Pay-off device for magnetron sputtering coating unit

Abstract

The utility model relates to the technical field of pay-off devices, in particular to a pay-off device for a magnetron sputtering coating unit, which comprises a supporting mechanism, the supporting mechanism comprises a frame, a fixing lug is arranged on the frame, a lifting rod is mounted on the upper side of the frame, and a pay-off mechanism is arranged on the supporting mechanism. An adjusting mechanism for locally adjusting the position of the steel wire is arranged on the rear side of the pay-off mechanism; the pay-off mechanism comprises a wire wheel rotationally installed on the frame, and one end of the wire wheel is connected with a power assembly. Through the arrangement of the pay-off mechanism and the adjusting mechanism, after a steel wire on a wire wheel bypasses a V-shaped groove of a first V-shaped wheel and a V-shaped groove of a second V-shaped wheel and is connected to a wire wheel at the other point position, a limiting supporting assembly limits, supports and stabilizes the steel wire, a lead screw is rotated, and the lead screw drives an adjusting plate to be adjusted under limiting of a sliding column; the steel wire between the two paying-off point positions is transversely adjusted, it is guaranteed that the steel wire coincides with paying-off of the theodolite, and the convenience of paying-off adjustment of the steel wire is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a pay -off device technical field especially relates to a pay -off device for magnetron sputtering coating unit. BACKGROUND

[0002] The prior art patent No. CN 212988357 U discloses a pay-off device for magnetron sputtering coating unit, which can adopt different steel wires for auxiliary installation according to the needs of different production lines by setting V-shaped grooves, small threading holes and large threading holes. The steel wire on the roller in the tightening device is aligned with the marked center line of the main machine, and then the steel wire is tightened by the fixed valve to ensure that the whole line is on the same center line, thereby solving the problems of high difficulty, low efficiency and large error in the current equipment unit splicing. However, the device needs to be accurately fixed at the point marked by the theodolite during use, and the steel wire needs to be installed on the same straight line of the theodolite after installation. However, the steel wire is fixed in position in the V-shaped groove, small threading hole or large threading hole, which may cause certain difficulties in the installation and fixation of the overall device in order to ensure the accuracy of the position of the steel wire. SUMMARY

[0003] The utility model discloses a pay-off device for magnetron sputtering coating unit.

[0004] The utility model discloses the following technical scheme to realize the above-mentioned purpose:

[0005] A pay-off device for magnetron sputtering coating unit, comprising a support mechanism, the support mechanism comprising a frame, the frame being provided with a fixing lug, the frame being provided with a lifting rod on the upper side, the support mechanism being provided with a pay-off mechanism on the upper side, and the pay-off mechanism being provided with an adjusting mechanism for local adjustment of the position of the steel wire on the rear side; the pay-off mechanism comprising a wire reel rotatably installed on the frame, the wire reel being connected with a power assembly at one end; the adjusting mechanism comprising a lead screw and a slide column arranged in parallel on the frame, the lead screw and the slide column being provided with an adjusting plate, the lead screw being provided with a hand wheel at one end, the adjusting plate being rotatably provided with a first V-shaped wheel and a second V-shaped wheel, the first V-shaped wheel and the second V-shaped wheel being arranged in a staggered manner, and the adjusting plate being provided with a limiting support assembly on the side close to the pay-off mechanism.

[0006] Further setting: the power assembly comprises a worm wheel fixed at one end of the wire reel, a support frame is fixed on the outer side of the worm wheel on the frame, a worm is arranged on the support frame and engaged with the worm wheel, and a crank handle is arranged at one end of the worm.

[0007] Further setting: the worm is rotatably connected with the support frame.

[0008] Further setting: the limiting support assembly comprises longitudinal support rollers oppositely arranged on the one side of the adjusting plate, the longitudinal support rollers are connected to the adjusting plate through support shafts, the support shafts are provided with support plates at one end, the adjusting plate is provided with adjusting frames at the back side of the longitudinal support rollers, the adjusting frames are oppositely arranged, sliding grooves are arranged in the adjusting frames, two sliding seats are arranged in the sliding grooves, and horizontal support rollers are rotatably arranged between the oppositely arranged sliding seats, and left and right screw rods are arranged through the sliding seats.

[0009] Further setting: the longitudinal support rollers are rotatably connected with the support shafts, and the horizontal support rollers are rotatably connected with the sliding seats.

[0010] Further setting: the left and right screw rods are threadedly connected with the sliding seats, and the sliding seats are slidably connected with the adjusting frames.

[0011] Further setting: the centers of the V-shaped grooves of the first V-shaped wheel and the second V-shaped wheel correspond to the center of the horizontal support roller.

