Folding tube reflecting seat, adjustable reflecting mirror seat system and multi-folding laser

Abstract

The utility model relates to the technical field of gas lasers, in particular to a folding tube reflecting seat, an adjustable reflecting mirror seat system and a multi-folding laser. According to the utility model, the annular boss is arranged at the beveled elliptical interface, the inner side via hole is arranged to have a circular cross section, and the top edge of the via hole is arranged to have an inward concave cambered surface along the annular direction, so that the annular boss and a reflector seat are assembled and installed; an interface matched with the reflector seat is changed from an ellipse to a perfect circle, and is processed on a circular outline, so that compared with the ellipse, the processing difficulty of the interface is reduced, the processing of the top cambered surface of the interface is more convenient, the contact gap between the circular cambered surface and the reflector seat is more uniform, and the sealing performance is better; the concave cambered surface arranged on the annular boss can form a two-dimensional angle-adjustable structure with the plane fitting edge of the existing reflector seat, and can also form a three-dimensional angle-adjustable structure with the spherical fitting edge of the existing reflector seat, so that the debugging is convenient, the grinding amount is small, and the debugging efficiency is favorably improved.

Description

Technical Field

[0001] This utility model relates to the field of gas laser technology, and in particular to a folded tube reflector mount, an adjustable reflector mount system, and a multi-folded laser. Background Technology

[0002] In traditional gas laser design, especially for carbon dioxide lasers, to achieve higher power output and a longer gain medium length within a limited space, a common technique is optical path folding, where multiple straight-tube laser units are connected end-to-end. Two parallel laser units are connected end-to-end via a folded tube reflector. The reflector guides the laser beam from the previous unit, turning it 180° before precisely injecting it into the next unit. This reflector is typically made of a glass tube with an internal U-shaped optical path channel, usually circular in cross-section. Elliptical interfaces are formed at specific locations on both sides of the reflector, corresponding to the incident and exit directions (usually at a 45° angle to the tube axis). Metal or glass reflector mounts are fused or bonded to these elliptical interfaces. Inside the reflector mount is a mounting cavity at a 45° angle to the optical path, containing a reflective mirror for efficient reflection and redirection of the laser beam. During installation, if… Figure 1 As shown, the reflecting surface of the reflecting lens 201 also serves as the bonding surface, and is bonded to the oblique plane of the folding tube reflecting seat through its edge.

[0003] However, in practical applications, traditional folded tube reflector mounts require the reflector mount to be removed multiple times during the alignment, welding, or sealing process with the reflector mount. The plane of the folded tube reflector mount needs to be repeatedly ground and adjusted until the normals of the two reflector lenses are strictly coplanar in space and form a precise 45° angle with the straight tube optical path. This results in a large amount of grinding and low adjustment efficiency. Utility Model Content

[0004] The purpose of this invention is to address the problem that existing folded tube reflector mounts used for adjusting the optical path of folded tubes require repeated grinding and adjustment of the mating edge during the installation of the reflector mount, resulting in large grinding work and low debugging efficiency. This invention provides a folded tube reflector mount, an adjustable reflector mount system, and a multi-folded laser.

[0005] In a first aspect, the present invention provides a folding tube reflector, including a reflector body. The reflector body has three sequentially connected optical path channels inside. The reflector body has an elliptical interface obliquely cut at the turning point of two adjacent optical path channels. An annular boss is provided on the periphery of the elliptical interface. The annular boss has a through hole with a circular cross-section. The through hole corresponds to the position of the elliptical interface. The inner edge of the top of the annular boss is circumferentially formed into a concave arc surface.

[0006] Preferably, the diameter of the via is greater than or equal to the major axis distance of the elliptical interface.

[0007] Preferably, the reflector body has a groove on its chamfered surface, and the groove is connected to the edge of the through hole.

[0008] Preferably, the depth of the groove is 0.3mm-0.6mm.

[0009] Preferably, the inner wall of the annular boss is a conical surface, which is tangent to two adjacent optical path channels. The inner wall of the annular boss aligns with the extension line of the optical path channel, ensuring that the reflector mount can be aligned with the laser tube core via the positioning mandrel during installation.

[0010] Preferably, the top of the annular boss has a flat surface.

[0011] Preferably, the annular boss has at least one chamfer on its top outer edge.

[0012] In a second aspect, the present invention provides an adjustable reflector mount system, including any of the above-mentioned folded tube reflector mounts, and further including a reflector mount, wherein the reflector mount is bonded to the arc surface of the folded tube reflector mount.

[0013] Preferably, the reflector mount includes a mount body and a reflector lens. The edge of the mount body is provided with a flange, which is used to fit the arc surface. The flange is a spherical fitting edge, and the reflector lens is installed on the side of the mount body provided with the spherical fitting edge.

