Cleaning system for FOUP

Abstract

A cleaning system for an FOUP comprises an input and output device used for transferring the FOUP between the outside and a cleaning space, a mechanical arm, a door opening and closing device and a control device, wherein the mechanical arm and the door opening and closing device are arranged in the cleaning space. The door opening and closing device comprises an opening and closing module and a torsion sensing module. The switch module is provided with a plurality of switch parts which can be driven to rotate to drive the lock of the FOUP to unlock. The torsion sensing module can sense the torsion borne by each switch piece when the switch piece is driven to rotate. When the control device judges that the torque force of one switch piece is larger than or equal to a threshold value, the control device controls the switch piece to rotate reversely to drive the lock to be locked. By means of the design that the torsion sensing module can sense the torsion borne by the switch piece when the switch piece is controlled to be unlocked, when the FOUP is unlocked, the situation that the whole FOUP fails and cannot be opened due to the fact that an abnormal lock is forcibly driven is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of cleaning systems, in particular to a kind of cleaning system for FOUP. BACKGROUND

[0002] In the process of wafer processing, the wafer needs to be transferred between various processing stations. In order to ensure that the wafer is not damaged or contaminated during the transfer process, a front opening unified pod (FOUP) is usually used to store and transport the wafer. In order to maintain the cleanliness of the FOUP, the FOUP must be cleaned regularly.

[0003] The cleaning system for cleaning the FOUP currently includes cleaning and drying the box body and the door body of the FOUP. Before cleaning the box body and the door body of the FOUP, the cleaning system uses a lock tool to rotate the lock on the door body to unlock the door body from the box body.

[0004] However, after a period of use of the FOUP, some locks may become stuck. If the stuck lock is forcibly driven, it is likely that the lock will be completely damaged, or even stuck in the box body, causing the door body to be locked and unable to be opened. SUMMARY

[0005] The purpose of the present utility model is to provide a cleaning system for FOUP that can improve at least one disadvantage of the prior art.

[0006] The cleaning system for FOUP of the present utility model is suitable for being arranged in a cleaning space. The FOUP includes a box body and a door body that are connected to each other. The door body has a door panel that covers the box body, and a plurality of locks arranged on the outer side of the door panel. The cleaning system includes an input / output device for transferring the FOUP between the outside and the cleaning space, a robot arm and a door opening and closing device arranged in the cleaning space, and a control device that is connected to the input / output device, the door opening and closing device, and the robot arm.

[0007] The door opening and closing device includes a bearing platform for placing the FOUP with the door body facing downward, an opening and closing module arranged on the bearing platform, and a torsion sensing module. The opening and closing module has a plurality of opening and closing pieces that can be controlled to protrude upward and be inserted into the locks, respectively. The opening and closing module can be controlled by the control device to rotate the locks to unlock them by the opening and closing pieces.

[0008] The torsion sensing module includes a plurality of torsion sensors respectively connected to the switch members. Each of the torsion sensors can sense the torsion force borne by the corresponding switch member when the switch member is driven to rotate.

[0009] The control device can control the robot arm to transfer the FOUP input by the input / output device into the clean room to the loading platform. When the control device determines that the torsion force measured by one of the torsion sensors is greater than or equal to a threshold value, the control device controls the switch member to drive the lock to lock.

[0010] The utility model discloses a cleaning system for FOUP, the box body has a plurality of air inlet and a plurality of air outlet, the input / output device includes the casing mechanism for accommodating the FOUP from the outside world or the clean room, the positioning mechanism for carrying the FOUP is arranged in the casing mechanism, and the particle detection mechanism is arranged in the casing mechanism, the positioning mechanism can be used to carry the FOUP before and after the positioning mechanism is adjusted and is positioned at the predetermined position, the particle detection mechanism has the drive module, the air inlet module and the air exhaust module are arranged in the drive module, and the particle detector is communicated with the air exhaust module, the drive module can be controlled by the control device, and the air inlet module and the air exhaust module are displaced to the FOUP, so that the air inlet module is communicated with the air inlet, and the air exhaust module is communicated with the air outlet, the air inlet module can be controlled to inject gas into the FOUP through the air inlet, the air exhaust module can be controlled to exhaust the air in the FOUP through the air outlet, and the particle detector can be used for particle detection of the gas sucked by the air exhaust module.

[0011] The utility model discloses a cleaning system for FOUP, the positioning mechanism includes two left and right interval and can be used to cooperate the FOUP of the conveying module of carrying, the positioning sensing module is arranged in the casing mechanism, and the carrying positioning module is arranged between the opposite sides of the conveying module, the conveying module can be controlled by the control device to move the FOUP before and after the carrying positioning module, the positioning sensing module can generate the positioning signal when sensing that the FOUP is adjusted and is positioned to align the carrying positioning module, the control device will be triggered by the positioning signal and control the conveying module stops the action, the carrying positioning module can be controlled by the control device, and the FOUP is lifted from the conveying module, the drive module can be controlled by the control device to drive the air inlet module and the air exhaust module are displaced to the FOUP on the carrying positioning module.

[0012] The utility model discloses a cleaning system for FOUP, bearing positioning module includes lifter, and positioning stage is set on the lifter, the lifter can be controlled by control device, and drive positioning stage relative conveying module moves upwards predetermined height, and make positioning stage lift FOUP upwards and leave conveying module.

