Gasket mounting device

Abstract

A gasket mounting device relates to the technical field of semiconductor manufacturing equipment. The gasket mounting device comprises a sliding part and a pushing part which are connected with each other, a sliding cavity is formed in the sliding part, a first opening and a second opening are formed in the two opposite ends of the sliding cavity respectively, the first opening is used for being communicated with a special gas connector, and the inner diameter of the sliding cavity is gradually reduced from the second opening to the first opening; the pushing part comprises a push rod, and the push rod can extend into the sliding cavity from the second opening and slide along the sliding cavity; and the gasket placed at the end part of the push rod can be pushed into the special gas interface through the first opening along the sliding cavity by the push rod. According to the gasket mounting device, the gasket mounting efficiency and accuracy can be improved, and the safety of the operation process is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and more specifically, to a gasket mounting device. Background Technology

[0002] In semiconductor manufacturing, specialty gases (such as silane and nitrogen trifluoride) are core media for processes like thin film deposition and etching. Their high purity, corrosiveness, or toxicity necessitates zero-leakage sealing in the delivery system. Specialty gaskets, as critical sealing components between interfaces, can prevent gas leakage and contamination through elastic deformation.

[0003] Current gasket installation relies on manual operation: technicians align the gasket with the interface by hand and press it into place with their fingers. Due to the tiny size of the gasket, technicians must remove their protective clothing to complete the delicate installation, which reduces operational safety; at the same time, manual installation of gaskets has low accuracy and the gaskets are prone to falling off, resulting in low installation efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a gasket installation device that can improve the efficiency and accuracy of gasket installation and ensure the safety of the operation process.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In one aspect, this utility model provides a gasket installation device, including a sliding part and a pushing part connected to each other. The sliding part has a sliding cavity, and a first opening and a second opening are respectively provided at opposite ends of the sliding cavity. The first opening is used to communicate with a special gas interface, and the inner diameter of the sliding cavity gradually decreases from the second opening to the first opening. The pushing part includes a push rod, which can extend into the sliding cavity through the second opening and slide along the sliding cavity. A gasket placed at the end of the push rod can be pushed into the special gas interface through the first opening along the sliding cavity by the push rod.

[0007] Optionally, the gasket mounting device further includes a fixing part, which is sleeved on the end of the sliding part away from the pushing part and extends toward the special gas interface; when the first opening of the sliding cavity is in communication with the special gas interface, the fixing part covers the outer wall of the special gas interface.

[0008] Optionally, a slot is provided on the side of the fixing part facing the special gas interface, and the slot is used to engage with the snap-fit ​​part on the outer wall of the special gas interface.

[0009] Optionally, the pushing part includes a fixed bracket, which includes a fixed plate and a limiting wall surrounding the fixed plate. The push rod passes through the fixed plate along the thickness direction of the fixed plate, and the limiting wall can be fitted onto the outer wall of the sliding part near the second opening.

[0010] Optionally, the limiting wall has a feeding port along the wall thickness direction. The feeding port is located between the second opening of the sliding cavity and the fixed plate. The gasket can be placed through the feeding port on the side of the push rod facing the sliding cavity.

[0011] Optionally, the push rod includes a connected rod body and a push plate, the rod body passing through the fixed plate along the thickness direction of the fixed plate, and the push plate being used to push the pad.

[0012] Optionally, the pushing part also includes a magnetic sheet, which is disposed on the side of the fixed plate opposite to the sliding part, and the push rod passes through the fixed plate and the magnetic sheet in sequence along the thickness direction of the fixed plate.

[0013] Optionally, a groove is provided on the side of the fixing plate away from the sliding part, the groove corresponding to the size of the magnetic sheet, and the magnetic sheet is engaged in the groove.

[0014] Optionally, an actuating element is provided at the end of the rod away from the push plate, and the outer wall of the actuating element is arc-shaped.

[0015] Optionally, a return spring is fitted on the outer wall of the rod, with the two ends of the return spring abutting against the fixed plate and the pusher, respectively.

