Vacuum evaporation coating equipment and vacuum evaporation coating system

Abstract

The utility model provides a vacuum evaporation coating device and a vacuum evaporation coating system, and the vacuum evaporation coating device comprises a vacuum chamber, a vacuum coating device and a vacuum coating device, the conveying device comprises a plurality of rollers arranged in the vacuum chamber at intervals, a first driving device for driving the rollers to rotate and a conveying belt arranged on the rollers, the rollers drive the conveying belt to move, and the conveying belt comprises an upper conveying section located above the rollers and a lower conveying section located below the rollers; and the tensioning shaft is movably arranged on the vacuum cavity in the vertical direction, and the tensioning shaft is pressed on the upper surface of the lower conveying section under the action of gravity. By applying the technical scheme provided by the utility model, the problem of poor operation stability of vacuum evaporation coating equipment in the prior art can be effectively solved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment, and more specifically, to a vacuum evaporation coating equipment and a vacuum evaporation coating system. Background Technology

[0002] With the development of modern industry, vacuum equipment has been widely used in many fields, especially in coating technology. Coating technology is a process of depositing thin films on the surface of a substrate and is widely used in semiconductors, optics, new energy, and other fields. In order to improve production efficiency and product quality, vacuum coating equipment needs to operate for a long time under efficient and stable conditions.

[0003] The transmission system is one of the key components affecting the operating efficiency and maintenance frequency of vacuum coating equipment. Traditional vacuum coating equipment typically uses ceramic roller conveyors for substrate transmission. However, ceramic roller conveyors are prone to wear and breakage under long-term high temperature and high pressure conditions. Furthermore, during the coating process, the deposited coating material adheres to the roller shafts, and the roller shaft circumference and flatness vary, affecting transmission accuracy. This leads to frequent equipment downtime for maintenance and replacement, impacting production efficiency and cost control.

[0004] To overcome the shortcomings of ceramic roller conveyors, increasing research and practice are focusing on metal mesh belt conveyor systems. Metal mesh belt conveyor systems possess high strength, high wear resistance, and good thermal conductivity, maintaining stable performance and a long service life under high temperature and high pressure conditions. Furthermore, the structure of metal mesh belt conveyor systems is relatively simple, reducing the density of support rollers and preventing the coating material from accumulating on the rollers. The mesh structure of the belt also prevents the coating material from thickening, significantly reducing equipment downtime and maintenance costs.

[0005] The basic structure of existing metal mesh belt transmission systems is as follows:

[0006] Metal mesh belt: A mesh belt made of stainless steel or other high-strength heat-resistant metal materials. Its mesh structure can be designed as needed to adapt to different types and sizes of substrates.

[0007] Drive unit: including motor and transmission mechanism, used to drive the metal mesh belt.

[0008] Support device: Used to support the metal mesh belt and ensure its stable operation.

[0009] Tensioning device: Used to adjust the tension of the conveyor belt to prevent the conveyor belt from becoming loose or deviating during operation.

[0010] Control device: Used to control the transmission speed and operating status to ensure the stability and accuracy of the transmission process.

[0011] The working principle and effects of existing metal mesh belt conveyor systems are as follows:

[0012] The substrate is placed on a metal mesh belt, which is driven by a drive unit to transport the substrate into the vacuum coating chamber. The mesh design of the metal mesh belt ensures that the substrate passes smoothly during transport, while preventing slippage and displacement. The entire transport process is monitored and regulated by a control device to ensure the stability of the transport speed and operating status.

[0013] However, when the metal mesh belt conveyor system with the above structure is actually used in coating equipment, the mesh belt will still become loose, causing it to easily deviate, thus affecting the transmission speed and operational stability. Utility Model Content

[0014] The main objective of this invention is to provide a vacuum evaporation coating equipment and a vacuum evaporation coating system to solve the problem of poor operational stability of existing vacuum evaporation coating equipment.

