Diamond powder deposition device

Abstract

The utility model discloses a diamond powder deposition device, which comprises a ring seat, a rotating ring, a vibration container, a vibrator, a driving device and a conductive slip ring, the rotating ring is rotatably mounted on the ring seat, the vibration container is mounted at the top of the rotating ring, the vibrator is mounted at the bottom of the vibration container, and the conductive slip ring is mounted in the middle of the ring seat. The wire on one side of the conductive slip ring is electrically connected with the vibrator, the wire on the other side of the conductive slip ring penetrates out of the ring seat, and the driving device is used for driving the rotating ring to rotate. The influence caused by the installation position of the vibrator and the uneven stress of the vibration container is counteracted through rotation of the vibration container, so that the diamond powder substrate can be dispersed more evenly during vibration, and the deposition effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material preparation technology, and in particular to a diamond powder deposition apparatus. Background Technology

[0002] Traditional boron-doped diamond electrodes are typically grown and deposited on planar substrates such as silicon, niobium, and titanium, resulting in relatively fixed shapes, generally sheet-like. Therefore, they are difficult to meet the shape requirements of boron-doped diamond electrodes under complex conditions. To obtain boron-doped diamond electrodes with complex shapes, our company plans to use boron-doped diamond powder to fabricate electrodes with complex shapes. To this end, our company has conducted relevant research and development.

[0003] The utility model patent application with application number 2025202304202 is for a boron-doped diamond powder deposition device applied for by our company. This device uses vibration to deposit diamond powder. In practical applications, due to the influence of the installation position of the vibrator and the uneven stress of the vibration container, the vibration intensity at the bottom of the vibration container varies, resulting in uneven distribution of diamond powder substrate during vibration, which affects the deposition effect.

[0004] To address the problem of uneven distribution of diamond powder substrates during vibration, this application proposes a diamond powder deposition apparatus. Utility Model Content

[0005] The purpose of this invention is to provide a diamond powder deposition apparatus. A rotating ring is mounted on a ring seat and can rotate by a drive device. A vibrating container is mounted on the rotating ring and can also rotate. The vibrating container is vibrated by a vibrator mounted at the bottom. When preparing boron-doped diamond powder, the diamond powder substrate inside the vibrating container will vibrate continuously, which solves the problem of uneven distribution of diamond powder substrate during vibration and improves the diamond powder deposition effect.

[0006] To achieve the above objectives, this utility model provides a diamond powder deposition apparatus, including a ring seat, a rotating ring, a vibrating container, a vibrator, a driving device, and a conductive slip ring. The rotating ring is rotatably mounted on the ring seat, the vibrating container is mounted on the top of the rotating ring, the vibrating device is mounted on the bottom of the vibrating container, and a conductive slip ring is mounted in the middle of the ring seat. A wire on one side of the conductive slip ring is electrically connected to the vibrator, and a wire on the other side passes through the ring seat. The driving device is used to drive the rotating ring to rotate.

[0007] The vibrating container includes an annular sidewall, an upper flange, and a bottom wall. The upper end of the annular sidewall is provided with an outwardly extending upper flange, and the lower end of the annular sidewall is provided with a bottom wall. The upper flange is mounted on the rotating ring by an elastic element.

[0008] The vibrating container includes an annular sidewall, an upper flange, and a bottom wall. The upper end of the annular sidewall is provided with an outwardly extending upper flange, and the lower end of the annular sidewall is provided with a bottom wall. The upper flange is mounted on a rotating ring, and the annular sidewall is a corrugated tubular structure.

[0009] The lower end of the annular sidewall is provided with an inwardly downward flange, and the bottom wall is fixedly installed and supported on the downward flange.

[0010] The upper flange is mounted on the rotating ring via an elastic element.

[0011] The vibrating container is made of molybdenum or tungsten or their alloys.

[0012] The bottom wall material is molybdenum or tungsten or their alloys.

[0013] A support rod is installed on the inner wall of the ring seat, and a central column is installed on the lower side of the support rod. The central column is inserted into the central hole of the conductive slip ring, and the central hole of the conductive slip ring is fixed to the central column by screws.