[0016] The beneficial effects of this utility model include:

[0017] This application provides a gasket installation device, including a sliding part and a pushing part connected to each other. The sliding part has a sliding cavity, with a first opening and a second opening at opposite ends. The first opening communicates with a special gas interface, and the inner diameter of the sliding cavity gradually decreases from the second opening to the first opening. When a push rod pushes the gasket to move within the sliding cavity, the gradually decreasing inner diameter exerts a certain squeezing effect on the gasket, helping it to better adapt to the shape of the special gas interface and improve the sealing effect. Furthermore, this arrangement also provides a certain degree of positioning and guidance for the gasket, making it more stable during movement. The pushing part includes a push rod that extends into the sliding cavity through the second opening and slides along the sliding cavity. The gasket placed at the end of the push rod can be pushed into the special gas interface through the first opening along the sliding cavity, avoiding potential safety risks when technicians install gaskets manually, and also improving the convenience and controllability of the operation. The above-mentioned gasket installation device can improve the efficiency and accuracy of gasket installation and ensure the safety of the operation process. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 One of the cross-sectional views of the gasket mounting device provided in the embodiments of this utility model;

[0020] Figure 2 A second cross-sectional view of the gasket mounting device provided in an embodiment of this utility model;

[0021] Figure 3 Third sectional view of the gasket mounting device provided in the embodiment of this utility model;

[0022] Figure 4 This is a schematic diagram showing the installation method of existing gaskets and special gas interfaces.

[0023] Icons: 100-Gasket mounting device; 110-Sliding part; 111-Sliding cavity; 1111-First opening; 1112-Second opening; 120-Pushing part; 121-Push rod; 1211-Rod body; 1212-Push plate; 1213-Pushing element; 1214-Reset spring; 122-Fixed bracket; 1221-Fixed plate; 1222-Limiting wall; 1223-Dispensing port; 123-Magnetic sheet; 130-Fixed part; 131-Slot; 200-Special gas interface; 210-Snap-fit ​​part; 300-Gasket. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0026] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0028] Please refer to Figure 1 This embodiment provides a gasket mounting device 100, including a sliding part 110 and a pushing part 120 connected to each other. The sliding part 110 has a sliding cavity 111. The two opposite ends of the sliding cavity 111 are respectively provided with a first opening 1111 and a second opening 1112. The first opening 1111 is used to communicate with a special gas interface 200, and the inner diameter of the sliding cavity 111 gradually decreases from the second opening 1112 to the first opening 1111. The pushing part 120 includes a push rod 121. The push rod 121 can extend into the sliding cavity 111 through the second opening 1112 and slide along the sliding cavity 111. The gasket 300 placed at the end of the push rod 121 can be pushed into the special gas interface 200 through the push rod 121 along the sliding cavity 111 and through the first opening 1111.

[0029] Specifically, such as Figure 1 As shown, the gasket mounting device 100 includes a sliding part 110 with a cylindrical structure. A sliding cavity 111 is provided in the sliding part 110 along the extending direction to guide the moving direction of the gasket 300 and connect to the special gas interface 200. The opposite ends of the sliding cavity 111 are connected to the outside to form a first opening 1111 and a second opening 1112.

[0030] The gasket mounting device 100 also includes a pushing part 120, which includes a push rod 121. The push rod 121 can extend into the sliding cavity 111 through the second opening 1112 and move relative to the sliding cavity 111 to extend and retract within the sliding cavity 111 for pushing the gasket 300.

[0031] like Figure 4As shown, with existing gaskets, technicians manually align the gasket with the interface and press it into position with their fingers during installation. Due to the small size of the gasket, the operation is inconvenient, and sometimes operators need to remove their protective clothing for precise installation. To solve the above problems, this application can set the gasket 300 at the end of the push rod 121. The operator only needs to push the push rod 121 to move the gasket 300 from the second opening 1112 towards the first opening 1111. This process avoids the safety risks that technicians may encounter when installing the gasket 300 by hand, and also improves the convenience and controllability of the operation. Since the inner diameter of the sliding cavity 111 gradually decreases along the movement path of the gasket 300, it will exert a certain squeezing effect on the gasket 300, which helps the gasket 300 to better adapt to the shape of the special gas interface 200 and improve the sealing effect. Compared with manual pressing, this method is easier to operate and also improves the stability of the gasket 300 installation process. The entire process is carried out within the sliding cavity 111, which will not cause the gasket 300 to fall off, thus improving the installation efficiency.

