Integrated silane gas filling equipment

Abstract

The utility model provides integrated silane gas filling equipment, which relates to the technical field of gas filling, and comprises a container, a condenser and a controller, the container is provided with a silane inlet and a silane outlet, the silane inlet and the silane outlet are both fixedly provided with control valves, and the controller is connected with the container. A temperature detection module, a pressure detection module and a liquid level detection module are further arranged on the outer side of the container, an electric heater is further fixed in the container, and the condenser is fixed on the container and communicated with the container. And the controller is electrically connected with the condenser, the control valve, the temperature detection module, the pressure detection module, the liquid level detection module and the electric heater. By the adoption of the technical scheme, the technical problems that an existing silane gas filling device is complex in operation process, low in filling efficiency and the like can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas filling technical field especially is related to a kind of integrated silane gas filling equipment. BACKGROUND

[0002] Silane gas is an important chemical raw material, widely used in semiconductor manufacturing, photovoltaic industry, chemical plating and gas chemical reaction and other fields. However, due to the high reactivity, flammability and volatility of silane gas, especially the high sensitivity to moisture and air, the safety hazards in the filling process become a major problem faced by the industry. The traditional silane gas filling process usually needs to heat the liquid silane into gas, and then fill the gas into high-pressure cylinder through compressor. This process involves multiple complex links, and the control accuracy of the equipment is required.

[0003] The existing filling equipment generally requires high-precision control and complex operation process, which not only leads to high maintenance cost of the equipment, but also due to the high reactivity of silane gas, the equipment is easy to be contaminated or corroded, and frequent maintenance and replacement of parts further increase the operating cost. In addition, the existing filling process usually needs multiple links, which leads to high energy consumption of the equipment and low production efficiency. In order to ensure safety, the filling system is equipped with multiple safety valves and real-time monitoring devices to prevent overpressure or leakage and other safety problems, however, these safety measures further increase the complexity and maintenance burden of the equipment.

[0004] Therefore, it is urgent to develop a safer, more efficient and stable silane gas filling technology, which can simplify the filling process, reduce energy consumption, improve filling efficiency, ensure the purity of gas and reduce equipment maintenance and operation cost. This not only helps to reduce production cost, but also promotes the upgrading and wide application of related industrial technology, meets the growing demand of the industry.

[0005] Therefore, the utility model is proposed. SUMMARY

[0006] The utility model aims at providing a kind of integrated silane gas filling equipment, to solve the above technical problems.

[0007] In order to achieve the above purpose of the utility model, the following technical scheme is adopted:

[0008] The utility model provides a kind of integrated silane gas filling equipment, comprising: container, condenser and controller, the container is equipped with silane inlet and silane outlet, control valve is fixed in the silane inlet and silane outlet, temperature detection module, pressure detection module and liquid level detection module are further equipped on the container outside, and electric heater is further fixed in container, the condenser is fixed on the container, and with the container communication, the controller is electrically connected with condenser, control valve, temperature detection module, pressure detection module, liquid level detection module and electric heater.

[0009] Further, the controller presets the temperature threshold interval in the container as T1~T2, and the pressure threshold interval as P1~P2, wherein T1<T2, P1<P2, when the silane is stored or filled, the temperature in the container is between T1~T2, and the pressure is between P1~P2.

[0010] Further, the liquid level detection module is used to detect the liquid level of liquid silane in the container. When the liquid level detection module detects that the height of liquid silane in the container reaches the height of the container, the controller controls the electric heater to heat. When the liquid level detection module detects that the height of liquid silane in the container is at the bottom of the container, the controller controls the electric heater to turn off.

[0011] Further, the temperature detection module is used to detect the temperature in the container, and the pressure detection module is used to detect the pressure in the container. When the temperature detection module detects that the temperature in the container exceeds T2 or the pressure detection module detects that the pressure exceeds P2, the controller controls the condenser to open or controls the electric heater to reduce the heating power or simultaneously opens the condenser and reduces the power of the electric heater.

[0012] Further, the container is hollow inside, the condenser includes a shell passage for circulating coolant and a tube passage for circulating silane, and the tube passage communicates with the inside of the container.

