Vacuum cavity assembly and vacuum coating equipment

Abstract

The utility model discloses a vacuum cavity assembly and vacuum coating equipment, and the vacuum cavity assembly comprises a plurality of vacuum cavity structures; the base frame can stretch out and draw back in the first direction, at least one vacuum cavity structure is arranged on the base frame, and the vacuum cavity structures can slide in a reciprocating mode relative to the base frame in the first direction. According to the utility model, the base frame capable of stretching out and drawing back along the first direction is arranged, and the vacuum cavity structures can slide back and forth along the first direction relative to the base frame, so that the number of the vacuum cavity structures on the base frame can be adjusted to adapt to production requirements, the required production speed and yield are realized, the coating efficiency is favorably improved, and the coating cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field especially relates to a vacuum cavity subassembly and vacuum coating equipment. BACKGROUND

[0002] The traditional lithium battery generally adopts aluminum foil as the positive current collector and copper foil as the negative current collector. In order to reduce the cost and weight of the battery and improve the cycle life and safety of the battery, the new lithium battery uses composite aluminum foil as the positive current collector and composite copper foil as the negative current collector. The composite aluminum foil and the composite copper foil are made by coating the surface of the aluminum foil and the copper foil in a vacuum coating equipment.

[0003] According to the change of production demand, the production speed and yield requirement of the composite copper foil and the composite aluminum foil are also changing, which requires that the coating speed of the surface of the copper foil and the aluminum foil can be adjusted at any time according to the production demand. However, the existing vacuum coating equipment only has one vacuum cavity structure, and the adjustment of the coating speed is limited, which cannot meet the actual production demand. UTILITY MODEL CONTENT

[0004] In order to solve the above technical problems, the utility model provides a kind of vacuum cavity subassembly and vacuum coating equipment, to select the proper number of vacuum cavity structure according to production demand, to reach the production speed and yield required.

[0005] The utility model discloses a first aspect discloses a kind of vacuum cavity subassembly, comprising:

[0006] Vacuum cavity structure, vacuum cavity structure is equipped with multiple;

[0007] Base frame, base frame can be telescopic along the first direction, at least one vacuum cavity structure is arranged on base frame, and vacuum cavity structure can reciprocate along the first direction relative to base frame and slide.

[0008] As an alternative embodiment, in the first aspect of the utility model, vacuum cavity structure and base frame are connected by slider, slider is fixed at the bottom of vacuum cavity structure, and slider can reciprocate along the first direction relative to base frame and slide.

[0009] As an alternative embodiment, in the first aspect of the utility model, slider and vacuum cavity structure are detachably connected.

[0010] As an alternative embodiment, in the first aspect of the utility model, base frame includes fixed support and slide rail that can be telescopic along the first direction, fixed support and slide rail are fixedly connected along the first direction, the length of fixed support is adapted to the length of one vacuum cavity structure, and one vacuum cavity structure is fixedly installed on fixed support.

[0011] As an optional implementation, in the first aspect of the utility model, the vacuum cavity structure comprises a first vacuum cavity structure and at least one second vacuum cavity structure, the length of the fixed support is adapted to the length of the first vacuum cavity structure, the first vacuum cavity structure is fixedly installed on the fixed support, and the second vacuum cavity structure is slidably arranged on the slide rail along the first direction.

[0012] As an optional implementation, in the first aspect of the utility model, the first vacuum cavity structure and the second vacuum cavity structure are of the same structure, and the first vacuum cavity structure and the second vacuum cavity structure are arranged at the same height.

[0013] As an optional implementation, in the first aspect of the utility model, the first vacuum cavity structure and the second vacuum cavity structure are of the same structure, and the first vacuum cavity structure and the second vacuum cavity structure are arranged at the same height.

[0014] As an optional implementation, in the first aspect of the utility model, the vacuum cavity structure comprises a vacuum cavity body and a coating mechanism, the coating mechanism comprises a driving motor, a driving shaft and a coating roller, the driving motor is arranged outside the vacuum cavity body, the driving shaft is sealedly penetrated through the vacuum cavity body and connected with the driving motor, the coating roller is arranged in the vacuum cavity body and sleeved on the driving shaft, and the coating roller rotates coaxially with the driving shaft.

[0015] As an optional implementation, in the first aspect of the utility model, the vacuum cavity structure further comprises a cooling water pipe, the cooling water pipe is sealedly penetrated through the vacuum cavity body, the cooling water pipe is arranged on the side of the coating roller, and the cooling water pipe is arranged in parallel with the coating roller.

[0016] The second aspect of the utility model discloses a vacuum coating equipment, which comprises the vacuum cavity assembly.

