Single crystal silicon rod extraction device

Abstract

The utility model provides a single crystal silicon rod extraction device, relates to the technical field of single crystal silicon rods, and is used for solving the technical problems of long working time and falling risk of the single crystal silicon rods during extraction of the single crystal silicon rods in related technologies. The single crystal silicon rod extraction device comprises a barrel and at least two locking assemblies, the top of the barrel is connected with a single crystal furnace lifting arm, and the locking assemblies are arranged on the barrel; a single crystal silicon rod can pass through the bottom of the cylinder body, so that the single crystal silicon rod is arranged in the cylinder body; the at least two locking assemblies are arranged on the outer peripheral wall of the cylinder body at intervals in the circumferential direction of the cylinder body; the locking assembly comprises an elastic piece, a synchronous connecting rod and at least one abutting plate. The two ends, in the elastic stretching and retracting direction, of the elastic piece are connected with the peripheral wall of the barrel and the synchronous connecting rod correspondingly. At least one abutting plate is arranged in the cylinder, and at least one connecting rod on the synchronous connecting rod extends into the cylinder from a through hole in the peripheral wall of the cylinder and is connected with the corresponding abutting plate; the abutting plate abuts against the peripheral wall of the single crystal silicon rod, so that the single crystal silicon rod is firmly grabbed, and the single crystal silicon rod is prevented from falling off.

Description

Technical Field

[0001] This application relates to the field of single-crystal silicon rod technology, and in particular to a single-crystal silicon rod extraction device. Background Technology

[0002] The growth process of single-crystal silicon rods is one of the key steps in the semiconductor industry to manufacture high-purity single-crystal silicon. During the growth process, after the rod reaches a certain length or breaks, it needs to be removed from the single-crystal furnace. This process is called rod removal. Careful handling is required when removing the rod to ensure its quality and integrity.

[0003] In related technologies, steel wire ropes are used to lift the crystal ingots out of the furnace. However, the temperature of the freshly grown crystal ingots is high, and the steel wire ropes need to be tied to the crystal ingots after the temperature drops, resulting in wasted time; at the same time, there is a risk of the crystal ingots falling during the process of using steel wire ropes to extract them, which is unsafe. Utility Model Content

[0004] In view of the above problems, this application provides a single-crystal silicon rod extraction device to solve the problems of long working time and risk of single-crystal silicon rod falling during extraction in related technologies.

[0005] To achieve the above objectives, the embodiments of this application provide the following technical solutions:

[0006] This application provides a single-crystal silicon rod extraction device, comprising: a cylindrical body, one radial end of which is configured to be connected to the lifting arm of a single-crystal furnace, and the other radial end of which is configured to allow the single-crystal silicon rod to pass through, so as to place the single-crystal silicon rod in the cylindrical body; at least two locking components, which are circumferentially spaced on the outer peripheral wall of the cylindrical body; each locking component includes: an elastic element, a synchronous connecting rod, and at least one abutting plate, wherein the two ends of the elastic element along its elastic extension direction are respectively fixedly connected to the outer peripheral wall of the cylindrical body and the synchronous connecting rod; at least one abutting plate is disposed in the cylindrical body, and at least one connecting rod disposed on the synchronous connecting rod extends into the cylindrical body from a through hole on the outer peripheral wall of the cylindrical body and is connected to a corresponding abutting plate; when the abutting plate abuts against the outer peripheral wall of the single-crystal silicon rod, the abutting plate pushes the synchronous connecting rod away from the outer peripheral wall of the cylindrical body, and the synchronous connecting rod drives the elastic element to elastically extend.

[0007] In one embodiment of this application, at least one of the abutment plates is arranged at equal radial intervals along the cylinder.

[0008] In one embodiment of this application, the width of the through hole is smaller than the width of the abutment plate along the radial direction of the cylinder; or, the width of the through hole is smaller than the width of the abutment plate along the circumferential direction of the cylinder.

[0009] In one embodiment of this application, the locking assembly further includes: a rotating shaft; one end of the connecting rod includes a first connecting plate and a second connecting plate spaced apart, the front side of the abutment plate abuts against the outer peripheral wall of the single crystal silicon rod, and the back side of the abutment plate is provided with a first connecting protrusion, which is fixedly connected between the first connecting plate and the second connecting plate; the other end of the connecting rod includes a third connecting plate and a fourth connecting plate spaced apart, the third connecting plate and the fourth connecting plate are respectively provided on both sides of the synchronous connecting rod along its thickness direction, the third connecting plate is provided with a first rotating hole, and the fourth connecting plate is provided with a second rotating hole; the synchronous connecting rod is provided with a third rotating hole, and the rotating shaft is rotatably connected to the first rotating hole, the second rotating hole, and the third rotating hole.

