Novel high-temperature furnace body sealing box of oxidation diffusion furnace

Abstract

The utility model discloses a novel oxidation diffusion furnace high-temperature furnace body sealing box, which relates to the technical field of oxidation diffusion furnaces, and comprises a base, clamping components are arranged in the base, two ends of a furnace body are clamped and fixed by arc-shaped clamping blocks in the two clamping components, a plurality of same extension covers are stacked above the base, a top cover is connected above the extension covers in a magnetic attraction manner, and the top cover is connected with the base. The top cover is arranged on the base, the extending cover is arranged on the top cover, the extending cover is in magnetic attraction connection with the base and the extending cover, the front end of the base is integrally connected with a push rod, a height adjusting assembly is arranged in the push rod, and the upper portion of the top cover is limited through a limiting plate in the height adjusting assembly. Meanwhile, the box body can be longitudinally and magnetically attracted and stacked through the extension cover, corresponding adjustment can be conducted according to the height of the furnace body, the box body can be suitable for furnace bodies of more sizes, the use flexibility is improved, and sealing boxes of different sizes do not need to be frequently replaced.

Description

Technical Field

[0001] This utility model relates to the field of oxidation diffusion furnace technology, and in particular to a novel high-temperature furnace body sealing box for oxidation diffusion furnaces. Background Technology

[0002] The high-temperature furnace body sealing box of the oxidation diffusion furnace is an important component of the oxidation diffusion furnace. It is used to seal the furnace body in a high-temperature environment to ensure the stability and purity of the atmosphere inside the furnace, thereby meeting the requirements of semiconductor material oxidation, diffusion and other processes.

[0003] A novel high-temperature furnace body sealing box for oxidation diffusion furnaces (CN214950593U) can be referenced in existing literature. By setting a second sealing component and a third sealing component, and by connecting the second sealing component to the bottom of the first sealing component, the capacity of the novel high-temperature furnace body sealing box for oxidation diffusion furnaces is increased, avoiding the need to replace equipment and increasing costs. This greatly reduces the limitations of the device and makes it more practical.

[0004] In existing integrated sealed boxes, as shown in the above literature, the high-temperature furnace body is usually placed directly inside the sealed box. Due to the gap between the furnace body and the inner wall of the box, the furnace body is prone to collision and damage when the box is moved or subjected to external impact. Furthermore, although the integrated sealed box is convenient to use, its fixed size design makes it difficult to adapt to high-temperature furnace bodies of different sizes, resulting in insufficient operational flexibility. Therefore, a high-temperature furnace body sealed box with clamping and adjustment functions is designed. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a novel high-temperature furnace body sealing box for oxidation diffusion furnaces. This invention uses clamping components inside the base to clamp and fix both ends of the furnace body, improving the installation stability of the furnace body. Simultaneously, the box can be stacked longitudinally using magnetic extension covers, and can be adjusted according to the furnace body height, accommodating furnaces of various sizes and increasing operational flexibility, eliminating the need for frequent replacement of sealing boxes of different sizes.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A novel high-temperature furnace body sealing box for an oxidation diffusion furnace includes: a base, wherein the base has a built-in clamping assembly, and the arc-shaped clamps in the two clamping assemblies clamp and fix both ends of the furnace body; multiple identical extension covers are stacked on top of the base, and a top cover is magnetically connected to the top of the extension covers, and the extension covers are magnetically connected to the base and the extension covers; a push rod is integrally connected to the front end of the base, and a height adjustment assembly is provided inside the push rod, which limits the top of the top cover by a limiting plate in the height adjustment assembly.

[0008] The present invention is further configured as follows: the clamping assembly includes: an adjusting screw threaded to both ends of the base; a transmission rod and a handle integrally connected to both ends of the adjusting screw, wherein the handle is located outside the base.

[0009] The present invention is further configured as follows: the clamping assembly includes: an arc-shaped clamping block, wherein a bearing is embedded and fixed inside the arc-shaped clamping block, and the transmission rod is fixed in the inner ring of the bearing; and a telescopic rod, wherein the fixed end of the telescopic rod is connected to the inner wall of the base, and the movable end of the telescopic rod is connected to one side of the arc-shaped clamping block.

