Electroplating clamp current measuring device

Abstract

The utility model provides an electroplating clamp current measuring device which comprises a rack, a guide rail, a clamp to be measured, a current output mechanism, a driving mechanism and a current detection mechanism, the guide rail is installed on one side of the rack and used for placing the clamp to be measured, and a plurality of clamp mechanisms are arranged at one end of the clamp to be measured. A current output mechanism and a current detection mechanism are arranged on the rack, the current output mechanism is electrically connected with the multiple clamp mechanisms, and the current detection mechanism is electrically connected with the guide rail; according to the utility model, the plurality of clamp mechanisms are arranged, so that the effectiveness of the current transmission function of the clamp to be detected can be effectively detected, and the production of abnormal products such as poor copper plating and sunken filling holes caused by poor conduction of the abnormal clamp to be detected is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of substrate detection, and specifically relates to a kind of electroplating fixture current measuring device. BACKGROUND

[0002] In the production process of substrate factory product, electroplating copper process plays an indispensable important role, and the thickening of copper layer and the conductive copper in hole are the basic functions that substrate product must have, and in the process of electroplating copper, electroplating fixture (vertical continuous electroplating line) as the bridge connecting rectifier and product, the current conduction efficiency of itself determines the copper plating effect of product, but in actual production process, only the output current of rectifier can be monitored, the actual effect current conducted to product by fixture cannot be detected, causing abnormal fixture to continue online production, leading to product copper layer anomaly and hole filling depression.Therefore, how to overcome the above-mentioned existing technical problems and defects becomes the problem that needs to be solved. SUMMARY

[0003] In view of the problem that the existing detection device cannot effectively detect abnormal fixture, the utility model provides a kind of electroplating fixture current measuring device.

[0004] The technical scheme adopted by the utility model to solve the above technical problems is as follows:

[0005] The utility model provides a kind of electroplating fixture current measuring device, including frame, guide rail, measured fixture, current output mechanism, drive mechanism and current detection mechanism, the side of frame is equipped with guide rail, guide rail is used to place measured fixture, the one end of measured fixture is provided with multiple fixture mechanisms, the current output mechanism and current detection mechanism are provided on the frame, the current output mechanism is electrically connected with multiple fixture mechanisms respectively, and the other end of current detection mechanism is electrically connected with measured fixture.

[0006] Optionally, the drive mechanism includes at least one first drive mechanism, the first drive mechanism includes first air pump, connecting plate and multiple first conductive plates, the first air pump is fixedly arranged on the frame and located below the measured fixture, the output shaft end of the first air pump is connected with one side of the connecting plate, the positions corresponding to the fixture mechanisms on the connecting plate are connected with one end of the first conductive plate, and multiple fixture mechanisms are clamped to the other end of the corresponding first conductive plate.

[0007] Optionally, the connecting plate includes first connecting plate and second connecting plate, the second connecting plate is connected with one side of the first connecting plate and extends along the plane perpendicular to the first connecting plate, the output shaft end of the first air pump is connected with the first connecting plate, and the first conductive plate is insulatedly connected with the second connecting plate.

[0008] Optionally, the current output mechanism comprises a rectifier, and the rectifier is electrically connected with the plurality of first conductive plates.

[0009] Optionally, the to-be-tested fixture comprises a first connecting piece, a second connecting piece, a third connecting piece and a plurality of fixture mechanisms, one side of each of the plurality of fixture mechanisms is connected with the second connecting piece, the other side of each of the plurality of fixture mechanisms is connected with the third connecting piece, one end of the first connecting piece is provided with a groove, the groove is clamped with the guide rail, and the other end of the first connecting piece is connected with the second connecting piece.

[0010] Optionally, the fixture mechanism comprises a first fixture clamping piece and a second fixture clamping piece, the inner side of the first fixture clamping piece is provided with a first measuring point, the inner side of the second fixture clamping piece is provided with a second measuring point corresponding to the position of the first measuring point, and when the fixture mechanism clamps the first conductive plate, the first measuring point and the second measuring point are in contact with the two sides of the first conductive plate.

[0011] Optionally, the fixture mechanism further comprises a hinge piece, the hinge piece is arranged on at least one side of the fixture mechanism, one end of the hinge piece is rotationally connected with the side surface of the first fixture clamping piece, and the other end of the hinge piece is rotationally connected with the side surface of the second fixture clamping piece.

[0012] Optionally, the second connecting piece is provided with at least one, the third connecting piece is provided with at least one, the second connecting piece is connected with the side of the plurality of first fixture clamping pieces close to the second fixture clamping piece, and the third connecting piece is connected with the side of the plurality of second fixture clamping pieces away from the first fixture clamping piece.