[0015] To achieve the above objectives, according to one aspect of the present invention, a vacuum evaporation coating apparatus is provided, comprising: a vacuum chamber; a conveying device including a plurality of rollers spaced apart within the vacuum chamber, a first driving device for driving the rollers to rotate, and a conveyor belt disposed on the rollers, wherein the rollers drive the conveyor belt to move, and the conveyor belt includes an upper conveying section located above the rollers and a lower conveying section located below the rollers; and a tensioning shaft movably disposed on the vacuum chamber in a vertical direction, the tensioning shaft pressing against the upper surface of the lower conveying section under the action of gravity.

[0016] In one embodiment, the vacuum evaporation coating equipment further includes: a second driving device, comprising an output shaft passing through the cavity wall of the vacuum chamber and a transmission component connected to one end of the output shaft and the tension shaft, wherein the output shaft drives the tension shaft to rotate, and the second driving device consists of two components located on both sides of the tension shaft.

[0017] In one embodiment, the transmission component is a universal joint, or the transmission component includes a first gear and a second gear that mesh with each other, with the output shaft passing through the first gear and the end of the tensioning shaft passing through the second gear.

[0018] In one embodiment, the vacuum evaporation coating apparatus further includes a rotary seal disposed on the wall of the vacuum chamber for dynamically sealing the output shaft.

[0019] In one embodiment, the vacuum evaporation coating equipment further includes a limiting member, which has a vertically extending limiting groove, and a portion of the tensioning shaft extends into the limiting groove.

[0020] In one embodiment, the limiting member includes two vertical plates arranged at intervals along the conveying direction of the conveying device, and the gap between the two vertical plates forms a limiting groove.

[0021] In one embodiment, the conveyor belt is a mesh belt, or the conveyor belt includes multiple sub-belts spaced apart along the axial direction of the rollers, the sub-belts being linear or belt-shaped.

[0022] In one embodiment, when the conveyor belt includes multiple sub-belts, the roller includes a roller shaft body and a plurality of support protrusions spaced apart along the axial direction of the roller shaft body. The sidewalls of the support protrusions are provided with first ring grooves, and the sub-belts are installed in the first ring grooves. The depth of the first ring grooves is less than the thickness of the sub-belts.

[0023] In one embodiment, the vacuum evaporation coating apparatus further includes: a guide shaft extending in the same direction as the roller and pivotally disposed within a vacuum chamber; the guide shaft having a plurality of second annular grooves corresponding one-to-one with a plurality of first annular grooves in its axial direction; the depth of the second annular grooves being greater than the thickness of the sub-belt, so as to limit the sub-belt in the axial direction of the guide shaft.

[0024] According to another aspect of the present invention, a vacuum evaporation coating system is provided, comprising: a plurality of vacuum evaporation coating devices, wherein the vacuum evaporation coating devices are the aforementioned vacuum evaporation coating devices.

[0025] By applying the technical solution of this utility model, when vacuum coating is not in progress, the conveyor belt is in a taut state because the tensioning shaft is pressed against the upper surface of the lower section of the conveyor under the action of gravity. When vacuum coating is in progress, the temperature of the conveyor belt in the vacuum chamber rises, and the conveyor belt expands. The supporting force on the tensioning shaft decreases, and this supporting force is less than the weight of the tensioning shaft. Therefore, the tensioning shaft will move downward under the action of the resultant force until the supporting force is equal to the weight. This allows the conveyor belt to maintain tension even if its length increases. When the temperature in the vacuum chamber decreases and the conveyor belt contracts, the supporting force on the tensioning shaft increases. Since the tensioning shaft has the freedom to move up and down, it can move upward until the force on the tensioning shaft is balanced. Therefore, excessive tension on the conveyor belt can be avoided, ensuring the service life of the conveyor belt. In summary, by applying the technical solution of this utility model, the vacuum evaporation coating equipment can automatically adjust the tension of the conveyor belt, ensuring the transmission speed, operational stability, and service life of the entire vacuum evaporation coating equipment. Furthermore, the tension of the conveyor belt is self-adjusting, requiring no electronic components, thus resulting in low production costs.

