Graphite transition piece and epitaxial growth equipment

Abstract

The embodiment of the utility model provides a graphite transition piece and epitaxial growth equipment, the graphite transition piece is applied to the epitaxial growth equipment, and the graphite transition piece comprises an inner shell and an outer shell; the inner shell and the outer shell are detachably connected, at least part of the inner shell is located in the outer shell, and at least part of the outer wall of the inner shell is attached to the inner wall of the outer shell and can cover the inner wall of the outer shell; the gas inlet ends of the inner shell and the outer shell are communicated with a gas inlet channel of the epitaxial growth equipment, the gas outlet ends of the inner shell and the outer shell are opposite to a graphite tray in the epitaxial growth equipment, and growth gas passes through a cavity of the inner shell. In the embodiment, the inner shell is detachably mounted on the outer shell, and at least part of the outer surface of the inner shell is attached to the inner surface of the outer shell, so that the inner surface of the outer shell cannot be exposed outside, growth gas passes through a cavity of the inner shell, sediments are only formed on the inner surface of the inner shell and cannot be formed in the outer shell, and the service life of the outer shell can be prolonged; and when the graphite transition piece is polished or replaced, only the inner shell needs to be polished and cleaned or replaced, so that the maintenance cost is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a graphite transition device and epitaxial growth equipment. Background Technology

[0002] Epitaxial wafers have broad application prospects in the field of high-power devices. In practical applications, there are strict requirements for the thickness uniformity, doping concentration uniformity, and warpage of epitaxial wafers. Currently, the mainstream method for preparing epitaxial wafers is chemical vapor deposition (CVD).

[0003] Currently, the main process for preparing epitaxial wafers using chemical vapor deposition (CVD) involves placing a wafer substrate on a graphite tray and moving the substrate and tray into an epitaxial furnace. High-temperature reactive gases and high-temperature hydrogen gas, acting as a carrier gas, are introduced into the furnace. Simultaneously, heating devices positioned above and below the graphite tray provide thermal radiation to the front and back sides of the wafer substrate. In this process, gaseous molecules in the silicon-containing reactive gas move to the surface of the wafer substrate. Under high temperature, these molecules react with the carbon-containing reactive gas, and the reaction products are deposited on the substrate surface, forming the epitaxial wafer.

[0004] In typical epitaxial furnaces, graphite transition elements are placed on both sides of the graphite tray. Reactive gases flow through the graphite transition elements to the graphite tray. During semiconductor epitaxial growth, some reaction products deposit on the inner surface of the graphite transition elements surrounding the wafer. When the deposit on the inner surface of the graphite transition elements reaches a certain thickness, it affects the gas flow and temperature field within the epitaxial furnace. Furthermore, particles deposited on the inner surface of the graphite transition elements are highly likely to fall onto the wafer surface with the gas flow, leading to a reduction in the quality of the epitaxial wafer. Therefore, timely maintenance or replacement of the graphite transition elements is necessary. Frequent replacement of graphite transition elements reduces their lifespan and increases costs. Utility Model Content

[0005] The purpose of this application is to provide a graphite transition piece and an epitaxial growth apparatus to extend the service life of the graphite transition piece and reduce costs. The specific technical solution is as follows:

[0006] An embodiment of the first aspect of this application provides a graphite transition member applied to an epitaxial growth apparatus. The graphite transition member includes an inner shell and an outer shell. The inner shell and the outer shell are detachably connected. At least a portion of the inner shell is located inside the outer shell, and the outer wall of at least a portion of the inner shell is fitted to the inner wall of the outer shell, thus covering the inner wall of the outer shell. The air inlet ends of the inner shell and the outer shell are connected to the air inlet channel of the epitaxial growth apparatus, and the air outlet ends are opposite to the graphite tray in the epitaxial growth apparatus. Growth gas passes through the cavity of the inner shell.

[0007] In some embodiments, the outer shell and the inner shell are snapped together.

[0008] In some embodiments, the air inlet end of the outer shell has a mounting groove, and the air inlet end of the inner shell has a mounting step, the mounting step being able to engage with the mounting groove so that the inner shell and the outer shell are tightly connected.

[0009] In some embodiments, the mounting groove is provided circumferentially along the outer shell, and the mounting step is provided circumferentially along the inner shell.

