Centering adjusting mechanism and ultrasonic scanning equipment

Abstract

The utility model relates to a centering adjusting mechanism and ultrasonic scanning equipment. The centering adjusting mechanism and the ultrasonic scanning equipment aim to conveniently adjust the alignment degree of the center line of a C-SCAN scanning probe in the ultrasonic scanning equipment and the center line of T-SCAN scanning. The centering adjusting mechanism comprises a first seat and a second seat, the second seat is connected to the first seat through an X-direction adjusting mechanism, and the X-direction adjusting mechanism comprises a first damping screw capable of being rotationally operated and has a first releasing state and a first locking state based on the fact that the first damping screw is rotationally operated; and the third seat is connected to the first seat through a Y-direction adjusting mechanism, and the Y-direction adjusting mechanism comprises a second damping screw capable of being rotationally operated and has a second releasing state and a second locking state based on the fact that the second damping screw is rotationally operated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of scanning devices, and in particular to a centering adjustment mechanism and an ultrasonic scanning device. BACKGROUND

[0002] The ultrasonic scanning device is widely used and can be used to detect cracks, delamination, holes, foreign matter and other defects in the internal of products in various industries such as semiconductor devices, circuit boards, ceramics, resins, automobile parts, metal products and wafers, without damaging the detected products, with high detection accuracy and easy operation.

[0003] In some scenarios, it is usually necessary to use a combination of C-SCAN scanning and T-SCAN scanning to quickly detect defects in products. Under the same conditions, the better the concentricity (alignment) of the center line of the C-SCAN scanning probe and the center line of the T-SCAN scanning, the higher the quality of the scanning image. SUMMARY

[0004] Therefore, the present application provides a centering adjustment mechanism and an ultrasonic scanning device to conveniently adjust the alignment of the center line of the C-SCAN scanning probe and the center line of the T-SCAN scanning and keep them in the aligned position.

[0005] In a first aspect, a centering adjustment mechanism is provided for adjusting the position of a first scanning probe to align the center line of the first scanning probe with the center line of a second scanning probe, one of the first scanning probe and the second scanning probe being a C-SCAN probe and the other being a T-SCAN probe, the centering adjustment mechanism comprising:

[0006] a first seat;

[0007] a second seat connected to the first seat via an X-direction adjustment mechanism, wherein the X-direction adjustment mechanism comprises a first damping screw that can be rotated and operated, and has a first release state and a first locking state based on the rotation and operation of the first damping screw, in the first release state, the second seat is allowed to move relative to the first seat in an X direction, and in the first locking state, the second seat is prevented from moving relative to the first seat in the X direction;

[0008] a third seat connected to the first seat via a Y-direction adjusting mechanism, wherein the Y-direction adjusting mechanism includes a second damping screw that is rotatably operated, and has a second release state and a second locking state based on the second damping screw being rotatably operated, in the second release state, the third seat is allowed to move relative to the second seat along a Y-direction, in the second locking state, the second seat is prevented from moving relative to the first seat along the Y-direction, the Y-direction is perpendicular to the X-direction, and the first scanning probe is mounted to the third seat.

[0009] In some possible implementations, the X-direction adjusting mechanism includes a first hand wheel configured to be rotatably operated to move the second seat relative to the first seat along the X-direction when the X-direction adjusting mechanism is in the release state;

[0010] The Y-direction adjusting mechanism includes a second hand wheel configured to be rotatably operated to move the third seat relative to the second seat along the Y-direction when the Y-direction adjusting mechanism is in the release state.

[0011] In some possible implementations, the X-direction adjusting mechanism includes a first screw rod extending along the X-direction, the first screw rod is connected with the first hand wheel and rotates in response to rotation of the first hand wheel, and the second seat is threadedly engaged with the first screw rod.

[0012] The Y-direction adjusting mechanism includes a second screw rod extending along the Y-direction, the second screw rod is connected with the second hand wheel and rotates in response to rotation of the first hand wheel, and the third seat is threadedly engaged with the second screw rod.

[0013] In some possible implementations, the X-direction adjusting mechanism includes a first elastic member arranged between the first damping screw and the first seat, the first damping screw is configured to move along the Y-direction by being rotatably operated to change a pressing force of the first elastic member on the second seat.

[0014] The Y-direction adjusting mechanism includes a second elastic member arranged between the second damping screw and the third seat, the second damping screw is configured to move along the X-direction by being rotatably operated to change a pressing force of the second elastic member on the third seat.