[0026] In addition to the objectives, features, and advantages described above, this utility model has other objectives, features, and advantages. The present utility model will now be described in further detail with reference to the figures. Attached Figure Description

[0027] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0028] Figure 1 A top view schematic diagram of a portion of the structure of a vacuum evaporation coating apparatus according to Embodiment 1 of the present invention is shown;

[0029] Figure 2 It shows Figure 1 A front view schematic diagram of a vacuum evaporation coating equipment;

[0030] Figure 3 It shows Figure 1 A front view schematic diagram of the conveying device of a vacuum evaporation coating equipment;

[0031] Figure 4 It shows Figure 1 A schematic diagram of the structure of a vacuum evaporation coating equipment in which the tensioning shaft is installed on the wall of the vacuum chamber;

[0032] Figure 5 It shows Figure 4 A schematic diagram of the limiting component of the vacuum evaporation coating equipment being fitted with the tensioning shaft;

[0033] Figure 6 It shows Figure 1 A side view of the rollers in a vacuum evaporation coating equipment;

[0034] Figure 7 It shows Figure 6 An enlarged structural diagram of point A on the roller;

[0035] Figure 8 It shows Figure 1 A side view of the guide shaft of the vacuum evaporation coating equipment;

[0036] Figure 9 A top view schematic diagram of a partial structure of a vacuum evaporation coating apparatus according to Embodiment 2 of the present invention is shown; and

[0037] Figure 10 It shows Figure 9 A side view of the rollers in a vacuum evaporation coating equipment;

[0038] Figure 11 A schematic diagram of the structure of the vacuum evaporation coating equipment according to Embodiment 3 of the present invention, in which the tensioning shaft is installed on the cavity wall of the vacuum chamber, is shown.

[0039] Figure 12 It shows Figure 11 A schematic diagram of the structure of the limiting component and the second drive device of the vacuum evaporation coating equipment.

[0040] The above figures include the following reference numerals:

[0041] 10. Vacuum chamber; 20. Conveying device; 211. Roller; 2111. Roller body; 2112. Supporting convex ring; 2113. First annular groove; 22. Conveyor belt; 221. Sub-belt; 50. Guide shaft; 521. Second annular groove; 60. First driving device; 80. Evaporation device; 90. Tensioning shaft; 91. Slider; 100. Second driving device; 101. Output shaft; 102. Universal joint; 103. First gear; 104. Second gear; 110. Limiting element; 111. Limiting groove; 112. Vertical plate; 120. Rotary seal. Detailed Implementation

[0042] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0043] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0044] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate for the embodiments of the utility model described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0045] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0046] After long-term research, the inventors discovered that when existing metal mesh belt conveyor systems are used in vacuum coating equipment, the mesh belts experience slack and deviation because the vacuum coating chamber is a high-temperature environment. Once the temperature rises, the mesh belt expands, leading to slack and deviation. To solve these technical problems, such as... Figures 1 to 5 As shown, the vacuum evaporation coating equipment of Embodiment 1 includes a vacuum chamber 10, a conveying device 20, and a tensioning shaft 90. The conveying device 20 includes a plurality of rollers 211 spaced apart within the vacuum chamber 10, a first driving device 60 for rotating the rollers 211, and a conveyor belt 22 mounted on the rollers 211. The rollers 211 drive the conveyor belt 22, which includes an upper conveying section above the rollers 211 and a lower conveying section below the rollers 211. The tensioning shaft 90 is movably mounted vertically on the vacuum chamber 10 and presses against the upper surface of the lower conveying section under the influence of gravity.

