Ion source cathode binding post and ion source equipment

Abstract

The utility model discloses an ion source cathode binding post and ion source equipment, the ion source cathode binding post comprises a conductive column and an insulating part, one end of the conductive column is a cathode connecting end; the insulating part sleeves the conductive column, the insulating part comprises a first insulating part, the first insulating part is made of a material capable of bearing arcing, the first insulating part sleeves the negative electrode connecting end, at least two grooves are formed in the peripheral wall of the first insulating part, and the at least two grooves are arranged at intervals along the axis of the conductive column. According to the ion source cathode binding post provided by the utility model, the probability of arcing around the cathode connecting end can be reduced, the condition of insulation failure of the cathode connecting end during arcing is avoided, and the normal work of ion source equipment is ensured.

Description

Technical Field

[0001] This utility model relates to the field of ion source equipment technology, and in particular to an ion source negative electrode terminal and an ion source equipment. Background Technology

[0002] In the manufacturing process of cadmium telluride solar cells, there is a pre-coating step where the substrate to be coated is bombarded with uniform ions generated by an ion source device in a vacuum environment to achieve surface treatment before coating. The ion source operates at a voltage as high as 2000 volts. Due to the characteristics of the equipment, the negative electrode plate must be placed inside a vacuum, and the terminal connected to the negative electrode must pass through the middle of the positive electrode plate. This requires the negative electrode terminal to have good internal conductivity and good external insulation. In the existing technology, the outer wall of the negative electrode terminal is entirely made of PEEK insulating sleeve. Although this meets the insulation performance requirements, in actual operation, arcing occurs at the negative electrode terminal. The local high temperature exceeding 350 degrees Celsius generated by the arcing melts the PEEK insulating sleeve on the end of the negative electrode terminal closest to the negative electrode plate, causing the insulation between the negative electrode terminal and the positive electrode plate to fail, affecting the normal operation of the ion source device. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes an ion source negative terminal that can reduce the probability of arcing around the negative terminal, prevent insulation failure during arcing, and ensure the normal operation of the ion source equipment.

[0004] This utility model also proposes an ion source device having the above-mentioned negative terminal of the ion source.

[0005] According to a first aspect of the present invention, an ion source negative electrode terminal includes a conductive post and an insulating component. One end of the conductive post is a negative electrode connection end. The insulating component is sleeved on the conductive post and includes a first insulating portion. The first insulating portion is made of a material capable of withstanding arcing. The first insulating portion is sleeved on the negative electrode connection end. The outer peripheral wall of the first insulating portion is provided with at least two grooves, and the at least two grooves are arranged at intervals along the axis of the conductive post.

[0006] The negative terminal of the ion source according to the embodiment of the present invention has at least the following beneficial effects: In the negative terminal of the ion source provided by the present invention, the first insulating part can provide insulation on the outer periphery of the negative terminal. The first insulating part is made of a material that can withstand arcing, so that the first insulating part can withstand the local high temperature generated during arcing, thereby avoiding the situation where the insulation of the negative terminal fails during arcing. At the same time, at least two grooves are provided on the outer peripheral wall of the first insulating part, which can increase the creepage distance on the surface of the first insulating part and improve the insulation performance of the first insulating part. The grooves can also be used to store some dust around the negative terminal, thereby reducing the probability of arcing around the negative terminal.

[0007] According to some embodiments of the present invention, the insulating member further includes a second insulating portion, which is sleeved on the conductive post and located on the side of the high-temperature resistant insulating portion away from the negative electrode connection end.

[0008] According to some embodiments of the present invention, the first insulating part and the second insulating part are respectively formed.

[0009] According to some embodiments of the present invention, the first insulating part is detachably sleeved on the negative electrode connection end.

[0010] According to some embodiments of the present invention, one end of the first insulating part and one end of the second insulating part abut against each other.

[0011] According to some embodiments of the present invention, the first insulating part is an insulating ceramic component.

[0012] According to some embodiments of the present invention, the second insulating part is made of PEEK material.

[0013] According to some embodiments of the present invention, a first sealing ring is provided between the second insulating part and the conductive post, and a second sealing ring is sleeved on the outer periphery of the second insulating part.

[0014] According to some embodiments of this utility model, the negative electrode connection end is provided with a connecting thread for screwing the negative electrode plate.

[0015] The ion source device according to a second aspect embodiment of the present invention includes the above-described ion source negative terminal.

[0016] The ion source device according to the embodiments of the present invention has at least the following beneficial effects: the ion source device provided by the present invention, by adopting the above-mentioned negative terminal of the ion source, can reduce the probability of arcing around the negative terminal, avoid the situation of insulation failure when the negative terminal arcs, and ensure the normal operation of the ion source device.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0019] Figure 1 This is a schematic diagram of the negative terminal of the ion source in an embodiment of the present invention;

[0020] Figure 2 for Figure 1 An exploded view of the negative terminal of the ion source is shown.

