Dust collecting device and vacuum pump

Abstract

The embodiment of the utility model provides a dust collecting device and a vacuum pump, and relates to the technical field of vacuum pumps. The dust collecting device comprises a dust collecting pipe, a switching valve and a plurality of dust collecting grooves. The dust collecting pipe is communicated with an inlet of the switching valve. The switching valve is provided with a plurality of outlets. And the plurality of outlets are respectively communicated with the plurality of dust collecting grooves. The switching valve selectively communicates with the inlet and one of the outlets. The vacuum pump comprises a pump body and the dust collecting device. A dust collecting pipe of the dust collecting device is connected to an air outlet pipe of the pump body. The dust collection device can be cleaned under the condition that the vacuum pump does not stop, and the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum pump technical field, specifically, relate to a dust collecting device and vacuum pump. BACKGROUND

[0002] Vacuum pump as an important mechanical equipment, in the semiconductor manufacturing, pharmacy, food processing and laboratory research etc. field get wide application. Vacuum pump is often used to extract gas, to achieve the required working environment. Prior art scheme in the exhaust line of vacuum pump is provided with dust collecting device, prevent dust accumulation leads to vacuum pump blockage.

[0003] However, in the cleaning of the dust collecting device of vacuum pump, usually need to stop operation, reduce the work efficiency. UTILITY MODEL CONTENT

[0004] The utility model discloses a dust collecting device and vacuum pump, which can clean the dust collecting device without stopping the vacuum pump, improving the work efficiency.

[0005] The embodiment of the utility model can be realized as follows:

[0006] Firstly, the utility model provides a dust collecting device, including dust collecting pipe, switching valve and multiple dust collecting tanks, the dust collecting pipe is communicated with the import of switching valve, the switching valve is provided with multiple exports, multiple exports are communicated with multiple dust collecting tanks respectively, and the switching valve can select to conduct the import and one of exports.

[0007] Secondly, the utility model provides a vacuum pump, including pump body and the dust collecting device of any one of preceding embodiments, and the dust collecting pipe of dust collecting device is connected on the air pipe of pump body.

[0008] The dust collecting device and vacuum pump provided by the embodiment of the utility model have the beneficial effects of:

[0009] The dust collecting device of the utility model includes dust collecting pipe, switching valve and multiple dust collecting tanks. The dust collecting pipe is communicated with the import of switching valve. The switching valve is provided with multiple exports. Multiple exports are communicated with multiple dust collecting tanks respectively. The switching valve can select to conduct the import and one of exports. The vacuum pump of the utility model includes pump body and the dust collecting device. The dust collecting pipe of dust collecting device is connected on the air pipe of pump body. By setting switching valve and multiple dust collecting tanks in the dust collecting device, the air pipe of pump body can be communicated with one of dust collecting tanks selectively. When one of dust collecting tanks needs to be cleaned, the switching valve can be operated to make the air pipe of pump body communicated with another dust collecting tank. In the process of cleaning the dust collecting tank, the pump body does not need to stop operation, thereby improving the work efficiency of the vacuum pump. BRIEF DESCRIPTION OF DRAWINGS

[0010] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained from these drawings without creative labor.

[0011] Figure 1 The structural schematic diagram of the dust collecting device provided for the present embodiment is shown in the figure.

[0012] Figure 2 The structural schematic diagram of the vacuum pump provided for the present embodiment is shown in the figure.

[0013] Icon: 100-dust collecting device; 10-dust collecting pipe; 11-switching valve; 12-connection flange; 20-dust collecting tank; 21-weighing sensor; 22-optical dust sensor; 30-purging module; 31-branch pipe; 40-control module; 200-vacuum pump; 201-upper pump body; 202-connection pipe; 203-lower pump body; 204-tail discharge pipe. DETAILED DESCRIPTION

[0014] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0015] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of the present application.

[0016] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0017] In the description of the utility model, it needs to be explained that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or position relationship is based on the orientation or position relationship shown in the drawing, or the orientation or position relationship of the utility model product when it is usually placed, only for the convenience of describing the utility model and simplifying the description, and it is not indicated or implied that the indicated device or element must have a specific orientation, structure and operation, therefore it cannot be understood as a limitation of the utility model.

[0018] In addition, if the terms "first", "second" and the like are only used for differentiation, and cannot be understood as indicating or implying relative importance.

[0019] It needs to be explained that the features in the embodiments of the utility model can be combined with each other without conflict.