[0010] In one embodiment of this application, the locking assembly further includes: a first connector; a first connecting plate is provided with a first connecting hole, a second connecting plate is provided with a second connecting hole, a third connecting hole is provided on the first connecting protrusion, and the first connector is connected to the first connecting hole, the second connecting hole and the third connecting hole.

[0011] In one embodiment of this application, the locking assembly further includes: a limiting shaft; the through hole includes a first inner wall and a second inner wall that are opposite to each other along the circumference of the cylinder, and the two ends of the limiting shaft are respectively fixedly connected to the first inner wall and the second inner wall; the connecting rod is provided with a fourth rotating hole, and the limiting shaft is rotatably connected to the fourth rotating hole.

[0012] In one embodiment of this application, the locking assembly further includes: a second connector and a third connector; a second connecting protrusion is provided on the outer peripheral wall of the cylinder, and a fourth connecting hole is provided on the second connecting protrusion; a first adapter plate and a second adapter plate are respectively provided at both ends of the elastic member along its elastic extension direction, a sixth connecting hole is provided on the first adapter plate, and a seventh connecting hole is provided on the second adapter plate; the second connector and the fourth connecting hole are fixedly connected to the sixth connecting hole; a third connecting protrusion is provided at one end of the synchronous connecting rod along its length direction, and a fifth connecting hole is provided on the third connecting protrusion; the third connector and the fifth connecting hole are fixedly connected to the seventh connecting hole.

[0013] In one embodiment of this application, the single crystal silicon rod extraction device further includes: a connecting joint and at least two connecting arms; at least two fourth connecting protrusions are provided at one end of the cylinder along its radial direction, and the at least two fourth connecting protrusions are arranged at equal intervals along the circumference of the cylinder; one end of the at least two connecting arms is fixedly connected to a corresponding fourth connecting protrusion, and the other end of the at least two connecting arms is fixedly connected to the connecting joint, and the connecting joint is configured to be fixedly connected to the lifting arm of the single crystal furnace.

[0014] In one embodiment of this application, the connecting joint is disposed on the central axis of the cylinder.

[0015] In one embodiment of this application, one end of the connecting arm includes a fifth connecting plate and a sixth connecting plate spaced apart, and the fourth connecting protrusion is fixedly disposed between the fifth connecting plate and the sixth connecting plate.

[0016] The thermal protection structure provided in this application has the following technical effects:

[0017] The monocrystalline silicon rod extraction device provided in this application embodiment can quickly remove fallen monocrystalline silicon rods, reduce wasted labor time, and improve the safety of personnel during operation; it can also be matched with monocrystalline silicon rods of various specifications; at the same time, the monocrystalline silicon rod extraction device has low manufacturing cost and is easy to operate. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 Schematic diagram of the single-crystal silicon rod extraction device provided in the embodiments of this application Figure 1 ;

[0020] Figure 2 Schematic diagram of the single-crystal silicon rod extraction device provided in the embodiments of this application Figure 2 ;

[0021] Figure 3 This is a schematic diagram of the locking assembly provided in an embodiment of this application;

[0022] Figure 4 This is a schematic diagram of the connecting rod provided in an embodiment of this application;

[0023] Figure 5 This is a schematic diagram of the structure of the abutment plate provided in an embodiment of this application;

[0024] Figure 6 This is a schematic diagram of the structure of the limiting shaft provided in an embodiment of this application;

[0025] Figure 7 This is a schematic diagram of the structure of the cylinder provided in an embodiment of this application;

[0026] Figure 8 This is a partially enlarged structural diagram of the cylinder provided in an embodiment of this application;

[0027] Figure 9 A schematic diagram of the connection structure between the elastic element and the synchronizing link provided in an embodiment of this application;

[0028] Figure 10 This is a partially enlarged structural schematic diagram of the elastic element provided in the embodiments of this application;

[0029] Figure 11 This is a schematic diagram of the structure of the synchronization link provided in an embodiment of this application;

[0030] Figure 12 A partially enlarged structural schematic diagram of the synchronization link provided in an embodiment of this application;

[0031] Figure 13 This is a schematic diagram of the structure of the connection joint provided in the embodiments of this application;

[0032] Figure 14 This is a schematic diagram of the connecting arm provided in an embodiment of this application.

