Novel furnace tube cleaning machine

Abstract

The utility model discloses a novel furnace tube cleaning machine which comprises a cleaning pool and an air-drying mechanism, the air-drying mechanism used for air-drying a furnace tube is arranged above the cleaning pool, a lifting mechanism used for driving the furnace tube to ascend and descend is installed on the side face of the air-drying mechanism, the lifting mechanism is installed at the upper end of the cleaning pool, and side plates are symmetrically installed at the lower end of the air-drying mechanism. A pressing rotating mechanism is arranged between the two side plates, rotating shafts are rotationally connected into the side plates, the rotating shafts are fixedly connected with the pressing rotating mechanism used for fixing and rotating the furnace tube, and a third motor is installed at the left end of the left rotating shaft. The device can fix the positions of a plurality of furnace tubes, can clean and air-dry the plurality of furnace tubes at the same time, and effectively improves the working efficiency.

Description

Technical Field

[0001] This utility model relates to the field of furnace tube cleaning, specifically to a novel furnace tube cleaning machine. Background Technology

[0002] With the development of the semiconductor industry, the demand for processing capacity of round semiconductor silicon wafers is increasing, requiring highly automated and efficient equipment to automatically clean furnace tubes and replace tedious manual operations. Currently, furnace tube cleaning equipment requires manual rotation of the furnace tubes, and after cleaning, the cleaned furnace tubes are manually moved to a fixed location for natural drying.

[0003] Chinese patent discloses an automatic cleaning machine for quartz furnace tubes (authorization announcement number CN 220554831 U). This patented technology uses a roller gripper with a rubber coating on the rollers to solve the problem of damage to the furnace tubes caused by manual rotation and handling. Furthermore, the entire cleaning process is mechanical, addressing the safety hazard posed by sharp burrs on the edges of the quartz furnace tubes. However, it can only clean and dry one furnace tube at a time, significantly impacting efficiency when handling large batches of furnace tubes. Therefore, those skilled in the art have proposed a novel furnace tube cleaning machine to address the problems mentioned in the background section. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a novel furnace tube cleaning machine, including a cleaning tank and a drying mechanism. The drying mechanism is set above the cleaning tank for drying the furnace tubes. A lifting mechanism for driving the furnace tubes to rise and fall is installed on the side of the drying mechanism, and the lifting mechanism is installed at the upper end of the cleaning tank. Side plates are symmetrically installed at the lower end of the drying mechanism. A pressing and rotating mechanism is set between the two side plates. A rotating shaft is rotatably connected inside the side plates, and the rotating shaft is fixedly connected to the pressing and rotating mechanism for fixing and rotating the furnace tubes. A motor is installed on the left end of the left rotating shaft.

[0005] Preferably, the drying mechanism includes a top plate and a fan. Several circular holes are opened inside the top plate, and the fan is installed inside the circular holes. The fan is fixedly connected to the inner wall of the circular holes through bearings, and a bevel gear is installed at the upper end of the fan.

[0006] Preferably, a rotating rod is provided at the upper end of the top plate, a motor is installed at the left end of the rotating rod, several bevel gears are installed on the outer surface of the rotating rod, and the bevel gears mesh with the bevel gears. A heating tube is installed on the inner wall of the circular hole, and the heating tube is located above the fan.

[0007] Preferably, the lifting mechanism includes two hollow rods and a threaded rod. The two hollow rods are fixed to the upper end of the cleaning tank. Connecting blocks are sleeved on the outer surfaces of the two hollow rods. The threaded rod is rotatably connected inside one hollow rod, and a fixed rod is installed inside the other hollow rod. A threaded sleeve is sleeved on the outer surface of the threaded rod and is fixedly connected to the connecting block. A motor is installed at the upper end of the threaded rod. A slider is sleeved on the outer surface of the fixed rod and is fixedly connected to the connecting block.