[0020] First embodiment

[0021] Please refer to Figure 1 The embodiment provides a dust collecting device 100 which is applied to a gas conveying pipeline, collects dust in the pipeline by adsorption, sedimentation and the like, and carries out dust removal on the pipeline.

[0022] Specifically, the dust collecting device 100 comprises a dust collecting pipe 10, a switching valve 11 and a plurality of dust collecting grooves 20. The dust collecting pipe 10 is in communication with the inlet of the switching valve 11. The switching valve 11 is provided with a plurality of outlets. The plurality of outlets are in communication with the plurality of dust collecting grooves 20 respectively. The switching valve 11 selectively connects the inlet and one of the outlets. It can be understood that the dust collecting pipe 10 is used for connecting the gas conveying pipeline. In the process of pipeline transportation, dust in the gas enters into the dust collecting pipe 10. The switching valve 11 is provided with an inlet and a plurality of outlets, and the switching valve 11 selectively connects the inlet and one of the outlets, so as to connect the dust collecting pipe 10 and one of the plurality of dust collecting grooves 20. The dust in the dust collecting pipe 10 falls into the dust collecting groove 20. When the dust collecting groove 20 is filled with a certain amount of dust, the switching valve 11 connects the inlet and another outlet, so as to connect the dust collecting pipe 10 and another dust collecting groove 20. At this time, the previous dust collecting groove 20 can be cleaned, non-stop operation is realized, and the work efficiency is improved.

[0023] Specifically, in the embodiment, the number of outlets of the switching valve 11 is two, and the number of dust collecting grooves 20 is two. In other embodiments, the number of outlets of the switching valve 11 and the number of dust collecting grooves 20 can be set according to specific requirements, for example, three, four and the like, and the utility model does not limit them.

[0024] Further, the dust collecting tank 20 is provided with a weighing sensor 21. The weighing sensor 21 is used to weigh the dust in the dust collecting tank 20. Specifically, the weighing sensor 21 is arranged at the bottom of the dust collecting tank 20. In the embodiment, the number of the dust collecting tank 20 is two. The weighing sensor 21 is arranged at the bottom of each of the two dust collecting tank 20 to weigh the dust in the dust collecting tank 20. It can be understood that when the weighing sensor 21 detects that the dust in one of the dust collecting tank 20 reaches a preset weight, the switching valve 11 connects the dust collecting pipe 10 and the other dust collecting tank 20 to input the dust into the other dust collecting tank 20.

[0025] Correspondingly, when the number of the dust collecting tank 20 is set to other numbers, for example, three, the weighing sensor 21 is arranged at the bottom of each of the three dust collecting tank 20. When one of the weighing sensor 21 detects that the dust in the upper dust collecting tank 20 reaches a preset weight, the switching valve 11 connects the dust collecting pipe 10 and the second dust collecting tank 20 to input the dust into the second dust collecting tank 20. When the dust in the second dust collecting tank 20 reaches the preset weight, the switching valve 11 connects the dust collecting pipe 10 and the third dust collecting tank 20 to input the dust into the third dust collecting tank 20. When the dust in the third dust collecting tank 20 reaches the preset weight, the switching valve 11 connects the dust collecting pipe 10 and the first dust collecting tank 20 again. The cycle operation is realized to improve the work efficiency.

[0026] When the number of the dust collecting tank 20 is set to more, the specific switching mode of the switching valve 11 is the same as the above mode, which will not be described here.

[0027] It should be noted that the above-mentioned preset weight can be set according to the volume of the dust collecting tank 20 and the amount of dust in the pipeline, etc. In the embodiment, the volumes of the different dust collecting tank 20 are the same, and the same preset weight can be set. In other embodiments, the volumes of the different dust collecting tank 20 can be different, and the different preset weights can be set accordingly. The utility model does not limit this.

[0028] Further, the dust collecting tank 20 is also connected with an optical dust sensor 22. The optical dust sensor 22 is used to detect the dust concentration and measure the concentration and particle size of particulate matter by optical principle. In the embodiment, the number of the dust collecting tank 20 is two. The optical dust sensor 22 is arranged on each of the two dust collecting tank 20 to measure the dust concentration in the dust collecting tank 20. It can be understood that when the optical dust sensor 22 detects that the dust concentration in one of the dust collecting tank 20 reaches a preset concentration, the switching valve 11 connects the dust collecting pipe 10 and the other dust collecting tank 20 to input the dust into the other dust collecting tank 20. At this time, the previous dust collecting tank 20 can be cleaned to realize the non-stop operation and improve the work efficiency.

