Cylinder shaft protection assembly applied to sputter coating equipment

Abstract

The utility model discloses a cylinder shaft protection component applied to sputter coating equipment, which comprises a base, a driving cylinder laterally mounted on one side of the base and a correction component arranged on a piston shaft of the driving cylinder and positioned on the other side of the base, the piston shaft of the driving cylinder penetrates through the base and is connected with the base and the correction component through a positioning assembly, and the correction component is positioned on the base. The piston shaft of the driving cylinder is sleeved with a stretchable protective sleeve, and the two ends of the protective sleeve are communicated with the positioning assembly. The stretchable protective sleeve is additionally arranged on the piston shaft of the driving cylinder, and the protective sleeve is communicated with the correction assembly arranged on the base and the correction assembly, so that when the piston shaft of the driving cylinder retreats, the protective sleeve is extruded and overlapped, and when the piston shaft of the driving cylinder is pushed forwards, the protective sleeve is unfolded, and impurities generated in the sputter coating process cannot be accumulated on the piston shaft of the driving cylinder; therefore, the dryness of the shaft sleeve caused by the impurities is avoided, the maintenance time of the piston shaft of the driving cylinder is prolonged, the use cost is reduced, and the processing efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary coating workpiece protection technology, and in particular to a cylinder shaft protection component used in sputtering coating equipment. Background Technology

[0002] The correction component located inside the target gate, used to adjust the thickness of the coating layer on the workpiece, can be moved by a transverse drive cylinder to adjust the size of the positive ion delivery channel. Because the sputtering coating equipment is a large piece of equipment, the cylinder that drives the correction component cannot be installed inside the target gate. Therefore, the cylinder is basically installed on the outer wall of the target gate. The cylinder output shaft passes through the inner cavity of the target gate and is connected to the correction component. In order to ensure that the inner cavity of the target gate can maintain a vacuum, a bushing is set at the connection between the cylinder output shaft and the target gate, and the target gate is kept in a vacuum state during coating inspection through the bushing.

[0003] However, during use, because part of the cylinder output shaft is located inside the coating chamber, impurities or dust from the air in the space during the coating process can adhere to the cylinder output shaft. After coating, the cylinder output shaft needs to retract and drive the correction component to reset so that the cage can move to the next process. When the cylinder output shaft with impurities on its surface retracts, it will come into contact with various components inside the bushing, such as the sealing ring. During this process, the impurities on the cylinder output shaft will transfer to the sealing ring, causing the sealing ring to dry out and affecting the smoothness of the cylinder output shaft's forward push and retraction, which in turn leads to a shortened equipment maintenance period. Utility Model Content

[0004] In view of this, the present invention addresses the deficiencies of the existing technology and its main objective is to provide a cylinder shaft protection component for use in sputtering coating equipment. This component solves the problem that impurities adhere to the surface of the cylinder output shaft during the coating process and then accumulate inside the bushing during movement, causing the cylinder output shaft to move unevenly and consequently shortening the equipment maintenance period.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a cylinder shaft protection assembly applied in a sputtering coating equipment, comprising a base, a drive cylinder mounted laterally on one side of the base, and a correction assembly disposed on the piston shaft of the drive cylinder and located on the other side of the base. The piston shaft of the drive cylinder passes through the base and is connected to the base and the correction assembly through a positioning assembly. A stretchable protective sleeve is fitted on the piston shaft of the drive cylinder, and both ends of the protective sleeve are connected to the positioning assembly.

[0006] Furthermore, the protective sleeve is made of welded corrugated pipe.

[0007] Furthermore, the protective sleeve is a U-shaped corrugated pipe.

[0008] Furthermore, the protective sleeve is made of Omega corrugated pipe.

[0009] Furthermore, both ends of the protective sleeve are connected to positioning seals, which are connected to the positioning assembly.

[0010] Furthermore, the positioning assembly includes a positioning plate and a positioning bushing. The positioning plate has a through-hole in the middle, and the positioning bushing is inserted into the through-hole and connected to the positioning seal.