[0012] Compared with the prior art, the magnetic control sputtering coating machine set has the beneficial effects as follows:

[0013] Through the arrangement of the wire paying-out mechanism and the adjusting mechanism, the steel wire on the wire wheel is wound around the V-shaped grooves of the first V-shaped wheel and the second V-shaped wheel, and then connected to the wire wheel at another position, the limiting support assembly supports and stabilizes the steel wire, the screw rod is rotated, the adjusting plate is adjusted under the limiting of the sliding column, the steel wire between the two wire paying-out positions is adjusted horizontally, the coincidence of the steel wire and the wire paying-out of the theodolite is ensured, and the convenience of the steel wire paying-out adjustment is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0015] Figure 1 is a structure schematic view of the wire paying-out device for the magnetic control sputtering coating machine set according to the present application;

[0016] Figure 2 is another perspective structure schematic view of the wire paying-out device for the magnetic control sputtering coating machine set according to the present application;

[0017] Figure 3 is a top view structure schematic view of the wire paying-out device for the magnetic control sputtering coating machine set according to the present application;

[0018] Figure 4It is the partial structure schematic view of the wire laying device for the magnetron sputtering coating unit group of the utility model;

[0019] Figure 5 It is the structure schematic view of the adjusting mechanism of the wire laying device for the magnetron sputtering coating unit group of the utility model;

[0020] Figure 6 It is the partial structure schematic view of the adjusting mechanism of the wire laying device for the magnetron sputtering coating unit group of the utility model.

[0021] The sign of the reference numeral is as follows:

[0022] 11, frame; 12, fixed lug; 13, lifting rod; 21, wire wheel; 22, worm wheel; 23, worm; 24, support frame; 25, rocking handle; 31, lead screw; 32, slide column; 33, adjusting plate; 34, first V-shaped wheel; 35, second V-shaped wheel; 36, longitudinal support roller; 37, support plate; 38, adjusting frame; 39, slide base; 310, transverse support roller; 311, left and right screw lead screw. DETAILED DESCRIPTION

[0023] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0024] In the description of the utility model, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; It can be mechanically connected, or it can be electrically connected; It can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0025] The utility model will be further described below in conjunction with the drawings:

[0026] As Figures 1-6 The magnetron sputtering coating machine set is provided with a wire releasing device, which comprises a supporting mechanism, the supporting mechanism comprising a frame 11, the frame 11 being provided with a fixing lug 12, and a lifting rod 13 being installed on the upper side of the frame 11, so as to facilitate the movement of the whole, and the supporting mechanism being provided with a wire releasing mechanism, and the rear side of the wire releasing mechanism being provided with an adjusting mechanism for locally adjusting the position of the steel wire.

[0027] In this embodiment, the wire releasing mechanism comprises a wire reel 21 which is rotatably installed on the frame 11, and the wire reel 21 being connected with a power assembly at one end; the power assembly comprising a worm gear 22 which is fixed at one end of the wire reel 21, and a supporting frame 24 being fixed on the frame 11 outside the worm gear 22, and a worm shaft 23 being provided on the supporting frame 24 and being engaged with the worm gear 22, and a crank 25 being provided at one end of the worm shaft 23, and the worm shaft 23 being rotatably connected with the supporting frame 24, and the worm shaft 23 being driven by rotating the crank 25 to be engaged with the worm gear 22 to rotate, so as to release or wind the steel wire on the wire reel 21.

[0028] In this embodiment, the adjusting mechanism comprises a lead screw 31 and a slide column 32 which are arranged in parallel on the frame 11, and an adjusting plate 33 being installed on the lead screw 31 and the slide column 32, and a hand wheel being provided at one end of the lead screw 31, and a first V-shaped wheel 34 and a second V-shaped wheel 35 being rotatably installed on the adjusting plate 33, and the first V-shaped wheel 34 and the second V-shaped wheel 35 being arranged in a staggered manner, and a limiting support assembly being provided on the side of the adjusting plate 33 close to the wire releasing mechanism, and the center of the V-shaped groove of the first V-shaped wheel 34 and the second V-shaped wheel 35 corresponding to the center between the horizontal supporting rollers 310, and the lead screw 31 being driven to adjust the adjusting plate 33 under the limitation of the slide column 32, so as to adjust the first V-shaped wheel 34 and the second V-shaped wheel 35 to adjust the steel wire in the horizontal direction, and the first V-shaped wheel 34 and the second V-shaped wheel 35 being convenient for limiting and supporting the steel wire of different specifications.

[0029] The limiting support assembly comprises longitudinal support rollers 36 arranged oppositely on the one side of the adjusting plate 33, the longitudinal support rollers 36 are connected to the adjusting plate 33 through support shafts, the support shafts are provided with support plates 37 at one end, the adjusting plate 33 is provided with adjusting frames 38 at the back side of the longitudinal support rollers 36, the adjusting frames 38 are arranged oppositely, the adjusting frames 38 are provided with sliding grooves, two sliding seats 39 are arranged in the sliding grooves, the transverse support rollers 310 are rotatably arranged between the oppositely arranged sliding seats 39, the adjusting frames 38 are provided with left and right screw rods 311 penetrating through the sliding seats 39; the longitudinal support rollers 36 are rotatably connected with the support shafts, the transverse support rollers 310 are rotatably connected with the sliding seats 39; the left and right screw rods 311 are threadedly connected with the sliding seats 39, the sliding seats 39 are slidably connected with the adjusting frames 38, the left and right screw rods 311 are used for moving the sliding seats 39 on the adjusting frames 38 to each other by rotating the left and right screw rods 311, the transverse support rollers 310 are used for clamping and limiting the steel wire on both sides, and the longitudinal support rollers 36 are used for supporting the steel wire in the longitudinal direction, so that the stability of the steel wire is ensured when the steel wire moves along with the first V-shaped wheel 34 and the second V-shaped wheel 35.