[0015] In some possible implementations, the X-direction adjusting mechanism includes a first linear guide extending along the X-direction and slidably connecting the second seat and the first seat.

[0016] The Y-direction adjusting mechanism includes a second linear guide extending along the Y-direction and slidably connecting the third seat and the second seat.

[0017] In some possible implementations, a first damping spring is supported between the second seat and the first seat to elastically bias the second seat and the first seat to each other in the X direction;

[0018] A second damping spring is supported between the third seat and the second seat to elastically bias the third seat and the second seat to each other in the Y direction.

[0019] In some possible implementations, an elastic biasing force of the first damping spring to the second seat and the first seat changes according to a change in relative position of the second seat and the first seat in the X direction;

[0020] An elastic biasing force of the second damping spring to the third seat and the second seat changes according to a change in relative position of the third seat and the second seat in the Y direction.

[0021] In a second aspect, an ultrasonic scanning device is provided, including a cabinet, and the cabinet is internally provided with:

[0022] The centering adjustment mechanism as described in the first aspect,

[0023] The first scanning probe, and

[0024] The second scanning probe.

[0025] In some possible implementations, the X direction and the Y direction are both horizontal directions, and a center line of the second scanning probe extends in a vertical direction.

[0026] In some possible implementations, further including:

[0027] A power device configured to drive the third seat to move in the cabinet;

[0028] A fourth seat fixed to the third seat and moving synchronously with the third seat;

[0029] The second scanning probe is mounted on the fourth seat.

[0030] According to the centering adjustment mechanism provided in the present application, the alignment degree of the center line of the C-SCAN scanning probe and the center line of the T-SCAN scanning probe in the ultrasonic scanning device can be conveniently and quickly adjusted, and the two are kept in the aligned position, thereby helping to improve the production efficiency and reduce the equipment operation cost. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application and not limit the present application.

[0032] Figure 1 is a structural schematic diagram of an ultrasonic scanning device provided by the embodiments of the present application.

[0033] Figure 2 is Figure 1 a partial enlarged view in

[0034] Figure 3 is Figure 1 a front view of a part where a first scanning probe is located in

[0035] Figure 4 is Figure 3 a sectional view of A-A in

[0036] Figure 5 is Figure 1 a side view of a part where a first scanning probe is located in

[0037] Figure 6 is Figure 5 a sectional view of B-B in

[0038] Legend of the drawings:

[0039] 1 - first scanning probe;

[0040] 2 - second scanning probe;

[0041] 3 - centering adjusting mechanism;

[0042] 4 - first seat;

[0043] 5 - second seat;

[0044] 6 - third seat;

[0045] 7 - fourth seat;

[0046] 8 - X-direction adjusting mechanism;

[0047] 9 - Y-direction adjusting mechanism;

[0048] 10 - cabinet;

[0049] 11 - first hand wheel;

[0050] 12 - second hand wheel;

[0051] 13 - first linear guide rail;

[0052] 14 - second linear guide rail;

[0053] 15 - first damping screw;

[0054] 16 - second damping screw;

[0055] 17 - first damping spring;

[0056] 18 - second damping spring. DETAILED DESCRIPTION

[0057] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings of the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of protection of the present application. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0058] In the description of the present application, if there are terms such as "first", "second", etc., they are only used to distinguish the described objects, and do not have any sequential or technical meaning. Therefore, the objects defined with "first", "second", etc. can include one or more of the objects explicitly or implicitly, and for example, the term "first element" itself does not mean the existence of "second element", and the term "second element" itself does not mean the existence of "first element". In addition, "one" or "an" and the like similar words do not represent a quantity limitation, but represent the existence of at least one, and "multiple" represents no less than two.

[0059] Figures 1 to 6 An ultrasonic scanning device provided by an embodiment of the present application is shown, which includes a cabinet 10 shown in a schematic sketch and a first scanning probe 1, a second scanning probe 2 and a centering adjusting mechanism 3 arranged in the cabinet 10.

[0060] One of the first scanning probe 1 and the second scanning probe 2 is a C-SCAN probe, and the other is a T-SCAN probe. In the present embodiment, the first scanning probe 1 is a C-SCAN probe, and the second scanning probe 2 is a T-SCAN probe.