[0013] Further, the condenser is fixed on the top of the container and communicates with the container, the silane inlet is located on the left side above the container, and the silane outlet is located on the right side above the container.

[0014] Further, the detection module includes a thermometer, a pressure gauge and a liquid level gauge, the thermometer, the pressure gauge and the liquid level gauge are electrically connected, the control valve is an electric valve, the electric valve at the silane inlet is a first electric valve, and the electric valve at the silane outlet is a second electric valve.

[0015] Further, the thermometer is provided with two, including a nearby thermometer and a remote thermometer, and the pressure gauge is also provided with two, including a nearby pressure gauge and a remote pressure gauge.

[0016] Further, the two ends of the liquid level meter are also fixed with manual valves, and the container is fixed and communicated with the liquid level meter through the manual valves.

[0017] Further, the electric heater is a tubular electric heater, which is provided with a plurality of.

[0018] The basic principle and beneficial effects of the technical solution are:

[0019] The technical solution integrates the functions of storage, condensation, vaporization and filling of silane gas in a single container, and realizes efficient and safe filling process through structure optimization and intelligent control. The integrated silane gas filling equipment mainly consists of the following parts: a container as the main component for storing liquid silane, equipped with a silane inlet and outlet for silane injection and output respectively; a condenser installed at the top of the container, responsible for condensing gaseous silane into liquid for storage; a controller as the control center of the whole system, coordinating the working state of each component; a control valve installed at the silane inlet and outlet for controlling the flow of silane; a detection module including a thermometer, a pressure gauge and a liquid level meter for real-time monitoring of environmental parameters in the container; and an electric heater for heating liquid silane into gas during filling.

[0020] The specific working process is as follows: in the storage stage, the controller opens the valve of the silane inlet and starts the condenser to condense gaseous silane into liquid and store it in the container. In the filling stage, the controller opens the valve of the silane outlet, closes the inlet valve and the condenser, and starts the electric heater to heat the liquid silane into gas, which is then filled into the target container through the silane outlet. In addition, the detection module also monitors the temperature, pressure and liquid level in the container in real time during the storage or filling stage, and feeds back the data to the controller. The controller adjusts the working state of the condenser and electric heater according to the preset temperature (T1-T2), pressure (P1-P2) and liquid level, to ensure that the operation is within the safe range. When an abnormality is detected (such as temperature exceeding T2 or pressure exceeding P2), the controller will take appropriate measures (such as starting the condenser or reducing the heating power) to prevent dangerous situations.

[0021] Compared with the prior art, the technical solution integrates the storage tank, condenser and vaporizer in a single container, simplifies the system architecture, reduces the equipment cost and increases the utilization rate of the equipment floor space. At the same time, based on the dynamic adjustment technology of pressure / temperature feedback of central control, the filling process is fully automated, reducing the manual intervention and operation complexity.

[0022] In summary, the present solution solves the technical problems of equipment dispersion, high energy consumption and complex operation in the field of silane filling through physical integration and intelligent control, and has significant industrial application value. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0024] Figure 1 The structure diagram of the integrated silane gas filling equipment of the present application. DETAILED DESCRIPTION

[0025] The embodiments of the present application will be described in detail below in combination with the embodiments and examples, but those skilled in the art will understand that the following embodiments and examples are only used to illustrate the present application, and should not be regarded as limiting the scope of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0026] The marks in the drawings of the specification include: container 1, condenser 2, electric heater 3, first electric valve 41, second electric valve 42, liquid level meter 5, manual valve 6, near pressure gauge 71, far pressure gauge 72, near thermometer 81, far thermometer 82.

[0027] The present application provides an integrated silane gas filling equipment, as shown in the accompanying Figure 1 The present application provides an integrated silane gas filling equipment, as shown in the accompanying

[0028] The silane inlet is arranged on the left side of the upper head of the container 1, and the silane outlet is arranged on the right side of the upper head of the container 1, which are respectively controlled by the first electric valve 41 and the second electric valve 42. The first electric valve 41 and the second electric valve 42 can select the existing electric valve to control the flow of silane. In the side wall of the container 1, the temperature detection module, the pressure detection module and the liquid level detection module are also fixed in the embodiment, and the electric heater 3 for heating silane is arranged in the container 1. The temperature detection module is used to detect the temperature in the container 1 in real time, the pressure detection module is used to detect the pressure in the container 1, and the liquid level detection module is used to detect the height of the liquid silane in the container 1.