[0013] The utility model discloses a cleaning system for FOUP, still include the failure product output channel for intercommunication outside, control device will judge the torsion that torsion sensor measures all less than threshold value, and switch module has unlocked the lock after, control mechanical arm removes the box body of FOUP from door body, control device will judge the torsion that one of torsion sensor measures is greater than or equal to threshold value, and control switch piece reverse drive lock after locking, will control mechanical arm and remove FOUP to failure product output channel.

[0014] The utility model discloses a cleaning system for FOUP, switch door device still includes setting in the negative pressure positioning module and residual material detection module of bearing platform top surface, negative pressure positioning module can be controlled by control device, and the door body of FOUP is positioned to the adsorption downwards, mechanical arm can be controlled by control device, and the box body of FOUP on bearing platform is removed upwards and separates the door body that has been adsorbed and positioned, residual material detection module can be controlled by control device, and after the box body is removed upwards and separates the door body, whether the sensing of wafer existence is carried out to the door body upper predetermined height, control device will judge the detection result of residual material detection module when representing that there is wafer, control mechanical arm and control switch module lock the lock of door body, and control mechanical arm removes FOUP to failure product output channel.

[0015] The utility model discloses a cleaning system for FOUP, every lock has the lock catch that exposes in the circumference of door body, when every lock is driven and locks, the lock catch will protrude the circumference of door body, switch door device still includes setting in the door body detection module of bearing platform, door body detection module has a plurality of distribution in the lock catch sensor of the periphery of door body, control device will control switch module drive lock and control lock catch sensor respectively and sense whether the lock catch of lock exists upwards after control mechanical arm removes the box body and separates the door body.

[0016] The utility model discloses a cleaning system for FOUP still contains the door body cleaning device for setting in the door body cleaning device in the cleaning space, the first cleaning tank body that can be used for containing the door body of the mechanical arm transmission, the first carousel module for bearing the door body of being placed in the first cleaning tank body in the first cleaning tank body is provided, and the first water spraying module is provided in the first cleaning tank body, the first carousel module can be controlled by the control device, and the door body of bearing is driven to rotate relative to the first water spraying module, the first water spraying module has the upper water sprayer and lower water sprayer respectively located above and below the door body, the first water spraying module can be controlled by the control device, and the top side and the bottom side of the door body are respectively sprayed with cleaning liquid through the upper water sprayer and the lower water sprayer.

[0017] The utility model discloses a cleaning system for FOUP still contains the box body cleaning device for setting in the box body cleaning device in the cleaning space, the second cleaning tank body that can be used for the mechanical arm with the box body opening is placed down in the second cleaning tank body, the second carousel module for bearing the box body in the second cleaning tank body is provided, and the second water spraying module is provided in the second cleaning tank body, the second carousel module can be controlled by the control device to drive the box body relative to the second cleaning tank body rotation, the second water spraying module has the lower water sprayer for spraying cleaning liquid to the inside of the box body upwards, a plurality of side water sprayers for spraying cleaning liquid to the surrounding of the box body, and the upper water sprayer for spraying cleaning liquid to the box body downwards.

[0018] The utility model discloses a cleaning system for FOUP, the left and right side of the inner wall of the box body is protruded with a plurality of upper and lower interval side bearing ribs, the cleaning system still contains the layer distance detection device for setting in the cleaning space, the seat body for the mechanical arm with the box body is placed positioning of the layer distance detection device, the shift module of setting in the seat body and two first image grabbers of setting in the shift module, the shift module can be controlled by the control device, and the first image grabber is removed into the box body, and the first image grabber can be controlled by the control device to carry out image acquisition to left and right side side bearing rib.

[0019] The utility model discloses a cleaning system for FOUP, the rear side of the inner wall of the box body is protruded with a plurality of upper and lower interval middle bearing ribs, the layer distance detection device still includes the second image grabber of setting in the shift module, the second image grabber can be driven into the box body by the shift module displacement, and can be controlled by the control device to carry out image acquisition to the middle bearing rib.

[0020] The door body cleaning device further includes a first drying groove body capable of accommodating the door body conveyed by the mechanical arm, and a first heating module arranged in the first drying groove body, wherein the first heating module can be controlled to heat the door body by the control device.

[0021] The cleaning system for FOUP further includes a box body drying device arranged in the cleaning space, wherein the box body drying device includes a second drying groove body for placing the box body opened downward by the mechanical arm, and a second heating module arranged in the second drying groove body, wherein the second heating module can be controlled to heat the box body.

[0022] The switch door device has the advantages that the torsion sensing module of the switch door device can sense the torsion borne by the switch piece of the switch module when the switch piece is controlled to be unlocked, and when the box body is unlocked, the situation that the lock is forcibly driven to be abnormal, the whole door body is faulty, and the box body cannot be detached can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0023] Other features and effects of the utility model will be clearly presented in the embodiments with reference to the accompanying drawings.

[0024] Figure 1 It is an exploded view illustrating the structure of a FOUP;

[0025] Figure 2 It is a perspective view illustrating an embodiment of the cleaning system for FOUP of the utility model;

[0026] Figure 3 It is a perspective view illustrating the structure of two input and output devices of the embodiment;

[0027] Figure 4 It is a top view of the embodiment;

[0028] Figure 5 It is an incomplete side sectional view illustrating the structure of the input and output device of the embodiment;

[0029] Figure 6 It is a view similar to Figure 5 , illustrating the situation that a bearing positioning module of the embodiment lifts and positions a FOUP, and a driving module drives an air inlet module and an air exhaust module to move upward and be connected to the FOUP;

[0030] Figure 7 It is a perspective view illustrating the structure of the input and output device and two switch door devices of the embodiment;

[0031] Figure 8 It is an incomplete 3D diagram illustrating the situation where multiple switching components are driven to extend upwards and insert into the FOUP;

[0032] Figure 9 It is an incomplete side sectional view illustrating the structure of one of the door opening and closing devices;

[0033] Figure 10 It is an incomplete top view illustrating the situation when a door is unlocked by the switch.

