Automatic spin coating device for thin film preparation

Abstract

An automatic spin-coating device for thin film preparation relates to the technical field of thin film preparation and comprises a workbench, a turntable, a first motor, a clamping assembly, a glue dripping device and a heating device, the workbench serves as a basic platform, the top of the workbench is rotationally connected with a turntable, and a first motor is installed at the bottom of the turntable and used for driving the turntable to intermittently rotate according to a set angle. A plurality of grooves are formed in the rotating disc at intervals in the circumferential direction, and a clamping assembly is arranged in each groove and used for clamping a base plate; the glue dripping device and the heating device are installed on the two sides of the workbench correspondingly and controlled to ascend and descend through the first lifting device and the second lifting device, and automatic glue dripping, spin coating and heating treatment on a base plate are achieved. According to the utility model, through integrated design, tedious operation and human error risks caused by cooperative use of a plurality of traditional instruments are avoided, and automation of a film preparation process is realized; and meanwhile, the manual transfer frequency of the substrates among different working procedures is reduced, and the pollution risk is effectively reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film preparation technical field especially is related to a thin film preparation is with automatic spin coating device. BACKGROUND

[0002] In the field of thin film material preparation, especially in the production process of functional thin films such as copper zinc tin sulfur selenium (CZTSSe) thin film, it is usually necessary to go through multiple fine and interrelated steps, such as spin coating, annealing and cooling, etc. Each step has extremely strict processing requirements for the substrate to ensure that the final thin film can have ideal performance and quality. However, there is currently a lack of complete integrated equipment specifically for such thin film preparation in the market, and operators often have to rely on multiple instruments with different functions to work together. This traditional operating mode not only has complicated steps, but also greatly increases the risk of human error.

[0003] For example, after the spin coating process is completed, the substrate needs to be manually transferred to the heating table for annealing treatment, and then further manually moved to the cooling table for cooling. This multiple manual transfer process not only consumes a lot of human and material resources, but also makes it difficult to accurately control various parameters during the transfer process, resulting in instability of the thin film quality. At the same time, the substrate is easily affected by external environmental factors during frequent transfer, such as the attachment of dust, moisture and other pollutants in the air, thereby increasing the risk of contamination of raw materials. The above defects are problems that need to be solved by those skilled in the art. SUMMARY

[0004] In order to overcome the deficiencies in the background art, the utility model discloses an automatic spin coating device for thin film preparation; aims at solving the problem of complicated thin film preparation process and easy pollution in the prior art.

[0005] To achieve the above-mentioned purposes, the utility model adopts the following technical solutions:

[0006] An automatic spin coating device for thin film preparation, comprising:

[0007] A workbench as a foundation;

[0008] A turntable rotatably connected to the workbench;

[0009] A first motor mounted on the workbench for driving the turntable to rotate intermittently at a predetermined angle;

[0010] Grooves, a plurality of which are arranged in a ring direction on the turntable;

[0011] A clamping assembly arranged in the groove for clamping the substrate and rotatably connected to the turntable;

[0012] A second motor is installed at the bottom of the rotating disc to drive the clamping assembly to rotate;

[0013] A glue dropping device is installed on the workbench to drop glue on the substrate;

[0014] A heating device is installed on one side of the glue dropping device to heat and anneal the film on the substrate.

[0015] Preferably, the clamping assembly comprises:

[0016] An annular positioning disc is rotatably connected with the rotating disc, and the bottom of the annular positioning disc penetrates the rotating disc and is drivingly connected with the second motor;

[0017] A plurality of clamping claws are arranged along the annular positioning disc in a ring shape, and the bent part of the clamping claw is hingedly connected with the annular positioning disc;

[0018] A pressing disc is movably inserted with the annular positioning disc at one end, and is used to press down the clamping claw to clamp the substrate;

[0019] A spring is installed between the annular positioning disc and the pressing disc to push the pressing disc downward.

[0020] Preferably, the workbench is provided with an extension cylinder corresponding to the bottom of the rotating disc to push the pressing disc upward.

[0021] Preferably, the inner bottom of the groove is provided with a glue discharging hole, and the bottom of the rotating disc is provided with a collecting cup corresponding to the position of the glue discharging hole.

