Sputtering coating machine with cleaning function

Abstract

The utility model discloses a sputter coating machine with the cleaning function, including sputter coating machine body and emptying plate, the left side of sputter coating machine body is provided with the cleaning mechanism, the cleaning mechanism includes driving subassembly and electric push rod, the driving subassembly is used for driving electric push rod back and forth reciprocating motion, the telescopic end of electric push rod is fixedly connected with U-shaped rod, and the U-shaped rod is connected with the emptying plate. A cleaning plate is mounted on the U-shaped rod through a mounting assembly, and a detachable ultrasonic assembly is further mounted on the U-shaped rod; the mounting assembly comprises a left C-shaped block and a right C-shaped block, and the two C-shaped blocks are fixedly connected with the back surfaces of the two ends of the U-shaped rod respectively. According to the sputter coating machine with the cleaning function, when a cleaning plate needs to be replaced, an adjusting lead screw is rotated to enable a pressing block to move upwards, at the moment, mounting of the cleaning plate is removed, and therefore the cleaning plate can be detached and replaced with a new cleaning plate, and the practicability of the sputter coating machine in use is improved.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating machine technology, specifically a sputtering coating machine with a cleaning function. Background Technology

[0002] A photofilm deposition machine is a process testing instrument used in the field of physics. It can be used in semiconductor deposition processes to deposit one or more thin films on the surface of semiconductor substrates, which can achieve specific functions or improve device performance.

[0003] The patent publication number CN221895106U discloses a sputtering coating machine with a cleaning function. The moving block is threadedly connected to the outside of the lead screw. A hot dryer is fixedly connected to the bottom of the mounting plate. Two second electric push rods are fixedly connected to the bottom of the mounting plate and to one side of the hot dryer. The output ends of the two second electric push rods are fixedly connected to a wiping plate.

[0004] As shown in the above technology, existing sputtering coating machines with cleaning functions clean the substrate surface by reciprocating the movement of a wiping plate. The wiping plate cleans by rubbing against the substrate. After the wiping plate has been used for a long time, the brushes on the surface of the wiping plate will wear down, resulting in reduced cleaning strength, and it will need to be replaced. However, the existing installation method makes replacement relatively troublesome. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a sputtering coating machine with a cleaning function, which solves the problem that the wiping plate in existing sputtering coating machines with cleaning functions needs to be replaced after long-term use.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: A sputtering coating machine with a cleaning function includes a sputtering coating machine body and a feeding plate. A cleaning mechanism is provided on the left side of the sputtering coating machine body. The cleaning mechanism includes a drive assembly and an electric push rod. The drive assembly is used to drive the electric push rod to move back and forth. A U-shaped rod is fixedly connected to the telescopic end of the electric push rod. A cleaning plate is installed on the U-shaped rod through an installation assembly. A detachable ultrasonic component is also installed on the U-shaped rod.

[0007] The mounting assembly includes two C-shaped blocks, one on the left and one on the right. The two C-shaped blocks are fixedly connected to the back ends of the two ends of the U-shaped rod. The front ends of the U-shaped rod are provided with grooves. The inner surfaces of the two grooves are provided with sliders. The front ends of the two sliders are fixedly connected with L-shaped blocks.

[0008] Preferably, a return spring is fixedly connected between the L-shaped block and the inner wall of the chute, and the cleaning plate is mounted between the C-shaped block and the L-shaped block.

[0009] Preferably, a pressure block is slidably connected to the front of the U-shaped rod, a rotating seat is fixedly connected between the U-shaped rods, an adjusting screw is rotatably connected to the rotating seat, and the rotating seat and the adjusting screw are threadedly connected.

[0010] Preferably, a right-angled trapezoidal block is fixedly connected to the top of each of the two L-shaped blocks, and an inclined surface is provided at the bottom of the pressure block, with the inclined surface at the bottom of the pressure block opposite to the inclined surfaces of the two right-angled trapezoidal blocks.

[0011] Preferably, the ultrasonic component includes two sliding rods, left and right, which are slidably connected to the two rods of the U-shaped rod respectively. The other end of each sliding rod is fixedly connected to a support frame. The left and right sides of the U-shaped rod are threaded with locking bolts that penetrate the U-shaped rod and extend into its interior. Rotating the locking bolts locks the position of the sliding rod.