[0029] Correspondingly, when the dust collecting grooves 20 are arranged in other numbers, for example, three dust collecting grooves 20 are arranged, the optical dust sensors 22 are arranged on the three dust collecting grooves 20. When one optical dust sensor 22 detects that the dust concentration of the dust collecting groove 20 reaches the preset concentration value, the switching valve 11 connects the dust collecting pipe 10 and the second dust collecting groove 20, and the dust is input into the second dust collecting groove 20. When the dust concentration of the second dust collecting groove 20 reaches the preset concentration value, the switching valve 11 connects the dust collecting pipe 10 and the third dust collecting groove 20, and the dust is input into the third dust collecting groove 20. When the dust concentration of the third dust collecting groove 20 reaches the preset concentration value, the switching valve 11 connects the dust collecting pipe 10 and the first dust collecting groove 20 again. The cycle non-stop working is realized, and the working efficiency is improved. When the dust collecting grooves 20 are arranged in more numbers, the specific switching mode of the switching valve 11 is the same as the above mode, and details are not described herein.

[0030] It should be noted that the above preset concentration value can be set according to the volume of the dust collecting groove 20 and the dust amount of the pipe, and in the embodiment, the volumes of the different dust collecting grooves 20 are the same, and the same preset concentration value can be set. In other embodiments, the volumes of the different dust collecting grooves 20 can be different, and correspondingly, different preset concentration values can be set. The utility model does not limit this.

[0031] Further, in the embodiment, the weighing sensor 21 and the optical dust sensor 22 are arranged at the same time, and the two detection modes can correct each other. The weighing sensor 21 can correct the measurement error of the optical dust sensor 22 caused by high humidity or strong light, and the optical dust sensor 22 can correct the measurement error of the weighing sensor 21 caused by device vibration, so that the dust accumulation data with higher accuracy is obtained. It can be understood that in the embodiment, the dust collecting device 100 obtains the accurate dust accumulation value according to the measured weight value of the weighing sensor 21 and the measured concentration value of the optical dust sensor 22. According to the dust accumulation value and the equipment running time, the running state of the equipment can be inferred.

[0032] In order to facilitate manual cleaning of the dust collecting groove 20, the outlet of the switching valve 11 is further provided with a connecting flange 12. The dust collecting groove 20 is detachably connected with the outlet of the switching valve 11 through the connecting flange 12. It can be understood that when the measurement values of the weighing sensor 21 and the optical dust sensor 22 reach the preset value, that is, the dust in the dust collecting groove 20 is more, the dust collecting groove 20 can be manually cleaned by being detached, and after cleaning, the dust collecting groove 20 is connected with the outlet of the switching valve 11 through the connecting flange 12.

[0033] It should be noted that the connecting flange 12 in the embodiment is provided with a lock (not shown in the figure). When the switching valve 11 is in communication with the dust collection pipe 10 and the corresponding dust collection groove 20, the connecting flange 12 is locked by the lock to avoid the disassembly of the dust collection groove 20 during the operation. Correspondingly, when the dust collection groove 20 is disassembled, the switching valve 11 is prohibited from being in communication with the dust collection pipe 10 and the outlet corresponding to the dust collection groove 20.

[0034] Further, the dust collection device 100 further comprises a blowing module 30. The blowing module 30 is connected with the dust collection groove 20 and is used for blowing gas to the dust collection groove 20. It can be understood that the blowing module 30 is suitable for the case where the amount of dust is small. The blowing module 30 continuously blows gas to the dust collection groove 20, and the dust reaching the dust collection groove 20 is immediately blown away and cannot be accumulated in the dust collection groove 20. Specifically, in the embodiment, the blowing module 30 is in communication with the bottom of the dust collection groove 20 and is used for blowing the bottom of the dust collection groove 20 to strengthen the blowing effect.

[0035] Specifically, the blowing module 30 comprises a gas blowing device. The gas blowing device is connected with the dust collection groove 20 through a plurality of branch pipelines 31. It can be understood that the gas blowing device can be a compressor, a gas pump or the like, and inert gas is introduced into the dust collection groove 20 through the branch pipelines 31 for blowing. The blowing of a plurality of dust collection grooves 20 by one gas blowing device reduces the energy consumption.

[0036] In the embodiment, the blowing module 30 is used for blowing nitrogen into the dust collection groove 20. In other embodiments, the blowing module 30 can blow other gas into the dust collection groove 20. The type of blowing gas is not limited in the utility model.