[0014] The driving device includes an internal gear ring and a drive motor. The internal gear ring is installed inside the rotating ring, and the drive motor is installed inside the ring seat through a bracket. The output shaft of the drive motor is equipped with a gear, which meshes with the internal gear ring for transmission.

[0015] The driving device includes an external gear ring and a drive motor. The external gear ring is installed on the outer wall of the rotating ring, and the drive motor is installed on the outer wall of the ring seat. The output shaft of the drive motor is equipped with a gear, which meshes with the external gear ring for transmission.

[0016] Compared with the prior art, this utility model has the following technical effects:

[0017] This invention features a rotating ring mounted on a ring seat, which is driven to rotate by a drive device. A vibrating container is mounted on the rotating ring, allowing it to rotate as well. The vibrating container is vibrated by a vibrator mounted at its bottom. During the preparation of boron-doped diamond powder, the diamond powder substrate inside the vibrating container continuously vibrates. The rotation of the vibrating container counteracts the effects of the vibrator's mounting position and uneven stress within the container, resulting in more uniform dispersion of the diamond powder substrate during vibration and improving the diamond powder deposition effect. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0020] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of AA.

[0021] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure of BB.

[0022] Figure label:

[0023] Ring seat 10, bearing 11, support rod 12, central column 13, bracket 14;

[0024] Rotating ring 20, elastic element 21;

[0025] Vibrating container 30, annular sidewall 31, upper flange 32, lower flange 33, bottom wall 34;

[0026] Vibrator 40;

[0027] Internal gear ring 50;

[0028] Drive motor 60, gear 61, conductive slip ring 70. Detailed Implementation

[0029] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0030] Example 1:

[0031] Please see Figure 1-3 A diamond powder deposition apparatus includes a ring seat 10, a rotating ring 20, a vibrating container 30, a vibrator 40, a driving device, and a conductive slip ring 70. The rotating ring 20 is rotatably mounted on the ring seat 10. The vibrating container 30 is mounted on the top of the rotating ring 20, and the vibrator 40 is mounted on the bottom of the vibrating container 30. The conductive slip ring 70 is mounted in the middle of the ring seat 10. A wire on one side of the conductive slip ring 70 is electrically connected to the vibrator 40, and a wire on the other side passes through the ring seat 10. The driving device is used to drive the rotating ring 20 to rotate. A rotating ring 20 is mounted on the ring seat 10 and rotates under the drive of a drive device. The vibration container 30 is mounted on the rotating ring 20 and can also rotate. The vibration container 30 is vibrated by a vibrator 40 mounted at the bottom. When preparing boron-doped diamond powder, the diamond powder substrate inside the vibration container 30 will vibrate continuously. The rotation of the vibration container 30 counteracts the effects of the installation position of the vibrator 40 and the uneven stress of the vibration container 30, so that the diamond powder substrate can be more evenly dispersed during vibration, thus improving the deposition effect of diamond powder.

[0032] In this embodiment, the vibrator 40 is a vibration motor. The conductive slip ring 70 is the MT50119 series through-hole conductive slip ring from Shenzhen Mofulong Electronics Co., Ltd.

[0033] In this embodiment, see Figure 2 , 3 The ring seat 10 is rotatably connected to the rotating ring 20 via the bearing 11.

[0034] In this embodiment, the vibrating container 30 includes an annular sidewall 31, an upper flange 32, and a bottom wall 34. The upper end of the annular sidewall 31 is provided with an outwardly extending upper flange 32, and the lower end of the annular sidewall 31 is provided with a bottom wall 34. The upper flange 32 is mounted on the rotating ring 20 by an elastic member 21, resulting in a simple structure. The elastic member 21 is used to filter the vibration of the vibrating container 30 and prevent the vibration of the vibrating container 30 from being transmitted to the rotating ring 20.

[0035] The elastic element 21 can be made of multiple springs, with the upper and lower ends of the springs fixedly connected to the rotating ring 20 and the upper flange 32, respectively. The elastic element 21 can also be made of rubber rings, with the upper and lower sides of the rubber rings bonded and fixedly connected to the rotating ring 20 and the upper flange 32, respectively.