[0029] The temperature detection module selects a thermometer to detect the temperature in the embodiment, and other instruments such as a thermal resistance and a temperature sensor can also be selected to detect the temperature. The pressure detection module selects a pressure gauge to detect the pressure in the container 1 in the embodiment, and other devices such as a pressure sensor can also be selected to detect the pressure, which will not be described here. The thermometer and the pressure gauge in the embodiment are each provided with two, including the near thermometer 81 and the far thermometer 82, and the near pressure gauge 71 and the far pressure gauge 72. The near thermometer 81 and the near pressure gauge 71 are used for personnel who run the equipment on site to directly observe the temperature and pressure in the container 1, and the far thermometer 82 and the far pressure gauge 72 are used to remotely transmit the detected temperature to the back-end console, so that the back-end personnel can also remotely monitor the change of the temperature and pressure in the container 1, and timely adjust the equipment according to the on-site situation to avoid unexpected risks.

[0030] The liquid level detection module in the embodiment selects the liquid level gauge 5 to be arranged, and the manual valve 6 is further fixed at both ends of the liquid level gauge 5. The liquid level gauge 5 is fixed and communicated with the container 1 through the manual valve 6. Under normal circumstances, the manual valve 6 is always in an open state. When the liquid in the container 1 is full, the liquid in the liquid level gauge 5 is also full at this time, indicating that the height of the liquid silane in the container 1 reaches the height of the container 1. At this time, the PLC controller controls the electric heater 3 to heat and evaporate the liquid. When the height of the liquid silane in the container 1 is at the bottom of the container 1, the PLC controller controls the electric heater 3 to be closed. When the liquid level gauge 5 needs to be disassembled, the manual valve 6 is only needed to be closed, so that the liquid level gauge 5 is separated from the container 1, and the liquid level gauge 5 is convenient to disassemble, replace or maintain.

[0031] The electric heater 3 in the embodiment is fixed inside the container 1, and is used for heating silane and has a maximum power of 30KW. The electric heater 3 is a tubular electric heater 3 provided with four tubes, so that the gasification of liquid silane can be more efficient, and the filling speed of gaseous silane can be improved. Of course, other suitable electric heaters 3, such as heating rods or heating plates, can also be selected and arranged in the container 1 to heat and gasify the liquid silane. At the same time, the number of heaters can also be appropriately increased or decreased according to different situations to better meet the use requirements.

[0032] The controller in the embodiment is used for linkage control of the entire silane gas filling equipment. The controller can be a PLC controller, which is electrically connected with the condenser 2, the first electric valve 41, the second electric valve 42, the thermometer, the pressure gauge, the liquid level meter 5 and the electric heater 3. The PLC controller presets a temperature threshold interval T1-T2 and a pressure threshold interval P1-P2 in the container 1, where T1

[0033] In the embodiment, when the silane is stored, the second electric valve 42 and the electric heater are in a closed state, the PLC controller opens the first electric valve 41 at the silane inlet, and starts the condenser 2, so that the gaseous silane entering the container 1 is gradually condensed into liquid under the action of the condenser 2, and the storage is completed. During the storage stage, the temperature in the container 1 will not be lower than -70℃, and will always be between -70℃ and 70℃. At the same time, the pressure will not be lower than 0.7Mpa, and will always be between 0.7Mpa and 13.4Mpa. At the same time, the liquid level meter 5 also detects the liquid level height of the liquid silane in the container 1. When the liquid level meter 5 detects that the height of the liquid silane reaches the upper limit of the storage of the container 1, the PLC controller closes the first electric valve 41 at the silane inlet, stops the silane input to the container, and thus completes the storage of the silane.