[0030] The working principle and use process of the utility model are as follows: the expansion bolt is penetrated through the fixed lug 12 on the frame 11, the whole is fixed on the installation pay-off point, the steel wire on the wire reel 21 is penetrated through the longitudinal support roller 36 and the transverse support roller 310, is wound around the V-shaped groove of the first V-shaped wheel 34 and the second V-shaped wheel 35, is connected to the wire reel 21 at another point, the sliding seats 39 on the adjusting frames 38 are moved to each other by rotating the left and right screw rods 311, the transverse support rollers 310 are used for clamping and limiting the steel wire on both sides, the adjusting plate 33 is adjusted under the limiting of the sliding column 32 by rotating the screw rod 31, the first V-shaped wheel 34 and the second V-shaped wheel 35 are used for adjusting the steel wire in the transverse direction, the wire reel 21 is used for adjusting the tension degree of the steel wire by rotating the worm 23, and the coincidence of the steel wire and the theodolite is ensured.

[0031] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above examples, and the above examples and descriptions in the specification are only used to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model.

Claims

1. A wire unwinding device for a magnetron sputtering coating machine group, comprising a supporting mechanism, wherein the supporting mechanism comprises a frame (11), a fixed lug (12) is arranged on the frame (11), and a lifting rod (13) is installed on the upper side of the frame (11), characterized in that: The supporting mechanism is provided with a pay-off mechanism, and the rear side of the pay-off mechanism is provided with an adjusting mechanism for locally adjusting the position of the steel wire; the pay-off mechanism comprises a wire reel (21) rotatably installed on the frame (11), and one end of the wire reel (21) is connected with a power assembly; the adjusting mechanism comprises a lead screw (31) and a slide column (32) which are arranged flush on the frame (11), and an adjusting plate (33) is installed on the lead screw (31) and the slide column (32); one end of the lead screw (31) is provided with a hand wheel; the adjusting plate (33) is rotatably provided with a first V-shaped wheel (34) and a second V-shaped wheel (35); the first V-shaped wheel (34) and the second V-shaped wheel (35) are arranged in a staggered manner; and a limiting support assembly is arranged on one side of the adjusting plate (33) close to the pay-off mechanism.

2. The wire unwinding device of a magnetron sputtering coating machine group according to claim 1, characterized in that: The power assembly comprises a worm wheel (22) fixed at one end of the wire reel (21), a support frame (24) is fixed on the frame (11) outside the worm wheel (22), a worm (23) is arranged on the support frame (24) and engaged with the worm wheel (22), and a crank handle (25) is arranged at one end of the worm (23).

3. The wire unwinding device of claim 2, wherein the wire unwinding device further comprises a wire guide. The worm (23) is rotatably connected with the support frame (24).

4. The wire unwinding device of a magnetron sputtering coating machine group according to claim 1, characterized in that: The limiting support assembly comprises longitudinal support rollers (36) arranged in opposition on one side of the adjusting plate (33); the longitudinal support rollers (36) are connected to the adjusting plate (33) through support shafts; one end of each support shaft is provided with a support plate (37); an adjusting frame (38) is arranged on the adjusting plate (33) behind the longitudinal support rollers (36); the adjusting frame (38) is arranged in opposition; a sliding groove is arranged in the adjusting frame (38); two sliding seats (39) are arranged in the sliding groove; a transverse support roller (310) is rotatably arranged between the sliding seats (39) in opposition; and left and right screw lead screws (311) are arranged on the adjusting frame (38) and pass through the sliding seats (39).

5. The wire feeding device of claim 4, wherein the wire feeding device further comprises a wire guide. The longitudinal support rollers (36) are rotatably connected with the support shafts, and the transverse support roller (310) is rotatably connected with the sliding seat (39).

6. The wire unwinding device of claim 5, wherein the wire unwinding device further comprises a wire guide. The left and right screw lead screws (311) are threadedly connected with the sliding seat (39), and the sliding seat (39) is slidably connected with the adjusting frame (38).

7. The wire feeding device of claim 4, wherein the wire feeding device comprises a wire feeding device for a magnetron sputtering coating machine. The centers of the V-shaped grooves of the first V-shaped wheel (34) and the second V-shaped wheel (35) correspond to the center of the transverse support roller (310).

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