[0061] The centering adjusting mechanism 3 is used to adjust the position of the first scanning probe 1 in the cabinet 10, so that the center line of the first scanning probe 1 is aligned with the center line of the second scanning probe 2, so that the cooperation of the C-SCAN probe and the T-SCAN probe with the center line aligned can obtain a high-quality scanning image.

[0062] The center adjustment mechanism 3 includes a first seat 4, a second seat 5, and a third seat 6, wherein the second seat 5 is connected to the first seat 4 via an X-direction adjustment mechanism 8, the third seat 6 is connected to the second seat via a Y-direction adjustment mechanism 9, and the first scanning probe 1 is detachably mounted to the third seat 6.

[0063] The X-direction adjustment mechanism includes a first linear guide 13, a first hand wheel 11, a first damping spring 17, and a first damping screw 15.

[0064] The first linear guide 13 can be a precision guide rail that slidably connects the second seat 5 and the first seat 4 to guide the second seat 5 to move smoothly relative to the first seat 4 in the X-direction.

[0065] The first hand wheel 11 is a fine adjustment hand wheel that can be rotated to operate in the X-direction to drive the second seat 5 to move in the X-direction relative to the first seat 4, and thereby adjust the position of the third seat 6 and the first scanning probe 1 in the X-direction.

[0066] Specifically, the rotational movement of the first hand wheel 11 can be converted into a linear movement of a first movable member in the X-direction by a screw mechanism, so as to drive the second seat 5 to move in the X-direction by the first movable member. In some embodiments, the first movable member is a first nut threadedly engaged with a first lead screw, wherein the first lead screw extends in the X-direction and penetrates through the second seat 5, and the first nut is fixed to the second seat 5.

[0067] The first damping spring 17 is supported between the second seat 5 and the first seat 4 to elastically bias the second seat 5 and the first seat 4 to each other in the X-direction. By the first damping spring 17, the operator can feel a damping feeling when rotating the first hand wheel 11. Specifically, the first hand wheel 11 and the first damping spring 17 are respectively arranged on opposite sides of the portion of the second seat 5 that engages with the first seat 4, and the first damping spring 17 is a compression spring in a contracted state that always exerts a force in the X-direction toward the side of the first hand wheel 11 on the second seat 5.

[0068] In some embodiments, the first damping spring 17 is a helical spring that extends in the X-direction, and the elastic biasing force of the second seat 5 and the first seat 4 is changed according to the change of the relative position of the second seat 5 and the first seat 4 in the X-direction. In this way, the operator can feel the first hand wheel 11 to be harder or softer by increasing or decreasing the elastic biasing force of the second seat 5 and the first seat 4.

[0069] The first damping screw 15 is rotatably operated in the Y direction, which is perpendicular to the X direction, and both the X direction and the Y direction are horizontal directions parallel to the ground when the cabinet 10 is placed in an upright state in the generation area. Moreover, the X-direction adjustment mechanism 8 has a first release state and a first locking state based on the first damping screw 15 being rotatably operated, in the first release state, the X-direction adjustment mechanism 8 allows the second seat 5 to move relative to the first seat 4 in the X direction, and in the first locking state, the X-direction adjustment mechanism 8 prevents the second seat 5 from moving relative to the first seat 4 in the X direction.

[0070] Specifically, the X-direction adjustment mechanism includes a first elastic member arranged between the first damping screw 15 and the first seat 4, which can be a metal spring piece pressing the first seat 4 and being bent. The first damping screw 15 is configured to move in the Y direction by being rotatably operated, thereby changing the deformation amplitude of the first elastic member in the Y direction, and thereby changing the pressing force of the first elastic member on the first seat 4. When the pressing force of the first elastic member on the first seat 4 is greater than a first specified value, the dynamic friction between the second seat 5 and the first seat 4 is relatively large, so that the second seat 5 is difficult to move relative to the first seat 4 in the X direction, which can be explained as the X-direction adjustment mechanism being in the first locking state; when the pressing force of the first elastic member on the first seat 4 is less than the first specified value, the dynamic friction between the second seat 5 and the first seat 4 is relatively small, so that the second seat 5 is easy to move relative to the first seat 4 in the X direction, which can be explained as the X-direction adjustment mechanism being in the first release state.

[0071] When the X-direction adjustment mechanism is in the first release state, the first hand wheel 11 can be rotatably operated, and when the X-direction adjustment mechanism is in the first locking state, the rotatable operation of the first hand wheel 11 becomes difficult.