[0033] Figure label:

[0034] 100 - Cylinder;

[0035] 101 - Through hole; 102 - Second connecting protrusion; 103 - Fourth connecting hole; 104 - Fourth connecting protrusion; 105 - Tenth connecting hole;

[0036] 200 - Locking assembly;

[0037] 201-Elastic element; 202-Synchronous connecting rod; 203-Abutting plate; 204-Connecting rod; 205-Limiting shaft;

[0038] 2011 - First adapter plate; 2012 - Sixth connecting hole; 2021 - Third rotating hole; 2022 - Third connecting protrusion; 2023 - Fifth connecting hole; 2031 - First connecting protrusion; 2032 - Third connecting hole; 2041 - First connecting plate; 2042 - Second connecting plate; 2043 - Third connecting plate; 2044 - Fourth connecting plate; 2045 - First rotating hole; 2046 - Second rotating hole; 2047 - First connecting hole; 2048 - Second connecting hole; 2049 - Fourth rotating hole;

[0039] 300-Connector;

[0040] 301 - Seventh connecting plate; 302 - First fixing hole;

[0041] 400-Connecting Arm;

[0042] 401 - Fifth connecting plate; 402 - Sixth connecting plate; 403 - Eighth connecting hole; 404 - Ninth connecting hole; 405 - Second fixing hole. Detailed Implementation

[0043] To make the above-mentioned objectives, features, and advantages of the embodiments of this application more apparent and understandable, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0044] In this embodiment of the application, the radial direction of the cylinder is the z-axis shown in the figure, and the circumferential direction of the cylinder is the y-axis shown in the figure.

[0045] refer to Figure 1 , Figure 2 and Figure 3 The single-crystal silicon rod extraction device provided in this application embodiment includes: a cylinder 100 and at least two locking components 200.

[0046] The cylindrical body 100 includes a top and a bottom along its radial direction, both of which have openings. The top of the cylindrical body 100 is used to connect to the lifting arm of the single crystal furnace, which can drive the cylindrical body 100 to move up and down in the vertical direction. The opening at the bottom of the cylindrical body 100 allows the single crystal silicon rod to pass through. When it is necessary to remove the fallen single crystal silicon rod, the lifting arm is driven to move the cylindrical body 100 downward, aligning the opening at the bottom of the cylindrical body 100 with the single crystal silicon rod, so as to place the single crystal silicon rod in the cylindrical body 100.

[0047] At least two locking components 200 are arranged at intervals along the circumference of the cylinder 100 on the outer peripheral wall of the cylinder 100. Each locking component 200 includes: an elastic element 201, a synchronizing rod 202, at least one abutment plate 203 and at least one connecting rod 204, and the number of abutment plates 203 and connecting rods 204 are the same.

[0048] The two ends of the elastic element 201 along its elastic extension direction are fixedly connected to the outer peripheral wall of the cylinder 100 and the first end of the synchronous connecting rod 202, respectively. The extension direction of the synchronous connecting rod 202 is parallel to the radial direction of the cylinder 100, and the second end of the synchronous connecting rod 202 is opposite to the first end along the radial direction of the cylinder 100.

[0049] At least one connecting rod 204 is provided on the synchronous link 202.

[0050] At least one abutment plate 203 is disposed inside the cylinder 100.

[0051] At least one through hole 101 is provided on the outer peripheral wall of the cylinder 100. Each connecting rod 204 extends into the cylinder 100 through a corresponding through hole 101 and is connected to a corresponding abutment plate 203.

[0052] When the opening at the bottom of the cylinder 100 is aligned with the monocrystalline silicon rod, and the monocrystalline silicon rod slowly moves into the cylinder 100, the abutment plate 203 will abut against the outer peripheral wall of the monocrystalline silicon rod. The abutment plate 203 will be subjected to a pushing force from the center of the cylinder 100 toward the outer peripheral wall of the cylinder 100, and the abutment plate 203 will move toward the outer peripheral wall of the cylinder 100. At the same time, the abutment plate 203 will push the connecting rod 204 to move, and the connecting rod 204 will drive the synchronous connecting rod 202 away from the outer peripheral wall of the cylinder 100. When the synchronous connecting rod 202 moves away from the outer peripheral wall of the cylinder 100, it will drive the elastic element 201 to elastically extend.