[0011] Furthermore, the positioning seal includes a positioning disc and a connecting cylinder disposed on the positioning disc. The positioning disc is connected to the positioning plate, one end of the connecting cylinder is connected to the protective sleeve, and the other end is sleeved on the positioning shaft sleeve.

[0012] Furthermore, the positioning disc is equipped with a sealing ring, and the sealing ring is located at the end of the positioning disc that abuts against the positioning plate.

[0013] Furthermore, the positioning plate is divided into a first positioning plate and a second positioning plate. The first positioning plate is embedded in the base, the drive cylinder is installed on the back of the first positioning plate, and the second positioning plate is installed on the back of the correction component.

[0014] Furthermore, the positioning bushing includes an overlapping portion, an insert portion, and a filling portion. The overlapping portion abuts against the opposite surfaces of the first positioning plate and the second positioning plate. The insert portion is inserted into the through-hole and connected to the connecting cylinder. The filling portion is located between the overlapping portion and the insert portion, and the outer side of the filling portion is tightly fitted to the inner wall of the through-hole.

[0015] Compared with the prior art, this utility model has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution, by adding a stretchable protective sleeve to the piston shaft of the drive cylinder, and the protective sleeve being connected to the correction component set on the base and the correction component, the protective sleeve is squeezed and stacked when the piston shaft of the drive cylinder retracts, and unfolds when it pushes forward. This prevents impurities generated during the sputtering coating process from accumulating on the piston shaft of the drive cylinder, thereby avoiding the dryness of the bushing caused by these impurities, extending the maintenance time of the piston shaft of the drive cylinder, reducing the cost of use and improving the processing efficiency.

[0016] To more clearly illustrate the structural features and effects of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of Embodiment 1 of the present utility model.

[0018] Figure 2 This is a diagram illustrating the positioning assembly of Embodiment 1 of this utility model.

[0019] Figure 3 This is a diagram illustrating the positioning seal of Embodiment 1 of this utility model.

[0020] Figure 4This is a cross-sectional view of the drive cylinder and its connecting parts according to Embodiment 1 of this utility model.

[0021] Explanation of reference numerals in the attached diagram:

[0022] 10 base, 20 drive cylinders, 21 drive cylinder piston shafts, 30 correction components;

[0023] 40 Positioning assembly, 41 Positioning plate, 411 First positioning plate, 412 Second positioning plate, 42 Positioning bushing, 421 Overlapping part, 422 Insertion part, 423 Filling part, 43 Through port;

[0024] 50 protective sleeves;

[0025] 60 Positioning seal, 61 Positioning disc, 62 Connecting cylinder, 63 Sealing ring. Detailed Implementation

[0026] Please refer to Figure 1-4 As shown, this illustrates the specific structure of a preferred first embodiment of the present invention, which is a cylinder shaft protection assembly used in sputtering coating equipment. It includes a base 10, a drive cylinder 20 laterally mounted on one side of the base, and a correction assembly 30 disposed on the piston shaft 21 of the drive cylinder and located on the other side of the base 10. The piston shaft 21 passes through the base 10 and is connected to the base 10 and the correction assembly 30 via a positioning assembly 40. A stretchable protective sleeve 50 is fitted onto the piston shaft 21, and both ends of the protective sleeve 50 communicate with the positioning assembly 40. Compared to the prior art, where the piston shaft lacks protection, causing impurities in the air or generated during the sputtering coating process to adhere to the piston shaft, resulting in dryness when the piston shaft retracts, and ultimately affecting the smoothness of the piston shaft's forward and backward movement, this design offers a significant improvement. This cylinder shaft protection assembly, applied in sputtering coating equipment, adds a stretchable protective sleeve 50 to the piston shaft 21 of the drive cylinder. The protective sleeve 50 is connected to the correction assembly 30 provided on the base 10 and the correction assembly 30. When the piston shaft 21 of the drive cylinder retracts, the protective sleeve 50 is compressed and stacked, and when it is pushed forward, the protective sleeve 50 unfolds. This prevents impurities generated during the sputtering coating process from accumulating on the piston shaft 21 of the drive cylinder, thereby avoiding the dryness of the sleeve caused by these impurities, extending the maintenance time of the piston shaft of the drive cylinder, reducing the operating cost and improving the processing efficiency.