[0014] Preferably, the mirror mount body includes a base plate and a mounting plate. The base plate is used to connect with the annular boss of the folded tube reflector. The mounting plate is connected to the side of the base plate facing the annular boss. The size of the mounting plate is smaller than the through hole size of the annular boss.

[0015] In a third aspect, the present invention provides a multi-folded laser, comprising at least two laser tube units arranged side by side, wherein two adjacent laser tube units are connected by any of the aforementioned adjustable reflector mount systems.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] 1. The folding tube reflector seat provided by this utility model, by setting an annular boss at the obliquely cut elliptical interface, setting its inner through hole as a circular cross section, and setting an inwardly concave arc surface along the top edge of the through hole (i.e., the inner edge of the top of the annular boss) to be adjusted and installed with the reflector seat, realizes that the interface that mates with the reflector seat is changed from an ellipse to a perfect circle. Compared with processing on an elliptical shape, the interface processing difficulty is reduced, making the processing of its top arc surface easier. The contact gap between the arc surface with the circular contour and the reflector seat is more uniform and the sealing performance is better. The inwardly concave arc surface set on the annular boss can form a two-dimensional angle-adjustable structure with the planar contact edge of the existing reflector seat, or form a three-dimensional angle-adjustable structure with the spherical contact edge of the existing reflector seat. The adjustment is convenient, the amount of grinding is small, the technical difficulty is reduced, and the adjustment efficiency is high.

[0018] 2. The adjustable reflector mount system provided by this utility model replaces the pure planar elliptical interface with the reflector mount by designing an annular boss and a circular arc surface on the folded tube reflector mount. This allows for a certain angle adjustment capability before bonding. Compared with the traditional pure planar bonding structure, it helps to reduce the amount of debugging work, shorten the overall debugging cycle, reduce technical difficulty, and thus improve production efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the connection method between the reflective lens and the folding tube reflective mount in the prior art;

[0020] Figure 2 This is a schematic diagram of the structure of a folded tube reflector in Example 1;

[0021] Figure 3 for Figure 2 Enlarged view of part A in the image;

[0022] Figure 4 for Figure 3 Enlarged view of part B in the image;

[0023] Figure 5 This is a schematic diagram of the structure when the reflector seat of the folded tube is cut at an angle.

[0024] Figure 6 This is a diagram showing the usage state when a positioning mandrel passes through the oblique cut of the folded tube reflector from the center of a light path;

[0025] Figure 7 This is a schematic diagram of the assembly structure when the folded tube reflector mount and the reflector lens mount are bonded together.

[0026] Figure 8 for Figure 7 Enlarged view of section C in the image.

[0027] Marked in the image:

[0028] 1-Reflector mount body; 101-Elliptical interface; 102-Annular boss; 103-Curved surface; 104-Through hole; 105-Conical surface; 106-Chamfer; 107-Groove; 108-Flat surface;

[0029] 2-Mirror mount; 201-Reflecting mirror; 202-Substrate; 203-Mounting plate; 204-Flange;

[0030] 3-Positioning mandrel. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0032] Example 1

[0033] like Figures 2-5 As shown, a folding tube reflector includes a reflector body 1. The reflector body 1 has three sequentially connected optical path channels inside. An elliptical interface 101 is obliquely cut at the junction of two adjacent optical path channels. An annular boss 102 is provided on the periphery of the elliptical interface 101. The annular boss 102 has a through hole 104 with a circular cross-section. The through hole 104 corresponds to the position of the elliptical interface 101. The inner edge of the top of the annular boss 102 is circumferentially formed into a concave arc surface 103.

[0034] This solution involves setting an annular boss 102 at the obliquely cut elliptical interface 101, with its inner through hole 104 having a circular cross-section, and a concave arc surface 103 circumferentially formed along the top edge of the through hole 104 (i.e., the inner edge of the top of the annular boss 102) for adjustment and installation with the reflector mount 2. The annular boss 102 transforms the interface for mating with the reflector mount 2 from an ellipse to a perfect circle. Machining on a circular contour reduces the interface machining difficulty compared to an elliptical shape, making the machining of the top arc surface 103 easier. The circular arc surface 103 provides a more uniform contact gap with the reflector mount 2, resulting in better sealing. The concave arc surface 103 on the annular boss 102 can form a two-dimensional angle-adjustable structure with the existing planar contact edge of the reflector mount 2, or a three-dimensional angle-adjustable structure with the existing spherical contact edge of the reflector mount 2, facilitating adjustment, reducing grinding work, lowering technical difficulty, and improving adjustment efficiency.

