Connecting bracket for PVD (Physical Vapor Deposition) host and wafer loading interface

Abstract

The utility model provides a connecting bracket for a PVD (Physical Vapor Deposition) host and a wafer loading interface. The connecting bracket comprises a left bracket assembly and a right bracket assembly, the left support assembly and the right support assembly are symmetrically arranged at the two ends of a main machine frame of the PVD main machine and connected with the main machine frame. The left support assembly comprises a left main connecting support, a left connector support and a connecting plate. The right support assembly comprises a right main connecting support, a right interface support and a connecting plate, the left main connecting support and the right main connecting support are of the same structure and are symmetrically arranged to be connected with the main rack, and the left interface support and the right interface support are of the same structure and are symmetrically arranged to be connected with the wafer loading interface; the left main connecting support comprises a first connecting part and a second connecting part which are vertically bent, the left connector support comprises a third connecting part and a fourth connecting part which are vertically bent, and the connecting plate, the second connecting part and the third connecting part are sequentially attached and fixedly connected through screws; the first connecting part is connected with the main frame, and the fourth connecting part is connected with the wafer loading interface.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and in particular relates to a connection bracket for the interface between a PVD host and a wafer loading interface. Background Technology

[0002] Physical vapor deposition (PVD) is a technique that uses physical methods under vacuum conditions to vaporize the surface of a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them into ions, and then deposits a thin film with a specific function on the substrate surface through a low-pressure gas (or plasma) process.

[0003] In semiconductor technology, thin-film sputtering is the primary process for metal interconnection, with metal sputtering deposition performed in a PVD (Polymerization and Deposition) machine. The Standard Mechanical Interface (SMIF) is a standard mechanical interface primarily used in semiconductor manufacturing to ensure that chips are not exposed to the cleanroom environment during operation, thereby preventing contamination and improving production efficiency. The wafer loading interface, which holds the wafer, needs to connect to the main support of the PVD machine to facilitate the contamination-free transfer of the wafer to the PVD machine. Therefore, it is necessary to provide a connection support for the PVD machine and the wafer loading interface. Utility Model Content

[0004] This invention provides a connection bracket for a PVD host and a wafer loading interface, enabling a quick and secure connection between the main bracket of the PVD host and the wafer loading interface.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A connection bracket for a PVD host and a wafer loading interface includes a left bracket assembly and a right bracket assembly. The left and right bracket assemblies are symmetrically arranged at both ends of the host frame of the PVD host and connected to the host frame. The left bracket assembly includes a left main connection bracket, a left interface bracket, and a connection plate. The right bracket assembly includes a right main connection bracket, a right interface bracket, and a connection plate. The left main connection bracket and the right main connection bracket have the same structure and are symmetrically arranged to connect to the host frame. The left interface bracket and the right interface bracket have the same structure and are symmetrically arranged to connect to the wafer loading interface. The left main connection bracket includes a first connecting portion and a second connecting portion that are vertically bent. The left interface bracket includes a third connecting portion and a fourth connecting portion that are vertically bent. The connection plate, the second connecting portion, and the third connecting portion are sequentially fitted together and fixed by screws. The first connecting portion is connected to the host frame, and the fourth connecting portion is connected to the wafer loading interface.

[0007] Preferably, the connecting plate is provided with a first fixing hole, the second connecting part is provided with a waist-shaped hole in the transverse direction corresponding to the first fixing hole, and the third connecting part is provided with a second fixing hole corresponding to the first fixing hole; the connecting plate, the second connecting part and the third connecting part are connected and fixed by screws that pass through the first fixing hole, the waist-shaped hole and the second fixing hole in sequence.

[0008] Preferably, when the connecting plate, the second connecting part, and the third connecting part are connected, the first connecting part and the fourth connecting part are located on the same side of the second connecting part and the third connecting part.