[0022] Preferably, the glue dropping device comprises:

[0023] A protective cover is capable of covering the groove to prevent glue from splashing when the substrate rotates;

[0024] A glue dropping pump is arranged on the top of the protective cover, and the protective cover is provided with a glue dropping nozzle corresponding to the glue dropping pump;

[0025] A first lifting device is installed on the workbench to drive the protective cover to lift.

[0026] Preferably, the heating device comprises:

[0027] A heat preservation cover is capable of covering the groove;

[0028] An electric heating device is arranged in the heat preservation cover to heat the film formed on the substrate;

[0029] A second lifting device is installed on the workbench to drive the heat preservation cover to lift.

[0030] Preferably, the workbench cover is provided with a cabin with an opening and closing door, and a vacuum pump is arranged in the cabin.

[0031] Preferably, the workbench is provided with a mechanical arm for loading and unloading the substrate on one side of the rotating disc.

[0032] Due to the adoption of the technical scheme as described above, the utility model has the following beneficial effects:

[0033] (1) The utility model has the advantages of simple structure, integration of functions such as spin coating and heating annealing, automatic transfer through the rotating disc, automatic switching between various workstations, reduced manual transfer times of the substrate between different processes, effectively reduced risk of environmental pollution of the substrate, and ensured quality of the film.

[0034] (2) The clamping assembly comprises a ring-shaped positioning disc, a jaw, a pressing disc and a spring, and can realize quick and accurate clamping and loosening of the substrate. The bending part of the jaw is hinged to the ring-shaped positioning disc, the pressing disc can drive the jaw to clamp the substrate, and the number of the jaws is at least three, so that the stability and reliability of clamping are ensured. When the substrate needs to be replaced, the pressing disc moves upward, the jaws expand outward under the action of the torsion spring, and the substrate is quickly loosened. This design effectively solves the problems of loose fixing and inaccurate positioning of the substrate in the traditional spin coating device, improves the stability of the substrate in the spin coating process, and thus ensures the uniformity and quality of the film. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 Fig. 1 is a structural schematic view of the utility model;

[0036] Figure 2 Fig. 2 is a structural schematic view of the workbench;

[0037] Figure 3 Fig. 3 is a schematic view of the clamping assembly;

[0038] Figure 4 Fig. 4 is a sectional view of the clamping assembly;

[0039] Figure 5 Fig. 5 is a partial structural schematic view of the rotating disc;

[0040] Figure 6 Fig. 6 is a structural schematic view of the cabin.

[0041] In the figure: 1, workbench; 2, turntable; 3, first motor; 4, groove; 5, clamping assembly; 5-1, annular positioning disc; 5-2, claw; 5-3, pressure plate; 5-4, spring; 6, second motor; 7, glue dropping device; 7-1, protective cover; 7-2, glue dropping pump; 7-3, first lifting device; 8, heating device; 8-1, heat preservation cover; 8-2, second lifting device; 9, telescopic cylinder; 10, glue discharging hole; 11, collection cup; 12, engine room; 13, mechanical arm. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0043] In the description of the present application, it should be pointed out that the positions or location relationships indicated by the terms "upper", "lower" and the like are based on the positions or location relationships shown in the drawings, or the positions or location relationships commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated devices or elements must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present application.

[0044] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing" and the like should be understood broadly, for example, can be fixed connection, can also be detachable connection, or can be integrated; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0045] Embodiment one:

[0046] In combination with the accompanying drawings Figures 1-4 An automatic spin coating device for thin film preparation includes a workbench 1, a turntable 2, a first motor 3 and a clamping assembly 5. Among them, the workbench 1 is used as the basic platform of the whole device, and the top is rotatably connected with the turntable 2. In the workbench 1, corresponding to the bottom position of the turntable 2, the first motor 3 is installed, which drives the turntable 2 to rotate intermittently at a certain angle.

[0047] The specific implementation is that according to actual use requirements, a cam divider can be arranged between the first motor 3 and the rotating disc 2, the cam divider is driven to rotate by the first motor 3, and then the rotating disc 2 is driven by the cam divider to realize intermittent rotation at a set angle. It should be noted that the cam divider mentioned here is a mature device, and the user only needs to select the appropriate model according to the actual working condition and install it for use.