[0017] Compared with the prior art, the utility model has the following beneficial effects:

[0018] In the utility model, the base frame can be telescoped along the first direction, and the vacuum cavity structure can reciprocate along the first direction relative to the base frame, so that the number of the vacuum cavity structures on the base frame can be adjusted to adapt to the production demand, the production speed and yield are realized, the coating efficiency is improved, and the coating cost is reduced. ACCURACY

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the drawings needed in the embodiment description will be briefly introduced, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0020] Figure 1It is the structural schematic view of a vacuum cavity assembly disclosed by the embodiment of the utility model.

[0021] Figure 2 It is the front view of a vacuum cavity assembly disclosed by the embodiment of the utility model.

[0022] Figure 3 It is the sectional view of a vacuum cavity assembly disclosed by the embodiment of the utility model.

[0023] In the drawing: 1, vacuum cavity structure;11, first vacuum cavity structure;12, second vacuum cavity structure;13, vacuum cavity;14, driving motor;15, driving shaft;16, coating roll;17, cooling water pipe;2, base frame;21, fixed support;22, slide rail;3, sliding block. Specific implementation

[0024] In order to make the personnel in the technical field better understand the utility model scheme, the technical scheme in the embodiment of the utility model will be described clearly and completely below in combination with the drawings in the embodiment of the utility model, obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor are within the protection scope of the utility model.

[0025] The terms "first", "second" and the like in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish different objects, not to describe a specific order. In addition, the terms "include" and "have" and any modification thereof are intended to cover non-exclusive inclusion. For example, the process, method, device, product or end including a series of steps or units is not limited to the listed steps or units, but optionally also includes the steps or units not listed, or optionally also includes other steps or units inherent to these processes, methods, products or ends.

[0026] In this paper, the "embodiment" means that the specific features, structures or characteristics described in combination with the embodiment can be included in at least one embodiment of the utility model. The phrase appears at various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment to other embodiments. The person skilled in the art explicitly and implicitly understands that the embodiments described in this paper can be combined with other embodiments.

[0027] Embodiment 1

[0028] Referring to Figure 1 The embodiment discloses a vacuum cavity assembly, which comprises a vacuum cavity structure 1 and a base frame 2. Referring to Figure 3The vacuum cavity structure 1 comprises a vacuum cavity 13 and a coating mechanism. The coating mechanism comprises a driving motor 14, a driving shaft 15 and a coating roller 16. The driving motor 14 is arranged outside the vacuum cavity 13. The driving shaft 15 is sealed through the vacuum cavity 13 and connected with the driving motor 14. The coating roller 16 is arranged in the vacuum cavity 13 and sleeved on the driving shaft 15. The coating roller 16 rotates coaxially with the driving shaft 15.

[0029] When the copper foil and / or aluminum foil of the lithium battery needs to be coated in the vacuum cavity structure 1, the copper foil and / or aluminum foil is wound on the coating roller 16. Then, the vacuum cavity 1 is vacuumized by a vacuumizing device. Then, the driving motor 14 is started to rotate the driving shaft 15, thereby rotating the coating roller 16 and the copper foil and / or aluminum foil on the coating roller 16 to coat the surface of the copper foil and / or aluminum foil.

[0030] The coating mechanism generates heat during long-term rotation and coating. The heat affects the coating quality and efficiency of the copper foil and / or aluminum foil. Therefore, the coating mechanism needs to be cooled during the vacuum coating process. To this end, the vacuum cavity structure 1 further comprises a cooling water pipe 17. The cooling water pipe 17 is sealed through the vacuum cavity 13. The cooling water pipe 17 is arranged on the side of the coating roller 16 and parallel to the coating roller 16. During the vacuum coating process, circulating cooling water is introduced into the cooling water pipe 17 to cool the coating roller 16, thereby avoiding the temperature of the coating roller 16 from being too high to affect the coating quality and efficiency of the copper foil and / or aluminum foil.

[0031] The number of the cooling water pipes 17 is determined according to the coating working condition. A plurality of cooling water pipes 17 can be arranged or only one cooling water pipe 17 can be arranged. In the embodiment, a plurality of cooling water pipes 17 are arranged. The plurality of cooling water pipes 17 are arranged in parallel at intervals and parallel to the coating roller 16. The plurality of cooling water pipes 17 are uniformly distributed on the side of the coating roller 16 to uniformly cool each part of the coating roller 16 during the coating process, thereby avoiding the local temperature of the coating roller 16 from being too high to affect the coating quality of the copper foil and / or aluminum foil.

[0032] The plurality of cooling water pipes 17 pass through the vacuum cavity 13 and are connected with external cooling water. The plurality of cooling water pipes 17 can be individually connected with cooling water. The plurality of cooling water pipes 17 can be connected with cooling water through a total pipe. The specific connection structure is determined according to the actual working condition.