[0013] Optionally, the driving mechanism further comprises a second driving mechanism, the second driving mechanism comprises a second air pump and a pushing plate, the second air pump is fixedly arranged on the rack and arranged vertically to the length direction of the fixture mechanism, the output shaft end of the second air pump is connected with the pushing plate, and the pushing plate is in contact with the corresponding third connecting piece under the pushing of the second air pump.

[0014] Optionally, the current detection mechanism comprises an ammeter, and the ammeter is provided with at least one, and the ammeter is used for detecting the current flowing through a plurality of positions on the to-be-tested fixture.

[0015] The current output mechanism respectively provides current for the clamp mechanism of the to-be-measured clamp, the current detection mechanism is electrically connected with the other end of the to-be-measured clamp, thereby the current flowing through the clamp mechanism is detected, whether the copper layer on the surface of the to-be-measured clamp is abnormal is judged according to whether the measured current values are consistent, whether there is a depression in the hole filling, the utility model discloses through setting a plurality of clamp mechanisms, the effectiveness of the current transmission function of the to-be-measured clamp can be effectively detected, and the production of abnormal products such as copper plating poor and hole filling depression caused by poor conduction of the abnormal to-be-measured clamp is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the description of the embodiments of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative labor.

[0017] Figure 1 is a structural schematic view of the electroplating clamp current measurement device provided by an embodiment of the present application;

[0018] Figure 2 is a front view schematic view of the electroplating clamp current measurement device provided by an embodiment of the present application;

[0019] Figure 3 is a structural schematic view of the to-be-measured clamp, the first driving mechanism and the second driving mechanism in the electroplating clamp current measurement device provided by an embodiment of the present application;

[0020] Figure 4 is a structural schematic view of the connecting plate in the electroplating clamp current measurement device provided by an embodiment of the present application;

[0021] The reference signs in the drawings of the specification are as follows:

[0022] 1 - rack; 11 - guide rail; 2 - to-be-measured clamp; 21 - clamp mechanism; 211 - first clamp clamping piece; 212 - second clamp clamping piece; 213 - first measurement point; 214 - second measurement point; 215 - hinged piece; 22 - first connecting piece; 221 - groove; 23 - second connecting piece; 24 - third connecting piece; 4 - first driving mechanism; 31 - first air pump; 32 - connecting plate; 321 - first connecting plate; 322 - second connecting plate; 33 - first conductive plate; 4 - second driving mechanism; 41 - second air pump; 42 - pushing plate. DETAILED DESCRIPTION

[0023] In order to make the technical problems solved by the present application, technical solutions and beneficial effects clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not used to limit the present application.

[0024] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "radial", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0025] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0026] As Figures 1-2 As shown in the embodiment, the utility model provides a kind of electroplating fixture current measuring device, including rack 1, guide 11, measured fixture 2, current output mechanism, driving mechanism and current detection mechanism, one side of rack 1 is equipped with guide 11, guide 11 is used to place measured fixture 2, and the one end of measured fixture 2 is provided with multiple fixture mechanisms 21, and current output mechanism and current detection mechanism are provided on rack 1, current output mechanism is electrically connected with multiple fixture mechanisms 21 respectively, and current detection mechanism is electrically connected with the other end of measured fixture 2.

[0027] Specifically, the first placing plate and the second placing plate are stacked on the rack 1, the current output mechanism is placed on the second placing plate, and the current detection mechanism is placed on the first placing plate. The current output mechanism provides current for the clamp mechanism 21 of the clamp 2 to be tested respectively, and the current detection mechanism is electrically connected to the other end of the clamp 2 to be tested, so as to detect the current flowing through the clamp mechanism 21. Whether the copper layer on the surface of the clamp 2 to be tested is abnormal, whether the filling hole is recessed or not is determined according to whether the measured current value is consistent. The utility model discloses a plurality of clamp mechanisms 21 can effectively detect the effectiveness of the current transmission function of the clamp 2 to be tested, and avoid the production of abnormal products such as poor copper plating and filling hole recess caused by poor conduction of the abnormal clamp 2 to be tested.

[0028] As shown in Figures 1-3 , in an embodiment, the driving mechanism includes at least one first driving mechanism 3, the first driving mechanism 3 includes a first air pump 31, a connecting plate 32 and a plurality of conductive plates 33, the first air pump 31 is fixedly arranged on the rack 1 and located below the clamp 2 to be tested, the output shaft end of the first air pump 31 is connected with one side of the connecting plate 32, the positions corresponding to the clamp mechanism 21 on the connecting plate 32 are connected with one end of the conductive plate 33, and the plurality of clamp mechanisms 21 clamp the other end of the corresponding conductive plate 33.