[0010] In some embodiments, the inner shell includes a detachably connected first part, a second part, a third part, and a fourth part, wherein the first part is disposed opposite to the second part, and the third part is disposed opposite to the fourth part; both ends of the first part are respectively connected to one end of the third part and the fourth part; and both ends of the second part are respectively connected to the other end of the third part and the fourth part.

[0011] In some embodiments, the two ends of the first part are respectively snapped into one end of the third part and the fourth part; the two ends of the second part are respectively snapped into the other end of the third part and the fourth part; the two ends of the first part and the second part have snap-fit ​​portions, and the two ends of the third part and the fourth part have snap-fit ​​mating portions that cooperate with the snap-fit ​​portions.

[0012] In some embodiments, the cross-sections of the first portion, the second portion, the third portion, and the fourth portion are T-shaped.

[0013] In some embodiments, the thickness of the inner shell portion located within the outer shell is 1 / 3 to 2 / 3 of the outer shell thickness.

[0014] In some embodiments, the outer wall of the housing is provided with a connecting protrusion, and a portion of the housing located at the air inlet end of the connecting protrusion is inserted into the air inlet pipe, with the side wall of one side of the connecting protrusion abutting against the outer side wall of the air outlet end of the air inlet pipe.

[0015] An embodiment of the second aspect of this application provides an epitaxial growth apparatus, including the graphite transition element described above.

[0016] The graphite transition component provided in this application embodiment has an inner shell that can be installed on or removed from the outer shell. Since at least part of the outer surface of the inner shell is attached to the inner surface of the outer shell, the inner surface of the outer shell is not exposed. The growth gas passes through the cavity of the inner shell, and the deposits only form on the inner surface of the inner shell and not on the inner surface of the outer shell, which can extend the service life of the outer shell. When grinding or replacing the graphite transition component, only grinding and cleaning or replacing the inner shell is required, reducing maintenance costs.

[0017] Of course, any product implementing this application does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the graphite transition component assembly provided in the embodiments of this application;

[0020] Figure 2 for Figure 1 The diagram shows the disassembly of the inner and outer shells of the graphite transition component.

[0021] Figure 3 for Figure 2 A schematic diagram of the outer shell in the graphite transition component shown;

[0022] Figure 4 for Figure 2 A schematic diagram of the inner shell in the graphite transition component shown;

[0023] Figure 5 This is an exploded view of the first, second, third, and fourth parts of the inner shell in an embodiment of this application;

[0024] Figure 6 This is a cross-sectional view of the first, second, third, and fourth parts of the inner shell in an embodiment of this application;

[0025] Figure 7 This is a schematic diagram of the epitaxial growth equipment provided in an embodiment of this application.

[0026] Figure label:

[0027] Graphite transition component 1; Epitaxial growth equipment 2; Air inlet channel 21; Equipment housing 22; Sample inlet door 221; Air outlet door 222; Support component 23; Graphite tray 24; Graphite connector 25;

[0028] Inner shell 10; mounting step 101; inner shell body 102; first part 11; protrusion 111; first side 1110; top edge 1111; fourth side 1112; fifth side 1113; extension 112; second side 1121; third side 1131; second part 12; third part 13; fourth part 14; outer shell 20; mounting groove 201; connecting protrusion 202; outer shell body 203. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art based on this application are within the scope of protection of this application.

[0030] To extend the service life of graphite transition components and reduce costs, embodiments of the first aspect of this application provide a graphite transition component, such as... Figure 1 and Figure 2 As shown, Figure 1 This is a schematic diagram of the graphite transition component assembly provided in the embodiments of this application; Figure 2 for Figure 1 The diagram shows the disassembly of the inner and outer shells of the graphite transition piece. The graphite transition piece is used in an epitaxial growth apparatus. The graphite transition piece 1 includes an inner shell 10 and an outer shell 20. The inner shell 10 and the outer shell 20 are detachably connected. At least a portion of the inner shell 10 is located inside the outer shell 20, and the outer wall of at least a portion of the inner shell 10 is fitted to the inner wall of the outer shell 20, thus covering the inner wall of the outer shell 20. The air inlet of the inner shell 10 and the outer shell 20 is connected to the air inlet channel of the epitaxial growth apparatus, and the air outlet is opposite to the graphite tray in the epitaxial growth apparatus. The growth gas passes through the cavity of the inner shell 10.