[0036] In this embodiment, the vibrating container 30 is made of molybdenum or tungsten or their alloys.

[0037] Example 2:

[0038] The difference from Example 1 is that, see [link to example]. Figure 2 , 3 The vibrating container 30 includes an annular sidewall 31, an upper flange 32, and a bottom wall 34. The upper end of the annular sidewall 31 is provided with an outwardly extending upper flange 32, and the lower end of the annular sidewall 31 is provided with a bottom wall 34. The upper flange 32 is mounted on the rotating ring 20. The annular sidewall 31 has a corrugated tubular structure. Because the annular sidewall 31 has a corrugated tubular structure, it has better axial extensibility. When the vibrator 40 vibrates, it can filter out most of the left-right vibration of the bottom wall 34, thereby allowing the bottom wall 34 to vibrate more fully up and down. This is because left-right vibration will cause the powder to disperse in all directions, while up and down vibration keeps the powder within the vibrating container 30.

[0039] Furthermore, the lower end of the annular sidewall 31 is provided with an inwardly projecting lower flange 33, and the bottom wall 34 is fixedly supported on the lower flange 33. This structure allows the annular sidewall 31 to be made of a more elastic material. In this design, the bottom wall 34 of the vibration container 30 is made of molybdenum, tungsten, or their alloys.

[0040] Furthermore, the upper flange 32 is mounted on the rotating ring 20 via the elastic element 21.

[0041] Example 3:

[0042] Based on Example 1 or 2, see Figure 2 , 3 A support rod 12 is installed on the inner wall of the ring seat 10, and a central column 13 is installed on the lower side of the support rod 12. The central column 13 passes into the central hole of the conductive slip ring 70, and the central hole of the conductive slip ring 70 is fixed to the central column 13 by screws. With the above structure, when the rotating ring 20 and the vibrating container 30 rotate, the support rod 12 rotates with the rotating ring 20. Since the central column 13 is fixed to the central hole of the conductive slip ring 70, the central rotating part of the conductive slip ring 70 rotates with the central column 13. The wires on the central rotating part of the conductive slip ring 70 will also rotate synchronously, instead of being pulled to rotate, thus improving the service life of the wires.

[0043] When using the MT50119 series through-hole conductive slip ring, a mounting base is provided on the outer wall of the conductive slip ring. The mounting base is fixed to the bottom of the ring seat 10 by screws. A screw is screwed onto the central rotating part of the conductive slip ring 70. After the central column 13 passes through the central rotating part of the conductive slip ring 70, this screw is tightened.

[0044] Example 4:

[0045] Based on Example 1, 2, or 3, see [link to example]. Figure 2 , 3 The drive device includes an internal gear ring 50 and a drive motor 60. The internal gear ring 50 is installed inside the rotating ring 20, and the drive motor 60 is installed inside the ring seat 10 through the bracket 14. The output shaft of the drive motor 60 is equipped with a gear 61, which meshes with the internal gear ring 50 for transmission.

[0046] When the drive motor 60 rotates, it drives the gear 61 to rotate. The rotation of the gear 61 drives the internal gear ring 50 to rotate, which in turn drives the rotating ring 20 to rotate, thereby driving the vibrating container 30 to rotate.

[0047] In another embodiment, the drive unit includes an external gear ring and a drive motor 60. The external gear ring is mounted on the outer wall of the rotating ring 20, and the drive motor 60 is mounted on the outer wall of the ring seat 10. A gear 61 is mounted on the output shaft of the drive motor 60, and the gear 61 meshes with the external gear ring for transmission. Specifically, a mounting plate is laterally fixed to the outer wall of the ring seat 10. The drive motor 60 is mounted on the lower side of the mounting plate, and the output shaft of the drive motor 60 passes through the mounting plate. The gear 61 is mounted on the output shaft of the drive motor 60, and the gear 61 meshes with the external gear ring for transmission.

