Simple radio frequency matcher network topology circuit

Abstract

The utility model relates to the technical field of semiconductor etching process equipment, and discloses a simple radio frequency matcher network topology circuit, which comprises a load tuning capacitor C2, a high-frequency matching network, a cavity, a network analyzer, a low-frequency matching network, a high-frequency radio frequency source and a low-frequency radio frequency source. According to the utility model, the optimized reverse matching network topology structure is adopted to significantly reduce the volume of the matcher, the improvement just meets the urgent demand of the current equipment design for modularization and simplification, and in a dual-frequency application scene, one load capacitor C2 is innovatively shared, thereby greatly saving the material use, and reducing the cost. According to the double-frequency common capacitor, the overall size of the circuit is further reduced, the cost is reduced, the integration level and the space utilization efficiency of the circuit are improved, and a new thought is provided for miniaturization and efficient design of modern electronic equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor etching process equipment technology, and more specifically, to a simple radio frequency matching network topology circuit. Background Technology

[0002] The simplified RF matching network topology is specifically designed for RF circuits to achieve impedance matching between transmission lines and loads. It employs L-type, T-type, or P-type circuit topologies, cleverly combining inductors, capacitors, and other components to flexibly adjust the circuit impedance, ensuring perfect matching with the transmission line impedance. In the RF field, impedance matching is crucial for improving system signal-to-noise ratio, enhancing frequency response linearity, and ensuring the load absorbs all power without reflection. The simplified matching network simplifies the matching process, improving design efficiency and providing RF circuits with greater flexibility and adaptability. It is an indispensable key component in modern RF system design. Current etching equipment technology covers various frequency ranges in biased RF applications. To achieve switching between high and low frequencies without frequent adjustments to the matching network, the traditional approach is to use a topology with two anti-matching networks. While this design solves the frequency switching problem to some extent, its internal structure is complex, containing numerous components. In practice, when one frequency network is active, the other is idle, resulting in wasted resources and increased overall equipment cost and complexity. Therefore, exploring more efficient and concise matching network design schemes has become an important direction for the development of current etching equipment technology. Utility Model Content

[0003] To overcome the shortcomings of existing technologies, this utility model provides a simple radio frequency matching network topology circuit, which has the advantages of improving circuit integration and space utilization efficiency.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a simple radio frequency matching network topology circuit, which includes a load tuning capacitor C2, a high-frequency matching network, a cavity, a network analyzer, a low-frequency matching network, a high-frequency radio frequency source, and a low-frequency radio frequency source;

[0005] The load tuning capacitor is electrically connected to the cavity and is used to adjust the impedance of the cavity at different frequencies. The high-frequency matching network and the low-frequency matching network are respectively connected to the output terminal of the cavity and are used to optimize the performance of the cavity in the high-frequency and low-frequency bands. The network analyzer is connected to the high-frequency matching network or the low-frequency matching network through a specific interface and is used to measure and analyze the performance of the entire circuit.

[0006] As a preferred embodiment of this utility model, the high-frequency matching network is composed of C2, C4, and L1. The high-frequency radio frequency source is electrically connected to C4, and C4 is electrically connected to L1. C2 is provided between the high-frequency radio frequency source and C4.

[0007] As a preferred embodiment of this utility model, the low-frequency matching network consists of C3, C2, and L3. The low-frequency radio frequency source is electrically connected to L2, and L2 and the low-frequency radio frequency source are located in C3. L1 and L2 are electrically connected.

[0008] As a preferred technical solution of this utility model, the network analyzer provides the following function: when selecting the load tuning capacitor C2 based on the high and low frequency impedance of the cavity, it must be ensured that it is applicable in both the low-frequency and high-frequency network impedance ranges to achieve multiplexing. Using the network analyzer, the reflection coefficient S11 and transmission coefficient S21 are observed, and the input impedance of the cavity is calculated through S11 and the system characteristic impedance Z0 (e.g., 100Ω).

[0009]

[0010] Where Z0 is the characteristic impedance of the system.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] This invention significantly reduces the size of the matcher by adopting an optimized anti-matching network topology. This improvement precisely meets the current urgent need for modularity and simplification in device design. In dual-frequency application scenarios, a load capacitor C2 is innovatively shared. This design not only greatly saves material usage but also further reduces the overall size of the circuit. This dual-frequency shared capacitor strategy not only reduces costs but also improves circuit integration and space utilization efficiency, providing a new approach for the miniaturization and high-efficiency design of modern electronic devices. Attached Figure Description

[0013] Figure 1 This is the topology circuit diagram of this utility model.

[0014] In the diagram: a) High-frequency matching network; b) High-frequency radio frequency source; c) Low-frequency radio frequency source; d) Low-frequency matching network. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] like Figure 1 As shown, this utility model provides a simple radio frequency matching network topology circuit, which includes a load tuning capacitor C2, a high-frequency matching network, a cavity, a network analyzer, a low-frequency matching network d, a high-frequency radio frequency source, and a low-frequency radio frequency source c;

[0017] The load tuning capacitor is electrically connected to the cavity to adjust the cavity's impedance at different frequencies. The high-frequency matching network and the low-frequency matching network d are connected to the cavity's output terminals to optimize the cavity's performance in the high-frequency and low-frequency bands, respectively. The network analyzer is connected to the high-frequency matching network or the low-frequency matching network d through a specific interface to measure and analyze the performance of the entire circuit.