[0048] On the rotating disc 2, a plurality of grooves 4 are distributed at intervals along the circumferential direction, each groove 4 is equipped with a clamping assembly 5 for clamping and fixing the substrate, and the clamping assembly 5 is in a rotating connection relationship with the rotating disc 2.

[0049] In combination with the accompanying drawings Figure 3 and 4 , the structure of the clamping assembly 5 is further described: it includes an annular positioning disc 5-1 which is in a rotating connection relationship with the rotating disc 2, the bottom of the annular positioning disc 5-1 penetrates through the rotating disc 2 and is in a driving connection relationship with the second motor 6. Since the second motor 6 is installed on the rotating disc 2, in order to ensure that it can be continuously and stably connected to the power supply, one of the following two ways can be adopted: one is to make the rotating disc 2 rotate in the opposite direction after rotating a certain angle; the other is to add a conductive slip ring on the rotating shaft of the rotating disc 2, and the second motor 6 is connected to the external power supply through the conductive slip ring, so that the rotating disc 2 can continuously rotate in one direction.

[0050] A plurality of clamping jaws 5-2 are arranged at intervals along the circumferential direction of the annular positioning disc 5-1, and the bent part of the clamping jaw 5-2 is connected to the corresponding position of the annular positioning disc 5-1 by a hinged manner. A pressing disc 5-3 is movably inserted at the center position of the annular positioning disc 5-1, when the pressing disc 5-3 moves downward, it will generate a downward pressure on the clamping jaw 5-2, so as to make the clamping jaw 5-2 close to the center, thereby achieving clamping of the substrate; according to actual application requirements, the number of clamping jaws 5-2 is at least three. When performing spin coating operation, the annular positioning disc 5-1 is driven to rotate by the second motor 6, and the clamping jaw 5-2 and the clamped substrate rotate together.

[0051] In order to ensure that the clamping jaw 5-2 can always reliably clamp the substrate, a spring 5-4 is installed between the annular positioning disc 5-1 and the pressing disc 5-3, and the spring 5-4 functions to push the pressing disc 5-3 to move downward. In addition, a torsional spring is also provided at the position corresponding to the hinge connection between the clamping jaw 5-2 and the annular positioning disc 5-1, which is not shown in the figure. When the pressing disc 5-3 moves upward, the torsional spring can drive the clamping jaw 5-2 to expand outward, thereby loosening the clamping of the substrate, facilitating the replacement operation of the substrate.

[0052] On the workbench 1, a glue dropping device 7 is also installed, and a heating device 8 is installed on the side opposite to the glue dropping device 7. The working process is as follows: first, glue liquid is dropped on the substrate through the glue dropping device 7, then the second motor 6 is started to drive the clamping assembly 5 to rotate, so that the glue liquid is uniformly spin-coated on the surface of the substrate to form a film; then the first motor 3 is controlled to be started to drive the rotating disc 2 to rotate by a certain angle, so as to transfer the substrate on which the glue has been coated to the position where the heating device 8 is located, and the heating device 8 is used to heat and anneal the film on the substrate.

[0053] Specifically, the structure of the glue dropping device 7 is as follows: a protective cover 7-1 capable of covering the groove 4 is included, and the protective cover 7-1 can cover the outside of the clamping assembly 5 during the rotation of the substrate, so as to effectively prevent the glue liquid from splashing when the substrate rotates. The top of the protective cover 7-1 is equipped with a glue dropping pump 7-2, the inside of the protective cover 7-1 is provided with a glue dropping nozzle in communication with the glue dropping pump 7-2, and the glue dropping nozzle is controlled by a solenoid valve. On the workbench 1, a first lifting device 7-3 is also installed, which is used to drive the protective cover 7-1 to move up and down.

