Partially-shielded PVD (Physical Vapor Deposition) jig

Abstract

The utility model discloses a partial shielding PVD jig in the field of PVD process auxiliary equipment, which comprises a hanging disc and supporting pieces arranged on the surface of the hanging disc and uniformly distributed along the circumference, mounting positioning holes are arranged on the hanging disc and positioned at the supporting pieces, screw sleeves are fixedly arranged in the mounting positioning holes, and the screw sleeves are fixedly connected with the hanging disc. The supporting piece comprises a supporting column, a wrench groove formed in the outer wall of the supporting column, a shielding piece fixedly installed on the outer circle face of the supporting column and a connecting stud integrally formed at the bottom end of the supporting column and connected with the threaded sleeve in a threaded mode. According to the utility model, the fixing of the supporting piece is realized through the matching of the threaded sleeve and the connecting stud on the supporting piece, the supporting pieces with different models and specifications can be conveniently replaced, and the threaded sleeve is arranged on the hanging disc instead of directly forming a threaded hole in the hanging disc, so that the hanging disc can be thinned as much as possible; and the processing difficulty of the hanging disc is greatly reduced, the weight is greatly reduced, the processing efficiency is improved, and the hanging disc is extremely practical.

Description

Technical Field

[0001] This utility model relates to the field of PVD process auxiliary equipment, specifically a PVD fixture with partial shielding. Background Technology

[0002] In PVD coating processes, it is often necessary to mask certain areas of the workpiece to prevent coating layers from forming on these areas or to control the coating thickness and pattern. However, existing masking fixtures have many shortcomings. For example, some masking fixtures have low masking accuracy, failing to precisely protect the target area, resulting in coating on unintended areas or poor coating effects on the target area; some fixtures have complex structures, making installation and disassembly cumbersome and reducing production efficiency; others have poor durability, easily deforming or being damaged in the high-temperature, high-energy environment of PVD, affecting their service life and masking effect, increasing production costs, and the mounting trays require support structures, resulting in large thicknesses, heavy weights, and inconvenient handling.

[0003] Therefore, those skilled in the art have provided a partially masked PVD fixture to solve the problems mentioned in the background art. Summary of the Invention

[0004] The purpose of this invention is to provide a partially masking PVD fixture to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A partially shielded PVD fixture includes a mounting plate and support members evenly distributed along the circumference of the mounting plate surface. The mounting plate has mounting holes at the support members, and a threaded sleeve is fixedly installed inside the mounting holes. Each support member includes a support column, a wrench groove formed on the outer wall of the support column, a shielding member fixedly installed on the outer circumferential surface of the support column, and a connecting stud integrally formed at the bottom end of the support column and threadedly connected to the threaded sleeve.

[0007] As a further embodiment of this utility model: a bushing is welded to the middle of the hanging plate, and a locking threaded hole is opened on the outer circular surface of the bushing at the position opposite to the vehicle.

[0008] As a further embodiment of this utility model: multiple fan-shaped weight-reducing holes are evenly distributed along the circumference of the hanging plate.

[0009] As a further embodiment of this utility model, both the hanging plate and the supporting component are made of high-temperature resistant and corrosion-resistant materials.

[0010] As a further aspect of this utility model, the shielding components in the support members are available in various sizes, specifications, and models.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This utility model achieves the fixation of the support component by engaging the threaded sleeve with the connecting stud on the support component. This facilitates the replacement of support components of different models and specifications. Moreover, by setting the threaded sleeve on the hanging plate instead of directly drilling threaded holes on the hanging plate, the hanging plate can be made as thin as possible, which also greatly reduces the processing difficulty of the hanging plate, significantly reduces weight, and improves processing efficiency. It is extremely practical. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ;

[0014] Figure 2 This is a cross-sectional view of the support component of this utility model.

[0015] In the diagram: 1. Hanging plate; 101. Weight reduction hole; 102. Mounting positioning hole; 2. Bushing; 201. Locking threaded hole; 3. Support component; 301. Support column; 302. Wrench groove; 303. Connecting stud; 304. Shielding component; 4. Screw sleeve. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see Figures 1-2 In this embodiment of the utility model, a partially shielded PVD fixture includes a hanging plate 1 and support members 3 evenly distributed along the circumference of the surface of the hanging plate 1. The hanging plate 1 has an installation positioning hole 102 at the support member 3. A screw sleeve 4 is fixedly installed inside the installation positioning hole 102. The support member 3 includes a support column 301, a wrench groove 302 opened on the outer wall of the support column 301, a shielding member 304 fixedly installed on the outer circular surface of the support column 301, and a connecting stud 303 integrally formed at the bottom end of the support column and threadedly connected to the screw sleeve 4.

[0018] By adopting the above technical solution, the support member 3 is fixed by the cooperation of the threaded sleeve 4 and the connecting stud 303 on the support member 3. This makes it easy to replace support members 3 of different models and specifications. Moreover, by setting the threaded sleeve 4 on the hanging plate 1 instead of directly drilling threaded holes on the hanging plate 1, the hanging plate 1 can be made as thin as possible, which also greatly reduces the processing difficulty of the hanging plate 1, greatly reduces the weight and improves the processing efficiency. It is extremely practical. The shielding member 304 can accurately match the inner hole of the workpiece to be processed, and the shielding effect is better, so as to achieve precise protection of the target area.

[0019] Among them, a bushing 2 is welded to the middle of the mounting plate 1, and a locking threaded hole 201 is opened on the outer circle surface of the bushing 2 at the position opposite to the vehicle.

[0020] Among them, multiple fan-shaped weight-reducing holes 101 are evenly distributed along the circumference of the hanging plate 1, which can play a role in weight reduction.

[0021] In this embodiment, both the hanging plate 1 and the support 3 are made of high-temperature resistant and corrosion-resistant materials, which can improve the durability of the fixture.

[0022] In this embodiment, the shielding components 304 in the support component 3 have various sizes, specifications and models to meet the shielding needs of different products.

[0023] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A partially shielded PVD fixture, comprising a mounting plate (1) and support members (3) evenly distributed along the circumference of the surface of the mounting plate (1), characterized in that: The mounting plate (1) has an installation positioning hole (102) at the support member (3). A screw sleeve (4) is fixedly installed inside the installation positioning hole (102). The support member (3) includes a support column (301), a wrench groove (302) opened on the outer wall of the support column (301), a shielding member (304) fixedly installed on the outer circular surface of the support column (301), and a connecting stud (303) integrally formed on the bottom end of the support and threadedly connected to the screw sleeve (4).

2. The PVD fixture for partial masking according to claim 1, characterized in that: A bushing (2) is welded to the middle of the hanging plate (1), and a locking threaded hole (201) is opened on the outer circular surface of the bushing (2) at the position opposite to the vehicle.

3. The PVD fixture for partial masking according to claim 1, characterized in that: The hanging plate (1) has multiple fan-shaped weight-reducing holes (101) evenly distributed along its circumference.

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