[0018] The simplified RF matching network topology circuit allows for flexible adjustment of the load tuning capacitor to match the cavity impedance at different frequencies. Performance is optimized through high-frequency and low-frequency matching networks, and the network analyzer provides real-time monitoring and analysis, ensuring efficient and stable circuit operation and improving overall communication quality and system reliability.

[0019] The high-frequency matching network consists of C2, C4, and L1. The high-frequency radio frequency source is electrically connected to C4, and C4 is electrically connected to L1. C2 is set between the high-frequency radio frequency source and C4.

[0020] The high-frequency matching network is carefully composed of C2, C4, and L1. The high-frequency RF source is directly connected to C4, while C4 is tightly electrically connected to L1. Meanwhile, C2 is cleverly placed between the high-frequency RF source and C4. This design not only optimizes the signal transmission efficiency in the high-frequency band but also enhances the stability and anti-interference capability of the circuit, providing a clearer and more stable high-frequency signal transmission path for the communication system.

[0021] The low-frequency matching network d consists of C3, C2, and L3. The low-frequency radio frequency source c is electrically connected to L2, and L2 is electrically connected to the low-frequency radio frequency source c via C3, L1, and L2.

[0022] The low-frequency matching network d cleverly integrates C3, C2, and L3. The low-frequency RF source c is electrically connected through L2, and L2 and the low-frequency RF source c are both located near C3, enhancing the compactness of the circuit layout. The electrical connection between L1 and L2 further improves the transmission efficiency of low-frequency signals, providing a stable and efficient low-frequency signal matching scheme for the communication system and ensuring optimized signal quality.

[0023] The network analyzer provides the following function: when selecting the load tuning capacitor C2 based on the high and low frequency impedance of the cavity, it must be ensured that it is applicable within both the low and high frequency network impedance ranges to achieve multiplexing. Using the network analyzer, the reflection coefficient S11 and transmission coefficient S21 are observed, and the input impedance of the cavity is calculated using S11 and the system characteristic impedance Z0 (e.g., 100Ω).

[0024]

[0025] Where Z0 is the characteristic impedance of the system.

[0026] When using a network analyzer to select the load tuning capacitor C2, precise matching based on the cavity's high and low frequency impedance requirements can be achieved, ensuring capacitor reuse across a wide frequency range and improving resource utilization. By observing the reflection coefficient S11 and transmission coefficient S21, and using S11 and the system characteristic impedance Z0 (e.g., 100Ω) to calculate the input impedance, circuit performance can be quickly optimized, debugging costs reduced, and the accuracy and reliability of the design improved. This provides strong support for the compact and efficient design of modern communication equipment.

[0027] The network analyzer connects to a high-frequency matching network or a low-frequency matching network d via a specific interface to measure and analyze the performance of the entire circuit.

[0028] Network analyzers connect to high-frequency or low-frequency matched networks (d) via specific interfaces, enabling comprehensive measurement and analysis of the entire circuit's performance. This connection method not only improves testing efficiency but also ensures testing accuracy, providing reliable data support for circuit optimization and contributing to enhanced overall equipment performance and stability.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A simple radio frequency matching network topology circuit, characterized in that: The circuit includes a load tuning capacitor C2, a high-frequency matching network (a), a cavity, a network analyzer, a low-frequency matching network (d), a high-frequency RF source (b), and a low-frequency RF source (c). The load tuning capacitor is electrically connected to the cavity and is used to adjust the impedance of the cavity at different frequencies. The high-frequency matching network (a) and the low-frequency matching network (d) are respectively connected to the output end of the cavity and are used to optimize the performance of the cavity in the high-frequency and low-frequency bands. The network analyzer is connected to the high-frequency matching network (a) or the low-frequency matching network (d) through a specific interface and is used to measure and analyze the performance of the entire circuit.

2. The simplified radio frequency matching network topology circuit according to claim 1, characterized in that: The high-frequency matching network (a) is composed of C2, C4, and L1. The high-frequency radio frequency source (b) is electrically connected to C4, and C4 and L1 are electrically connected. C2 is provided between the high-frequency radio frequency source (b) and C4.

3. A simplified radio frequency matching network topology circuit according to claim 2, characterized in that: The low-frequency matching network (d) consists of C3, C2, and L3. The low-frequency radio frequency source (c) is electrically connected to L2. L2 and the low-frequency radio frequency source (c) are located in C3. L1 and L2 are electrically connected.

4. A simplified radio frequency matching network topology circuit according to claim 1, characterized in that: The network analyzer provides the following function: when selecting the load tuning capacitor C2 based on the high and low frequency impedance of the cavity, it must be ensured that it is applicable in both the low-frequency and high-frequency network impedance ranges to achieve multiplexing. Using the network analyzer, the reflection coefficient S11 and transmission coefficient S21 are observed, and the input impedance of the cavity is calculated through S11 and the system characteristic impedance Z0. Where Z0 is the characteristic impedance of the system.

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