[0034] Figure 11 It is similar Figure 10 The view illustrates the situation where the door is locked by the switch, and multiple latches protrude laterally.

[0035] Figure 12 This is a perspective view illustrating the structure of a door cleaning device according to this embodiment;

[0036] Figure 13 This is a complete front view illustrating the structure of the door cleaning device in this embodiment;

[0037] Figure 14 It is a top sectional view illustrating the door cleaning device of this embodiment when it is used to support a door to be cleaned;

[0038] Figure 15 This is an exploded perspective view illustrating the structure of a box body cleaning device according to this embodiment;

[0039] Figure 16 This is an incomplete top view illustrating the case where the box body cleaning device of this embodiment carries a box body to be cleaned;

[0040] Figure 17 This is an incomplete side sectional view illustrating the structure of the box body cleaning device of this embodiment;

[0041] Figure 18 This is an exploded perspective view illustrating the structure of a box body drying device according to this embodiment;

[0042] Figure 19 This is an incomplete front sectional view illustrating the structure of the box body drying device of this embodiment;

[0043] Figure 20 This is a perspective view illustrating the structure of a layer spacing detection device according to this embodiment;

[0044] Figure 21is a fragmentary perspective view showing the structure of the layer distance detecting device of this embodiment, with part of the housing of a seat removed;

[0045] Figure 22 is a view similar to Figure 20 , showing the case where the layer distance detecting device of this embodiment carries two cassette bodies to be detected, and showing the case where a FOUP is placed in a defective product output passage;

[0046] Figure 23 is a fragmentary bottom view showing the case where the layer distance detecting device of this embodiment performs layer distance detection on a cassette body, with part of the housing of a seat removed. DETAILED DESCRIPTION

[0047] Referring to Figure 1 , Figure 2 , Figure 3 , an embodiment of the cleaning system for a FOUP is used for being disposed in a cleaning space, and is used in combination with a water supply device (not shown in the figure) for supplying cleaning water, and a gas suction device (not shown in the figure) for performing gas suction, so as to be used for performing cleaning treatment on a FOUP 9. The FOUP 9 includes a cassette body 91 for containing wafers (not shown in the figure), and a door body 92 for sealing the cassette body 91.

[0048] The cassette body 91 has a plurality of air inlet holes 911 and air outlet holes 912 at the bottom thereof, which are in communication with the internal space of the cassette body 91. In addition, the left and right sides of the inner wall of the cassette body 91 are provided with a plurality of side bearing ribs 913 extending forward and backward and arranged in an upper and lower interval, and the rear side of the inner wall is provided with a plurality of intermediate bearing ribs 914 protruding forward and arranged in an upper and lower interval.

[0049] The door body 92 has a door plate 921 for sealing the cassette body 91, and a plurality of locks 922 provided on the door plate 921 and used for locking the cassette body 91. The locks 922 are exposed on the outer side of the door plate 921, and each lock 922 has a lock catch 923 exposed on the periphery of the door plate 921. Each lock 922 can be driven to drive the lock catch 923 to protrude out of the periphery of the door plate 921, so as to be buckled on the cassette body 91.

[0050] Referring to Figure 2 , Figure 4The cleaning system comprises two input / output devices 2 for connecting the outside with the cleaning space, a failure product output channel 31 for connecting the outside with the cleaning space, a mechanical arm 32 for being arranged in the cleaning space, two switch door devices 4, a door body cleaning device 5, two box body cleaning devices 6, two box body drying devices 7, and a layer distance detecting device 8, and a control device 100. The control device 100 is signal connected with the input / output devices 2, the mechanical arm 32, the switch door devices 4, the door body cleaning device 5, the box body cleaning devices 6, the box body drying devices 7, and the layer distance detecting device 8, and can be used to control the operation of the mechanical arm 32 and the aforementioned devices.

[0051] The mechanical arm 32 can be controlled by the control device 100 to transfer the FOUP 9, the box body 91, and the door body 92 among the input / output devices 2, the failure product output channel 31, the switch door devices 4, the door body cleaning device 5, the box body cleaning devices 6, the box body drying devices 7, and the layer distance detecting device 8. Since the mechanical arm 32 can be used to transfer articles and is of various types and is prior art, it will not be described in detail.

[0052] The failure product output channel 31 can be used to transfer the FOUP 9 carried outward to the outside. Since the failure product output channel 31 has various ways of outputting the FOUP 9 and is prior art, it will not be described in detail.

[0053] For the convenience of description, the input / output devices 2, the switch door devices 4, the box body cleaning devices 6, and the box body drying devices 7 will be described by taking one of them as an example.

[0054] Referring to Figure 3 , Figure 5 , Figure 6 The input / output device 2 comprises a housing mechanism 21 for accommodating a FOUP 9, and a displacement positioning mechanism 22 and a particle detecting mechanism 23 arranged in the housing mechanism 21. The housing mechanism 21 is provided with two cavity doors 210 which can be controlled to be opened to connect the outside with the cleaning space. Since the housing mechanism 21 is prior art and of various types, it will not be described in detail.

[0055] The displacement positioning mechanism 22 comprises two left and right spaced and front and back extending conveying modules 221 arranged in the housing mechanism 21 for carrying FOUP 9, a positioning sensing module 222 arranged in the housing mechanism 21, and a carrying positioning module 224 arranged between the opposite sides of the conveying modules 221. Due to the perspective of the drawing, only one of the conveying modules 221 is shown in the figure.