[0031] In the embodiments of this application, such as Figure 1 and Figure 2 As shown, the inner shell 10 can be installed on or removed from the outer shell 20. Since at least part of the outer surface of the inner shell 10 is attached to the inner surface of the outer shell 20, the inner surface of the outer shell 20 is not exposed. The growth gas passes through the cavity of the inner shell 10, and the deposits only form on the inner surface of the inner shell 10, not on the inner surface of the outer shell 20, thus extending the service life of the outer shell 20. When internally grinding or replacing the graphite transition component, only grinding and cleaning or replacing the inner shell 10 is required; there is no need to clean or replace the outer shell 20, thereby reducing maintenance costs. The service life of the outer shell 20 of the graphite transition component provided in this embodiment can be increased by at least 2 times. Under normal maintenance, as long as the graphite transition component does not crack or can be used indefinitely, production costs can be greatly reduced.

[0032] It should be noted that, Figure 2 The black lines and white-filled arrows indicate the direction of gas flow within the graphite transition piece, with the arrows pointing towards the gas outlet.

[0033] In some embodiments of this application, the outer shell 20 and the inner shell 10 are snapped together.

[0034] In this embodiment, the inner shell 10 and outer shell 20 of the graphite transition piece are detachably connected by a snap-fit ​​method. The advantage of the snap-fit ​​connection method is that the connection is reliable and safe, and the installation and maintenance are convenient and quick. No other connecting parts are required, and the structure is simple. Therefore, the graphite transition piece has a simple structure and is easy to install and maintain.

[0035] In some embodiments of this application, such as Figure 3 and Figure 4 As shown, Figure 3 for Figure 2 A schematic diagram of the outer shell in the graphite transition component shown; Figure 4 for Figure 2 The diagram shows the inner shell of the graphite transition piece; the air inlet end of the outer shell 20 has a mounting groove 201, and the air inlet end of the inner shell 10 has a mounting step 101. The mounting step 101 can engage with the mounting groove 201 so that the inner shell 10 and the outer shell 20 are tightly connected.

[0036] In this embodiment, the inner shell 10 is engaged with the outer shell 20's mounting groove 201 via the mounting step 101, eliminating the need for other connecting parts to connect the outer shell 20 and the inner shell 10. This results in a simple structure and quick and convenient installation.

[0037] Specifically, the inner shell 10 includes an inner shell body 102, and a mounting step 101 is provided at the air intake end of the inner shell body 102, and the mounting step 101 protrudes from the inner shell body 102; when the mounting step 101 of the inner shell 10 is engaged with the mounting groove 201 of the outer shell 20, the side of the mounting step 101 near the outer shell 20 is in contact with the side of the mounting groove 201 near the mounting step 101.

[0038] It should be noted that, as Figure 1 and Figure 2 As shown, the engagement surface between the mounting step 101 and the mounting groove 201 can be a plane. The engagement surface between the mounting step 101 and the mounting groove 201 can also be a bent surface. For example, the outer surface of the mounting groove 201 can be serrated or wedge-shaped, and the surface of the mounting step 101 that mates with the mounting groove 201 can also be serrated or wedge-shaped. This application does not limit this.

[0039] In some embodiments of this application, such as Figure 1 and Figure 2 As shown, the mounting groove 201 is arranged along the circumference of the outer shell 20, and the mounting step 101 is arranged along the circumference of the inner shell 10.

[0040] In this embodiment, the mounting groove 201 is arranged circumferentially along the outer shell 20, and the mounting step 101 is arranged circumferentially along the inner shell 10, so that the mounting groove 201 and the mounting step 101 are annular. This increases the connection area between the outer shell 20 and the inner shell 10, thereby improving the tightness of the connection between the inner shell 10 and the outer shell 20.

[0041] It should be noted that the mounting groove 201 and the mounting step 101 may not be continuously arranged along the circumferential direction. For example, the mounting groove 201 may be divided into two sections, which are arranged opposite to each other at the air inlet end of the inner shell 10.

[0042] In the prior art, due to the small internal space of the graphite transition piece, it is difficult to polish the solidified silicon carbide layer deposited in the four right-angled parts of the inner cavity, which can easily reduce its service life.

[0043] In some embodiments of this application, such as Figure 5 and Figure 6 As shown, Figure 5 This is an axonometric schematic diagram of the first, second, third, and fourth parts of the inner shell in an embodiment of this application; Figure 6 This is a cross-sectional view of the first, second, third, and fourth portions of the inner shell in an embodiment of this application; the inner shell 10 includes a first portion 11, a second portion 12, a third portion 13, and a fourth portion 14 that are detachably connected, the first portion 11 and the second portion 12 being disposed opposite to each other, and the third portion 13 and the fourth portion 14 being disposed opposite to each other; both ends of the first portion 11 are respectively connected to one end of the third portion 13 and the fourth portion 14; both ends of the second portion 12 are respectively connected to the other ends of the third portion 13 and the fourth portion 14.