[0010] The present invention is further configured such that a magnetic groove is provided on the top of the base and a magnetic ring is integrally connected to the bottom of the top cover. The upper and lower ends of the extension cover are respectively provided with magnetic grooves and magnetic rings, and the magnetic rings can be inserted into the magnetic grooves for adsorption.

[0011] The present invention is further provided that each of the four corners of the bottom of the base is equipped with casters.

[0012] The present invention is further configured as a height adjustment assembly comprising: a lead screw rotatably connected inside the push rod; a slider threadedly connected outside the lead screw; and two top rods fixed above the slider, wherein both top rods extend out of the push rod and are fixed to the limiting plate.

[0013] The present invention is further configured as a height adjustment component including: two guide rods fixed inside the push rod, the slider being slidably sleeved on the outside of the two guide rods; and a second handle rotatably connected to the bottom of the push rod, the second handle being fixed to one end of the lead screw.

[0014] The beneficial effects of this utility model are as follows:

[0015] 1. When installing the high-temperature furnace body, the high-temperature furnace body sealing box rotates the adjusting screws at both ends to drive the two arc-shaped clamping blocks to move towards the center, thereby quickly clamping and fixing the two ends of the high-temperature furnace body, making it more stable when moving or placing, and effectively preventing the furnace body from colliding with the inner wall of the box.

[0016] 2. The high-temperature furnace body sealing box can stack multiple extension covers on the base by magnetic attraction, and then the top extension cover is sealed with a top cover. During installation, it can be adjusted according to the height of the furnace body to improve the flexibility of use. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a novel high-temperature furnace body sealing box for an oxidation diffusion furnace proposed in this utility model;

[0018] Figure 2This is a top view of the base structure of a novel high-temperature furnace body sealing box for an oxidation diffusion furnace proposed in this utility model.

[0019] Figure 3 This is a schematic diagram showing the disassembled structure of the base, extension cover, and top cover of a novel high-temperature furnace body sealing box for an oxidation diffusion furnace proposed in this utility model.

[0020] Figure 4 This is a schematic diagram of the internal structure of the push rod of a novel high-temperature furnace body sealing box for an oxidation diffusion furnace proposed in this utility model.

[0021] Figure 5 This is a schematic diagram of the disassembled structure of the adjusting screw and arc-shaped clamping block of a novel high-temperature furnace body sealing box for an oxidation diffusion furnace proposed in this utility model.

[0022] In the diagram: 1. Base; 2. Extension cover; 3. Top cover; 4. Casters; 5. Push rod; 6. Adjusting screw; 7. Arc-shaped clamp; 8. Telescopic rod; 9. Magnetic groove; 10. Magnetic ring; 11. Lead screw; 12. Guide rod; 13. Slider; 14. Top rod; 15. Limiting plate; 16. Bearing; 17. Transmission rod; 18. Handle 1; 19. Handle 2. Detailed Implementation

[0023] The technical solution of this patent will be further described in detail below with reference to specific embodiments.

[0024] The embodiments of this patent are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this patent, and should not be construed as limiting this patent.

[0025] In the description of this patent, it should be understood that the terms “center,” “upper,” “lower,” “front,” “back,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this patent.

[0026] In the description of this patent, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integral connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this patent according to the specific circumstances.

[0027] Reference Figure 1-5 A novel high-temperature furnace body sealing box for oxidation diffusion furnace includes: a base 1, multiple extension covers 2, and a top cover 3. The base 1 serves as a base support to support the upper structure. The extension covers 2 can be magnetically stacked on top of the base 1 to increase the height of the box. The top cover 3 can be magnetically connected to the top of the extension covers 2 to seal the extension covers 2. A clamping assembly is provided inside the base 1 for clamping and fixing the furnace body.