[0056] The conveying module 221 can be controlled by the control device 100 to move the FOUP 9 forward and backward. In the embodiment, the conveying module 221 is a conveying mechanism composed of a plurality of rollers, but in implementation, the conveying module 221 can also be replaced by a conveying belt conveying mode. Since there are many types of conveying modules 221 that can be used to carry and move the FOUP 9, the above-mentioned mode is not limited in implementation.

[0057] The positioning sensing module 222 includes two positioning sensors 223 arranged in front and back. The positioning sensors 223 can be used to respectively sense the front and back edges of the FOUP 9 carried by the conveying module 221. The positioning sensing module 222 generates a positioning signal when the positioning sensors 223 simultaneously sense the front and back edges.

[0058] In the embodiment, the positioning sensors 223 are optical sensors, such as but not limited to light reflection sensors or light interruption sensors. However, in implementation, the positioning sensors 223 can also be replaced by microswitches that can be used to sense the touch of the FOUP 9. Since there are many types of positioning sensors 223, the above-mentioned mode is not limited in implementation.

[0059] The carrying positioning module 224 includes a lifter 225 and a positioning stage 226 arranged on the lifter 225. The lifter 225 can be controlled to drive the positioning stage 226 to move upward relative to the conveying module 221 by a predetermined height, so as to lift the FOUP 9 upward away from the conveying module 221 and position it at a to-be-measured position, as shown in Figure 6 The lifter 225 is, for example but not limited to, an oil cylinder or an air cylinder, etc.

[0060] The particle detection mechanism 23 includes a driving module 231 arranged below the displacement positioning mechanism 22, an air inlet module 232 and an air outlet module 233 arranged in front and back of the driving module 231, and a particle detector 234 connected to the air outlet module 233. The driving module 231 can be controlled by the control device 100 to drive the air inlet module 232 and the air outlet module 233 to move upward toward the FOUP 9 on the positioning stage 226, so that the air inlet module 232 communicates with the air inlet hole 911 of the FOUP 9, and the air outlet module 233 communicates with the air outlet hole 912 of the FOUP 9, as shown in Figure 6 The air inlet module 232 can be driven to inject gas into the FOUP 9. The air outlet module 233 can be driven to perform gas suction on the FOUP 9. The particle detector 234 can be used to detect dust particles in the gas sucked by the air outlet module 233, and generate a particle detection data according to the detection result.

[0061] Referring to Figure 7 , Figure 8 , Figure 9 , Figure 10 The switch door device 4 is adjacent to one of the input / output devices 2. The switch door device 4 includes a bearing platform 41 for positioning the FOUP 9 in a downwardly facing manner, a negative pressure positioning module 42 exposed on the top surface of the bearing platform 41, a switch module 43, a residual material detection module 44, a door body detection module 45, and a torsion sensing module 46 connected to the switch module 43.

[0062] The negative pressure positioning module 42 has a plurality of negative pressure suction nozzles 421 exposed on the top surface of the bearing platform 41 and located below the door body 92. The negative pressure positioning module 42 can be controlled to apply negative pressure to the door body 92 through the negative pressure suction nozzles 421, thereby attracting the door body 92 to be positioned on the bearing platform 41.

[0063] The switch module 43 has a plurality of switch pieces 431 exposed on the top surface of the bearing platform 41 and a driver 432 for driving the switch pieces 431 to protrude upwardly out of the bearing platform 41. The switch module 43 can be controlled to drive the driver 432 to drive the switch pieces 431 to protrude upwardly and insert into the lock 922, as shown in Figure 8 , and to drive the switch pieces 431 to rotate and drive the lock 922 to be unlocked, as shown in Figure 10 , that is, to drive the lock catch 923 of the lock 922 to retract the door plate 921, so that the door body 92 is unlocked and separated from the box body 91. In this embodiment, the driver 432 is a telescopic cylinder device that can be controlled to extend and retract, such as but not limited to a pneumatic cylinder or an oil hydraulic cylinder.

[0064] The residual material detection module 44 can be used to sense whether there is a wafer on the door body 92. When the door body 92 is unlocked and separated from the box body 91, and the box body 91 is moved upwardly away from the door body 92 by the robot arm 32, if there is a wafer or a broken wafer residue in the box body 91, the wafer or the residue will fall downwardly above the door body 92. The residual material detection module 44 detects the wafer or the residue in a predetermined horizontal direction above the door body 92, and generates a residual material signal when the wafer or the residue is detected.

[0065] In this embodiment, the residual material detection module 44 is an optical sensor, such as but not limited to a light blocking sensor or a light reflection sensor. However, in implementation, the residual material detection module 44 can also be replaced by radar wave or ultrasonic wave object sensing technology to sense whether there is a wafer. Therefore, in implementation, the residual material detection module 44 is not limited to the above-mentioned manner.

[0066] Referring to Figure 8 , Figure 10 , Figure 11 The door body detection module 45 includes a plurality of lock catch sensors 451 exposed on the top surface of the carrying platform 41. The lock catch sensors 451 are distributed around the door body 92 corresponding to the positions of the lock catches 923 of the lockset 922. After the control device 100 controls the switch module 43 to unlock the lockset 922 and controls the mechanical arm 32 (shown in Figure 2 ) to detach the box body 91 from the door body 92, it controls the switch module 43 to lock the lockset 922, so that the lock catch 923 protrudes out of the periphery of the door panel 921 (as shown in Figure 11 ). Then, the lock catch sensors 451 are controlled to sense the lock catch 923 respectively. The door body detection module 45 generates a lock catch sensing data corresponding to the sensing results of the lock catch sensors 451.