[0027] For example, the protective sleeve 50 is a welded corrugated pipe. When a welded corrugated pipe is selected, due to the characteristics of the welded corrugated pipe itself, the compression of the welded corrugated pipe can be between 30% and 70%. At this time, the forward pushable length of the piston shaft 21 of the drive cylinder 20 is increased, so that the correction component 30 connected to the piston shaft 21 of the drive cylinder can be adjusted to adjust the distance between it and the cage surface, and enhance the finished effect of the coated product.

[0028] For example, the protective sleeve 50 is a U-shaped corrugated pipe. When a U-shaped corrugated pipe is selected, due to the characteristics of the U-shaped corrugated pipe itself, the compression of the U-shaped corrugated pipe is within 30%, so as to satisfy the drive cylinder piston shaft 21 to drive the correction component 30 to translate, so as to adjust the distance between it and the cage surface, thereby increasing the finished effect of the coated product.

[0029] For example, the protective sleeve 50 is an omega bellows. When an omega bellows is selected, due to the characteristics of the omega bellows' own structure, the compression of the omega bellows is kept within 5% to meet the requirement that the piston shaft 21 of the drive cylinder drives the correction component 30 to move and adjust the distance between it and the cage surface, thereby increasing the finished effect of the coated product.

[0030] For example, both ends of the protective sleeve 50 are connected to positioning seals 60, and the positioning seals 60 are connected to the positioning assembly 40. Figure 2 As shown, when the protective sleeve 50 is connected to both ends with positioning seals 60 and the positioning seals 60 are connected to the positioning assembly 40, the connection between the positioning seals 60 and the positioning assembly 40 makes the inner cavity of the protective sleeve 50 communicate with the outside world and is in a static sealed state. This ensures that the vacuum level in the coating chamber is not affected by the piston shaft 21 of the drive cylinder. Even if the piston shaft 21 of the drive cylinder is slightly offset, it will not cause outside air to enter the coating chamber and affect the vacuum level of the coating chamber.

[0031] Specifically, the positioning assembly 40 includes a positioning plate 41 and a positioning sleeve 42. Each positioning plate 41 has a through-hole 43 in its center. The positioning sleeve 42 is inserted into the through-hole 43 and connected to the positioning seal 60. By inserting the positioning sleeve 42 into the through-hole 43, after the drive cylinder piston shaft 21 is inserted into the positioning sleeve 42, the forward and backward translation of the drive cylinder piston shaft 21 can be kept horizontal under the constraint of the positioning sleeve 42.

[0032] For example, the positioning seal 60 includes a positioning disk 61 and a connecting cylinder 62 disposed on the positioning disk 61. The positioning disk 61 is connected to the positioning plate 41, and one end of the connecting cylinder 62 communicates with the protective sleeve 50, while the other end is sleeved onto the positioning bushing 42. Figure 3As shown, the connecting cylinder 62 can be integrally formed with the positioning plate 61, or it can be fixed to the positioning plate 61. When the connecting cylinder 62 is fixedly connected to the protective sleeve 50, the positioning plate 61 is connected to the positioning plate 41 by screws or bolts, which limits the protective sleeve 50 so that it will not rebound under its own elastic force. For example, if either end of a U-shaped corrugated pipe lacks a limit, it is easy to rebound and shrink.

[0033] For example, the positioning disk 61 is provided with a sealing ring 63, and the sealing ring 63 is located at the end of the positioning disk 61 that abuts against the positioning plate 41. By providing a sealing ring 63 at the end of the positioning disk 61 that abuts against the positioning plate 41, after the positioning disk 61 and the positioning plate 41 are locked together by screws or bolts, the sealing ring 63 fills the gap at the connection between the positioning disk 61 and the positioning plate 41, so as to prevent leakage and disruption of the vacuum state in the coating chamber.

[0034] It should be noted that the sealing ring 63 is embedded in the positioning plate 61. This can be understood as the positioning plate 61 having an annular groove, and the sealing ring 63 being located inside the annular groove. However, the sealing ring 63 is larger than the annular groove and part of it is located on the outside. When the positioning plate 61 comes into contact with the positioning plate 41, the sealing ring 63 is squeezed and deformed, thus preventing air circulation.