[0048] In this embodiment, the drive motor 60 is a vacuum servo motor or a vacuum stepper motor.

[0049] The working principle or operation process of this utility model is as follows:

[0050] When depositing boron-doped diamond powder, the ring seat 10 is bolted to the worktable of the deposition equipment. The wires pass through the holes on the worktable and extend into the space below the worktable, which facilitates connection to the power supply or controller. The holes on the worktable are sealed with sealant.

[0051] In use, start the drive motor 60, which drives the gear 61 to rotate. The rotation of the gear 61 drives the internal gear ring 50 to rotate, which in turn drives the rotating ring 20 to rotate, thereby driving the vibrating container 30 to rotate. Start the vibrator 40, and the bottom wall of the vibrating container 30 will vibrate.

Claims

1. A diamond powder deposition apparatus, characterized by: The utility model provides a kind of rotary vibration device, including ring seat (10), rotating ring (20), vibrating container (30), vibrator (40), driving device and conductive slip ring (70), rotating ring (20) is installed on the ring seat (10) rotation, vibrating container (30) is installed on the top of rotating ring (20), vibrating container (30) is installed on the bottom of vibrator (40), conductive slip ring (70) is installed in the middle of ring seat (10), the wire of one side of conductive slip ring (70) is electrically connected with vibrator (40), the wire of other side is from ring seat (10) and is exported, and the driving device is used to drive rotating ring (20) rotation.

2. A diamond powder deposition apparatus as claimed in claim 1, wherein: The vibrating container (30) includes an annular side wall (31), an upper flange (32) and a bottom wall (34), the upper end of the annular side wall (31) is provided with the outwardly extending upper flange (32), and the lower end of the annular side wall (31) is provided with the bottom wall (34), wherein the upper flange (32) is installed on the rotating ring (20) by the elastic member (21).

3. A diamond powder deposition apparatus as claimed in claim 1, wherein: The vibrating container (30) includes an annular side wall (31), an upper flange (32) and a bottom wall (34), the upper end of the annular side wall (31) is provided with the outwardly extending upper flance (32), and the lower end of the annular side wall (31) is provided with the bottom wall (34), wherein the upper flange (32) is installed on the rotating ring (20), and the annular side wall (31) has a bellows structure.

4. A diamond powder deposition apparatus as claimed in claim 2 or 3, wherein: The lower end of the annular side wall (31) is provided with an inwardly extending lower flange (33), and the bottom wall (34) is fixedly installed on the lower flange (33).

5. A diamond powder deposition apparatus as claimed in claim 3, wherein: The upper flange (32) is installed on the rotating ring (20) by the elastic member (21).

6. A diamond powder deposition apparatus as claimed in claim 2 or 3, wherein: The vibrating container (30) is made of molybdenum, tungsten or an alloy thereof.

7. A diamond powder deposition apparatus as claimed in claim 4, wherein: The bottom wall (34) is made of molybdenum, tungsten or an alloy thereof.

8. A diamond powder deposition apparatus as claimed in claim 1, wherein: The inner wall of the ring seat (10) is provided with a support rod (12), the lower side of the support rod (12) is provided with a center column (13), the center column (13) penetrates into the center hole of the conductive slip ring (70), and the center hole of the conductive slip ring (70) and the center column (13) are fixed by screws.

9. A diamond powder deposition apparatus as claimed in claim 1, wherein: The driving device includes an inner gear ring (50) and a driving motor (60), the inner gear ring (50) is installed in the rotating ring (20), the driving motor (60) is installed in the ring seat (10) by a support (14), the output shaft of the driving motor (60) is provided with a gear (61), and the gear (61) is in meshing transmission with the inner gear ring (50).

10. A diamond powder deposition apparatus as claimed in claim 1, wherein: The driving device includes an outer gear ring and a driving motor (60), the outer gear ring is installed on the outer wall of the rotating ring (20), the driving motor (60) is installed on the outer wall of the ring seat (10), the output shaft of the driving motor (60) is provided with a gear (61), and the gear (61) is in meshing transmission with the outer gear ring.

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