[0067] In this embodiment, each lock catch sensor 451 is an optical sensor, for example but not limited to a light reflection type optical sensor, which generates a sensing signal when it senses the light signal reflected by the corresponding lock catch 923. However, in other embodiments of the present application, radar wave sensing technology or ultrasonic wave sensing technology can also be used to sense the lock catch 923. Therefore, the lock catch sensor 451 is not limited to the above-mentioned form.

[0068] Referring to Figure 9 The torque sensing module 46 includes a plurality of torque sensors 461 connected to the switch pieces 431 respectively. Each torque sensor 461 can sense the torque borne by the corresponding switch piece 431 when it is driven to rotate. In implementation, the torque sensor 461 can be, for example but not limited to, a resistance strain type, a magnetostrictive type or a photoelectric type.

[0069] Referring to Figure 12 , Figure 13 , Figure 14 The door body cleaning device 5 includes a first cleaning tank body 51 and a first drying tank body 52 arranged vertically, a first rotating disc module 53 and a first water spraying module 54 arranged in the first cleaning tank body 51, a first driving module 55 arranged in the first cleaning tank body 51 and connected to the first rotating disc module 53, and a first heating module 56 arranged in the first drying tank body 52.

[0070] The first cleaning tank body 51 can be controlled to be opened, and is used to accommodate the mechanical arm 32 (shown in Figure 2The first rotation module 55 can be controlled to start, and drive the first rotation module 53 to rotate the door body 92 relative to the first cleaning tank 51. The first rotation module 55 is composed of a motor, and a power transmission assembly connected between the motor and the first rotation module 53. The power transmission assembly is, for example but not limited to, a belt pulley and a transmission belt, or a gear and a chain, etc.

[0071] The first water spraying module 54 is connected to the water supply device, and is used to guide the cleaning water provided by the water supply device. The first water spraying module 54 includes an upper water sprayer 541 and a lower water sprayer 542 located above and below the door body 92, respectively. The upper water sprayer 541 and the lower water sprayer 542 can be controlled to open, and respectively spray the cleaning water towards the top side and the bottom side of the rotating door body 92.

[0072] The first drying tank 52 can be controlled to open, and is used to accommodate the door body 92 moved by the mechanical arm 32. The first heating module 56 can be controlled to heat, and perform drying treatment on the door body 92. The first heating module 56 is, for example but not limited to, an electric heating tube device. In implementation, the first drying tank 52 is connected to the air exhaust device, and can be used to perform drying operation, so that the air exhaust device can exhaust the water vapor generated during drying.

[0073] Referring to Figure 15 , Figure 16 , Figure 17 The box body cleaning device 6 includes a second cleaning tank 61, and a second rotation module 62, a second rotation driving module 63 and a second water spraying module 64 arranged in the second cleaning tank 61. The second cleaning tank 61 can be controlled to open, and is used to accommodate the box body 91 placed by the mechanical arm 32 (shown in Figure 2 ) with the opening facing downward.

[0074] The second rotation module 62 can be used to carry the box body 91 placed in the second cleaning tank 61. The second rotation driving module 63 can be controlled to start, and drive the second rotation module 62 to rotate the box body 91 relative to the second cleaning tank 61. The second rotation driving module 63 is composed of a motor, and a power transmission assembly connected between the motor and the second rotation module 62. The power transmission assembly is, for example but not limited to, a belt pulley and a transmission belt, or a gear and a chain, etc.

[0075] The second water spraying module 64 is connected to the water supply device and is used to guide the cleaning water provided by the water supply device. The second water spraying module 64 includes an upper water sprayer 641 and a lower water sprayer 642 located above and below the cartridge body 91 respectively, and a plurality of side water sprayers 643 arranged along the inner periphery of the second cleaning tank 61 and located around the cartridge body 91. The upper water sprayer 641, the lower water sprayer 642 and the side water sprayers 643 can be controlled to spray the cleaning water towards the inside, the top side and the outer periphery of the cartridge body 91 which rotates oppositely.

[0076] Referring to FIG. 18, Figure 19 The cartridge body drying device 7 includes a second drying tank 71 and two second heating modules 72 arranged in the second drying tank 71. The second drying tank 71 can be controlled to be opened to receive the cartridge body 91 with the opening facing downward by the mechanical arm 32 (shown in Figure 2 ). The second heating modules 72 can be controlled to generate heat to warm up and dry the cartridge body 91. The second heating modules 72 are, for example but not limited to, electric heating tube devices. In implementation, the second drying tank 71 is connected to the air extraction device and can be used to perform drying operation to extract the water vapor generated during drying by the air extraction device.

[0077] Referring to FIG. 18, Figure 20 , Figure 21 , Figure 22 , Figure 23 The layer distance detection device 8 includes a seat body 81, a shifting module 82 arranged in the seat body 81, and two first image grabbers 83 and a second image grabber 84 arranged in the shifting module 82. The seat body 81 has a detection platform 810 which can be used to position the cartridge body 91 with the opening facing forward by the mechanical arm 32 (shown in Figure 2 ).