[0053] At this time, the rebound force of the elastic element 201 will act on the synchronous connecting rod 202, the connecting rod 204 and the abutment plate 203 to ensure that the abutment plate 203 can stick tightly to the outer peripheral wall of the monocrystalline silicon rod, thereby holding the monocrystalline silicon rod firmly and preventing the monocrystalline silicon rod from falling during the upward movement.

[0054] In other words, the monocrystalline silicon rod extraction device provided in this application embodiment can quickly remove fallen monocrystalline silicon rods, reduce wasted time, and improve the safety of personnel during operation; it can also be matched with monocrystalline silicon rods of various specifications; at the same time, the monocrystalline silicon rod extraction device has low manufacturing cost and is easy to operate.

[0055] In this embodiment, at least two locking components 200 are arranged at equal intervals, so that the at least two locking components 200 are evenly distributed on the outer peripheral wall of the cylinder 100; this allows the outer peripheral wall of the monocrystalline silicon rod to be uniformly stressed along the circumference of the cylinder 100, thereby improving the stability of the monocrystalline silicon rod moving upward.

[0056] In this embodiment, three locking components 200 may be provided at equal intervals along the circumferential direction of the cylinder 100 on the outer peripheral wall of the cylinder 100.

[0057] In this embodiment, at least one connecting rod 204 is arranged at equal radial intervals on the synchronous connecting rod 202 along the cylinder 100. Correspondingly, at least one abutment plate 203 is arranged at equal radial intervals along the cylinder 100, and at least one through hole 101 is also arranged at equal radial intervals along the cylinder 100. This allows the outer peripheral wall of the single crystal silicon rod to be uniformly stressed along the radial direction of the cylinder 100, thereby improving the stability of the single crystal silicon rod moving upward.

[0058] In this application embodiment, each locking component 200 may include three connecting rods 204 and three abutment plates 203.

[0059] refer to Figure 6 In this embodiment, along the radial direction of the cylinder 100 (z-axis shown in the figure), the width of the through hole 101 is less than the width of the abutment plate 203; or, along the circumferential direction of the cylinder 100 (y-axis shown in the figure), the width of the through hole 101 is less than the width of the abutment plate 203. This prevents the abutment plate 203 from extending out of the cylinder 100 through the through hole 101.

[0060] refer to Figure 3 , Figure 4 and Figure 5 In this embodiment of the application, the locking assembly 200 further includes: a rotating shaft and a first connecting member.

[0061] One end of the connecting rod 204 includes a first connecting plate 2041 and a second connecting plate 2042 spaced apart. The first connecting plate 2041 is provided with a first connecting hole 2047, and the second connecting plate 2042 is provided with a second connecting hole 2048.

[0062] The front of the abutment plate 203 abuts against the outer peripheral wall of the monocrystalline silicon rod, and the back of the abutment plate 203 is provided with a first connecting protrusion 2031, and a third connecting hole 2032 is provided on the first connecting protrusion 2031.

[0063] The first connecting protrusion 2031 is disposed between the first connecting plate 2041 and the second connecting plate 2042. The first connector is connected to the first connecting hole 2047, the second connecting hole 2048 and the third connecting hole 2032, so that the first connecting protrusion 2031 is fixedly connected between the first connecting plate 2041 and the second connecting plate 2042, thereby realizing the fixed connection between the connecting rod 204 and the abutment plate 203.

[0064] The other end of the connecting rod 204 also includes a third connecting plate 2043 and a fourth connecting plate 2044 spaced apart, with the third connecting plate 2043 and the fourth connecting plate 2044 respectively disposed on both sides of the synchronous connecting rod 202 along its thickness direction.

[0065] The third connecting plate 2043 is provided with a first rotating hole 2045, and the fourth connecting plate 2044 is provided with a second rotating hole 2046; the synchronous connecting rod 202 is provided with a third rotating hole 2021, and the rotating shaft is rotatably connected to the first rotating hole 2045, the second rotating hole 2046 and the third rotating hole 2021.