[0032] It should be noted that, in one possible implementation of this application, firstly, as... Figure 2 As shown, the gasket mounting device 100 also includes a fixing part 130. The fixing part 130 is sleeved on the end of the sliding part 110 away from the pushing part 120 and extends towards the special gas interface 200, protruding from the periphery of the first opening 1111, thereby providing additional support and fixing structure for the sliding part 110. When the first opening 1111 of the sliding cavity 111 is in communication with the special gas interface 200, the fixing part 130 covers the outer wall of the special gas interface 200, which can reduce the shaking or displacement of the sliding part 110 during operation, making the entire device more stable and helping the push rod 121 to accurately push the gasket 300 into the special gas interface 200, improving the installation accuracy. In addition, the setting of the fixing part 130 allows the special gas interface 200 to be covered during the installation of the gasket 300, which can also play a certain role in sealing.

[0033] Optionally, to further improve the stability of the electrical mounting device when using the mounting gasket 300, such as... Figure 2 As shown, the fixing part 130 has a slot 131 on the side facing the special gas interface 200. The slot 131 is used to engage with the engaging part 210 on the outer wall of the special gas interface 200.

[0034] Specifically, such as Figure 2As shown, the outer wall of the special gas interface 200 is provided with a snap-fit ​​part 210, and the fixing part 130 is provided with a slot 131 that matches the shape of the snap-fit ​​part 210 on the side facing the special gas interface 200. When the first opening 1111 of the sliding cavity 111 is connected to the special gas interface 200, the fixing part 130 covers the outer wall of the special gas interface 200. At this time, the slot 131 can snap with the snap-fit ​​part 210 of the special gas interface 200 to further prevent the connection between the sliding part 110 and the special gas interface 200 from falling off or shifting.

[0035] Second, such as Figure 2 As shown, the pushing part 120 includes a fixed bracket 122, which includes a fixed plate 1221 and a limiting wall 1222 surrounding the fixed plate 1221. The push rod 121 passes through the fixed plate 1221 along the thickness direction of the fixed plate 1221, and the limiting wall 1222 can be sleeved on the outer wall of the sliding part 110 near the second opening 1112.

[0036] Specifically, such as Figure 2 As shown, the push rod 121 passes through the fixed plate 1221, thereby restricting the movement direction of the push rod 121 through the fixed plate 1221, so that the push rod 121 can only move along the thickness direction of the fixed plate 1221, ensuring the straightness of the push rod 121 when pushing the shim 300, and improving the installation accuracy of the shim 300.

[0037] The limiting wall 1222 is arranged around the periphery of the fixing plate 1221. It can be sleeved on the outer wall of the sliding part 110 near the second opening 1112 to limit the relative position of the fixing bracket 122 and the sliding part 110, ensuring that the connection between the two is stable and the position is accurate, preventing the fixing bracket 122 from shaking or shifting on the sliding part 110, thereby ensuring that the relative positional relationship between the push rod 121 and the sliding cavity 111 remains unchanged, which is beneficial to improving the consistency and reliability of the installation of the gasket 300.

[0038] By fitting the limiting wall 1222 onto the outer wall of the sliding part 110, a tight connection and accurate fit between the pushing part 120 and the sliding part 110 are achieved. On the one hand, this enhances the structural stability of the entire device, allowing the pushing part 120 and the sliding part 110 to work together without relative displacement or loosening during the pushing of the pad 300. On the other hand, this fitting method also facilitates the assembly and disassembly of the device, makes maintenance and component replacement easier, and provides clear installation guidance for operators, reducing the difficulty of operation.

[0039] The aforementioned gasket mounting device 100 includes a sliding part 110 and a pushing part 120 connected to each other. The sliding part 110 has a sliding cavity 111. A first opening 1111 and a second opening 1112 are respectively provided at opposite ends of the sliding cavity 111. The first opening 1111 is used to communicate with the special gas interface 200. The inner diameter of the sliding cavity 111 gradually decreases from the second opening 1112 to the first opening 1111. When the push rod 121 pushes the gasket 300 to move within the sliding cavity 111, the gradually decreasing inner diameter exerts a certain squeezing effect on the gasket 300, helping the gasket 300 to better adapt to the special gas interface 200. The shape improves the sealing effect; in addition, this arrangement can also position and guide the gasket 300 to a certain extent, making the gasket 300 more stable during movement; the pushing part 120 includes a push rod 121, which can extend into the sliding cavity 111 through the second opening 1112 and slide along the sliding cavity 111; the gasket 300 placed at the end of the push rod 121 can be pushed into the special gas interface 200 through the first opening 1111 along the sliding cavity 111 by the push rod 121, avoiding the safety risks that may occur when technicians install the gasket 300 by hand, and also improving the convenience and controllability of operation. The above-mentioned gasket installation device 100 can improve the installation efficiency and accuracy of the gasket 300 and ensure the safety of the operation process.