[0072] Similar to the case of the X-direction adjustment mechanism, the Y-direction adjustment mechanism includes the second linear guide rail 14, the second hand wheel 12, the second damping spring 18, and the second damping screw 16.

[0073] The second linear guide rail 14 can be a precision guide rail, which slidably connects the third seat 6 and the second seat 5 to guide the third seat 6 to move smoothly relative to the second seat 5 in the Y direction.

[0074] The second hand wheel 12 is a fine adjustment hand wheel, which can be rotatably operated in the Y direction to drive the third seat 6 to move relative to the second seat 5 in the Y direction, and thereby adjust the position of the first scanning probe 1 in the Y direction.

[0075] Specifically, the rotational movement of the second hand wheel 12 can be converted into the linear movement of the second movable member in the Y direction by the screw mechanism, so as to drive the third seat 6 to move in the Y direction through the second movable member. In some embodiments, the second movable member is a second nut engaged with a second screw rod, wherein the second screw rod extends in the Y direction and penetrates through the third seat 6, and the second nut is fixed to the third seat 6.

[0076] The second damping spring 18 is supported between the third seat 6 and the second seat 5, so as to elastically bias the third seat 6 and the second seat 5 to each other in the Y direction. Through the second damping spring 18, the operator can have a damping feeling when rotating the second hand wheel 12. Specifically, the second hand wheel 12 and the second damping spring 18 are arranged on opposite sides of the portion of the third seat 6 engaged with the second seat 5, respectively, and the second damping spring 18 is a compression spring in a contracted state, which always applies a force in the Y direction towards the side of the second hand wheel 12 to the third seat 6.

[0077] In some embodiments, the second damping spring 18 is a helical spring extending in the X direction, which gives the elastic biasing force of the third seat 6 and the second seat 5 varying according to the change of the relative position of the third seat 6 and the second seat 5 in the X direction.

[0078] The second damping screw 16 can be rotated in the X direction. The Y direction adjusting mechanism 9 has a second release state and a second locking state based on the rotation of the second damping screw 16, in the second release state, the Y direction adjusting mechanism 9 allows the third seat 6 to move in the Y direction relative to the second seat 5, in the second locking state, the Y direction adjusting mechanism 9 prevents the third seat 6 from moving in the Y direction relative to the second seat 5.

[0079] Specifically, the Y direction adjusting structure includes a second elastic member arranged between the second damping screw 16 and the third seat 6, which can be a metal spring piece pressing the third seat 6 and bending. The second damping screw 16 is configured to move in the X direction by being rotated, so as to change the deformation amplitude of the second elastic member in the X direction, and thereby change the pressing force of the second elastic member on the third seat 6. When the pressing force of the second elastic member on the third seat 6 is greater than a second predetermined value, the dynamic friction between the third seat 6 and the second seat 5 is relatively large, so that the third seat 6 is difficult to move in the Y direction relative to the second seat 5, which can be explained as the Y direction adjusting structure being in the second locking state; when the pressing force of the second elastic member on the third seat 6 is less than the second predetermined value, the dynamic friction between the third seat 6 and the second seat 5 is relatively small, so that the third seat 6 is easy to move in the Y direction relative to the second seat 5, which can be explained as the Y direction adjusting structure being in the second release state.

[0080] When the Y-direction adjustment structure is in the second release state, the second hand wheel 12 can be rotated, and when the Y-direction adjustment structure is in the second locking state, the rotation of the second hand wheel 12 becomes difficult.

[0081] In use, the operator can first loosen the first damping screw 15 and the second damping screw 16, and then adjust the position of the first scanning probe 1 by rotating the first hand wheel 11 and the second hand wheel 12, and after the center line of the first scanning probe 1 is aligned with the center line of the second scanning probe 2, the first damping screw 15 and the second damping screw 16 are tightened.

[0082] The ultrasonic scanning device further comprises a servo motor (omitted) as a power device and a fourth seat 7 carrying the second scanning probe 2, the second scanning probe 2 is detachably mounted on the fourth seat 7, and the mounting position of the second scanning probe 2 relative to the fourth seat 7 is fixed and cannot be adjusted, in addition, the center line of the second scanning probe 2 extends in the vertical direction. In some embodiments, the fourth seat 7 and the third seat 6 are fixed to each other, the servo motor is connected to at least one of the third seat 6 and the fourth seat 7 through a transmission mechanism, so as to drive the third seat 6 and the fourth seat 7 and thereby drive the first scanning probe 1 and the second scanning probe 2 to move synchronously in the cabinet 10 after the center line of the first scanning probe 1 is aligned with the center line of the second scanning probe 2, so as to scan different positions of the scanned object.