[0047] Applying the technical solution of Embodiment 1, when vacuum coating is not in progress, the tensioning shaft 90 is pressed against the upper surface of the lower section of the conveyor belt under the action of gravity, thus the conveyor belt 22 is in a taut state. When vacuum coating is in progress, the temperature of the conveyor belt 22 in the vacuum chamber 10 rises, and the conveyor belt 22 expands. The supporting force on the tensioning shaft 90 from the conveyor belt 22 decreases. This supporting force is less than the weight of the tensioning shaft 90, so the tensioning shaft 90 will move downward under the action of the resultant force until the supporting force is equal to the weight. This allows the conveyor belt 22 to maintain tension even if its length increases. When the temperature in the vacuum chamber 10 decreases, the conveyor belt 22 contracts, and the supporting force on the tensioning shaft 90 from the conveyor belt 22 increases. Since the tensioning shaft 90 has the freedom to move up and down, it can move upward until the force on the tensioning shaft 90 is balanced. Therefore, excessive tension on the conveyor belt 22 can be avoided, ensuring the service life of the conveyor belt 22. In summary, by applying the technical solution of Embodiment 1, the vacuum evaporation coating equipment can automatically adjust the tension of the conveyor belt 22, ensuring the transmission speed, operational stability, and service life of the entire vacuum evaporation coating equipment. Furthermore, the tension of the conveyor belt 22 is self-adjusting, requiring no electronic components, thus resulting in low production costs.

[0048] like Figure 4 As shown, in Embodiment 1, the vacuum evaporation coating equipment further includes a second drive device 100. The second drive device 100 includes an output shaft 101 passing through the cavity wall of the vacuum chamber 10 and a transmission component connected to one end of the output shaft 101 and the tension shaft 90. The output shaft 101 drives the tension shaft 90 to rotate. This structure enables the rotational speed of the tension shaft 90 to be the same as the rotational speed of the roller 211, thereby minimizing the friction between the tension shaft 90 and the conveyor belt 22 and ensuring the lifespan of the conveyor belt 22.

[0049] Preferably, such as Figure 4 As shown, in Embodiment 1, the second drive device 100 consists of two units located on either side of the tension shaft 90. This structure makes the tension adjustment of the conveyor belt 22 more stable and reliable.

[0050] like Figure 4 As shown, in Embodiment 1, the vacuum evaporation coating equipment further includes a rotating seal 120, which is disposed on the cavity wall of the vacuum chamber 10 to provide a dynamic seal for the output shaft 101. The rotating seal 120 can ensure the vacuum level within the vacuum chamber 10, thereby ensuring the coating quality.

[0051] like Figure 4 As shown, in Embodiment 1, the transmission component is a universal joint 102. This structure ensures that even if the axis of the output shaft 101 and the axis of the tension shaft 90 are not on the same straight line, the driving force of the output shaft 101 can be directly transmitted to the tension shaft 90, causing the tension shaft 90 to rotate at a predetermined speed. This structure is simple and easy to implement.

[0052] like Figure 4 and Figure 5 As shown, in this embodiment, the vacuum evaporation coating equipment further includes a limiting member 110, on which a vertically extending limiting groove 111 is provided, and a portion of the tensioning shaft 90 extends into the limiting groove 111. The above structure is simple and has high assembly efficiency.

[0053] like Figure 4 and Figure 5 As shown, in Embodiment 1, the limiting member 110 includes two upright plates 112 arranged at intervals along the conveying direction of the conveying device 20, and the gap between the two upright plates 112 forms a limiting groove 111. The above structure is simple and low in cost.

[0054] like Figure 1As shown, in Embodiment 1, the conveyor belt 22 includes multiple sub-belts 221 spaced apart along the axial direction of the rollers 211, and the sub-belts 221 are belt-shaped. This structure reduces the density of the rollers 211, preventing the coating material from accumulating on the rollers 211. The smaller width of the sub-belts 221 also prevents the coating material from accumulating and thickening, significantly reducing equipment downtime and maintenance costs. Preferably, in this embodiment, the sub-belts 221 are stainless steel strips (belt-shaped). However, in other embodiments not shown in the figures, the sub-belts 221 can also be steel wires (wire-shaped).