[0008] Preferably, the pressing and rotating mechanism includes two uprights and a threaded rod II. The uprights are fixedly connected to a rotating shaft. A movable groove is opened at the inner end of the upright. The threaded rod II is installed inside the movable groove. The outer surface of the threaded rod II is threaded with a threaded sleeve II. A bevel gear III is installed at the upper end of the threaded rod II. A rotating rod II is installed at the upper end of the two uprights. A bevel gear IV is symmetrically installed on the outer surface of the rotating rod II, and the bevel gear IV and bevel gear III mesh. A motor IV is installed at the left end of the rotating rod II.

[0009] Preferably, a base plate is installed between the two uprights, and several support rollers are symmetrically installed on the upper end of the base plate.

[0010] Preferably: a lifting plate is installed between the two threaded sleeves 2, several rotating rollers are symmetrically installed at the lower end of the lifting plate, bevel gear 5 is installed at the rear end of the rotating rollers, a transmission rod is set on the rear side of the lifting plate, the transmission rod is installed at the rear end of the lifting plate, motor 5 is installed at the right end of the transmission rod, several bevel gears 6 are installed on the outer surface of the transmission rod, and bevel gears 6 and bevel gears 5 mesh, and anti-slip textures are provided on the outer surfaces of the support roller and the rotating roller.

[0011] The technical effects and advantages of this utility model are as follows:

[0012] This invention can fix the position of multiple furnace tubes and can clean and dry multiple furnace tubes at the same time, effectively improving work efficiency. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this application;

[0014] Figure 2 This is a structural schematic diagram of the lifting mechanism of this application;

[0015] Figure 3 This is a schematic diagram of the air-drying mechanism of this application;

[0016] Figure 4 This is a schematic diagram of the pressing and rotating mechanism of this application;

[0017] In the picture:

[0018] 1. Washing tank; 2. Drying mechanism; 3. Top plate; 4. Fan; 5. Bevel gear one; 6. Rotating rod one; 7. Bevel gear two; 8. Motor one; 9. Heating element;

[0019] 10. Lifting mechanism; 11. Hollow rod; 12. Threaded rod one; 13. Motor two; 14. Threaded sleeve one; 15. Connecting block; 16. Fixed rod; 17. Slider; 18. Pressing and rotating mechanism; 19. Vertical pole;

[0020] 20. Moving groove; 21. Threaded rod II; 22. Threaded sleeve II; 23. Bevel gear III; 24. Rotating rod II; 25. Bevel gear IV; 26. Motor IV; 27. Base plate; 28. Support roller; 29. ​​Lifting plate;