[0021] Figure 3 for Figure 1 A cross-sectional view of the negative terminal of the ion source is shown.

[0022] Figure 4 This is a schematic diagram of an ion source device according to an embodiment of the present invention.

[0023] Figure label:

[0024] Conductive post 110, negative electrode connection end 111, connecting thread 1111, insulating part 120, first insulating part 121, groove 1211, second insulating part 122, first sealing ring 123, second sealing ring 124, positive electrode plate 200, negative electrode plate 300, support base 400, cooling structure 500. Detailed Implementation

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0028] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0029] Reference Figures 1 to 3 According to a first aspect embodiment of the present invention, the negative terminal of the ion source includes a conductive post 110 and an insulating member 120. One end of the conductive post 110 is a negative terminal. The insulating member 120 is sleeved on the conductive post 110. The insulating member 120 includes a first insulating part 121. The first insulating part 121 is made of a material that can withstand arcing. The first insulating part 121 is sleeved on the negative terminal. The outer peripheral wall of the first insulating part 121 is provided with at least two grooves 1211. The at least two grooves 1211 are arranged at intervals along the axis of the conductive post 110.

[0030] In the negative electrode terminal of the ion source provided by this utility model, the first insulating part 121 can provide insulation on the outer periphery of the negative electrode connection terminal. The first insulating part 121 is made of a material that can withstand arcing, so that the first insulating part 121 can withstand the local high temperature generated during arcing, thereby avoiding the insulation failure of the negative electrode connection terminal during arcing. At the same time, at least two grooves 1211 are provided on the outer peripheral wall of the first insulating part 121, which can increase the creepage distance on the surface of the first insulating part 121 and improve the insulation performance of the first insulating part 121. The grooves 1211 can also be used to store some dust around the negative electrode connection terminal, thereby reducing the probability of arcing around the negative electrode connection terminal and reducing the probability of insulation failure of the negative electrode connection terminal from the source.

[0031] Reference Figures 1 to 3 According to some embodiments of the present invention, the insulating member 120 further includes a second insulating part 122, which is sleeved on the conductive post 110 and is located on the side of the first insulating part 121 away from the negative electrode connection end.

[0032] During the operation of the ion source device, arcing usually occurs around the negative electrode connection end connected to the negative electrode plate 300. Other parts of the conductive post 110 are usually not affected by arcing. Therefore, the second insulating part 122 that insulates other parts of the conductive post 110 can be made of a material that can withstand arcing, or it can be made of a material that can not withstand arcing.

[0033] According to some embodiments of this utility model, the first insulating part 121 and the second insulating part 122 are formed separately, thereby allowing the first insulating part 121 and the second insulating part 122 to be made of different materials. Typically, materials capable of withstanding arcing are expensive. With the above arrangement, the second insulating part 122 does not need to be made of an arc-resistant material; it only needs to be made of conventional insulating material. This avoids the need to use a high-cost arc-resistant material for the entire insulating component 120, thus controlling the overall cost of the ion source negative electrode terminal.

[0034] According to some embodiments of this utility model, the first insulating part 121 is detachably sleeved on the negative electrode connection terminal. With the above arrangement, when the first insulating part 121 is damaged, only the first insulating part 121 needs to be replaced, without replacing the entire insulating component 120 including the second insulating part 122, which can reduce the maintenance cost of the negative electrode terminal of the ion source.

[0035] According to some embodiments of the present invention, one end of the first insulating part 121 and one end of the second insulating part 122 abut against each other to avoid gaps between the first insulating part 121 and the second insulating part 122, thereby ensuring the insulation effect.

[0036] Of course, in other embodiments, the first insulating part 121 may also be sleeved on one end of the second insulating part 122, thereby avoiding gaps between the first insulating part 121 and the second insulating part 122 and ensuring the insulation effect.

[0037] According to some embodiments of this utility model, the first insulating part 121 is an insulating ceramic component. The insulating ceramic component can withstand the local high temperature generated by arcing well, and will not melt when faced with arcing. Of course, the first insulating part 121 can also be made of other materials that can withstand arcing, such as inorganic fiber materials or other inorganic insulating materials.

[0038] According to some embodiments of this utility model, the second insulating part 122 is made of PEEK material. The second insulating part 122 is located on the side of the first insulating part 121 opposite to the negative electrode connection end. During the operation of the ion source equipment, arcing is usually not encountered around the second insulating part 122, and the operating environment temperature of the second insulating part 122 typically does not exceed 350 degrees Celsius. PEEK material has excellent insulation properties, and its melting point is around 350 degrees Celsius. Therefore, using PEEK material for the second insulating part 122 can also meet the operational requirements. In other embodiments, the second insulating part 122 can also be made of plastics such as polytetrafluoroethylene (PTFE) that meet the operational requirements.