[0055] like Figure 1 , Figure 6 and Figure 7 As shown, in Embodiment 1, the roller 211 includes a roller shaft body 2111 and a plurality of supporting protrusions 2112 spaced apart along the axial direction of the roller shaft body 2111. A first annular groove 2113 is provided on the side wall of each supporting protrusion 2112, and a sub-belt 221 is installed within the first annular groove 2113. The depth of the first annular groove 2113 is less than the thickness of the sub-belt 221. This structure allows the surface of the sub-belt 221 to protrude beyond the end face of the supporting protrusions 2112, thereby ensuring that the workpiece is lifted by the sub-belt 221 and moved away from the end face of the supporting protrusions 2112, ensuring horizontal transport of the workpiece.

[0056] like Figure 3 and Figure 8 As shown, in Embodiment 1, the vacuum evaporation coating equipment further includes: a guide shaft 50, the guide shaft 50 extending in the same direction as the roller 211, and pivotally disposed within the vacuum chamber 10. The guide shaft 50 is provided with a plurality of second annular grooves 521 corresponding one-to-one with the plurality of first annular grooves 2113 in its axial direction. The depth of the second annular grooves 521 is greater than the thickness of the sub-belt 221, thereby limiting the sub-belt 221 in the axial direction of the guide shaft 50. This structure can limit the sub-belt 221, preventing it from shifting along the axial direction of the guide shaft 50.

[0057] like Figure 2 As shown, in this embodiment, the vacuum evaporation coating equipment further includes an evaporation device 80 for evaporating and coating a workpiece.

[0058] The difference between the vacuum evaporation coating equipment in Example 2 and the vacuum evaporation coating equipment in Example 1 lies only in the structure of the conveyor belt. Specifically, as shown... Figure 9 and Figure 10 As shown, in Embodiment 2, the conveyor belt 22 is a mesh belt. The above structure can reduce the density of the rollers 211, and the coating material will not accumulate on the rollers 211. The conveyor belt 22 has multiple mesh holes, and the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance costs of the equipment.

[0059] The difference between the vacuum evaporation coating equipment in Example 3 and the vacuum evaporation coating equipment in Example 1 lies only in the structure of the conveyor belt. Specifically, as shown... Figure 11 and Figure 12 As shown, in Embodiment 3, the transmission components include a first gear 103 and a second gear 104 that mesh with each other. An output shaft 101 passes through the first gear 103, and the end of the tension shaft 90 passes through the second gear 104. Specifically, the rotation of the output shaft 101 drives the first gear 103 to rotate, the first gear 103 drives the second gear 104 to rotate, and the second gear 104 drives the tension shaft 90 to rotate. This structure ensures that even if the axis of the output shaft 101 and the axis of the tension shaft 90 are not on the same straight line, the driving force of the output shaft 101 can be directly transmitted to the tension shaft 90, causing the tension shaft 90 to rotate at a predetermined speed. It should be noted that during the expansion or contraction of the conveyor belt 22, the tension shaft 90 will make small up-and-down movements. Because the movement of the tension shaft 90 is small, although the distance between the axes of the first gear 103 and the second gear 104 will change, it will not affect their meshing, and the transmission can still proceed normally.

[0060] In embodiment three, the tensioning shaft 90 includes a shaft body and sliders 91 pivotally disposed at both ends of the shaft body, with the sliders 91 extending into the limiting groove 111.

[0061] Specifically, in Embodiment 3, the vacuum evaporation coating equipment further includes: a vertical plate as a limiting member, and the limiting groove 111, the first gear 103 and the second gear 104 are all disposed on the vertical plate.

[0062] This application provides a vacuum evaporation coating system. An embodiment of the vacuum evaporation coating system according to this application includes multiple vacuum evaporation coating devices, wherein the vacuum evaporation coating system is the aforementioned vacuum evaporation coating device. Since the aforementioned vacuum evaporation coating device has advantages such as ensuring the transmission speed, operational stability, service life, and low cost of the entire vacuum evaporation coating equipment, the vacuum evaporation coating system having it also possesses the aforementioned advantages.