[0021] 30. Rotating roller; 31. Bevel gear five; 32. Transmission rod; 33. Motor five; 34. Bevel gear six; 35. Shaft; 36. Motor three; 37. Side plate. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0023] Please see Figures 1-4This embodiment provides a novel furnace tube cleaning machine, including a cleaning tank 1 and a drying mechanism 2. The drying mechanism 2 is installed above the cleaning tank 1. The drying mechanism 2 includes a top plate 3 and a fan 4. Several circular holes are opened inside the top plate 3, and the fan 4 is installed inside the circular holes. The fan 4 is fixedly connected to the inner wall of the circular holes by bearings. A bevel gear 5 is installed on the upper end of the fan 4. A rotating rod 6 is installed on the upper end of the top plate 3. A motor 8 is installed on the left end of the rotating rod 6. Several bevel gears 7 are installed on the outer surface of the rotating rod 6, and the bevel gears 7 mesh with the bevel gears 5. A heating tube 9 is installed on the inner wall of the circular holes, and the heating tube 9 is located above the fan 4. A lifting mechanism 1 is installed on the side of the drying mechanism 2. 0, and the lifting mechanism 10 is installed on the upper end of the cleaning tank 1. The lifting mechanism 10 includes two hollow rods 11 and a threaded rod 12. The two hollow rods 11 are fixed to the upper end of the cleaning tank 1. Connecting blocks 15 are sleeved on the outer surface of the two hollow rods 11. The threaded rod 12 is rotatably connected inside one hollow rod 11, and a fixing rod 16 is installed inside the other hollow rod 11. A threaded sleeve 14 is sleeved on the outer surface of the threaded rod 12, and the threaded sleeve 14 is fixedly connected to the connecting block 15. A motor 13 is installed on the upper end of the threaded rod 12. A slider 17 is sleeved on the outer surface of the fixing rod 16, and the slider 17 is fixedly connected to the connecting block 15. Side plates 37 are symmetrically installed on the lower end of the drying mechanism 2. A clamping rotation mechanism 18 is provided between the plates 37. A rotating shaft 35 is rotatably connected inside the side plate 37, and the rotating shaft 35 is fixedly connected to the clamping rotation mechanism 18. A motor 36 is installed on the left end of the left rotating shaft 35. The clamping rotation mechanism 18 includes two uprights 19 and a threaded rod 21. The uprights 19 are fixedly connected to the rotating shaft 35. A moving groove 20 is opened at the inner end of the upright 19. The threaded rod 21 is provided inside the moving groove 20. The outer surface of the threaded rod 21 is threaded with a threaded sleeve 22. A bevel gear 23 is installed on the upper end of the threaded rod 21. A rotating rod 24 is provided on the upper end of the two uprights 19. A bevel gear 25 is symmetrically installed on the outer surface of the rotating rod 24. The bevel gear 25 and the bevel gear 25 are connected to the bevel gear 23. Wheel 23 meshes, motor 26 is installed on the left end of rotating rod 24, base plate 27 is installed between two uprights 19, several support rollers 28 are symmetrically installed on the upper end of base plate 27, lifting plate 29 is installed between two threaded sleeves 22, several rotating rollers 30 are symmetrically installed on the lower end of lifting plate 29, bevel gear 31 is installed at the rear end of rotating roller 30, transmission rod 32 is set on the rear side of lifting plate 29, transmission rod 32 is installed at the rear end of lifting plate 29, motor 33 is installed on the right end of transmission rod 32, several bevel gears 34 are installed on the outer surface of transmission rod 32, and bevel gears 34 and bevel gears 31 mesh, and anti-slip texture is provided on the outer surface of support roller 28 and rotating roller 30.

[0024] The working principle of this utility model is as follows: Multiple furnace tubes are placed on two support rollers 28. Then, motor 4 26 drives rotating rod 24 to rotate. Rotating rod 24 drives threaded rod 21 to rotate through bevel gear 4 25 and bevel gear 3 23. Threaded rod 21 drives lifting plate 29 to descend through threaded sleeve 22. Lifting plate 29 drives rotating roller 30 to descend and contact and press the furnace tubes. Then, motor 2 13 drives threaded rod 12 to rotate. Threaded rod 12 drives top plate 3 to descend through threaded sleeve 14 and connecting block 15. Top plate 3 drives pressing and rotating mechanism 18 to descend into cleaning tank 1 through side plate 37, so that multiple furnace tubes are immersed in cleaning liquid. At the same time, motor 5 33 drives transmission rod 32 to rotate. Transmission rod 32 drives rotating roller 30 to rotate through bevel gear 6 34 and bevel gear 5 31. Rotating roller 30 drives furnace tube to rotate to perform cleaning work.

[0025] After the cleaning is completed, motor 213 reverses its operation, causing the pressing and rotating mechanism 18 to rise away from the cleaning tank 1, and the furnace tube to rise away from the cleaning liquid. Then, motor 36 drives the upright 19 to rotate through the rotating shaft 35. The upright 19 drives the base plate 27 and the lifting plate 29 to rotate synchronously, so that the furnace tube rotates 90 degrees perpendicular to the cleaning tank 1, allowing the residual cleaning liquid on the surface of the furnace tube to flow back into the cleaning tank 1. At the same time, the heating tube 9 heats and generates high temperature. Then, motor 18 drives the rotating rod 16 to rotate. The rotating rod 16 drives the fan 4 to rotate through the meshing of bevel gear 27 and bevel gear 15. The fan 4 blows the high temperature generated by the heating tube 9 onto the furnace tube, so that the furnace tube dries quickly.