Claims

1. A centering adjustment mechanism for adjusting the position of a first scanning probe so that the centerline of the first scanning probe is aligned with the centerline of a second scanning probe, wherein one of the first scanning probe and the second scanning probe is a C-SCAN probe and the other is a T-SCAN probe, characterized in that, The centering adjustment mechanism comprises: a first seat; a second seat connected to the first seat via an X-direction adjustment mechanism, wherein the X-direction adjustment mechanism comprises a first damping screw that can be rotationally operated, and has a first release state and a first locking state based on the first damping screw being rotationally operated, in the first release state, the second seat is allowed to move relative to the first seat along an X direction, in the first locking state, the second seat is prevented from moving relative to the first seat along the X direction; a third seat connected to the first seat via a Y-direction adjustment mechanism, wherein the Y-direction adjustment mechanism comprises a second damping screw that can be rotationally operated, and has a second release state and a second locking state based on the second damping screw being rotationally operated, in the second release state, the third seat is allowed to move relative to the second seat along a Y direction, in the second locking state, the second seat is prevented from moving relative to the first seat along the Y direction, the Y direction being perpendicular to the X direction, and the first scanning probe being mounted on the third seat.

2. The centering adjustment mechanism according to claim 1, wherein: the X-direction adjustment mechanism comprises a first hand wheel configured to be rotationally operated to move the second seat relative to the first seat along the X direction when the X-direction adjustment mechanism is in the release state; the Y-direction adjustment mechanism comprises a second hand wheel configured to be rotationally operated to move the third seat relative to the second seat along the Y direction when the Y-direction adjustment mechanism is in the release state.

3. The centering adjustment mechanism according to claim 2, wherein: the X-direction adjustment mechanism comprises a first screw rod extending along the X direction, the first screw rod being connected with the first hand wheel and being rotated in response to rotation of the first hand wheel, and the second seat being threadedly engaged with the first screw rod; the Y-direction adjustment mechanism comprises a second screw rod extending along the Y direction, the second screw rod being connected with the second hand wheel and being rotated in response to rotation of the first hand wheel, and the third seat being threadedly engaged with the second screw rod.

4. The centering adjustment mechanism according to claim 2, wherein: the X-direction adjustment mechanism comprises a first elastic member arranged between the first damping screw and the first seat, the first damping screw being configured to be moved along the Y direction by being rotationally operated to change a pressing force of the first elastic member on the second seat; the Y-direction adjustment mechanism comprises a second elastic member arranged between the second damping screw and the third seat, the second damping screw being configured to be moved along the X direction by being rotationally operated to change a pressing force of the second elastic member on the third seat.

5. The centering adjustment mechanism according to claim 2, wherein: the X-direction adjustment mechanism comprises a first linear guide rail extending along the X direction and slidably connecting the second seat and the first seat; The Y-direction adjusting structure comprises a second linear guide rail extending along the Y-direction and slidingly connecting the third seat and the second seat.

6. The centering adjustment mechanism of claim 5, wherein, Further comprising: a first damping spring supported between the second seat and the first seat to elastically bias the second seat and the first seat to each other in the X-direction; a second damping spring supported between the third seat and the second seat to elastically bias the third seat and the second seat to each other in the Y-direction.

7. The centering adjusting mechanism according to claim 6, wherein an elastic biasing force of the second seat and the first seat imparted by the first damping spring changes according to a change in relative position of the second seat and the first seat in the X-direction; an elastic biasing force of the third seat and the second seat imparted by the second damping spring changes according to a change in relative position of the third seat and the second seat in the Y-direction.

8. An ultrasonic scanning apparatus comprising a cabinet, characterised in that, The cabinet is provided with: the centering adjusting mechanism according to any one of claims 1 to 7, the first scanning probe, and the second scanning probe.

9. An ultrasound scanning device according to claim 8, characterised in that, The X-direction and the Y-direction are both horizontal directions, and a center line of the second scanning probe extends in a vertical direction.

10. An ultrasound scanning device according to claim 8 or 9, characterized in that, Further comprising: a power device configured to drive the third seat to move in the cabinet; a fourth seat fixed to the third seat and moving synchronously with the third seat; wherein the second scanning probe is mounted to the fourth seat.

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