[0033] It is worth noting that the driving shaft 15 and the cooling water pipe 17 pass through the vacuum cavity 13. In order to ensure the sealing performance of the vacuum cavity 13 to form a vacuum cavity, the driving shaft 15 and the vacuum cavity 13 and the cooling water pipe 17 and the vacuum cavity 13 are connected by sealing members.

[0034] On the basis of the above structure, the vacuum cavity structure 1 is provided with a plurality of vacuum cavity structures 1 to facilitate the selection of a proper number of vacuum cavity structures 1 according to production needs.

[0035] The base frame 2 is telescopic along the first direction, and the at least one vacuum cavity structure 1 is arranged on the base frame 2, and the vacuum cavity structure 1 is reciprocally slidable along the first direction relative to the base frame 2, so that the increase or decrease of the number of vacuum cavity structures 1 on the base frame 2 is completed by the sliding of the vacuum cavity structure 1.

[0036] In the embodiment, the first direction is a horizontal direction. Since there are multiple vacuum cavity structures 1 arranged on the base frame 2 at the same time, in order to facilitate coating, the coating mechanism is arranged horizontally and perpendicular to the first direction.

[0037] Therefore, the embodiment adjusts the number of vacuum cavity structures 1 on the base frame 2 to adapt to production needs by arranging the base frame 2 which is telescopic along the first direction, and the vacuum cavity structure 1 which is reciprocally slidable along the first direction relative to the base frame 2, so as to realize the production speed and yield required, improve the coating efficiency, and reduce the coating cost.

[0038] Referring to Figure 2 , the vacuum cavity structure 1 and the base frame 2 are connected through the sliding block 3, the sliding block 3 is fixed at the bottom of the vacuum cavity structure 1, and the sliding block 3 is reciprocally slidable along the first direction relative to the base frame 2. The sliding of the vacuum cavity structure 1 can be driven by an external force to drive the sliding block 3 to slide to realize the reciprocating sliding of the vacuum cavity structure 1 along the first direction relative to the base frame 2.

[0039] The sliding block 3 is provided with a plurality of sliding blocks 3, and the sliding blocks 3 are uniformly distributed at the bottom of the vacuum cavity structure 1 to stabilize the sliding of the vacuum cavity structure 1.

[0040] In addition, the sliding block 3 and the vacuum cavity structure 1 are detachably connected. The detachable connection structure can be a screw, a rivet, a clamping structure, etc., and needs to ensure the stable connection between the sliding block 3 and the vacuum cavity structure 1. Therefore, when multi-cavity coating is needed, the sliding block 3 can be installed at the bottom of the vacuum cavity structure 1. After the sliding block 3 is removed, the vacuum cavity structure 1 can be used in a single-cavity vacuum coating device to increase the application scenarios of the vacuum cavity structure 1.

[0041] For the base frame 2 of the embodiment, the base frame 2 comprises a fixed support 21 and a slide rail 22 which is retractable along a first direction, the fixed support 21 and the slide rail 22 are fixedly connected along the first direction, the length of the fixed support 21 is adapted to the length of one vacuum cavity structure 1, and one vacuum cavity structure 1 is fixedly installed on the fixed support 21. When the production speed and yield requirement is low, the slide rail 22 can be retracted, and only the vacuum cavity structure 1 on the fixed support 21 needs to be reserved for coating. When the production speed and yield requirement is high, the vacuum cavity structure 1 can be arranged on the slide rail 22, and the length of the slide rail 22 is adjusted according to the number of the vacuum cavity structure 1 on the slide rail 22, so that high-efficiency coating is performed through two or more vacuum cavity structures 1.

[0042] The slide rail 22 can comprise a slide rail body and an extension section, the slide rail body is fixedly connected with the fixed support 21, the extension section is arranged at one end of the slide rail body away from the fixed support 21, and the extension section is reciprocally slidable relative to the slide rail body along the first direction, so as to realize the extension or retraction of the slide rail 22.

[0043] On the basis of the above structure, the vacuum cavity structure 1 comprises a first vacuum cavity structure 11 and at least one second vacuum cavity structure 12, the length of the fixed support 21 is adapted to the length of the first vacuum cavity structure 11, the first vacuum cavity structure 11 is fixedly installed on the fixed support 21, and the second vacuum cavity structure 12 is reciprocally slidably arranged on the slide rail 22 along the first direction. The first vacuum cavity structure 11 is fixedly connected with the fixed support 21, when the production speed and yield requirement is low, coating can be performed only through the first vacuum cavity structure 11. When the production speed and yield requirement is high, the second vacuum cavity structure 12 can be arranged on the slide rail 22, and the length of the slide rail 22 is adjusted according to the number of the vacuum cavity structure 1 on the slide rail 22, so that high-efficiency coating is performed simultaneously through the first vacuum cavity structure 11 and the at least one second vacuum cavity structure 12.