[0037] Further, the dust collection device 100 further comprises a control module 40. The control module 40 is used for controlling the switching valve 11 to be in communication with different dust collection grooves 20 according to the signals of the weighing sensor 21 and / or the optical dust sensor 22. In the embodiment, the optical dust sensor 22 and the weighing sensor 21 are electrically connected with the control module 40 respectively. The control module 40 is electrically connected with the blowing module 30 and the switching valve 11. It can be understood that when the weighing sensor 21 and the optical dust sensor 22 convert the detected dust weight and concentration signals into electrical signals and transmit the electrical signals to the control module 40, the control module 40 compares the dust weight and concentration values with corresponding preset values respectively, thereby controlling the switching valve 11 to be in communication with the dust collection pipe 10 and different dust collection grooves 20. The control module 40 can also control the blowing module 30 to start or stop.

[0038] Second embodiment

[0039] Please refer to Figure 2The embodiment provides a vacuum pump 200, which comprises a pump body and the dust collecting device 100 of the first embodiment.

[0040] Specifically, the pump body comprises an upper pump body 201 and a lower pump body 203. The gas outlet pipe comprises a connecting pipe 202 and a tail discharge pipe 204. The connecting pipe 202 is connected between the gas outlet of the upper pump body 201 and the gas inlet of the lower pump body 203. The tail discharge pipe 204 is connected to the gas outlet of the lower pump body 203. The dust collecting device 100 is arranged on the connecting pipe 202 and / or the tail discharge pipe 204.

[0041] It can be understood that the dust collecting device 100 generally captures particulate matters based on the principles of gravity settling, inertial collision, electrostatic attraction and the like. The dust collecting device 100 is crucial to ensure the performance of the pump body. The use of the dust collecting device 100 can significantly reduce the dust entering the interior of the pump body, thereby avoiding wear and performance decline caused by dust accumulation.

[0042] Optionally, in the embodiment, a double-pump vacuum pump 200 is used, which comprises the upper pump body 201 and the lower pump body 203 connected in series. The vacuum pump 200 in the embodiment is provided with two pump bodies, which can be two same pump bodies or pump bodies of different types in combination. The double-pump vacuum pump 200 can provide higher air suction rate and better vacuum degree, and is suitable for large-scale vacuum machines that need to be quickly evacuated or process a large amount of materials. In addition, the double-pump system can also realize more accurate pressure control and faster evacuation time.

[0043] In other embodiments, a single-pump vacuum pump 200 can be used, which only comprises one pump body, and the dust collecting device 100 is arranged on the tail discharge pipe 204 of the vacuum pump 200.

[0044] Further, in the embodiment, the dust collecting device 100 is arranged on the connecting pipe 202 and the tail discharge pipe 204. In other embodiments, the dust collecting device 100 can be arranged only on the connecting pipe 202 or only on the tail discharge pipe 204. The application does not limit the arrangement position of the dust collecting device 100.

[0045] The dust collecting device 100 of the vacuum pump 200 of the application has two selectable working modes:

[0046] Real-time blowing mode: in this mode, the dust collection tank 20 is blown by the blowing module 30, which is suitable for the condition that the dust amount is low, the process gas is relatively clean, and a large amount of dust does not need to be treated. The blowing module 30 is respectively connected with branch pipes 31 of the two dust collection tanks 20. According to the switching state of the switching valve 11, only the dust collection tank 20 communicated with the switching valve 11 is continuously blown. After the slight dust enters the dust collection tank 20 and is blown by nitrogen, the dust continues to enter the lower pump body 203 along with the process gas or enters the lower equipment of the vacuum pump 200 along the tail discharge pipeline, and the slight dust does not cause adverse effects on the equipment and system.