[0078] The shifting module 82 has a horizontal slide rail 821 extending front to back, a translation seat 822 arranged on the horizontal slide rail 821 and horizontally translatable front to back, a vertical slide rail 823 arranged vertically on the translation seat 822, a lifting seat 824 arranged on the vertical slide rail 823 and vertically translatable up and down, an extension arm 825 mounted on the lifting seat 824 and extending forward from the lifting seat 824, a translation driver 85 mounted on the seat body 81 and connected to the translation seat 822, and a lifting driver 86 mounted on the vertical slide rail 823 and connected to the lifting seat 824.

[0079] In this embodiment, the translation driver 85 is composed of a transmission screw (not shown) disposed in the horizontal slide rail 821 and connected to the translation seat 822, and a motor assembly (not shown) connected to the transmission screw, which can be controlled to drive the translation seat 822 to horizontally move along the horizontal slide rail 821. The lifting driver 86 is composed of a transmission screw (not shown) vertically disposed in the vertical slide rail 823 and connected to the lifting seat 824, and a motor assembly (not shown) connected to the transmission screw, which can be controlled to drive the lifting seat 824 to move up and down along the vertical slide rail 823. However, the translation driver 85 for driving the translation seat 822 to move relative to the horizontal slide rail 821, and the lifting driver 86 for driving the lifting seat 824 to move up and down relative to the vertical slide rail 823 are both prior art and of various types, so the above-mentioned forms are not limited in implementation.

[0080] The extension arm 825 has two front-and-back extension and left-and-right spaced mounting arm portions 826. The first image pickup device 83 is respectively mounted at the extension end portions of the mounting arm portions 826, and the image pickup directions of the first image pickup devices 83 are opposite to each other. The second image pickup device 84 is mounted at the extension end portion of one of the mounting arm portions 826, and its image pickup direction is toward one of the left and right sides.

[0081] The translation module 82 can be controlled by the control device 100 to operate to drive the extension arm 825 to move the first image pickup devices 83 and the second image pickup device 84 into the box body 91. The first image pickup devices 83 can be controlled to perform image pickup toward the side bearing ribs 913 on the left and right sides, respectively, to generate a first image data. The second image pickup device 84 can be controlled to perform image pickup on the middle bearing rib 914 to obtain a second image data. The first image data and the second image data can be used for image analysis to determine the deformation amount and the upper and lower layer distance of the side bearing ribs 913 and the middle bearing rib 914.

[0082] Referring to Figure 2 , Figure 4 , Figure 5 When the cleaning system for FOUP is used to clean a FOUP 9, one of the input and output devices 2 can be connected to the outside by operating the control device 100 to place the FOUP 9 on the conveying module 221 in the housing mechanism 21. The control device 100 controls the conveying module 221 to move and position the FOUP 9 according to the sensing result of the positioning sensor 223, and then controls the bearing positioning module 224 to lift and position the FOUP 9.

[0083] The control device 100 then controls the particle detection mechanism 23 to perform the air blowing and air sucking processes on the FOUP 9, and to perform the dust particle removal and content detection on the FOUP 9. After the detection is completed, the control device 100 controls the housing mechanism 21 to communicate with the cleaning space, controls the transfer positioning mechanism 22 to transfer the FOUP 9 to the cleaning space, and controls the robot arm 32 to place the FOUP 9 on the load platform 41 of the door opening and closing device 4, as shown in Figure 8 .

[0084] Referring to Figure 7 , Figure 8 , 10 , the control device 100 then controls the negative pressure positioning module 42 to position the door body 92 of the FOUP 9. The control device 100 then controls the opening and closing module 43 to open the lock 922 of the door body 92, and simultaneously controls the torsion sensing module 46 to sense the torsion borne by the opening and closing member 431. When the control device 100 determines that the sensed torsion is too large, the control device 100 controls the opening and closing member 431 to reverse to relock the lock 922, and controls the robot arm 32 to transfer the FOUP 9 to the defective product output channel 31.

[0085] Referring to Figure 10 , Figure 11 , when the control device 100 determines that the torsion is normal and the lock 922 is unlocked, the control device 100 controls the robot arm 32 to move the box body 91 upward and away from the door body 92. At the same time, the control device 100 controls the residual wafer detection module 44 to detect whether there is a residual wafer on the door body 92. When a residual wafer is detected, the control device 100 controls the robot arm 32 to re-cover the box body 91 on the door body 92, controls the opening and closing module 43 to relock the lock 922, and then controls the robot arm 32 to transfer the FOUP 9 to the defective product output channel 31.

[0086] Referring to Figure 2 , Figure 10 , when the control device 100 determines that no residual wafer is detected, the control device 100 controls the robot arm 32 to move the box body 91 into the second cleaning tank 61 of the corresponding box body cleaning device 6. The control device 100 then controls the corresponding second driving module 63 to drive the second rotating disc module 62 to rotate the box body 91, and controls the second water spraying module 64 to spray water, so as to perform the rotating cleaning of the inner and outer surfaces of the box body 91.

[0087] Referring to Figure 18 , 19After the cleaning programming of the cassette body 91 is completed, the control device 100 controls the mechanical arm 32 to take out the cassette body 91 from the second cleaning tank 61 and place the cassette body 91 into the second drying tank 71 of one of the cassette body drying devices 7. Then, the corresponding second heating module 72 is controlled to generate heat, and the air extraction device is controlled to perform air extraction, so as to dry the cassette body 91.

[0088] Referring to Figure 22 , Figure 23 After the drying of the cassette body 91 is completed, the control device 100 controls the mechanical arm 32 to move the cassette body 91 to the measurement platform 810 of the layer distance detection device 8, controls the displacement module 82 to displace the first image collector 83 and the second image collector 84, and controls the first image collector 83 and the second image collector 84 to perform image collection on the cassette body 91.