[0066] refer to Figure 4 and Figure 6 In this embodiment of the application, the locking component 200 further includes a limiting shaft 205.

[0067] The through hole 101 includes a first inner wall and a second inner wall that are opposite each other along the circumference (y-axis shown in the figure) of the cylinder 100. The two ends of the limiting shaft 205 are fixedly connected to the first inner wall and the second inner wall respectively. A fourth rotating hole 2049 is provided on the connecting rod 204, and the limiting shaft 205 is rotatably connected to the fourth rotating hole 2049.

[0068] In other words, a limiting shaft 205 is also provided inside the through hole 101. When the connecting rod 204 passes through the through hole 101 and extends into the cylinder 100, the connecting rod 204 is rotatably connected to the limiting shaft 205, and the connecting rod 204 can rotate around the limiting shaft 205; so as to limit the connecting rod 204 and improve the installation stability of the connecting rod 204.

[0069] refer to Figures 7-12 In this embodiment of the application, the locking assembly 200 further includes a second connector and a third connector.

[0070] A second connecting protrusion 102 is provided on the outer peripheral wall of the cylinder 100 near its top, and a fourth connecting hole 103 is provided on the second connecting protrusion 102.

[0071] The elastic member 201 has a first adapter plate 2011 and a second adapter plate at both ends along its elastic extension direction. The first adapter plate 2011 has a sixth connecting hole 2012, and the second adapter plate has a seventh connecting hole.

[0072] The second connector and the fourth connecting hole 103 are all fixedly connected to the sixth connecting hole 2012, so that one end of the elastic member 201 along its elastic expansion and contraction direction is fixedly connected to the outer peripheral wall of the cylinder 100.

[0073] The synchronizing link 202 has a third connecting protrusion 2022 at one end along its length, and a fifth connecting hole 2023 is provided on the third connecting protrusion 2022.

[0074] The third connector and the fifth connecting hole 2023 are all fixedly connected to the seventh connecting hole, so that the other end of the elastic member 201 along its elastic extension and contraction direction is fixedly connected to one end of the synchronous connecting rod 202.

[0075] refer to Figure 1 , Figure 7 , Figure 8 , Figure 13 and Figure 14 In this embodiment of the application, the single crystal silicon rod extraction device further includes: a connecting joint 300 and at least two connecting arms 400.

[0076] The top of the cylinder 100 is provided with at least two fourth connecting protrusions 104, which are arranged at equal intervals along the circumference of the cylinder 100.

[0077] One end of each connecting arm 400 is fixedly connected to a corresponding fourth connecting protrusion 104, and the other end of each connecting arm 400 is fixedly connected to a connecting joint 300. The connecting joint 300 is used to fixally connect to the lifting arm of the single crystal furnace so that the lifting arm can drive the cylinder 100 to move up and down in the vertical direction.

[0078] In this embodiment, the connecting joint 300 is disposed on the central axis of the cylinder 100 to ensure the stability of the cylinder 100 when it moves up and down in the vertical direction.

[0079] refer to Figure 13 and Figure 14 In this embodiment of the application, one end of the connecting arm 400 includes a fifth connecting plate 401 and a sixth connecting plate 402 that are spaced apart, and a fourth connecting protrusion 104 is fixedly disposed between the fifth connecting plate 401 and the sixth connecting plate 402.

[0080] The single-crystal silicon rod extraction device also includes a fourth connector.

[0081] The fifth connecting plate 401 is provided with an eighth connecting hole 403, the sixth connecting plate 402 is provided with a ninth connecting hole 404, and the fourth connecting protrusion 104 is provided with a tenth connecting hole 105; the fourth connecting member is connected to the eighth connecting hole 403, the ninth connecting hole 404 and the tenth connecting hole 105, so that the fourth connecting protrusion 104 is fixedly connected between the fifth connecting plate 401 and the sixth connecting plate 402.

[0082] In this embodiment of the application, when the single crystal silicon rod extraction device includes two connecting arms 400, the single crystal silicon rod extraction device further includes two fifth connecting members.

[0083] The top of the connector 300 is fixedly connected to the lifting arm of the single crystal furnace, and the bottom of the connector 300 is provided with a seventh connecting plate 301, on which two first fixing holes 302 are provided.

[0084] Each connecting arm 400 includes a second fixing hole 405 at the other end.