[0029] Specifically, in the working state, the clamp 2 to be tested is first placed on the guide rail 11, then the connecting plate 32 is driven to move upward under the action of the first air pump 31, and then the conductive plate 33 is driven to move upward through the connecting plate 32, until the other end of the conductive plate 33 is clamped by the clamp mechanism 21; at this time, the current path is formed between the conductive plate 33 and the clamp mechanism 21.

[0030] As shown in Figure 4 , in an embodiment, the connecting plate 32 includes a first connecting plate 321 and a second connecting plate 322, the second connecting plate 322 is connected with one side of the first connecting plate 321 and extends along a plane perpendicular to the first connecting plate 321, the output shaft end of the first air pump 31 is connected with the first connecting plate 321, and the conductive plate 33 is insulatively connected with the second connecting plate 322.

[0031] Specifically, the cross section of the connecting plate 32 is L-shaped, the larger surface of the first connecting plate 321 is arranged vertically to the output shaft end of the first air pump 31, so as to increase the contact surface between the output shaft end of the first air pump 31 and the first connecting plate 321 and make the stress uniform; the extension direction of the second connecting plate 322 is parallel to the length direction of the first pushing plate 42, the end of the first pushing plate 42 is connected with the larger surface of the second connecting plate 322, so as to increase the contact surface between the first pushing plate 42 and the second connecting plate 322 and make the stress uniform; the material of the first connecting plate 321 is copper material, the material of the second connecting plate 322 is insulating material, or the surface of the second connecting plate 322 is provided with an insulating layer.

[0032] In one embodiment, the current output mechanism includes a rectifier (not shown) electrically connected to a plurality of conductive plates 33.

[0033] Specifically, this application provides current to multiple conductive plates 33 through a rectifier. When the other end of the conductive plate 33 is clamped by the clamping mechanism 21, a current path is formed between it and the fixture 2 to be tested.

[0034] like Figure 3 As shown, in one embodiment, the fixture 2 to be tested includes a first connector 22, a second connector 23, a third connector 24 and a plurality of fixture mechanisms 21. One side of the plurality of fixture mechanisms 21 is connected to the second connector 23, and the other side of the plurality of fixture mechanisms 21 is connected to the third connector 24. One end of the first connector 22 is provided with a groove 221, which engages with the guide rail 11. The other end of the first connector 22 is connected to the second connector 23.

[0035] Specifically, the fixture 2 under test is engaged with the guide rail 11 through the groove 221, thereby suspending the fixture 2 under test on the guide rail 11. One side of the multiple clamping mechanisms 21 is connected to a second connector 23, and the other side of the multiple clamping mechanisms 21 is connected to a third connector 24. By pushing the second connector 23 or the third connector 24, the multiple clamping mechanisms 21 can be opened and closed simultaneously, thereby facilitating quick clamping with the conductive plate 33.

[0036] like Figure 3 As shown, in one embodiment, the clamping mechanism 21 includes a first clamping piece 211 and a second clamping piece 212. The inner side of the first clamping piece 211 is provided with a first measuring point 213, and the inner side of the second clamping piece 212 is provided with a second measuring point 214 corresponding to the position of the first measuring point 213. When the clamping mechanism clamps the conductive plate 33, the first measuring point 213 and the second measuring point 214 are in contact with the two sides of the conductive plate 33.

[0037] Specifically, the first clamping piece 211 is an anode clamping piece; the second clamping piece 212 is a cathode clamping piece; the length of the first clamping piece 211 is greater than the length of the second clamping piece 212.

[0038] The first clamping piece 211 and the second clamping piece 212 together clamp the conductive plate 33. The first clamping piece 211 and the second clamping piece 212 are both provided with measuring points at the ends near the conductive plate 33, and the measuring points are in contact with the conductive plate 33.

[0039] like Figure 3As shown in the drawings, in an embodiment, the clamp mechanism further comprises a hinge 215, which is arranged on at least one side of the clamp mechanism, one end of the hinge 215 is rotatably connected to the side surface of the first clamp jaw 211, and the other end of the hinge 215 is rotatably connected to the side surface of the second clamp jaw 212.

[0040] In the non-working state, the hinge 215 is in a normal state, at this time, there is no gap between the first clamp jaw 211 and the one end of the second clamp jaw 212 having the measuring point, and the first measuring point 213 and the second measuring point 214 are in contact;

[0041] In the working state, the hinge 215 rotates to drive the second clamp jaw 212 to rotate, so that a gap appears between the first clamp jaw 211 and the one end of the second clamp jaw 212 having the measuring point, thereby clamping the conductive plate 33.