[0089] Referring to Figure 12 , Figure 13 During the cleaning and drying of the cassette body 91, the control device 100 controls the mechanical arm 32 to move the door body 92 to the first cleaning tank 51. Then, the corresponding first driving module 55 is controlled to drive the first rotating disc module 53 to rotate the door body 92, and the first water spraying module 54 is controlled to spray water on the door body 92 to perform rotating cleaning.

[0090] After the cleaning programming of the door body 92 is completed, the control device 100 controls the mechanical arm 32 to move the door body 92 to the first drying tank 52. Then, the corresponding first heating module 56 is controlled to generate heat, and the air extraction device is controlled to perform air extraction, so as to dry the door body 92.

[0091] After the drying of the door body 92 is completed, the control device 100 controls the mechanical arm 32 to move the door body 92 to the loading platform 41 of the door opening and closing device 4, controls the mechanical arm 32 to stack the dried cassette body 91 on the door body 92, and controls the opening and closing module 43 to drive the lock 922 of the door body 92 to lock the cassette body 91, so as to reassemble a FOUP 9.

[0092] When the control device 100 determines that the layer distance of the side bearing rib 913 and the middle bearing rib 914 of the cassette body 91 is abnormal, the reassembled FOUP 9 is moved to the fault product output channel 31. If the layer distance is determined to be normal, the FOUP 9 is moved into one of the input and output devices 2, and then the FOUP 9 is moved to the outside through the input and output device 2.

[0093] In summary, the torsion sensing module 46 of the switch door device 4 can sense the torsion of the switch member 431 of the switch module 43 when it is controlled to be unlocked, so that the lock 922 that has been abnormally unlocked can be avoided to be forcibly driven, and the entire door body 92 cannot be separated from the box body 91.

[0094] In addition, the particle detection mechanism 23 can be further provided on each input and output device 2, so that the dust particles in the FOUP 9 can be removed before the FOUP 9 is sent into the cleaning space, thereby improving the cleaning effect and effectively maintaining the cleanliness of the cleaning space.

[0095] In addition, the door body cleaning device 5 can be used to rotate and clean the door plate 921, and the box body cleaning device 6 can be used to rotate and clean the box body 91, so that the cleaning effect of the door body 92 and the box body 91 can be greatly improved.

[0096] In addition, the layer distance detection device 8 can be further provided, and the side bearing rib 913 and the middle bearing rib 914 can be imaged to quickly analyze the deformation and layer distance of the side bearing rib 913 and the middle bearing rib 914.

[0097] Therefore, the cleaning system for the FOUP is indeed quite innovative and convenient, and can achieve the purpose of the present application.

[0098] The above is only an embodiment of the present application, and cannot limit the scope of the present application. Any simple equivalent changes and modifications made according to the claims and the content of the specification are still within the scope of the present application.

Claims

1. A cleaning system for a FOUP, adapted to be disposed in a cleaning space, said FOUP comprising a cassette body and a door body coupled to each other, said door body having a door panel to cover said cassette body, and a plurality of locks disposed on the outer side of said door panel, said cleaning system comprising an input / output device for transferring said FOUP between the outside and said cleaning space, a robot arm and a door opening / closing device disposed in said cleaning space, and a control device for signal connecting said input / output device, said door opening / closing device and said robot arm, characterized in that: The switch door device includes a bearing platform for placing the FOUP with the door body facing downward, a switch module disposed on the bearing platform, and a torsion sensing module. The switch module has a plurality of switch pieces capable of being controlled to protrude upward and be inserted into the lock respectively, and the switch module can be controlled by the control device to rotate the switch pieces to drive the lock to be unlocked. The torsion sensing module includes a plurality of torsion sensors respectively connected to the switch pieces, and each of the torsion sensors can sense the torsion borne by the corresponding switch piece when it is driven to rotate. The control device can control the robot arm to move the FOUP input by the input and output device into the cleaning space to the bearing platform. When the control device determines that the torsion measured by one of the torsion sensors is greater than or equal to a threshold value, the control device controls the switch piece to reverse drive the lock to be locked.

2. The cleaning system for FOUP according to claim 1, characterized by: The box body has a plurality of air inlet holes and a plurality of air outlet holes. The input and output device includes a housing mechanism for accommodating the FOUP from the outside or the cleaning space, a shifting positioning mechanism disposed in the housing mechanism and used for bearing the FOUP, and a particle detection mechanism disposed in the housing mechanism. The shifting positioning mechanism can be used to shift and position the FOUP in a predetermined position. The particle detection mechanism has a driving module, an air inlet module and an air extraction module disposed on the driving module, and a particle detector connected to the air extraction module. The driving module can be controlled by the control device to drive the air inlet module and the air extraction module to move close to the FOUP, so that the air inlet module is connected to the air inlet hole, and the air extraction module is connected to the air outlet hole. The air inlet module can be controlled to inject gas into the FOUP through the air inlet hole. The air extraction module can be controlled to extract air from the FOUP through the air outlet hole. The particle detector can be used to detect particles in the air extracted by the air extraction module.

3. The cleaning system for FOUP according to claim 2, characterized by: The shifting positioning mechanism includes two left and right spaced conveying modules capable of being used to cooperatively bear the FOUP, a positioning sensing module disposed in the housing mechanism, and a bearing positioning module disposed between the opposite sides of the conveying modules. The conveying modules can be controlled by the control device to move the FOUP forward and backward relative to the bearing positioning module. The positioning sensing module can generate a positioning signal when it senses that the FOUP is shifted to align with the bearing positioning module. The control device is triggered by the positioning signal to control the conveying modules to stop moving. The bearing positioning module can be controlled by the control device to lift the FOUP away from the conveying modules. The driving module can be controlled by the control device to drive the air inlet module and the air extraction module to move close to the FOUP on the bearing positioning module.

