Content

[0003] The purpose of this invention is to provide an air-floating motion platform suitable for the coating industry. The specific technical solution is as follows:

[0004] An air-floating motion platform suitable for the coating industry includes a base, a transverse motion component, a longitudinal motion component, and a coating component. The transverse motion component is configured in two sets and is respectively disposed on the corresponding sides of the base. The longitudinal motion component is configured in two sets and is respectively fixedly disposed on the transverse motion component. The two ends of the coating component are respectively fixedly connected to the longitudinal motion components on both sides of the base.

[0005] The lateral motion component includes an air-bearing guide rail, a slider platform, and a first linear motor. The air-bearing guide rail is laid on the base, the slider platform is set on the air-bearing guide rail, and the first linear motor is electrically connected to the slider platform to control the lateral movement of the slider platform on the air-bearing guide rail.

[0006] The longitudinal motion component includes a bracket, a support platform, and a second linear motor. The bracket is fixedly mounted on the slider platform, and the support platform is mounted inside the bracket. The second linear motor is electrically connected to the support platform and is used to control the longitudinal movement of the support platform within the bracket. Both ends of the coating component are fixedly connected to the support platforms on both sides of the base.

[0007] It also includes: a control component, which includes a control board and a grating encoder. The control board is electrically connected to the grating encoder, the first linear motor and the second linear motor respectively. The grating encoder is used to monitor the motion data of the first linear motor and the second linear motor and transmit it back to the control board. The control board controls the motion parameters of the first linear motor and the second linear motor according to the motion data transmitted back by the grating encoder.

[0008] The longitudinal motion component also includes a cylinder, which is mounted on a bracket and its output end is fixedly connected to the load-bearing platform. The cylinder is used to control the gravity balance of the load-bearing platform.

[0009] The first linear motor includes a first stator and a first mover. The first stator is laid on the side of the air-bearing guide rail facing the slider platform, and the first mover is set on the side of the slider platform facing the air-bearing guide rail.

[0010] The second linear motor includes a longitudinal guide rail, a second stator, and a second mover. The second stator and the longitudinal guide rail are fixedly installed in the bracket. The longitudinal guide rail and the second stator are spaced apart. The second mover slides in conjunction with the longitudinal guide rail. The support platform is fixedly connected to the second mover.

[0011] Limit plates are installed at both ends of the air-bearing guide rail. Anti-collision components are installed on the side of the limit plates facing the slider platform. Anti-collision blocks are installed at both ends of the slider platform. The anti-collision blocks and anti-collision components correspond one-to-one to prevent the slider platform from directly colliding with the limit plates.

[0012] The above-mentioned technical solution of this utility model has the following beneficial technical effects: Through the rigid connection between the dual longitudinal motion component and the coating component, and the fixed connection of the dual longitudinal motion component on the dual transverse motion component, the motion structure of dual transverse and dual longitudinal repeating positioning can effectively achieve precision coating operations. The dual longitudinal repeating positioning accuracy is ±0.5 micrometers, and the dual transverse repeating positioning accuracy is ±0.85 micrometers, further improving accuracy. The dual longitudinal load is significantly increased, enabling the installation of coating equipment with high load capacity. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0014] Figure 2 This is a cross-sectional structural diagram of the transverse motion component and the longitudinal motion component in this utility model.

[0015] Wherein: 1-base, 2-lateral motion assembly, 21-air-bearing guide rail, 22-first stator, 23-slider platform, 24-anti-collision block, 25-limiting plate, 26-anti-collision component, 3-longitudinal motion assembly, 31-bracket, 32-second stator, 33-second mover, 34-bearing platform, 35-longitudinal guide rail, 36-cylinder, 4-coating assembly. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0017] An air-floating motion platform suitable for the coating industry includes a base 1, a transverse motion component 2, a longitudinal motion component 3, and a coating component 4. Two sets of transverse motion components 2 are respectively positioned on opposite sides of the base 1. Two sets of longitudinal motion components 3 are respectively fixedly mounted on the transverse motion components 2. Both ends of the coating component 4 are fixedly connected to the longitudinal motion components 3 on opposite sides of the base 1. The rigid connection between the two longitudinal motion components 3 and the coating component 4, with the two longitudinal motion components 3 fixedly mounted on the two transverse motion components 2, and the double transverse and double longitudinal repeating positioning motion structure, effectively achieves precision coating operations. The double longitudinal repeating positioning accuracy is ±0.5 micrometers, and the double transverse repeating positioning accuracy is ±0.85 micrometers, further improving accuracy. The double longitudinal load capacity is significantly increased, enabling the installation of coating equipment with high loads.

[0018] The lateral motion component 2 includes an air-bearing guide rail 21, a slider platform 23, and a first linear motor. The air-bearing guide rail 21 is laid on the base 1, the slider platform 23 is set on the air-bearing guide rail 21, and the first linear motor is electrically connected to the slider platform 23 to control the lateral movement of the slider platform 23 on the air-bearing guide rail 21.

[0019] The longitudinal motion component 3 includes a bracket 31, a support platform 34, and a second linear motor. The bracket 31 is fixedly mounted on the slider platform 23, and the support platform 34 is mounted inside the bracket 31. The second linear motor is electrically connected to the support platform 34 and is used to control the longitudinal movement of the support platform 34 within the bracket 31. The two ends of the coating component 4 are fixedly connected to the support platforms 34 on both sides of the base 1, respectively.