[0042] As shown in the drawings, Figures 1-3 In an embodiment, the second connecting piece 23 is provided with at least one, and the third connecting piece 24 is provided with at least one, the second connecting piece 23 is connected to the side of the plurality of first clamp jaws 211 close to the second clamp jaw 212, and the third connecting piece 24 is connected to the side of the plurality of second clamp jaws 212 away from the first clamp jaw 211.

[0043] Specifically, the second connecting piece 23 drives the plurality of first clamp jaws 211 to move synchronously, and the third connecting piece 24 drives the plurality of second clamp jaws 212 to move synchronously, so that the plurality of clamp mechanisms 21 are opened and closed at the same time, thereby facilitating rapid clamping of the conductive plate 33 and current detection of the to-be-measured part of the to-be-measured clamp 2.

[0044] Specifically, a plurality of second connecting pieces 23 are arranged in sequence at the position of the first clamp jaw 211 towards the second clamp jaw 212, so that each first clamp jaw 211 is connected to the corresponding second connecting piece 23; the lengths of the second connecting pieces 23 can be the same or different.

[0045] Similarly, a plurality of third connecting pieces 24 are arranged in sequence at the position of the second clamp jaw 212 away from the first clamp jaw 211, so that each second clamp jaw 212 is connected to the corresponding third connecting piece 24; the lengths of the third connecting pieces 24 can be the same or different.

[0046] As shown in the drawings, Figures 1-3 In an embodiment, the driving mechanism further comprises a second driving mechanism 4, which comprises a second air pump 41 and a pushing plate 42, the second air pump 41 is fixedly arranged on the rack 1 and arranged vertically to the length direction of the clamp mechanism, the output shaft end of the second air pump 41 is connected to the pushing plate 42, and the pushing plate 42 is in contact with the corresponding third connecting piece 24 under the pushing of the second air pump 41.

[0047] Specifically, in the working state, under the action of the second air pump 41, the output shaft end of the second air pump 41 moves along the direction close to the second clamp jaw 212, and in turn drives the push plate 42 to move along the direction close to the second clamp jaw 212 and contact with the outer surface of the third connecting piece 24. The output shaft end of the second air pump 41 continues to move along the direction, until the relative movement between the second clamp jaw 212 and the first clamp jaw 211 occurs, so that a gap appears between the first clamp jaw 211 and the end of the second clamp jaw 212 having the measuring point. At the same time, under the action of the first air pump 31, the connecting plate 32 is driven to move upward, and in turn drives the conductive plate 33 to move upward through the connecting plate 32, until the other end of the conductive plate 33 is located between the first clamp jaw 211 and the second clamp jaw 212. At this time, under the action of the second air pump 41, the output shaft end of the second air pump 41 moves along the direction away from the second clamp jaw 212, so that the push plate 42 is not in contact with the third connecting piece 24. The relative movement between the second clamp jaw 212 and the first clamp jaw 211 occurs again, so that the first clamp jaw 211 and the second clamp jaw 212 clamp the conductive plate 33, and the current path is formed between the conductive plate 33 and the clamp mechanism 21.

[0048] After the detection is completed, under the action of the second air pump 41, the output shaft end of the second air pump 41 moves along the direction close to the second clamp jaw 212, and in turn drives the push plate 42 to move along the direction close to the second clamp jaw 212 and contact with the outer surface of the third connecting piece 24. The output shaft end of the second air pump 41 continues to move along the direction, until the relative movement between the second clamp jaw 212 and the first clamp jaw 211 occurs, so that a gap appears between the first clamp jaw 211 and the end of the second clamp jaw 212 having the measuring point. At the same time, under the action of the first air pump 31, the connecting plate 32 is driven to move downward, and in turn drives the conductive plate 33 to move downward through the connecting plate 32, until the end of the conductive plate 33 is separated from between the first clamp jaw 211 and the second clamp jaw 212. At this time, under the action of the second air pump 41, the output shaft end of the second air pump 41 moves along the direction away from the second clamp jaw 212, so that the push plate 42 is not in contact with the third connecting piece 24. The relative movement between the second clamp jaw 212 and the first clamp jaw 211 occurs again, so that the first clamp jaw 211 and the second clamp jaw 212 return to the initial position.

[0049] In an embodiment, the current detection mechanism includes an ammeter (not shown in the figure), and the ammeter is provided at least one. The ammeter is used to detect the current flowing through multiple positions on the clamp 2 to be detected.