[0044] The bottom of the second vacuum cavity structure 12 is detachably installed with a sliding block 3, so that the second vacuum cavity structure 12 realizes reciprocating sliding relative to the slide rail 22 along the first direction through the sliding block 3 to increase or decrease the number of the second vacuum cavity structure 12.

[0045] In the embodiment, the first vacuum cavity structure 11 and the second vacuum cavity structure 12 are of the same structure, and the first vacuum cavity structure 11 and the second vacuum cavity structure 12 are arranged at the same height, so as to facilitate operation and improve the coating efficiency when multi-cavity coating is performed.

[0046] The first vacuum cavity structure 11 and the second vacuum cavity structure 12 and / or the adjacent two second vacuum cavity structures 12 are fixedly connected through the connecting piece. When the production speed and yield requirement is high, the second vacuum cavity structure 12 needs to be added on the slide rail 22 to improve the coating speed. Since the second vacuum cavity structure 12 is arranged on the slide rail 22 through the sliding block 3, in order to avoid the sliding of the second vacuum cavity 12, the first vacuum cavity structure 11 and the second vacuum cavity structure 12 and / or the adjacent two second vacuum cavity structures 12 are fixed through the connecting piece.

[0047] The connecting piece can be a buckle structure, a magnetic attraction structure, etc., as long as it can ensure that the second vacuum cavity structure 12 does not slide relative to the slide rail 22 during the coating process.

[0048] Embodiment 2

[0049] The embodiment discloses a vacuum coating equipment comprising the vacuum cavity assembly of embodiment 1. The vacuum cavity assembly realizes the increase or decrease of the number of the vacuum cavity structures 1 on the base frame 2 through the base frame 2 which can be telescoped in the first direction and the vacuum cavity structure 1 which can reciprocally slide in the first direction relative to the base frame 2, so as to adapt to the required production speed and yield. The application of the vacuum cavity assembly in the vacuum coating equipment of the embodiment makes the vacuum coating equipment adjust the appropriate coating efficiency according to the production demand, which is beneficial to reduce the coating cost.

[0050] Finally, it should be noted that: the vacuum cavity assembly and the vacuum coating equipment disclosed in the embodiment of the utility model are only the preferred embodiments of the utility model, and are only used to illustrate the technical scheme of the utility model, but not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical scheme recorded in the foregoing embodiments can still be modified, or some technical features can be replaced; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the spirit and scope of the technical scheme of the embodiments of the utility model.

Claims

1. A vacuum chamber assembly, characterized by, The vacuum cavity structure comprises a plurality of vacuum cavities and a coating mechanism, the coating mechanism comprises a driving motor, a driving shaft and a coating roller, the driving motor is arranged outside the vacuum cavity, the driving shaft is sealed through the vacuum cavity and connected with the driving motor, the coating roller is arranged in the vacuum cavity and sleeved on the driving shaft, and the coating roller rotates coaxially with the driving shaft. The vacuum cavity structure further comprises a cooling water pipe, the cooling water pipe is sealed through the vacuum cavity, the cooling water pipe is arranged on the side of the coating roller, and the cooling water pipe is arranged in parallel with the coating roller. The vacuum cavity structure and the base frame are connected through a sliding block, the sliding block is fixed at the bottom of the vacuum cavity structure, and the sliding block can reciprocate along the first direction relative to the base frame. The sliding block and the vacuum cavity structure are detachably connected. The base frame comprises a fixed support and a slide rail which can be telescoped along the first direction, the fixed support and the slide rail are fixedly connected along the first direction, the length of the fixed support is adapted to the length of one vacuum cavity structure, and one vacuum cavity structure is fixedly installed on the fixed support.

2. The vacuum chamber assembly of claim 1, wherein: The vacuum cavity structure comprises a first vacuum cavity structure and at least one second vacuum cavity structure, the length of the fixed support is adapted to the length of the first vacuum cavity structure, the first vacuum cavity structure is fixedly installed on the fixed support, and the second vacuum cavity structure is telescopically arranged on the slide rail along the first direction.

3. The vacuum chamber assembly of claim 2, wherein: The first vacuum cavity structure and the second vacuum cavity structure are the same in structure, and the first vacuum cavity structure and the second vacuum cavity structure are arranged at the same height.

4. The vacuum chamber assembly of claim 1, wherein: The first vacuum cavity structure and the second vacuum cavity structure are fixedly connected through a connecting piece.

5. The vacuum chamber assembly of claim 4, wherein: The vacuum cavity assembly comprises the base frame and the vacuum cavity structure.

6. The vacuum chamber assembly of claim 5, wherein: The vacuum cavity assembly comprises the base frame and the vacuum cavity structure.

7. The vacuum chamber assembly of claim 5, wherein: ​ 8. A vacuum coating apparatus, characterized by ​ ​

Images