[0039] Of course, if cost is not a concern, the second insulation part 122 can also be made of materials such as ceramic that can withstand arcing.

[0040] Reference Figure 1 and Figure 3 According to some embodiments of the present invention, a first sealing ring 123 is provided between the second insulating part 122 and the conductive post 110, and a second sealing ring 124 is sleeved on the outer periphery of the second insulating part 122. The arrangement of the first sealing ring 123 and the second sealing ring 124 enables a seal to be formed between the negative electrode terminal of the ion source and other components of the ion source device.

[0041] Reference Figure 1 and Figure 3 According to some embodiments of this utility model, the negative electrode connection end is provided with a connecting thread 1111 for screwing the negative electrode plate 300, so that the negative electrode terminal of the ion source and the negative electrode plate 300 are easy to assemble and disassemble.

[0042] Reference Figure 4 The ion source device according to a second aspect embodiment of the present invention includes the aforementioned negative terminal of the ion source. By employing the aforementioned negative terminal of the ion source, the ion source device provided by the present invention can reduce the probability of arcing around the negative terminal, avoid insulation failure at the negative terminal during arcing, and ensure the normal operation of the ion source device.

[0043] Specifically, the ion source device also includes a positive electrode plate 200, a negative electrode plate 300, and a support base 400. The positive electrode plate 200 is mounted on the support base 400, and the negative electrode plate 300 is located on the side of the positive electrode plate 200 away from the support base 400. The negative electrode plate 300 is fixed to the positive electrode plate 200 by an insulating partition. The negative electrode connection end of the ion source negative electrode terminal is connected to the negative electrode plate 300 and passes through the positive electrode plate 200. The first insulating part 121 can form insulation between the negative electrode connection end and the positive electrode plate 200. The conductive post 110, except for the negative electrode connection end, passes through the support base 400. The conductive post 110 and the support base 400 are sealed by a second sealing ring 124. The side of the support base 400 away from the positive electrode plate 200 is the atmospheric side, and the side of the positive electrode plate 200 away from the support base 400 is the vacuum side. The atmospheric side and the vacuum side are isolated by the support base 400, the positive electrode plate 200, and other components.

[0044] In some embodiments, a cooling structure 500 is provided between the support base 400 and the positive electrode plate 200. The end of the negative electrode connection furthest from the negative electrode plate 300 is positioned close to the cooling structure 500. This allows the cooling structure 500 to cool the negative electrode connection, preventing heat accumulation at the connection point and thus avoiding a situation where the temperature at the negative electrode connection exceeds the withstand capacity of the first insulating sleeve. This prevents damage to components due to high temperatures.

[0045] The cooling structure 500 may include a water-cooling channel disposed within the support base 400, through which cooling water is circulated and transported to dissipate heat from components such as the positive electrode plate 200 and the support base 400. Of course, the cooling structure 500 may also employ cooling devices such as air cooling or semiconductor cooling.

[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A negative terminal block for an ion source, characterized in that, include: The conductive post (110) has a negative terminal at one end; An insulating element (120) is sleeved on the conductive post (110). The insulating element (120) includes a first insulating part (121). The first insulating part (121) is made of a material that can withstand arcing. The first insulating part (121) is sleeved on the negative electrode connection end. The outer peripheral wall of the first insulating part (121) is provided with at least two grooves (1211). The at least two grooves (1211) are arranged at intervals along the axis of the conductive post (110).

2. The negative electrode terminal of an ion source according to claim 1, characterized in that, The insulating component (120) further includes a second insulating portion (122), which is sleeved on the conductive post (110) and is located on the side of the first insulating portion (121) away from the negative electrode connection end.

3. The negative electrode terminal of an ion source according to claim 2, characterized in that, The first insulating part (121) and the second insulating part (122) are respectively formed.

4. The negative electrode terminal of an ion source according to claim 3, characterized in that, The first insulating part (121) is detachably sleeved on the negative electrode connection end.

5. The negative electrode terminal of an ion source according to claim 3, characterized in that, One end of the first insulating part (121) and one end of the second insulating part (122) abut against each other.

6. The negative terminal of an ion source according to claim 1, characterized in that, The first insulating part (121) is an insulating ceramic part.

7. The negative electrode terminal of an ion source according to claim 2, characterized in that, The second insulating part (122) is made of PEEK material.

8. The negative electrode terminal of an ion source according to claim 2, characterized in that, A first sealing ring (123) is provided between the second insulating part (122) and the conductive post (110), and a second sealing ring (124) is sleeved on the outer periphery of the second insulating part (122).

9. The negative terminal block of an ion source according to claim 8, characterized in that, The negative electrode connection end is provided with a connecting thread (1111) for screwing the negative electrode plate (300).

10. An ion source device, characterized in that, Includes the negative terminal of the ion source as described in any one of claims 1 to 9.

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