[0012] Preferably, an ultrasonic generator is fixedly installed on the top of the support frame by bolts, and a transmitter head is fixedly installed at the ultrasonic emission port of the ultrasonic generator.

[0013] Beneficial effects

[0014] This invention provides a sputtering coating machine with a cleaning function. Compared with the prior art, it has the following advantages:

[0015] 1. This sputtering coating machine with cleaning function includes two C-shaped blocks on the left and right sides, which are fixedly connected to the back of both ends of a U-shaped rod. The front of both ends of the U-shaped rod is provided with a sliding groove, and the inner surface of both sliding grooves is provided with a slider. When the cleaning plate needs to be replaced, the adjusting screw is rotated to move the pressure block upward. At this time, the installation of the cleaning plate is released, so that the cleaning plate can be removed and a new cleaning plate can be replaced, which improves the practicality of the device.

[0016] 2. This sputtering coating machine with cleaning function uses an ultrasonic component including two sliding rods on the left and right. The two sliding rods are slidably connected to the two rods of a U-shaped rod, and the other end of each sliding rod is fixedly connected to a support frame. When the cleaning plate cleans the surface of the substrate, the ultrasonic generator performs a layer treatment on the surface of the substrate, thereby enabling better cleaning. Furthermore, the ultrasonic component can be disassembled and assembled, further improving the convenience of using the device. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the appearance of the present utility model;

[0018] Figure 2 This is a partial schematic diagram of the cleaning mechanism of this utility model;

[0019] Figure 3This is a schematic diagram of the mounting components and U-shaped rod of this utility model;

[0020] Figure 4 This is a side view of the mounting components and U-shaped rod of this utility model.

[0021] In the diagram: 1. Sputtering coating machine body; 2. Feeding plate; 3. Drive assembly; 4. Electric push rod; 5. U-shaped rod; 6. Mounting assembly; 61. C-shaped block; 62. Slide groove; 63. Slider; 64. L-shaped block; 65. Return spring; 66. Pressure block; 67. Rotating seat; 68. Adjusting screw; 69. Right-angled trapezoidal block; 7. Cleaning plate; 8. Ultrasonic assembly; 81. Slide rod; 82. Support frame; 83. Locking bolt; 84. Ultrasonic generator; 85. Transmitting head. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figures 1-4 This sputtering coating machine with cleaning function offers two technical solutions:

[0024] The first embodiment includes a sputtering coating machine body 1 and a feeding plate 2. A cleaning mechanism is provided on the left side of the sputtering coating machine body 1. The cleaning mechanism includes a drive assembly 3 and an electric push rod 4. The drive assembly 3 is used to drive the electric push rod 4 to move back and forth. A U-shaped rod 5 is fixedly connected to the telescopic end of the electric push rod 4. A cleaning plate 7 is mounted on the U-shaped rod 5 through a mounting assembly 6. The mounting assembly 6 includes two C-shaped blocks 61 on the left and right sides. The two C-shaped blocks 61 are fixedly connected to the back sides of both ends of the U-shaped rod 5. Slide grooves 62 are opened on the front sides of both ends of the U-shaped rod 5. Slide blocks 63 are opened on the inner surfaces of both slide grooves 62. L-shaped blocks 64 are fixedly connected to the front of each block 63. A return spring 65 is fixedly connected between the L-shaped blocks 64 and the inner wall of the slide groove 62. The cleaning plate 7 is mounted between the C-shaped block 61 and the L-shaped blocks 64. A pressure block 66 is slidably connected to the front of the U-shaped rod 5. A rotating seat 67 is fixedly connected between the U-shaped rods 5. An adjusting screw 68 is rotatably connected to the rotating seat 67. The rotating seat 67 and the adjusting screw 68 are threadedly connected. Right-angled trapezoidal blocks 69 are fixedly connected to the top of each of the two L-shaped blocks 64. The bottom of the pressure block 66 is provided with an inclined surface, and the inclined surface of the bottom of the pressure block 66 is opposite to the inclined surface of the two right-angled trapezoidal blocks 69.

[0025] When the cleaning plate 7 needs to be replaced, rotate the adjusting screw 68 to move the pressure block 66 upward. At this time, the installation of the cleaning plate 7 is released, so that the cleaning plate 7 can be removed and replaced with a new cleaning plate 7, which improves the practicality of the device.