[0009] Preferably, a connecting protrusion is provided on one side edge of the connecting plate, and the first connecting part is provided with a snap-in groove that matches the connecting protrusion and a sliding groove that communicates with the snap-in groove. When the connecting protrusion passes through the snap-in groove and moves to the end of the sliding groove, the connecting plate is fitted with the second connecting part.

[0010] Preferably, the first connecting portion extends downward and is provided with a mounting hole, and the first connecting portion is connected to the main bracket by a screw passing through the mounting hole.

[0011] Preferably, the fourth connecting part is provided with a mounting groove, which is arranged laterally to connect to the wafer loading interface.

[0012] Preferably, there are two mounting slots, which are arranged in parallel at the upper end of the fourth connecting part.

[0013] Preferably, both the left support assembly and the right support assembly are made of aluminum alloy.

[0014] Compared with the prior art, the technical solution of this utility model has beneficial effects.

[0015] For example, the connection bracket for the PVD host and the wafer loading interface includes a left bracket assembly and a right bracket assembly. The left and right bracket assemblies are symmetrically arranged at both ends of the main frame of the PVD host and connected to the main frame. The left bracket assembly includes a left main connection bracket, a left interface bracket, and a connection plate. The right bracket assembly includes a right main connection bracket, a right interface bracket, and a connection plate. The left main connection bracket and the right main connection bracket have the same structure and are symmetrically arranged to connect to the main frame. The left interface bracket and the right interface bracket have the same structure and are symmetrically arranged to connect to the wafer loading interface. The left main connection bracket includes a first connecting part and a second connecting part that are vertically bent. The left interface bracket includes a third connecting part and a fourth connecting part that are vertically bent. The connection plate, the second connecting part, and the third connecting part are sequentially fitted together and fixed by screws. The first connecting part is connected to the main frame, and the fourth connecting part is connected to the wafer loading interface. This enables a quick and secure connection between the main bracket of the PVD host and the wafer loading interface. Attached Figure Description

[0016] Figure 1 This is a rear view of the connection bracket for the PVD host and the wafer loading interface in this embodiment of the present invention.

[0017] Figure 2 This is a side view of the connection bracket connecting the PVD host and the wafer loading interface in an embodiment of this utility model.

[0018] Figure 3 This is a schematic diagram of the left support assembly structure in an embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the left main connecting bracket structure in an embodiment of this utility model;

[0020] Figure 5 This is a schematic diagram of the left interface bracket structure in an embodiment of this utility model;

[0021] Figure 6 This is a schematic diagram of the connecting plate structure in an embodiment of this utility model;

[0022] Figure 7 This is a schematic diagram of the right main connecting bracket, right interface bracket and connecting plate assembled into a right bracket assembly in an embodiment of this utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Main unit rack;

[0025] 2. Left main connecting bracket; 21. First connecting part; 211. Snap-in groove; 212. Sliding groove; 213. Mounting hole; 22. Second connecting part; 221. Waist-shaped hole;

[0026] 3. Left interface bracket; 31. Third connecting part; 311. Second fixing hole; 32. Fourth connecting part; 321. Mounting slot;

[0027] 4. Connecting plate; 41. First fixing hole; 42. Connecting protrusion;

[0028] 5. Right main connecting bracket;

[0029] 6. Right interface bracket. Detailed Implementation

[0030] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.

[0031] Figure 1 This is a rear view of the connection bracket for the PVD host and the wafer loading interface in this embodiment of the present invention. Figure 2 This is a side view of the connection bracket connecting the PVD host and the wafer loading interface in an embodiment of this utility model. Figure 3 This is a schematic diagram of the left support assembly structure in an embodiment of this utility model; Figure 4 This is a schematic diagram of the left main connecting bracket structure in an embodiment of this utility model; Figure 5 This is a schematic diagram of the left interface bracket structure in an embodiment of this utility model; Figure 6 This is a schematic diagram of the connecting plate structure in an embodiment of this utility model; Figure 7 This is a schematic diagram of the right main connecting bracket, right interface bracket and connecting plate assembled into a right bracket assembly in an embodiment of this utility model.