[0063] Preferably, in this embodiment, the vacuum evaporation coating system further includes a control device. The drive shafts of the first drive device 60 and the second drive device 100 are connected to a servo motor outside the chamber using a synchronous belt. The servo motor is electrically connected to the control device to ensure that the rollers 211 and the tensioning shaft 90 of the vacuum evaporation coating equipment rotate at the same speed. This structure reduces the friction between the tensioning shaft 90 and the conveyor belt 22, thereby ensuring the lifespan of the conveyor belt 22.

[0064] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0065] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0066] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0067] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum evaporation coating equipment, characterized in that, include: Vacuum chamber (10); The conveying device (20) includes a plurality of rollers (211) spaced apart in the vacuum chamber (10), a first drive device (60) for driving the rollers (211) to rotate, and a conveyor belt (22) disposed on the rollers (211). The rollers (211) drive the conveyor belt (22) to move. The conveyor belt (22) includes an upper conveying section located above the rollers (211) and a lower conveying section located below the rollers (211). The tensioning shaft (90) is movably mounted on the vacuum chamber (10) in the vertical direction, and the tensioning shaft (90) is pressed against the upper surface of the lower section of the conveyor under the action of gravity.

2. The vacuum evaporation coating equipment according to claim 1, characterized in that, The vacuum evaporation coating equipment also includes: The second drive device (100) includes an output shaft (101) passing through the cavity wall of the vacuum chamber (10) and a transmission component connected to one end of the output shaft (101) and the tension shaft (90). The output shaft (101) drives the tension shaft (90) to rotate. The second drive device (100) consists of two units located on both sides of the tension shaft (90).

3. The vacuum evaporation coating equipment according to claim 2, characterized in that, The transmission component is a universal joint (102), or the transmission component includes a first gear (103) and a second gear (104) that mesh with each other, the output shaft (101) passes through the first gear (103), and the end of the tensioning shaft (90) passes through the second gear (104).

4. The vacuum evaporation coating equipment according to claim 2, characterized in that, The vacuum evaporation coating equipment also includes: A rotating seal (120) is disposed on the cavity wall of the vacuum chamber (10) to provide a dynamic seal for the output shaft (101).

5. The vacuum evaporation coating equipment according to claim 1, characterized in that, The vacuum evaporation coating equipment also includes: A limiting member (110) is provided with a vertically extending limiting groove (111), and part of the tensioning shaft (90) extends into the limiting groove (111).

6. The vacuum evaporation coating equipment according to claim 5, characterized in that, The limiting member (110) includes two upright plates (112) arranged at intervals along the conveying direction of the conveying device (20), and the gap between the two upright plates (112) forms the limiting groove (111).

7. The vacuum evaporation coating equipment according to claim 1, characterized in that, The conveyor belt (22) is a mesh belt, or the conveyor belt (22) includes a plurality of sub-belts (221) spaced apart along the axial direction of the roller (211), the sub-belts (221) being linear or belt-shaped.

8. The vacuum evaporation coating equipment according to claim 7, characterized in that, When the conveyor belt (22) includes multiple sub-belts (221), the roller (211) includes a roller body (2111) and multiple support rings (2112) spaced apart along the axial direction of the roller body (2111). A first annular groove (2113) is provided on the side wall of the support ring (2112), and the sub-belt (221) is installed in the first annular groove (2113). The depth of the first annular groove (2113) is less than the thickness of the sub-belt (221).

9. The vacuum evaporation coating equipment according to claim 8, characterized in that, The vacuum evaporation coating equipment also includes: A guide shaft (50) extends in the same direction as the roller (211) and is pivotally disposed within the vacuum chamber (10). The guide shaft (50) is provided with a plurality of second annular grooves (521) that correspond one-to-one with a plurality of first annular grooves (2113) in its axial direction. The depth of the second annular grooves (521) is greater than the thickness of the sub-belt (221) so as to limit the sub-belt (221) in the axial direction of the guide shaft (50).

10. A vacuum evaporation coating system, comprising: Multiple vacuum evaporation coating equipment, characterized in that the vacuum evaporation coating equipment is the vacuum evaporation coating equipment according to any one of claims 1 to 9.

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