[0054] When the rotating disc 2 drives the substrate to rotate to the position of the glue dropping device 7, the first lifting device 7-3 drives the protective cover 7-1 to move downwards, so that it is buckled on the groove 4, thereby completely covering the clamping assembly 5. At this time, the solenoid valve is controlled to open the glue dropping nozzle, and the glue dropping pump 7-2 is started to accurately drop a certain amount of glue liquid on the surface of the substrate. Then, the second motor 6 is started to drive the substrate to rotate, so that the glue liquid is uniformly spin-coated on the substrate to form a film. After the spin-coating is completed, the first lifting device 7-3 drives the protective cover 7-1 to move upwards, and then the rotating disc 2 can be controlled to continue to rotate to transfer the substrate to the subsequent heating station.

[0055] The structure of the heating device 8 includes a heat preservation cover 8-1 capable of covering the groove 4, and the inside of the heat preservation cover 8-1 is equipped with an electric heating device (not shown in the figure) for heating the film formed on the substrate. On the workbench 1, a second lifting device 8-2 is also installed, which is used to drive the heat preservation cover 8-1 to move up and down.

[0056] When the substrate on which the glue liquid has been spin-coated is rotated to the heating station by the rotating disc 2, the second lifting device 8-2 drives the heat preservation cover 8-1 to move downwards, so that it is buckled on the groove 4, thereby completely covering the substrate. At this time, the electric heating device is started to implement the heating and annealing process of the film. After the film is solidified, the second lifting device 8-2 is controlled to drive the heat preservation cover 8-1 to move upwards, so as to transfer the substrate to the next process station to continue the subsequent processing process.

[0057] It should be noted that the whole device in the process of operation, the coordination between the components is essential. For example, the combination of the first motor 3 and the cam divider, not only can realize the accurate intermittent rotation of the turntable 2, but also can ensure that the substrate in each groove 4 can accurately reach the work area of the glue dropping device 7 and the heating device 8 in turn during rotation, so as to ensure the continuity and stability of the film preparation process. At the same time, the installation and driving mode of the second motor 6, by adding a conductive slip ring on the rotating shaft of the turntable 2, effectively solves the problem of motor power connection caused by the continuous rotation of the turntable 2 in one direction, ensures that the clamping assembly 5 can stably drive the substrate to perform spin coating operation, and further improves the reliability and operation efficiency of the device.

[0058] In addition, the design of the protective cover 7-1 in the glue dropping device 7 not only effectively prevents the splashing of glue liquid when the substrate rotates, but also realizes accurate positioning and sealing operation in the glue dropping process through cooperation with the first lifting device 7-3, ensures the full use of glue liquid and the stability of glue dropping quality. The heat preservation cover 8-1 in the heating device 8 and the second lifting device 8-2 can provide a relatively stable temperature environment for the substrate during heating and annealing, which is beneficial to the uniform solidification and performance optimization of the film, so as to meet the process requirements of high-quality film preparation.

[0059] Example two:

[0060] In combination with the attached Figure 6 An automatic spin coating device for film preparation, which is different from example one in that on the basis of example one, the workbench 1 cover is provided with a cabin 12 with opening and closing door, and the cabin 12 is provided with a vacuum pump. The cabin 12 plays a protective role and can provide a dustproof sealed environment. During the film preparation process, the vacuum pump can be started to vacuum the cabin 12, so as to effectively prevent dust from falling on the film and effectively improve the quality of the film.

[0061] Further, in order to realize automation, the workbench 1 is provided with a mechanical arm 13 for loading and unloading the substrate on one side of the rotating disc 2, that is, the substrate can be clamped by the mechanical arm 13 and placed on the clamping assembly 5. In order to ensure that the clamping assembly 5 is in an open state when the substrate is placed, a telescopic cylinder 9 is arranged at the bottom of the rotating disc 2 corresponding to the workbench 1, and the telescopic cylinder 9 is installed on the loading and unloading station. When the rotating disc 2 drives the corresponding clamping assembly 5 to rotate to the loading and unloading station, the telescopic cylinder 9 acts to push the corresponding pressure plate 5-3 upward, and the clamping jaw 5-2 is automatically opened under the action of the torsion spring. The mechanical arm 13 clamps the substrate and places the substrate on the pressure plate 5-3, and the telescopic cylinder 9 is controlled to reset, and the pressure plate 5-3 is lowered under the action of the spring 5-4, and the clamping jaw 5-2 is driven to clamp the substrate. Conversely, when unloading is required, the rotating disc 2 drives the corresponding clamping assembly 5 to rotate to the loading and unloading station, the telescopic cylinder 9 acts to push the corresponding pressure plate 5-3 upward, and the clamping jaw 5-2 is opened, so that the mechanical arm 13 can be controlled to take away the substrate and replace a new substrate.