[0035] In an optional embodiment, the arc surface 103 is preferably configured as a sphere, and the radius of curvature is preferably configured as 100 mm.

[0036] In optional implementations, such as Figure 3, Figure 5 As shown, the diameter of the via 104 is greater than or equal to the major axis distance of the elliptical interface 101. This allows the optical path channel within the reflector body 1 to be fully exposed in the via 104 of the annular boss 102, facilitating the machining of the annular boss 102 and the positioning of the optical path axis. The via 104 is preferably positioned through the two endpoints on the major axis of the elliptical interface 101.

[0037] The reflector mount body 1 has support platforms spaced a certain distance apart on both sides of the elliptical interface 101 along its minor axis. This is to better accommodate the installation of reflective lenses 201 of different thicknesses. Figure 3 As shown, a groove 107 of a certain depth is preferably provided on the oblique cut surface of the reflector body 1 to provide more installation space for the reflector 201, which helps to ensure that the reflector surfaces of the lenses intersect at the center of the optical path, further reducing the difficulty of adjustment. During use, the optical path center can be matched by adjusting the lens thickness. The groove 107 is preferably connected to the edge of the via 104. The planar shape of the groove 107 is circular, which has good adaptability to working conditions and is convenient for processing and positioning.

[0038] In an optional embodiment, the depth of the groove 107 is 0.3mm-0.6mm, and preferably 0.5mm.

[0039] In optional implementations, such as Figure 2 , Figure 3 , Figure 6 As shown, the inner wall of the annular boss 102 is a conical surface 105, which is tangent to the two optical path channels connected at its location. On the horizontal projection plane, the inner wall of the annular boss 102 is perpendicular to the side wall of the optical path channel on its side and extends in the same direction as the side wall of the opposite optical path channel. This ensures that the positioning mandrel 3 can pass through the elliptical interface 101, thereby axially positioning the gas storage tube and core tube of the laser tube unit, and can also be used for accurate positioning during the installation of the reflector mount 2.

[0040] In optional implementations, such as Figure 4 , Figure 5 As shown, the top of the annular boss 102 has a flat surface 108, which helps to reduce the contact stress with the reflector mount 2. This flat surface 108 connects to the inner arc surface 103, and the outer edge of the flat surface 108 has at least one chamfer 106, serving as a bonding surface for bonding with the reflector mount 2. The planar shape of the outer contour of the annular boss 102 is preferably circular, so that the chamfer 106 forms an outer conical surface, which is easy to process and provides good uniformity and sealing of the gap. The chamfer 106 can form a wedge-shaped space with the reflector mount 2 for better and more secure bonding. Figure 8 As shown.

[0041] In this design, the annular boss 102 transforms the 45-degree beveled elliptical adjustment surface and the sealant bonding surface into a circle, facilitating the processing of the adjustment spherical surface and the bonding conical surface. By adopting this design, the lens reflecting surface and the bonding adjustment surface of the reflective lens 201 can be separated, allowing the sealant to be kept away from the reflecting surface of the reflective lens 201, thus improving light quality. Furthermore, the circular bonding surface has uniform gaps and good sealing performance.

[0042] In an optional embodiment, the annular boss 102 may be made of materials such as ceramic, glass or silicon.

[0043] Example 2

[0044] Based on Example 1, such as Figure 7 , Figure 8 As shown, this embodiment provides an adjustable reflector mount system, including the aforementioned folded tube reflector mount and a reflector mount 2. The reflector mount 2 is bonded to the curved surface 103 of the folded tube reflector mount. Adhesive is applied to the bonding area.

[0045] This solution replaces the pure planar elliptical interface by designing an annular boss 102 and a circular arc surface 103 on the folded tube reflector base. This allows for a certain degree of angle adjustment before bonding. Compared with the traditional pure planar bonding structure, this reduces the workload of debugging, shortens the overall debugging cycle, reduces technical difficulty, and thus improves production efficiency.

[0046] In an optional embodiment, the reflector mount 2 includes a mount body and a reflector lens 201. The mount body is provided with a flange 204 for engaging with the arc surface 103 on the annular boss 102 of the folded tube reflector. The flange 204 is preferably a spherical engagement edge, and the radius of curvature of the spherical engagement edge is consistent with the radius of curvature of the concave arc surface 103 at the top of the folded tube reflector. The reflector lens 201 is installed on the side of the mount body provided with the flange 204. During installation, the mount body of the reflector mount 2 contacts the folded tube reflector through a spherical contact. The reflector lens 201 is located in the through hole 104 of the annular boss 102 and is attached to the reflector body 1 on both sides of the minor axis of the elliptical interface 101. By bonding the mount body to the top of the annular boss 102 of the folded tube reflector, the reflective surface and the bonding surface of the reflector lens 201 are separated, keeping the sealant away from the reflective surface of the lens. This facilitates the removal and adjustment of the reflector mount 2 and improves the quality of the internal optical path.