[0050] Specifically, if the ammeter is a single display ammeter, the number of ammeters is consistent with the number of clamp mechanisms 21, and each clamp mechanism 21 is connected with an ammeter at the corresponding position; if the ammeter is a multi-display ammeter, a single ammeter can be connected with multiple clamp mechanisms 21 at the corresponding positions.

[0051] The present application provides current for the clamp mechanism 21 through the rectifier, and then makes the measured clamp 2 generate current. At this time, the ammeter is electrically connected with multiple positions of the other end of the measured clamp 2. The current values of different positions of the measured clamp 2 can be detected through the ammeter. Whether the current conduction efficiency of the measured clamp 2 is abnormal is judged according to whether the measured current values are consistent. The present application can effectively detect the effectiveness of the current transmission function of the measured clamp 2 by setting multiple clamp mechanisms, and avoid the production of abnormal products such as poor copper plating and hole filling depression caused by poor conduction of the abnormal measured clamp 2.

[0052] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An electroplating fixture current measurement device, characterized by: The utility model provides a current output mechanism, drive mechanism and current detection mechanism, the utility model discloses a rack, guide rail, the clamp of measurement, current output mechanism, drive mechanism and current detection mechanism, the one side of rack is equipped with the guide rail, the guide rail is used to place the clamp of measurement, the one end of clamp of measurement is provided with a plurality of clamp mechanism, be provided with current output mechanism and current detection mechanism on the rack, current output mechanism is connected with a plurality of clamp mechanism electricity respectively, current detection mechanism is connected with the other end of clamp of measurement electricity.

2. The electroplating fixture current measurement device of claim 1, wherein: The drive mechanism includes at least one first drive mechanism, the first drive mechanism includes a first air pump, a connecting plate and a plurality of first conductive plates, the first air pump is fixedly arranged on the rack and located below the clamp under test, the output shaft end of the first air pump is connected with one side of the connecting plate, the positions corresponding to the clamp mechanisms on the connecting plate are connected with one end of the first conductive plates, and the plurality of clamp mechanisms clamp the other end of the corresponding first conductive plates.

3. The electroplating fixture current measurement device of claim 2, wherein: The connecting plate includes a first connecting plate and a second connecting plate, the second connecting plate is connected with one side of the first connecting plate and extends along the plane perpendicular to the first connecting plate, the output shaft end of the first air pump is connected with the first connecting plate, and the first conductive plates are insulatively connected with the second connecting plate.

4. The electroplating fixture current measurement device of claim 2, wherein: The current output mechanism includes a rectifier, and the rectifier is electrically connected with the plurality of first conductive plates.

5. The electroplating fixture current measurement device of claim 2, wherein: The clamp under test includes a first connecting piece, a second connecting piece, a third connecting piece and a plurality of clamp mechanisms, one side of the plurality of clamp mechanisms is connected with the second connecting piece, the other side of the plurality of clamp mechanisms is connected with the third connecting piece, one end of the first connecting piece is provided with a groove, the groove is clamped with the guide rail, and the other end of the first connecting piece is connected with the second connecting piece.

6. The electroplating fixture current measurement device of claim 5, wherein: The clamp mechanism includes a first clamp jaw and a second clamp jaw, the inner side of the first clamp jaw is provided with a first measuring point, the inner side of the second clamp jaw is provided with a second measuring point corresponding to the position of the first measuring point, when the clamp mechanism clamps the first conductive plate, the first measuring point and the second measuring point are in contact with the two side surfaces of the first conductive plate.

7. The electroplating fixture current measurement device of claim 6, wherein: The clamp mechanism further includes a hinge piece, the hinge piece is arranged on at least one side of the clamp mechanism, one end of the hinge piece is rotatably connected with the side surface of the first clamp jaw, and the other end of the hinge piece is rotatably connected with the side surface of the second clamp jaw.

8. The electroplating fixture current measurement device of claim 6, wherein: The second connecting piece is provided with at least one, the third connecting piece is provided with at least one, the second connecting piece is connected with the side of the plurality of first clamp jaws close to the second clamp jaw, and the third connecting piece is connected with the side of the plurality of second clamp jaws away from the first clamp jaw.

9. The electroplating fixture current measurement device of claim 6, wherein: The drive mechanism further includes a second drive mechanism, the second drive mechanism includes a second air pump and a push plate, the second air pump is fixedly arranged on the rack and is arranged vertically to the length direction of the clamp mechanism, the output shaft end of the second air pump is connected with the push plate, and the push plate is in contact with the corresponding third connecting piece under the pushing of the second air pump.

10. The electroplating fixture current measurement device of claim 1, wherein: The current detection mechanism comprises ammeters, at least one of which is arranged to detect the current flowing through the multiple positions on the clamp under test.

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