[0026] The second implementation differs from the first implementation in that: a detachable ultrasonic component 8 is also installed on the U-shaped rod 5. The ultrasonic component 8 includes two sliding rods 81, which are slidably connected to the two rods of the U-shaped rod 5 respectively. The other end of each sliding rod 81 is fixedly connected to a support frame 82. Locking bolts 83 are threadedly connected to the left and right sides of the U-shaped rod 5, and they penetrate the U-shaped rod 5 and extend into the interior of the U-shaped rod 5. Rotating the locking bolts 83 locks the position of the sliding rods 81. An ultrasonic generator 84 is fixedly installed on the top of the support frame 82 by bolts. An transmitting head 85 is fixedly installed at the ultrasonic emission port of the ultrasonic generator 84.

[0027] When the cleaning plate 7 cleans the substrate surface, the ultrasonic generator 84 performs a layer treatment on the substrate surface, which enables better cleaning. In addition, the ultrasonic component 8 can be disassembled and assembled, which further improves the convenience of using the device.

[0028] In use, the ultrasonic generator 84 is started and ultrasonic waves are emitted onto the substrate surface through the transmitter 85. At the same time, the drive assembly 3 is started to move the electric push rod 4 back and forth. The electric push rod 4 is started to make the cleaning plate 7 contact the substrate surface, thereby cleaning the substrate surface. In addition, when the cleaning plate 7 needs to be replaced, the adjusting screw 68 is rotated to move the pressure block 66 upward. At this time, the pressure block 66 and the right-angled trapezoidal block 69 move away from each other, and the pressing effect of the L-shaped block 64 on the cleaning plate 7 is released. At this time, the cleaning plate 7 can be removed for replacement.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A sputtering coating machine with a cleaning function, comprising a sputtering coating machine body (1) and a feeding plate (2), characterized in that: A cleaning mechanism is provided on the left side of the sputtering coating machine body (1). The cleaning mechanism includes a drive assembly (3) and an electric push rod (4). The drive assembly (3) is used to drive the electric push rod (4) to move back and forth. A U-shaped rod (5) is fixedly connected to the telescopic end of the electric push rod (4). A cleaning plate (7) is installed on the U-shaped rod (5) through an installation assembly (6). A detachable ultrasonic component (8) is also installed on the U-shaped rod (5). The mounting assembly (6) includes two C-shaped blocks (61) on the left and right. The two C-shaped blocks (61) are fixedly connected to the back of both ends of the U-shaped rod (5). The front of both ends of the U-shaped rod (5) is provided with a sliding groove (62). The inner surface of the two sliding grooves (62) is provided with a slider (63). The front of the two sliders (63) is fixedly connected with an L-shaped block (64).

2. The sputtering coating machine with cleaning function according to claim 1, characterized in that: A return spring (65) is fixedly connected between the inner wall of the L-shaped block (64) and the slide (62), and the cleaning plate (7) is mounted between the C-shaped block (61) and the L-shaped block (64).

3. The sputtering coating machine with cleaning function according to claim 1, characterized in that: A pressure block (66) is slidably connected to the front of the U-shaped rod (5), and a rotating seat (67) is fixedly connected between the U-shaped rods (5). An adjusting screw (68) is rotatably connected to the rotating seat (67), and the rotating seat (67) is threadedly connected to the surface of the adjusting screw (68).

4. A sputtering coating machine with a cleaning function according to claim 3, characterized in that: The top of each of the two L-shaped blocks (64) is fixedly connected to a right-angled trapezoidal block (69), and the bottom of the pressure block (66) is provided with an inclined surface, and the inclined surface of the bottom of the pressure block (66) is opposite to the inclined surface of the two right-angled trapezoidal blocks (69).

5. A sputtering coating machine with a cleaning function according to claim 1, characterized in that: The ultrasonic component (8) includes two sliding rods (81) on the left and right sides. The two sliding rods (81) are slidably connected to the two rods of the U-shaped rod (5) respectively. The other end of each sliding rod (81) is fixedly connected to a support frame (82). The left and right sides of the U-shaped rod (5) are threaded with locking bolts (83), which penetrate the U-shaped rod (5) and extend into the interior of the U-shaped rod (5). The locking bolts (83) are rotated to lock the position of the sliding rods (81).

6. A sputtering coating machine with a cleaning function according to claim 5, characterized in that: An ultrasonic generator (84) is fixedly installed on the top of the support frame (82) by bolts, and a transmitter head (85) is fixedly installed at the ultrasonic emission port of the ultrasonic generator (84).

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