[0044] In this embodiment, the inner shell 10 comprises four detachable parts. The first part 11, the second part 12, the third part 13, and the fourth part 14 are connected end to end. When it is necessary to polish the silicon carbide layer deposited in the inner cavity of the graphite part, the inner shell 10 can be removed from the outer shell 20 firstly, and then the inner shell 10 can be disassembled into the aforementioned four parts, namely the first part 11, the second part 12, the third part 13, and the fourth part 14, for polishing respectively. This can improve polishing efficiency and quality, facilitate polishing, and extend service life. Specifically, the first part 11, the second part 12, the third part 13, and the fourth part 14 are all plates, which respectively form the four sides of the inner shell 10.

[0045] In some embodiments of this application, such as Figure 5 and Figure 6As shown, the two ends of the first part 11 are respectively snapped into one end of the third part 13 and the fourth part 14; the two ends of the second part 12 are respectively snapped into the other ends of the third part 13 and the fourth part 14; the two ends of the first part 11 and the second part 12 have snap-fit ​​portions, and the two ends of the third part 13 and the fourth part 14 have snap-fit ​​mating portions that cooperate with the snap-fit ​​portions. In this embodiment, through the above arrangement, the first part 11, the second part 12, the third part 13, and the fourth part 14 of the inner shell 10 are snapped together end to end. The advantage of the snap-fit ​​connection method is that the connection is reliable and safe, the installation and maintenance are convenient and quick, no other connecting parts are required, and the structure is simple. Therefore, the graphite transition inner shell 10 has a simple structure and is easy to install and maintain.

[0046] In some embodiments of this application, such as Figure 5 and Figure 6 As shown, the cross-sections of the first part 11, the second part 12, the third part 13, and the fourth part 14 are T-shaped.

[0047] In this embodiment, the T-shaped plate has a protrusion 111 and extensions 112 at both ends of the protrusion 111. The first side 1110 of the protrusion 111 of the first part 11 and the second part 12 abuts against the top edge 1111 of the protrusion 111 of the third part 13 and the fourth part 14. The second side 1121 and the third side 1131 of the extensions 112 of the first part 11 and the second part 12 abut against the fourth side 1112 of the extensions 112 of the third part 13 and the fifth side 1113 of the protrusion 111 of the fourth part 14, respectively.

[0048] In some embodiments of this application, the thickness of at least a portion of the inner shell 10 located within the outer shell 20 is 1 / 3 to 2 / 3 of the thickness of the outer shell 20.

[0049] In this embodiment, the thickness of the inner shell 10 located inside the outer shell 20 is 1 / 3 to 2 / 3 of the thickness of the outer shell 20. For example, the thickness of at least a portion of the inner shell 10 located inside the outer shell 20 can be 1 / 3, 1 / 2, or 2 / 3 of the thickness of the outer shell 20. The thickness of the portion of the inner shell 10 located inside the outer shell 20 is less than the thickness of the outer shell 20, which can save the material used to manufacture the inner shell 10 and thus save the manufacturing cost of the inner shell 10.

[0050] In some embodiments of this application, such as Figure 1 and Figure 2 , Figure 7 As shown, Figure 7This is a schematic diagram of the epitaxial growth device provided in the embodiment of this application. The outer wall of the housing 20 is provided with a connecting protrusion 202. The part of the housing 20 located at the air inlet end of the connecting protrusion 202 is inserted into the air inlet channel 21. The side wall of one side of the connecting protrusion 202 abuts against the outer side wall of the air outlet end of the air inlet channel 21.

[0051] In this embodiment, the outer shell 20 has an outer shell body 203, and a connecting protrusion 202 is arranged around the outer wall of the outer shell body 203. The connecting protrusion 202 can play the role of connection positioning and limiting, thereby improving the accuracy of the connection between the graphite transition piece and the air intake channel 21.

[0052] An embodiment of the second aspect of this application provides an epitaxial growth apparatus 2, such as... Figure 1 , Figure 2 and Figure 7 As shown, the epitaxial growth equipment 2 includes the graphite transition piece 1 described above.