[0062] Embodiment three:

[0063] In combination with the accompanying drawings Figure 2 and 5 An automatic spin coating device for thin film preparation, on the basis of embodiment one or two, a glue discharging hole 10 is arranged at the bottom of the groove 4, and a collection cup 11 is arranged at the bottom of the rotating disc 2 corresponding to the position of the glue discharging hole 10. During the spin coating process, the excess glue liquid will accumulate in the groove 4 and flow into the collection cup 11 along the glue discharging hole 10, and the operator can clean the groove 4 and the collection cup 11 regularly.

[0064] The part not described in detail in the utility model is the prior art. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and all changes falling within the meaning and scope of the equivalent elements should be included in the utility model.

Claims

1. An automatic spin-coating apparatus for thin film preparation, characterized in that, include: Workbench (1), as the base; Turntable (2), which is rotatably connected to worktable (1); The first motor (3) is mounted on the workbench (1) and is used to drive the turntable (2) to rotate intermittently at a predetermined angle; Grooves (4), wherein multiple grooves (4) are arranged at intervals along the circumference of the turntable (2); The clamping assembly (5) is located in the groove (4) for clamping the substrate and is rotatably connected to the turntable (2); The second motor (6) is mounted on the bottom of the turntable (2) and is used to drive the clamping assembly (5) to rotate; A dispensing device (7) is mounted on a workbench (1) and is used to dispense adhesive onto a substrate; Heating device (8), which is installed on one side of dispensing device (7), is used to heat and anneal the film on the substrate.

2. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that, The clamping assembly (5) includes: The annular positioning disk (5-1) is rotatably connected to the turntable (2), and the bottom of the annular positioning disk (5-1) passes through the turntable (2) and is driven by the second motor (6). The claws (5-2) are arranged circumferentially along the annular positioning disk (5-1), and the bent parts of the claws (5-2) are hinged to the annular positioning disk (5-1). The pressure plate (5-3) is movably connected at one end to the annular positioning plate (5-1) and is used to press down the claw (5-2) to clamp the substrate. A spring (5-4) is installed between the annular positioning plate (5-1) and the pressure plate (5-3) to push the pressure plate (5-3) downward.

3. The automatic spin-coating apparatus for thin film preparation as described in claim 2, characterized in that: The workbench (1) is equipped with a telescopic cylinder (9) at the bottom of the turntable (2) for pushing the pressure plate (5-3) upward.

4. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that: The bottom of the groove (4) is provided with a glue discharge hole (10), and a collection cup (11) is installed at the bottom of the turntable (2) corresponding to the position of the glue discharge hole (10).

5. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that, The dispensing device (7) includes: A protective cover (7-1) is provided to cover the groove (4) to prevent adhesive from splashing when the substrate rotates; A dispensing pump (7-2) is located on top of a protective cover (7-1), and a dispensing nozzle corresponding to and communicating with the dispensing pump (7-2) is provided inside the protective cover (7-1). The first lifting device (7-3) is installed on the workbench (1) and is used to drive the protective cover (7-1) to lift.

6. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that, The heating device (8) includes: A heat insulation cover (8-1) is provided, which can be placed over the groove (4); An electric heating device, which is located inside a heat insulation cover (8-1), is used to heat the thin film formed on the substrate; The second lifting device (8-2) is installed on the workbench (1) and is used to drive the heat insulation cover (8-1) to lift.

7. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that: The workbench (1) is covered by a cabin (12) with an opening and closing door, and a vacuum pump is installed inside the cabin (12).

8. The automatic spin-coating apparatus for thin film preparation as described in claim 1, characterized in that: The workbench (1) is provided with a robotic arm (13) for loading and unloading substrates on one side of the turntable (2).

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