[0085] The fifth connector is connected to both the first fixing hole 302 and the second fixing hole 405, so that the other end of each connecting arm 400 is fixedly connected to the connecting joint 300.

[0086] In summary, this application provides a single-crystal silicon rod extraction device, comprising: a cylindrical body 100 and at least two locking assemblies 200. One radial end of the cylindrical body 100 is configured to connect to the lifting arm of a single-crystal furnace, and the other radial end of the cylindrical body 100 is configured to allow the single-crystal silicon rod to pass through, so as to place the single-crystal silicon rod in the cylindrical body 100; at least two locking assemblies 200 are circumferentially spaced on the outer peripheral wall of the cylindrical body 100; each locking assembly 200 includes: an elastic element 201, a synchronous connecting rod 202, and at least one abutment plate 203. The two ends of the component 201 along its elastic extension direction are fixedly connected to the outer peripheral wall of the cylinder 100 and the synchronous connecting rod 202, respectively; at least one abutment plate 203 is disposed inside the cylinder 100, and at least one connecting rod 204 disposed on the synchronous connecting rod 202 extends into the cylinder 100 from the through hole 101 on the outer peripheral wall of the cylinder 100 and is connected to a corresponding abutment plate 203; when the abutment plate 203 abuts against the outer peripheral wall of the single crystal silicon rod, the abutment plate 203 pushes the synchronous connecting rod 202 away from the outer peripheral wall of the cylinder 100, and the synchronous connecting rod 202 drives the elastic component 201 to elastically extend.

[0087] In other words, the rebound force of the elastic element 201 will act on the synchronous connecting rod 202, the connecting rod 204, and the abutment plate 203, ensuring that the abutment plate 203 can tightly adhere to the outer peripheral wall of the monocrystalline silicon rod, thereby firmly gripping the monocrystalline silicon rod and preventing it from falling during upward movement. This allows for the quick removal of any fallen monocrystalline silicon rods, reducing wasted time and improving the safety of personnel during operation.

[0088] Meanwhile, the single-crystal silicon rod extraction device provided in this application embodiment can also be matched with single-crystal silicon rods of various specifications.

[0089] The various embodiments or embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.

[0090] It should be noted that the terms "one embodiment," "embodiment," "exemplary embodiment," "some embodiments," etc., mentioned in the specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Moreover, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0091] Generally speaking, terms should be understood at least in part by their use in context. For example, at least in part by context, the term "one or more" as used in the text can be used to describe any feature, structure, or characteristic of the singular meaning, or a combination of features, structures, or characteristics of the plural meaning. Similarly, at least in part by context, terms such as "a" or "the" can also be understood to convey either singular or plural usage.

[0092] It should be readily understood that the terms “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest possible sense, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0093] Furthermore, for ease of explanation, spatially relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of one element or feature relative to other elements or features as shown in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation other than those shown in the figures. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatially relative descriptive terms used herein may be interpreted accordingly.

[0094] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A device for extracting single-crystal silicon rods, characterized in that, include: A cylindrical body (100) is configured to connect to the lifting arm of a single crystal furnace at one end of its radial direction, and the other end of the cylindrical body (100) is configured to allow a single crystal silicon rod to pass through, so as to place the single crystal silicon rod in the cylindrical body (100). At least two locking components (200) are arranged circumferentially on the outer peripheral wall of the cylinder (100); The locking assembly (200) includes: an elastic element (201), a synchronous connecting rod (202) and at least one abutment plate (203), wherein the two ends of the elastic element (201) along its elastic extension direction are fixedly connected to the outer peripheral wall of the cylinder (100) and the synchronous connecting rod (202) respectively. At least one of the abutment plates (203) is disposed inside the cylinder (100), and at least one connecting rod (204) disposed on the synchronous connecting rod (202) extends into the cylinder (100) from the through hole (101) on the outer peripheral wall of the cylinder (100) and is connected to a corresponding abutment plate (203); When the abutting plate (203) abuts against the outer peripheral wall of the single crystal silicon rod, the abutting plate (203) pushes the synchronous connecting rod (202) away from the outer peripheral wall of the cylinder (100), and the synchronous connecting rod (202) drives the elastic element (201) to elastically elongate.

2. The single-crystal silicon rod extraction device according to claim 1, characterized in that, At least one of the abutment plates (203) is arranged at equal radial intervals along the cylinder (100).