[0035] The positioning plate 41 is divided into a first positioning plate 411 and a second positioning plate 412. The first positioning plate 411 is embedded in the base 10, the drive cylinder 20 is installed on the back of the first positioning plate 411, and the second positioning plate 412 is installed on the back of the correction component 30.

[0036] For example, the positioning bushing 42 includes an overlapping portion 421, an insertion portion 422, and a filling portion 423. The overlapping portion 421 abuts against the opposite surfaces of the first positioning plate 411 and the second positioning plate 412. The insertion portion 422 is inserted into the through-hole 43 and connected to the connecting cylinder 62. The filling portion 423 is located between the overlapping portion 421 and the insertion portion 422, and the outer side of the filling portion 423 is tightly fitted to the inner wall of the through-hole 43. Figure 2 As shown, by filling the space between the overlapping portion 421 and the insertion portion 422 by the filling portion 423, the positioning sleeve 42 inside the through 43 can be restricted to prevent the positioning sleeve 42 from moving with the piston shaft 21 of the drive cylinder.

[0037] The above description is merely a preferred embodiment of the present utility model and does not constitute any limitation on the technical scope of the present utility model. Therefore, any minor modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A cylinder shaft protection assembly for use in a sputtering coating equipment, comprising a base (10), a drive cylinder (20) laterally mounted on one side of the base, and a correction assembly (30) disposed on the piston shaft (21) of the drive cylinder and located on the other side of the base (10), characterized in that: The drive cylinder piston shaft (21) passes through the base (10) and is connected to the base (10) and the correction assembly (30) through the positioning assembly (40). The drive cylinder piston shaft (21) is fitted with a stretchable protective sleeve (50), and both ends of the protective sleeve (50) are connected to the positioning assembly (40).

2. The cylinder shaft protection assembly applied in sputtering coating equipment according to claim 1, characterized in that: The protective sleeve (50) is a welded corrugated pipe.

3. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 1, characterized in that: The protective sleeve (50) is a U-shaped corrugated pipe.

4. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 1, characterized in that: The protective sleeve (50) is an Omega corrugated pipe.

5. A cylinder shaft protection assembly for use in sputtering coating equipment according to any one of claims 1-3, characterized in that: Both ends of the protective sleeve (50) are connected to positioning seals (60), and the positioning seals (60) are connected to the positioning assembly (40).

6. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 5, characterized in that: The positioning assembly (40) includes a positioning plate (41) and a positioning bushing (42). The positioning plate (41) is provided with a through-hole (43) in the middle. The positioning bushing (42) is inserted into the through-hole (43) and connected to the positioning seal (60).

7. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 6, characterized in that: The positioning seal (60) includes a positioning disk (61) and a connecting cylinder (62) disposed on the positioning disk (61). The positioning disk (61) is connected to the positioning plate (41). One end of the connecting cylinder (62) is connected to the protective sleeve (50), and the other end is sleeved with the positioning bushing (42).

8. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 7, characterized in that: The positioning disk (61) is provided with a sealing ring (63), and the sealing ring (63) is located at the end of the positioning disk (61) that abuts against the positioning plate (41).

9. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 8, characterized in that: The positioning plate (41) is divided into a first positioning plate (411) and a second positioning plate (412). The first positioning plate (411) is embedded in the base (10). The drive cylinder (20) is installed on the back of the first positioning plate (411), and the second positioning plate (412) is installed on the back of the correction component (30).

10. A cylinder shaft protection assembly for use in sputtering coating equipment according to claim 9, characterized in that: The positioning bushing (42) includes an overlapping portion (421), an insert portion (422), and a filling portion (423). The overlapping portion (421) abuts against the opposite sides of the first positioning plate (411) and the second positioning plate (412). The insert portion (422) is inserted into the through-hole (43) and plugged into the connecting cylinder (62). The filling portion (423) is located between the overlapping portion (421) and the insert portion (422), and the outer side of the filling portion (423) is tightly fitted to the inner wall of the through-hole (43).

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