4. The cleaning system for FOUP according to claim 3, characterized by: The carrying positioning module comprises a lifter and a positioning platform arranged on the lifter, the lifter is controlled by the control device to drive the positioning platform to move upward relative to the conveying module by a predetermined height, so that the positioning platform lifts the FOUP upward away from the conveying module.

5. The cleaning system for FOUP according to claim 1, wherein: The cleaning system for FOUP further comprises a failure product output channel for communicating with the outside world, the control device controls the robot arm to detach the box body of the FOUP from the door body after judging that the torque measured by the torque sensor is less than the threshold value and the switch module has unlocked the lock, and the control device controls the robot arm to move the FOUP to the failure product output channel after judging that the torque measured by one of the torque sensors is greater than or equal to the threshold value and controlling the switch to drive the lock to be locked.

6. The cleaning system for FOUP according to claim 5, wherein: The door opening and closing device further comprises a negative pressure positioning module and a residual material detection module arranged on the top surface of the carrying platform, the negative pressure positioning module is controlled by the control device to adsorb and position the door body of the FOUP downward, the robot arm is controlled by the control device to detach the box body of the FOUP on the carrying platform upward from the adsorbed and positioned door body, the residual material detection module is controlled by the control device to sense whether there is a wafer at a predetermined height above the door body after the box body is moved upward away from the door body, and the control device controls the robot arm to reset the box body on the door body and controls the switch module to lock the lock of the door body and controls the robot arm to move the FOUP to the failure product output channel when judging that the detection result of the residual material detection module represents that there is a wafer.

7. The cleaning system for FOUP according to claim 6, characterized by: Each of the locks has a lock catch exposed on the periphery of the door body, when each of the locks is driven to be locked, the lock catch protrudes out of the periphery of the door body, the door opening and closing device further comprises a door body detection module arranged on the carrying platform, the door body detection module has a plurality of lock catch sensors distributed around the door body, the control device controls the switch module to drive the locks to be locked and controls the lock catch sensors to respectively sense whether the lock catch of the lock exists upward after controlling the robot arm to detach the box body from the door body.

8. The cleaning system for FOUP according to claim 1, characterized by: The cleaning system for FOUPs further comprises a door body cleaning device disposed in the cleaning space, the door body cleaning device comprising a first cleaning tank capable of accommodating the door body conveyed by the robot arm, a first rotary disc module disposed in the first cleaning tank and capable of carrying the door body placed in the first cleaning tank, and a first water spraying module disposed in the first cleaning tank, the first rotary disc module being capable of being controlled by the control device to drive the carried door body to rotate relative to the first water spraying module, the first water spraying module having an upper water sprayer and a lower water sprayer located above and below the door body respectively, the first water spraying module being capable of being controlled by the control device to spray cleaning water to the top side and the bottom side of the door body via the upper water sprayer and the lower water sprayer respectively.

9. The cleaning system for FOUP according to claim 1 or 8, wherein: The cleaning system for FOUPs further comprises a door body cleaning device disposed in the cleaning space, the door body cleaning device comprising a first cleaning tank capable of accommodating the door body conveyed by the robot arm, a first rotary disc module disposed in the first cleaning tank and capable of carrying the door body placed in the first cleaning tank, and a first water spraying module disposed in the first cleaning tank, the first rotary disc module being capable of being controlled by the control device to drive the carried door body to rotate relative to the first water spraying module, the first water spraying module having an upper water sprayer and a lower water sprayer located above and below the door body respectively, the first water spraying module being capable of being controlled by the control device to spray cleaning water to the top side and the bottom side of the door body via the upper water sprayer and the lower water sprayer respectively.

10. The cleaning system for FOUP according to claim 9, characterized by: The left and right side surfaces of the inner wall of the cassette body are provided with a plurality of upper and lower spaced side bearing ribs, and the cleaning system further comprises a layer distance detection device disposed in the cleaning space, the layer distance detection device comprising a seat body for positioning the cassette body by the robot arm, a shifting module disposed in the seat body, and two first image capture devices disposed in the shifting module, the shifting module being capable of being controlled by the control device to drive the first image capture devices to shift into the cassette body, and the first image capture devices being capable of being controlled by the control device to capture images of the left and right side bearing ribs respectively.

11. The cleaning system for FOUP according to claim 10, wherein: The rear surface of the inner wall of the cassette body is provided with a plurality of upper and lower spaced intermediate bearing ribs, and the layer distance detection device further comprises a second image capture device disposed in the shifting module, the second image capture device being capable of being driven by the shifting module to shift into the cassette body and being capable of being controlled by the control device to capture images of the intermediate bearing ribs.

12. The cleaning system for FOUP according to claim 8, characterized by: The door body cleaning device further comprises a first drying tank capable of accommodating the door body conveyed by the robot arm, and a first heating module disposed in the first drying tank, the first heating module being capable of being controlled by the control device to heat the door body.

13. The cleaning system for FOUP according to claim 9, characterized by: The cleaning system for FOUP further comprises a box body drying device for being arranged in the cleaning space, the box body drying device comprises a second drying groove body for the mechanical arm to place the box body opening downwardly, and a second heating module arranged in the second drying groove body, the second heating module can be controlled to be heated to heat the box body.

Images