[0032] Reference Figures 1-7 This utility model embodiment provides a connection bracket for a PVD host and a wafer loading interface.

[0033] Specifically, the connection bracket for the PVD host and the wafer loading interface includes a left bracket assembly and a right bracket assembly. The left and right bracket assemblies are symmetrically arranged at both ends of the host frame 1 of the PVD host and connected to the host frame 1. The left bracket assembly includes a left main connecting bracket 2, a left interface bracket 3, and a connecting plate 4. The right bracket assembly includes a right main connecting bracket 5, a right interface bracket 6, and a connecting plate 4. The left main connecting bracket 2 and the right main connecting bracket 5 have the same structure and are symmetrically arranged to connect the host frame 1. The left interface bracket 3 and the right interface bracket 6 have the same structure and are symmetrically arranged to connect the wafer loading interface. The left main connecting bracket 2 includes a first connecting part 21 and a second connecting part 22 that are vertically bent. The left interface bracket 3 includes a third connecting part 31 and a fourth connecting part 32 that are vertically bent. The connecting plate 4, the second connecting part 22, and the third connecting part 31 are sequentially fitted together and fixed by screws. The first connecting part 21 is connected to the host frame 1, and the fourth connecting part 32 is connected to the wafer loading interface, realizing a quick and fixed connection between the main bracket 1 of the PVD host and the wafer loading interface.

[0034] In some embodiments, the connecting plate 4 is provided with a first fixing hole 41, the second connecting part 22 is provided with a waist-shaped hole 221 in the transverse direction corresponding to the first fixing hole 41, and the third connecting part 31 is provided with a second fixing hole 311 in the transverse direction corresponding to the first fixing hole 41; the connecting plate 4, the second connecting part 22 and the third connecting part 31 are connected and fixed by screws that pass through the first fixing hole 41, the waist-shaped hole 221 and the second fixing hole 311 in sequence; the second connecting part 22 is located between the connecting plate 4 and the third connecting part 31, making the fixation more reliable; the transverse waist-shaped hole 221 design in the second connecting part 22 is conducive to fine adjustment of the relative position of the second connecting part 22 and the third connecting part 31, which is beneficial for subsequent installation.

[0035] In some embodiments, when the connecting plate 4, the second connecting portion 22, and the third connecting portion 31 are present, the first connecting portion 21 and the fourth connecting portion 32 are located on the same side of the second connecting portion 22 and the third connecting portion 31.

[0036] In some embodiments, a connecting protrusion 42 is provided on one side edge of the connecting plate 4, and the first connecting part 21 is provided with a snap-in groove 211 that matches the connecting protrusion 42 and a sliding groove 212 that communicates with the snap-in groove 211. When the connecting protrusion 42 passes through the snap-in groove 211 and moves to the end of the sliding groove 212, the connecting plate 4 and the second connecting part 22 are fitted together. At the same time, the connecting plate 4 and the second connecting part 22 are fitted together, and the connecting plate 4 and the first connecting part 21 are snapped together, making the connection more reliable. At the same time, the second connecting part 22 and the third connecting part 31 are guided when their positions are finely adjusted.

[0037] In some embodiments, the first connecting portion 21 extends downward and is provided with a mounting hole 213, and the first connecting portion 21 is connected to the main bracket 1 by a screw passing through the mounting hole 213.

[0038] In some embodiments, the fourth connection portion 32 is provided with a mounting groove 321, which is arranged laterally to connect to the wafer loading interface.

[0039] In some embodiments, there are two mounting slots 321, which are arranged in parallel at the upper end of the fourth connecting portion 32.

[0040] In some embodiments, both the left and right support assemblies are made of aluminum alloy, which makes the structure robust while being lighter in weight.

[0041] Specifically, the left main connecting bracket 2 and the right main connecting bracket 5 have the same structure and are symmetrically arranged. The left interface bracket 3 and the right interface bracket 6 have the same structure and are symmetrically arranged. The structure of the right main connecting bracket 5 and the right interface bracket 6 will not be repeated. The connection method between the right main connecting bracket 5, the right interface bracket 6 and the connecting plate 4 is the same as the connection method between the left main connecting bracket 2, the left interface bracket 3 and the connecting plate 4, and will not be repeated.