[0034] When the filling of silane is carried out: the PLC controller opens the second electric valve 42 of the silane outlet, and closes the first electric valve 41 and the condenser 2, and starts the electric heater 3, so as to heat the liquid silane in the container 1 to the gaseous state, and then fill it into the target container through the silane outlet, and finally complete the filling of silane. During the filling stage, the temperature in the container 1 is generally not higher than 70℃, and is between-70℃ and 70℃, and the pressure is also not higher than 13.4Mpa, and is between 0.7Mpa and 13.4Mpa. In special cases, if the temperature detector detects that the temperature in the container 1 exceeds 70℃ or the pressure gauge detects that the pressure exceeds 13.4Mpa, the PLC controller will control the condenser 2 to open, or control the electric heater 3 to reduce the heating power, or open the condenser 2 and reduce the power of the electric heater 3 at the same time, so as to cool the temperature in the container 1. In addition, during this filling stage, the liquid level meter 5 also detects the liquid level of the liquid silane in the container 1, and when the height of the liquid silane in the container 1 is at the bottom of the container 1, the PLC controller controls the electric heater 3 to be closed, and the liquid silane is not gasified, so as to complete the filling of silane.

[0035] In summary, the technical scheme solves the technical problems of equipment dispersion, high energy consumption and complex operation in the field of silane filling through physical integration and intelligent control, and has significant industrial application value.

[0036] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical scheme of the present application, and not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the present application.

Claims

1. An integrated silane gas filling device, characterized in that, The application relates to a silane storage and filling device. The device comprises a container, a condenser and a controller, the container is provided with a silane inlet and a silane outlet, control valves are fixed at the silane inlet and the silane outlet, a temperature detection module, a pressure detection module and a liquid level detection module are arranged on the outer side of the container, an electric heater is fixed in the container, the condenser is fixed on the container and communicates with the container, and the controller is electrically connected with the condenser, the control valves, the temperature detection module, the pressure detection module, the liquid level detection module and the electric heater.

2. The integrated silane gas charging apparatus according to claim 1, wherein The temperature threshold interval of the container is T1-T2, and the pressure threshold interval is P1-P2, wherein T1 3. The integrated silane gas charging apparatus according to claim 2, wherein The liquid level detection module is used for detecting the liquid level of the liquid silane in the container, when the liquid level detection module detects that the height of the liquid silane in the container reaches the height of the container, the controller controls the electric heater to heat, and when the liquid level detection module detects that the height of the liquid silane in the container is at the bottom of the container, the controller controls the electric heater to be closed.

4. The integrated silane gas charging apparatus according to claim 2 or 3, characterized by, The temperature detection module is used for detecting the temperature in the container, and the pressure detection module is used for detecting the pressure in the container, when the temperature detection module detects that the temperature in the container exceeds T2 or the pressure detection module detects that the pressure exceeds P2, the controller controls the condenser to be opened or controls the electric heater to reduce the heating power or simultaneously opens the condenser and reduces the power of the electric heater.

5. The integrated silane gas charging apparatus of claim 1, wherein The container is internally hollow, the condenser comprises a shell channel for flowing through a coolant and a tube channel for flowing through silane, and the tube channel communicates with the internal container.

6. The integrated silane gas charging apparatus of claim 1, wherein The condenser is fixed on the top of the container and communicates with the container, the silane inlet is located on the left side above the container, and the silane outlet is located on the right side above the container.

7. The integrated silane gas charging apparatus of claim 1, wherein The detection module comprises a thermometer, a pressure gauge and a liquid level meter, the thermometer, the pressure gauge and the liquid level meter are electrically connected, the control valve is an electric valve, the electric valve at the silane inlet is a first electric valve, and the electric valve at the silane outlet is a second electric valve.

8. The integrated silane gas charging apparatus of claim 7, wherein The thermometer is provided with two thermometers, a near thermometer and a far thermometer, and the pressure gauge is also provided with two pressure gauges, a near pressure gauge and a far pressure gauge.

9. The integrated silane gas charging apparatus according to claim 7 or 8, characterized by, Manual valves are further fixed at two ends of the liquid level meter, and the container is fixed and communicated with the liquid level meter through the manual valves.

10. The integrated silane gas charging apparatus of claim 1, wherein The electric heater is a tubular electric heater, and the tubular electric heater is provided with a plurality of

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