[0047] Centralized cleaning mode: this mode is suitable for the condition that the dust amount is high, the process gas is low in cleanliness, the dust is easy to accumulate, and the vacuum pump 200 is harsh in working condition and easy to be stuck. In this mode, the branch pipes 31 of the blowing module 30 leading to the two dust collection tanks 20 are in the closed state. The dust enters from the dust collection pipe 10, passes through the switching valve 11 and the connecting flange 12 in turn, and falls into the dust collection tank 20. The dust accumulates in the dust collection tank 20, the weighing sensor 21 converts the dust weight into an electric signal and feeds back to the control module 40, and the optical dust sensor 22 also feeds back an electric signal to the control module 40 according to the scattering condition. The two kinds of real-time detection correct each other to measure the accurate dust accumulation amount. The weighing sensor 21 can correct the measurement error of the optical dust sensor 22 caused by high humidity or strong light of the environment, and the optical dust sensor 22 can correct the measurement error of the weighing sensor 21 caused by device vibration, so that the dust accumulation amount with high accuracy is obtained. The running state of the vacuum pump 200 can be inferred from the dust accumulation amount and the running time of the vacuum pump 200. After receiving the signal feedback of the weighing sensor 21 and the optical dust sensor 22, the control module 40 issues an alarm when the dust accumulation amount reaches the set threshold value, and automatically switches the conduction state of the switching valve 11 to make the inlet of the switching valve 11 communicated with the other outlet, so that the dust can enter the other dust collection tank 20. At this time, the previous dust collection tank 20 can be manually removed from the connecting flange 12 for cleaning.

[0048] The dust collection device 100 of the vacuum pump 200 has the following beneficial effects:

[0049] The dust collecting device 100 comprises a dust collecting pipe 10, a switching valve 11 and a plurality of dust collecting grooves 20. The dust collecting pipe 10 is communicated with the inlet of the switching valve 11. The switching valve 11 is provided with a plurality of outlets. The plurality of outlets are respectively communicated with the plurality of dust collecting grooves 20. The switching valve 11 selectively connects the inlet and one of the outlets. The vacuum pump 200 comprises a pump body and the above-mentioned dust collecting device 100. The dust collecting pipe 10 of the dust collecting device 100 is connected to the air outlet pipe of the pump body. By arranging the switching valve 11 and the plurality of dust collecting grooves 20 in the dust collecting device 100, the air outlet pipe of the pump body is selectively communicated with one of the dust collecting grooves 20. When one of the dust collecting grooves 20 needs to be cleaned, the switching valve 11 is operated to make the air outlet pipe of the pump body communicated with another dust collecting groove 20. In the process of cleaning the dust collecting groove 20, the pump body does not need to be stopped, thereby improving the working efficiency of the vacuum pump 200.

[0050] The above merely provides the specific implementation of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art can easily think of the changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A dust collecting apparatus (100) characterized by comprising: The dust collecting device (100) comprises a dust collecting pipe (10), a switching valve (11) and a plurality of dust collecting tanks (20), the dust collecting pipe (10) is communicated with an inlet of the switching valve (11), the switching valve (11) is provided with a plurality of outlets, the plurality of outlets are respectively communicated with the plurality of dust collecting tanks (20), and the switching valve (11) can selectively connect the inlet and one of the outlets.

2. The dust collecting device (100) according to claim 1, characterized by, The dust collecting tank (20) is provided with a weighing sensor (21).

3. The dust collecting apparatus (100) according to claim 2, characterized by, The dust collecting tank (20) is further connected with an optical dust sensor (22).

4. The dust collecting device (100) according to claim 1, characterized by, The outlet of the switching valve (11) is provided with a connecting flange (12), and the dust collecting tank (20) is detachably connected with the switching valve (11) through the connecting flange (12).

5. The dust collecting apparatus (100) according to claim 1, characterized in that, The dust collecting device (100) further comprises a blowing module (30) connected with the dust collecting tank (20) for blowing gas to the dust collecting tank (20).

6. The dust collecting device (100) according to claim 5, characterized in that, The blowing module (30) comprises a gas blowing device connected with the plurality of dust collecting tanks (20) through a plurality of branch pipes (31).

7. The dust collecting device (100) according to claim 6, characterized in that, The gas blowing device is used for blowing nitrogen into the dust collecting tank (20). 8.The dust collecting device (100) according to claim 3, wherein The dust collecting device (100) further comprises a control module (40) for controlling the switching valve (11) to be connected with different dust collecting tanks (20) according to signals of the weighing sensor (21) and / or the optical dust sensor (22).

9. A vacuum pump (200), characterized by The dust collecting device (100) is connected with the outlet pipe of the pump body.

10. Vacuum pump (200) according to claim 9, characterized in that The pump body comprises an upper pump body (201) and a lower pump body (203), the outlet pipe comprises a connecting pipe (202) connected between a gas outlet of the upper pump body (201) and a gas inlet of the lower pump body (203), and a tail pipe (204) connected with a gas outlet of the lower pump body (203), and the dust collecting device (100) is arranged on the connecting pipe (202) and / or the tail pipe (204).

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