3. The single-crystal silicon rod extraction device according to claim 1, characterized in that, Along the radial direction of the cylinder (100), the width of the through hole (101) is smaller than the width of the abutment plate (203); or, Along the circumference of the cylinder (100), the width of the through hole (101) is smaller than the width of the abutment plate (203).

4. The single-crystal silicon rod extraction device according to claim 1, characterized in that, The locking assembly (200) further includes: a rotating shaft; One end of the connecting rod (204) includes a first connecting plate (2041) and a second connecting plate (2042) spaced apart. The front side of the abutment plate (203) abuts against the outer peripheral wall of the single crystal silicon rod. The back side of the abutment plate (203) is provided with a first connecting protrusion (2031). The first connecting protrusion (2031) is fixedly connected between the first connecting plate (2041) and the second connecting plate (2042). The other end of the connecting rod (204) includes a third connecting plate (2043) and a fourth connecting plate (2044) spaced apart. The third connecting plate (2043) and the fourth connecting plate (2044) are respectively disposed on both sides of the synchronous connecting rod (202) along its thickness direction. The third connecting plate (2043) is provided with a first rotating hole (2045), and the fourth connecting plate (2044) is provided with a second rotating hole (2046). The synchronous connecting rod (202) is provided with a third rotating hole (2021). The rotating shaft is rotatably connected to the first rotating hole (2045), the second rotating hole (2046), and the third rotating hole (2021).

5. The single-crystal silicon rod extraction device according to claim 4, characterized in that, The locking assembly (200) further includes: a first connector; The first connecting plate (2041) is provided with a first connecting hole (2047), the second connecting plate (2042) is provided with a second connecting hole (2048), and the first connecting protrusion (2031) is provided with a third connecting hole (2032). The first connector is connected to the first connecting hole (2047), the second connecting hole (2048) and the third connecting hole (2032).

6. The single-crystal silicon rod extraction device according to claim 1, characterized in that, The locking assembly (200) further includes: a limiting shaft (205); The through hole (101) includes a first inner wall and a second inner wall that are circumferentially opposite to each other along the cylinder (100), and the two ends of the limiting shaft (205) are fixedly connected to the first inner wall and the second inner wall respectively. The connecting rod (204) is provided with a fourth rotating hole (2049), and the limiting shaft (205) is rotatably connected to the fourth rotating hole (2049).

7. The single-crystal silicon rod extraction device according to claim 1, characterized in that, The locking assembly (200) further includes: a second connector and a third connector; The outer peripheral wall of the cylinder (100) is provided with a second connecting protrusion (102), and the second connecting protrusion (102) is provided with a fourth connecting hole (103); The elastic member (201) has a first adapter plate (2011) and a second adapter plate at both ends along its elastic extension direction. The first adapter plate (2011) has a sixth connecting hole (2012), and the second adapter plate has a seventh connecting hole. The second connector and the fourth connecting hole (103) are all fixedly connected to the sixth connecting hole (2012); The synchronizing link (202) has a third connecting protrusion (2022) at one end along its length, and a fifth connecting hole (2023) is provided on the third connecting protrusion (2022); The third connector and the fifth connecting hole (2023) are all fixedly connected to the seventh connecting hole.

8. The single-crystal silicon rod extraction device according to claim 1, characterized in that, The single-crystal silicon rod extraction device further includes: a connecting joint (300) and at least two connecting arms (400); The cylinder (100) is provided with at least two fourth connecting protrusions (104) at one end along its radial direction, and the at least two fourth connecting protrusions (104) are provided at the same distance along the circumference of the cylinder (100); One end of each of the at least two connecting arms (400) is fixedly connected to a corresponding fourth connecting protrusion (104), and the other end of each of the at least two connecting arms (400) is fixedly connected to the connecting joint (300), which is configured to be fixedly connected to the lifting arm of the single crystal furnace.

9. The single-crystal silicon rod extraction device according to claim 8, characterized in that, The connecting joint (300) is located on the central axis of the cylinder (100).

10. The single-crystal silicon rod extraction device according to claim 8, characterized in that, One end of the connecting arm (400) includes a fifth connecting plate (401) and a sixth connecting plate (402) spaced apart, and the fourth connecting protrusion (104) is fixedly disposed between the fifth connecting plate (401) and the sixth connecting plate (402).

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