[0047] This solution adopts a spherical-to-spherical bonding method, which, compared to the spherical-to-planar bonding method, can form a conformal surface contact, resulting in a larger contact area, a more uniform adhesive layer thickness, and less local stress concentration. Furthermore, the spherical-to-spherical contact method allows for smooth angle and position fine-tuning in multiple directions (three dimensions), providing a wider adjustment range, higher tolerance for processing and assembly errors, more uniform gaps, better sealing, superior long-term stability, and easier assembly and debugging.

[0048] Furthermore, the mirror mount body includes a substrate 202 and a mounting plate 203, which are integrally connected. The substrate 202 is used to connect with the annular boss 102 of the folded tube reflector, and a spherical fitting edge is provided on its outer edge to match the position of the arc surface 103 at the top of the folded tube reflector. A chamfer is also provided on the outer edge of the substrate 202, corresponding to the plane 108 at the top of the annular boss 102 and the chamfer 106 on the outer edge, to facilitate better penetration and bonding of adhesive. Figure 8 As shown. Mounting plate 203 is used to bond and connect reflector 201. Mounting plate 203 is connected to the side of substrate 202 facing annular boss 102. The size of mounting plate 203 is smaller than the size of through hole 104, so that mounting plate 203 can be better inserted into through hole 104 of annular boss 102. By adjusting the mating spherical surface, the angle of reflector 201 is adjusted so that the reflecting surface of reflector 201 matches the center of optical path.

[0049] Example 3

[0050] Based on Embodiment 2, this embodiment provides a multi-folded laser, including at least two laser tube units arranged in parallel, with adjacent laser tube units connected by the aforementioned adjustable reflector mount system.

[0051] The multi-fold laser using the aforementioned adjustable reflector mount system is beneficial for system stability and high production efficiency.

[0052] The above-described construction method is applicable to sealed-off gas lasers using carbon dioxide (CO2), carbon monoxide (CO), nitrogen (N2), helium-neon (He-Ne), argon ions (Ar+), krypton ions (Kr+), and excimers (such as KrF, ArF, XeCl) as gain media.

[0053] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A folded tube reflector comprising a reflector body (1) having three light path channels connected in sequence, and an elliptical interface (101) being chamfered at the turning connection of two adjacent light path channels. The annular boss (102) has a through hole (104) with a circular cross section, the through hole (104) corresponds to the position of the elliptical interface (101), and the inner edge of the top of the annular boss (102) is provided as an arc surface (103) in a concave shape in the circumferential direction.

2. The folded tube reflector of claim 1, wherein The diameter of the through hole (104) is greater than or equal to the distance of the major axis of the elliptical interface (101).

3. The folded tube reflector of claim 1, wherein The bevel surface of the reflector body (1) is provided with a groove (107), and the groove (107) is connected to the edge position of the through hole (104).

4. The folded tube of claim 3, wherein The depth of the groove (107) is 0.3mm-0.6mm.

5. The folded tube of claim 1, wherein The inner side wall of the annular boss (102) is provided as a conical surface (105), and the conical surface (105) is tangent to the adjacent two light path channels, respectively.

6. The folded tube reflector of any of claims 1-5, wherein The top of the annular boss (102) is provided with a flat surface (108), the flat surface (108) is located on the outer side of the arc surface (103), and the outer edge of the flat surface (108) is further provided with at least one chamfer (106).

7. An adjustable mirror mount system, characterized by The folding tube reflector includes the folding tube reflector according to any one of claims 1-6, and further includes a reflector seat (2) which is bonded to the arc surface (103) of the folding tube reflector.

8. The gimbal system of claim 7, wherein, The reflector seat (2) includes a seat body and a reflector lens (201), the edge of the seat body is provided with a flange (204) which is used for adapting to the arc surface (103), the flange (204) is a spherical surface fitting edge, and the reflector lens (201) is installed on one side of the seat body provided with the flange (204).

9. The gimbal system of claim 8, wherein, The seat body includes a base plate (202) and a mounting plate (203), the base plate (202) is used for connecting the annular boss (102) of the folding tube reflector, the mounting plate (203) is connected to one side of the base plate (202) facing the annular boss (102), and the size of the mounting plate (203) is smaller than the size of the through hole (104) of the annular boss (102).

10. A multiple folded laser, characterized by, The laser tube unit includes at least two parallel laser tube units, and adjacent two laser tube units are connected through the adjustable reflector seat system according to any one of claims 7-9.

Images