[0020] It also includes: a control component, which includes a control board and a grating encoder. The control board is electrically connected to the grating encoder, the first linear motor and the second linear motor respectively. The grating encoder is used to monitor the motion data of the first linear motor and the second linear motor and transmit it back to the control board. The control board controls the motion parameters of the first linear motor and the second linear motor according to the motion data transmitted back by the grating encoder.

[0021] The longitudinal motion component 3 also includes a cylinder 36, which is mounted on the bracket 31. The output end of the cylinder 36 is fixedly connected to the support platform 34. The cylinder 36 is used to control the gravity balance of the support platform 34.

[0022] The first linear motor includes a first stator 22 and a first mover. The first stator 22 is laid on the side of the air-bearing guide rail 21 facing the slider platform 23, and the first mover is disposed on the side of the slider platform 23 facing the air-bearing guide rail 21.

[0023] The second linear motor includes a longitudinal guide rail 35, a second stator 32, and a second mover 33. The second stator 32 and the longitudinal guide rail 35 are fixedly installed in the bracket 31. The longitudinal guide rail 35 and the second stator 32 are spaced apart. The second mover 33 is slidably engaged with the longitudinal guide rail 35. The bearing platform 34 is fixedly connected to the second mover 33.

[0024] Limiting plates 25 are provided at both ends of the air-bearing guide rail 21. Anti-collision parts 26 are provided on the side of the limiting plate 25 facing the slider platform 23. Anti-collision blocks 24 are provided at both ends of the slider platform 23. The anti-collision blocks 24 correspond one-to-one with the anti-collision parts 26 to prevent the slider platform 23 from directly colliding with the limiting plate 25.

Claims

1. An air floating motion platform suitable for use in the coating industry, characterized in that, The application relates to a horizontal and vertical motion type coating device, which comprises a base (1), horizontal motion assemblies (2), vertical motion assemblies (3) and coating assemblies (4), the horizontal motion assemblies (2) are arranged on the two sides of the base (1) respectively, the vertical motion assemblies (3) are arranged on the horizontal motion assemblies (2) respectively, and the two ends of the coating assemblies (4) are fixedly connected with the vertical motion assemblies (3) on the two sides of the base (1) respectively.

2. The air bearing motion platform suitable for coating industry as claimed in claim 1 wherein, The horizontal motion assembly (2) comprises air floating guide rails (21), sliding block platforms (23) and first linear motors, the air floating guide rails (21) are arranged on the base (1), the sliding block platforms (23) are arranged on the air floating guide rails (21), and the first linear motors are electrically connected with the sliding block platforms (23) and used for controlling the horizontal motion of the sliding block platforms (23) on the air floating guide rails (21).

3. The air bearing motion platform suitable for coating industry as claimed in claim 2 wherein, The vertical motion assembly (3) comprises supports (31), bearing platforms (34) and second linear motors, the supports (31) are fixedly arranged on the sliding block platforms (23), the bearing platforms (34) are arranged in the supports (31), the second linear motors are electrically connected with the bearing platforms (34) and used for controlling the vertical motion of the bearing platforms (34) in the supports (31), and the two ends of the coating assemblies (4) are fixedly connected with the bearing platforms (34) on the two sides of the base (1) respectively.

4. The air bearing motion platform suitable for coating industry as claimed in claim 3 wherein, The application further comprises a control assembly, the control assembly comprises a control panel and grating encoders, the control panel is electrically connected with the grating encoders, the first linear motors and the second linear motors respectively, the grating encoders are used for monitoring the motion data of the first linear motors and the second linear motors and transmitting the motion data to the control panel, and the control panel controls the motion parameters of the first linear motors and the second linear motors according to the motion data transmitted by the grating encoders. The vertical motion assembly (3) further comprises air cylinders (36), the air cylinders (36) are arranged on the supports (31), the output ends of the air cylinders (36) are fixedly connected with the bearing platforms (34), and the air cylinders (36) are used for controlling the gravity balance of the bearing platforms (34).

5. The air bearing motion platform suitable for coating industry as claimed in claim 3 wherein, The first linear motor comprises a first stator (22) and a first mover, the first stator (22) is arranged on the side, facing the sliding block platform (23), of the air floating guide rail (21), and the first mover is arranged on the side, facing the air floating guide rail (21), of the sliding block platform (23).

6. The air bearing motion platform suitable for coating industry as claimed in claim 2 wherein, The second linear motor comprises a vertical guide rail (35), a second stator (32) and a second mover (33), the second stator (32) and the vertical guide rail (35) are fixedly arranged in the support (31), the vertical guide rail (35) is arranged in a spaced mode with the second stator (32), the second mover (33) is in sliding fit with the vertical guide rail (35), and the bearing platform (34) is fixedly connected with the second mover (33).

7. The air bearing motion platform suitable for coating industry as claimed in claim 3 wherein, ​ 8. The air bearing motion platform suitable for coating industry as claimed in claim 2 wherein, The air floating guide rail (21) is respectively provided with a limiting plate (25) at both ends, the limiting plate (25) is provided with an anti-collision piece (26) on the side facing the slider platform (23), the slider platform (23) is respectively provided with an anti-collision block (24) at both ends, the anti-collision block (24) corresponds to the anti-collision piece (26) one by one, for avoiding the direct impact of the slider platform (23) and the limiting plate (25).

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