[0053] In this embodiment, the inner shell 10 can be installed on or removed from the outer shell 20. Since at least part of the outer surface of the inner shell 10 is attached to the inner surface of the outer shell 20, the inner surface of the outer shell 20 is not exposed. The growth gas passes through the cavity of the inner shell 10, and the deposits are only formed on the inner surface of the inner shell 10 and not on the inner surface of the outer shell 20, which can extend the service life of the outer shell 20. When grinding or replacing the graphite transition part, only the inner shell 10 needs to be ground or replaced, and the outer shell 20 does not need to be ground or replaced, thereby reducing maintenance costs.

[0054] Specifically, the epitaxial growth equipment 2 includes an equipment shell 22, a support member 23, a graphite tray 24, and a graphite connector 25. The equipment shell 22 has a sample inlet 221 and an outlet 222 at both ends. The sample inlet 221 is connected to the air inlet channel 21, and the air inlet end of the graphite transition member 1 is connected to the outlet of the air inlet channel 21, while the air outlet end faces the top of the graphite tray 24. It should be noted that a graphite transition member 1 can also be provided at the air inlet end of the outlet 222, and the graphite transition member 1 is provided on the support member 23. The two graphite transition members 1 are connected by the graphite connector 25.

[0055] The above description is merely a preferred embodiment of this application and is not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application are included within the scope of protection of this application.

Claims

1. A graphite transition component, characterized in that, Applied to epitaxial growth equipment, including: an inner shell (10) and an outer shell (20); The inner shell (10) and the outer shell (20) are detachably connected. At least a portion of the inner shell (10) is located inside the outer shell (20), and the outer wall of at least a portion of the inner shell (10) is fitted with the inner wall of the outer shell (20) and can cover the inner wall of the outer shell (20). The air inlet of the inner shell (10) and the outer shell (20) is connected to the air inlet channel (21) of the epitaxial growth equipment, and the air outlet is opposite to the graphite tray in the epitaxial growth equipment. The growth gas passes through the cavity of the inner shell (10).

2. The graphite transition member according to claim 1, characterized in that, The outer shell (20) and the inner shell (10) are snapped together.

3. The graphite transition member according to claim 2, characterized in that, The air inlet end of the outer shell (20) has a mounting groove (201), and the air inlet end of the inner shell (10) has a mounting step (101). The mounting step (101) can engage with the mounting groove (201) so that the inner shell (10) and the outer shell (20) are tightly connected.

4. The graphite transition member according to claim 3, characterized in that, The mounting groove (201) is arranged circumferentially along the outer shell (20), and the mounting step (101) is arranged circumferentially along the inner shell (10).

5. The graphite transition member according to claim 1, characterized in that, The inner shell (10) includes a first part (11), a second part (12), a third part (13) and a fourth part (14) that are detachably connected. The first part (11) is disposed opposite to the second part (12), and the third part (13) is disposed opposite to the fourth part (14). The two ends of the first part (11) are respectively connected to one end of the third part (13) and the fourth part (14); the two ends of the second part (12) are respectively connected to the other end of the third part (13) and the fourth part (14).

6. The graphite transition member according to claim 5, characterized in that, The two ends of the first part (11) are respectively engaged with one end of the third part (13) and the fourth part (14); the two ends of the second part (12) are respectively engaged with the other end of the third part (13) and the fourth part (14); the two ends of the first part (11) and the second part (12) have engaging portions, and the two ends of the third part (13) and the fourth part (14) have engaging mating portions that cooperate with the engaging portions.

7. The graphite transition member according to claim 6, characterized in that, The cross-sections of the first part (11), the second part (12), the third part (13) and the fourth part (14) are T-shaped.

8. The graphite transition member according to any one of claims 1-7, characterized in that, The thickness of the inner shell (10) located inside the outer shell (20) is 1 / 3 to 2 / 3 of the thickness of the outer shell (20).

9. The graphite transition member according to any one of claims 1-7, characterized in that, The outer wall of the outer shell (20) is provided with a connecting protrusion (202). A portion of the outer shell (20) located at the air inlet end of the connecting protrusion (202) is inserted into the air inlet channel (21). The side wall of one side of the connecting protrusion (202) abuts against the outer side wall of the air outlet end of the air inlet channel (21).

10. An epitaxial growth apparatus, characterized in that, Includes the graphite transition member as described in any one of claims 1-9.

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