[0040] For example, such as Figure 2 As shown, the limiting wall 1222 has a delivery port 1223 along the wall thickness direction. The delivery port 1223 is located between the second opening 1112 of the sliding cavity 111 and the fixing plate 1221. The gasket 300 can be placed on the side of the push rod 121 facing the sliding cavity 111 through the delivery port 1223.

[0041] Specifically, such as Figure 2 As shown, a feeding port 1223 is provided along the wall thickness direction of the limiting wall 1222 to facilitate the feeding of the gasket 300. Operators can directly insert the gasket 300 into the device without disassembling the entire device, greatly simplifying the gasket 300 loading process and improving work efficiency. Furthermore, feeding the gasket 300 through the feeding port 1223 avoids damage to the internal precision structure caused by frequent disassembly of the device, extending the device's service life.

[0042] For example, such as Figure 3 As shown, the push rod 121 includes a rod body 1211 and a push plate 1212 connected to each other. The rod body 1211 passes through the fixed plate 1221 along the thickness direction of the fixed plate 1221, and the push plate 1212 is used to push the pad 300.

[0043] Specifically, the rod 1211 primarily functions to transmit thrust, transferring the force applied by the operator to the push plate 1212; the push plate 1212 then directly contacts the pad 300, used to move the pad 300. To improve the reliability of the pad 300's movement, the shape and structure of the push plate 1212 can be adapted to the shape and structure of the pad 300 to ensure uniform force distribution on the pad 300 during the pushing process. Preferably, the push plate 1212 is circular.

[0044] Optionally, such as Figure 2 As shown, the pushing part 120 also includes a magnetic sheet 123, which is disposed on the side of the fixed plate 1221 opposite to the sliding part 110. The push rod 121 passes through the fixed plate 1221 and the magnetic sheet 123 in sequence along the thickness direction of the fixed plate 1221.

[0045] Specifically, such as Figure 2 As shown, the magnetic sheet 123 is disposed on the side of the fixed plate 1221 facing away from the sliding part 110. Since the push rod 121 passes through the fixed plate 1221 and the magnetic sheet 123 sequentially along the thickness direction of the fixed plate 1221, the magnetic sheet 123 corresponds to the position of the push plate 1212. This positional arrangement will not affect the normal operation of the sliding part 110. When the pad 300 is inserted into the end of the push plate 1212 through the insertion port 1223, it can be attracted by the magnetic sheet 123 and fixed to the push plate 1212, avoiding the pad 300 tilting at an angle after insertion. This makes the push rod 121 more stable during movement and prevents it from shifting or shaking.

[0046] In one possible embodiment of this application, a groove is provided on the side of the fixing plate 1221 facing away from the sliding part 110, the groove corresponds to the size of the magnetic piece 123, and the magnetic piece 123 is engaged in the groove.

[0047] Specifically, a groove is provided on the fixing plate 1221 to provide an installation position for the magnetic sheet 123, preventing the magnetic sheet 123 from protruding from the surface of the fixing plate 1221 and thus preventing damage to the magnetic sheet 123 due to collision or friction during device operation. Furthermore, the groove also provides a certain positioning function for the magnetic sheet 123, preventing it from shaking or shifting, while facilitating its installation and ensuring accurate positioning of the magnetic sheet 123 on the fixing plate 1221.

[0048] For example, such as Figure 3As shown, a pusher 1213 is provided at the end of the lever 1211 away from the push plate 1212, and the outer wall of the pusher 1213 is arc-shaped. The pusher 1213 provides the operator with a convenient part to apply force. When pushing the push rod 121, the operator does not need to directly contact the lever 1211, but moves the push rod 121 by pressing the pusher 1213, avoiding the problem of operation discomfort caused by friction between the hand and the lever 1211, making the operation process easier and more convenient.

[0049] The arc-shaped outer wall can better conform to the shape of the human hand, making the contact between the hand and the pressing part 1213 more uniform during the pressing process, reducing local pressure concentration, and thus further improving the comfort of the operator's hand.