[0042] In summary, the connection bracket for connecting a PVD host and a wafer loading interface provided by this utility model includes a left bracket assembly and a right bracket assembly. The left and right bracket assemblies are symmetrically arranged at both ends of the host frame 1 of the PVD host and connect to the host frame 1. The left bracket assembly includes a left main connecting bracket 2, a left interface bracket 3, and a connecting plate 4. The right bracket assembly includes a right main connecting bracket 5, a right interface bracket 6, and a connecting plate 4. The left main connecting bracket 2 and the right main connecting bracket 5 have the same structure and are symmetrically arranged to connect to the host frame 1. The interface bracket 3 and the right interface bracket 6 have the same structure and are symmetrically arranged to connect the wafer loading interface; the left main connecting bracket 2 includes a first connecting part 21 and a second connecting part 22 that are vertically bent, and the left interface bracket 3 includes a third connecting part 31 and a fourth connecting part 32 that are vertically bent. The connecting plate 4, the second connecting part 22 and the third connecting part 31 are sequentially attached and fixed by screws; the first connecting part 21 is connected to the main frame 1, and the fourth connecting part 32 is connected to the wafer loading interface, so as to realize the quick fixed connection between the main bracket 1 of the PVD host and the wafer loading interface.

[0043] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.

[0044] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A connection bracket for a PVD mainframe and wafer loading interface, characterized by, The left support assembly and the right support assembly are symmetrically arranged at both ends of the main frame of the PVD main machine to connect the main frame, the left support assembly comprises a left main connecting support, a left interface support and a connecting plate, the right support assembly comprises a right main connecting support, a right interface support and a connecting plate, the left main connecting support and the right main connecting support are the same in structure and symmetrically arranged to connect the main frame, the left interface support and the right interface support are the same in structure and symmetrically arranged to connect the wafer loading interface, the left main connecting support comprises a first connecting part and a second connecting part arranged vertically and bent, the left interface support comprises a third connecting part and a fourth connecting part arranged vertically and bent, the connecting plate, the second connecting part and the third connecting part are sequentially and closely arranged and fixed by a screw, the first connecting part is connected with the main frame, and the fourth connecting part is connected with the wafer loading interface.

2. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, characterized in that, The connecting plate is provided with a first fixing hole, the second connecting part is provided with a waist-shaped hole corresponding to the first fixing hole, and the third connecting part is provided with a second fixing hole corresponding to the first fixing hole, and the connecting plate, the second connecting part and the third connecting part are fixed by a screw sequentially penetrating through the first fixing hole, the waist-shaped hole and the second fixing hole.

3. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, wherein, When the connecting plate, the second connecting part and the third connecting part are connected, the first connecting part and the fourth connecting part are located on the same side of the second connecting part and the third connecting part.

4. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, characterized in that, One side edge of the connecting plate is provided with a connecting protrusion, the first connecting part is provided with a clamping groove matched with the connecting protrusion and a sliding groove communicated with the clamping groove, and when the connecting protrusion penetrates through the clamping groove and moves to the end of the sliding groove, the connecting plate is closely arranged with the second connecting part.

5. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, wherein, The first connecting part extends to a lower end and is provided with a mounting hole, and the first connecting part is connected with the main support by a screw penetrating through the mounting hole.

6. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, wherein, The fourth connecting part is provided with a mounting groove, and the mounting groove is transversely arranged to connect the wafer loading interface.

7. The connection bracket for PVD mainframe and wafer loading interface according to claim 6, characterized in that, The mounting groove is two, and the two mounting grooves are parallelly arranged at the upper end of the fourth connecting part.

8. The connection bracket for PVD mainframe and wafer loading interface according to claim 1, wherein, The materials of the left support assembly and the right support assembly are both aluminum alloy.

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