[0026] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A new type of furnace tube cleaning machine comprising a cleaning tank (1) and a air drying mechanism (2), characterized in that, The drying mechanism (2) is arranged above the cleaning pool (1) and is used for air-drying the furnace pipe, a lifting mechanism (10) for driving the furnace pipe to lift is arranged on the side of the drying mechanism (2), the lifting mechanism (10) is arranged on the upper end of the cleaning pool (1), the lower end of the drying mechanism (2) is symmetrically provided with side plates (37), the pressing and rotating mechanism (18) is arranged between the two side plates (37), the rotating shaft (35) is rotatably connected in the side plate (37), the rotating shaft (35) is fixedly connected with the pressing and rotating mechanism (18) for fixing and rotating the furnace pipe, and the left end of the left rotating shaft (35) is provided with a motor three (36).

2. A novel boiler tube cleaning machine as claimed in claim 1, wherein, The drying mechanism (2) comprises a top plate (3) and a fan (4), a plurality of circular holes are formed in the top plate (3), the fan (4) is arranged in the circular hole, the fan (4) is fixedly connected to the inner wall of the circular hole through a bearing, and the upper end of the fan (4) is provided with a bevel gear one (5).

3. A novel boiler tube cleaning machine as claimed in claim 2, wherein, The upper end of the top plate (3) is provided with a rotating rod one (6), the left end of the rotating rod one (6) is provided with a motor one (8), a plurality of bevel gear two (7) are arranged on the outer surface of the rotating rod one (6), the bevel gear two (7) is engaged with the bevel gear one (5), a heating pipe (9) is arranged on the inner wall of the circular hole, and the heating pipe (9) is located above the fan (4).

4. A novel boiler tube cleaning machine as claimed in claim 1, wherein, The lifting mechanism (10) comprises two hollow rods (11) and a threaded rod one (12), the two hollow rods (11) are fixedly connected to the upper end of the cleaning pool (1), the connecting block (15) is sleeved on the outer surface of the two hollow rods (11), the threaded rod one (12) is rotatably connected in one of the hollow rods (11), the fixed rod (16) is arranged in the other hollow rod (11), the threaded sleeve one (14) is sleeved on the outer surface of the threaded rod one (12), the threaded sleeve one (14) is fixedly connected with the connecting block (15), the motor two (13) is arranged on the upper end of the threaded rod one (12), the sliding block (17) is sleeved on the outer surface of the fixed rod (16), and the sliding block (17) is fixedly connected with the connecting block (15).

5. A novel boiler tube cleaning machine as claimed in claim 1, wherein, The pressing and rotating mechanism (18) comprises two vertical rods (19) and a threaded rod two (21), the vertical rod (19) is fixedly connected with the rotating shaft (35), the inner end of the vertical rod (19) is provided with a moving groove (20), the threaded rod two (21) is arranged in the moving groove (20), the threaded sleeve two (22) is sleeved on the outer surface of the threaded rod two (21), the bevel gear three (23) is arranged on the upper end of the threaded rod two (21), the rotating rod two (24) is arranged on the upper end of the two vertical rods (19), the bevel gear four (25) is symmetrically arranged on the outer surface of the rotating rod two (24), the bevel gear four (25) is engaged with the bevel gear three (23), and the motor four (26) is arranged on the left end of the rotating rod two (24).

6. A novel boiler tube cleaning machine as claimed in claim 5 wherein, The bottom plate (27) is arranged between the two vertical rods (19), and a plurality of supporting rollers (28) are symmetrically arranged on the upper end of the bottom plate (27).

7. A novel boiler tube cleaning machine as claimed in claim 5 wherein, Two said thread sleeve two (22) between the installation of lifting plate (29), lifting plate (29) lower end of the symmetric installation of several rotating roller (30), rotating roller (30) rear end of the installation of bevel gear five (31), lifting plate (29) rear side set transmission rod (32), transmission rod (32) is installed in the rear end of lifting plate (29), transmission rod (32) right end of the installation of motor five (33), transmission rod (32) outer surface is installed in several bevel gear six (34), and bevel gear six (34) and bevel gear five (31) meshing, support roller (28) and rotating roller (30) outer surface are provided with anti-skid pattern.

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