[0050] Furthermore, such as Figure 3 As shown, a return spring 1214 is sleeved on the outer wall of the rod body 1211, and the two ends of the return spring 1214 abut against the fixed plate 1221 and the pusher 1213 respectively.

[0051] Specifically, the main function of the return spring 1214 is to automatically return the push rod 121 to its initial position after it is pressed. When the operator presses the actuating element 1213 to push the push rod 121, the return spring 1214 is compressed and stores elastic potential energy; when the operator releases the actuating element 1213, the return spring 1214 releases the elastic potential energy and pushes the push rod 121 back to its original position. This eliminates the need for manual reset of the push rod 121, improving the convenience and efficiency of operation.

[0052] In addition, during the movement of push rod 121, return spring 1214 can play a certain role in buffering and shock absorption. When push rod 121 is pushed by a large external force, return spring 1214 can absorb part of the impact force, reduce damage to push rod 121, fixed plate 1221 and other components of the entire device, and extend the service life of the device.

[0053] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0054] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.

Claims

1. A gasket mounting device, characterized in that, The device includes a sliding part (110) and a pushing part (120) connected to each other. The sliding part (110) has a sliding cavity (111). The sliding cavity (111) has a first opening (1111) and a second opening (1112) at opposite ends. The first opening (1111) is used to communicate with a special gas interface (200). The inner diameter of the sliding cavity (111) gradually decreases from the second opening (1112) to the first opening (1111). The pushing part (120) includes a push rod (121). The push rod (121) can extend into the sliding cavity (111) through the second opening (1112) and slide along the sliding cavity (111). A gasket (300) placed at the end of the push rod (121) can be pushed into the special gas interface (200) through the push rod (121) along the sliding cavity (111) and through the first opening (1111).

2. The gasket mounting device according to claim 1, characterized in that, The gasket mounting device (100) further includes a fixing part (130), which is sleeved on the end of the sliding part (110) away from the pushing part (120) and extends toward the special gas interface (200); when the first opening (1111) of the sliding cavity (111) is in communication with the special gas interface (200), the fixing part (130) covers the outer wall of the special gas interface (200).

3. The gasket mounting device according to claim 2, characterized in that, The fixing part (130) has a slot (131) on the side facing the special gas interface (200), and the slot (131) is used to engage with the snap-fit ​​part (210) on the outer wall of the special gas interface (200).

4. The gasket mounting device according to claim 1, characterized in that, The pushing part (120) includes a fixed bracket (122), the fixed bracket (122) includes a fixed plate (1221) and a limiting wall (1222) surrounding the periphery of the fixed plate (1221), the push rod (121) passes through the fixed plate (1221) along the thickness direction of the fixed plate (1221), and the limiting wall (1222) can be sleeved on the outer wall of the sliding part (110) near the second opening (1112).

5. The gasket mounting device according to claim 4, characterized in that, The limiting wall (1222) has a delivery port (1223) along the wall thickness direction. The delivery port (1223) is located between the second opening (1112) of the sliding cavity (111) and the fixing plate (1221). The gasket (300) can be placed through the delivery port (1223) on the side of the push rod (121) facing the sliding cavity (111).

6. The gasket mounting device according to claim 4, characterized in that, The push rod (121) includes a rod body (1211) and a push plate (1212) connected to each other. The rod body (1211) passes through the fixed plate (1221) along the thickness direction of the fixed plate (1221). The push plate (1212) is used to push the pad (300).

7. The gasket mounting device according to claim 4, characterized in that, The pushing part (120) also includes a magnetic sheet (123), which is disposed on the side of the fixed plate (1221) away from the sliding part (110). The push rod (121) passes through the fixed plate (1221) and the magnetic sheet (123) in sequence along the thickness direction of the fixed plate (1221).

8. The gasket mounting device according to claim 7, characterized in that, The fixing plate (1221) has a groove on the side opposite to the sliding part (110), the groove corresponds to the size of the magnetic piece (123), and the magnetic piece (123) is engaged in the groove.

9. The gasket mounting device according to claim 6, characterized in that, A pusher (1213) is provided at the end of the rod (1211) away from the push plate (1212), and the outer wall of the pusher (1213) is arc-shaped.

10. The gasket mounting device according to claim 9, characterized in that, A return spring (1214) is sleeved on the outer wall of the rod body (1211), and the two ends of the return spring (1214) abut against the fixed plate (1221) and the pusher (1213) respectively.

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