[0028] Specifically, such as Figure 3 As shown, a magnetic groove 9 is provided at the upper end of the base 1 and a magnetic ring 10 is integrally connected to the bottom of the top cover 3. The magnetic ring 10 can be inserted into the magnetic groove 9 and the magnetic poles are opposite to each other so that they can be attracted.

[0029] Furthermore, magnetic grooves 9 and magnetic rings 10 are respectively provided at the upper and lower ends of the extension cover 2, so that the extension cover 2 can be magnetically connected to the base 1 and the top cover 3, and the extension covers 2 can be magnetically connected to each other.

[0030] Specifically, such as Figure 2 As shown, the clamping assembly has two symmetrical sets, and the adjusting screws 6 in the clamping assembly are threadedly connected to both sides of the base 1.

[0031] Furthermore, such as Figure 5 As shown, the two ends of the adjusting screw 6 are connected to the transmission rod 17 and the handle 18 respectively. The handle 18 is located outside the base 1. The clamping assembly also includes an arc-shaped clamping block 7. The bearing 16 is embedded and fixed inside the arc-shaped clamping block 7. The transmission rod 17 is fixed in the inner ring of the bearing 16. Telescopic rods 8 are connected to both sides of the arc-shaped clamping block 7. The thicker end of the telescopic rod 8 is fixed to the inner wall of the base 1.

[0032] In this embodiment, the adjusting screw 6 is rotated by rotating the handle 18, so that the adjusting screw 6 moves linearly during rotation. The bearing 16 reduces rotational friction. The two telescopic rods 8 cooperate with the bearing 16 to prevent the arc-shaped clamp 7 from rotating with the adjusting screw 6. The arc-shaped clamp 7 can only move linearly, and then the furnace body is clamped and fixed by the two arc-shaped clamps 7 moving towards the center.

[0033] like Figure 1 As shown, casters 4 are installed at the four corners of the bottom of the base 1, and an L-shaped push rod 5 is connected to the front end of the base 1, which makes it easy to move the furnace body when it is installed inside.

[0034] For details, please refer to Figure 4As shown, a height adjustment assembly is provided inside the push rod 5. The lead screw 11 in the height adjustment assembly is rotatably connected inside the push rod 5. The lead screw 11 is externally threaded to the slider 13. The slider 13 slides in fit inside the push rod 5. The top two sides of the slider 13 are connected to the top rod 14. At the same time, the top rod 14 passes through the push rod 5 and is connected to the limiting plate 15.

[0035] Furthermore, two smooth guide rods 12 are fixed inside the push rod 5. Both guide rods 12 pass through the slider 13, which can limit the slider 13 to prevent it from rotating with the lead screw 11.

[0036] Furthermore, a handle 19 is rotatably connected to the bottom of the push rod 5 and is fixed to one end of the lead screw 11.

[0037] In this embodiment, after the box is assembled, the screw 11 is rotated by rotating the handle 19, which in turn drives the externally threaded slider 13 to move linearly and then drives the two top rods 14 to move longitudinally. By abutting the limit plate 15 against the top cover 3, the assembled box is further limited, thereby improving the assembly stability.

[0038] Working principle: When using this utility model, rotating the handle 18 drives the adjusting screw 6 to rotate, causing the adjusting screw 6 to move linearly during rotation. The bearing 16 design reduces rotational friction. The two telescopic rods 8, in conjunction with the bearing 16, prevent the arc-shaped clamp 7 from rotating with the adjusting screw 6. The arc-shaped clamp 7 can only move linearly, and the two arc-shaped clamps 7 move towards the center to clamp and fix the furnace body. After the box is assembled, rotating the handle 19 drives the lead screw 11 to rotate, which in turn drives the externally threaded slider 13 to move linearly, which in turn drives the two top rods 14 to move longitudinally. By abutting the limit plate 15 against the top cover 3, the assembled box is further limited, improving the assembly stability.

[0039] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A novel high-temperature furnace body sealing box for an oxidation diffusion furnace, comprising: The base (1) is characterized in that the base (1) has a built-in clamping assembly, and the arc-shaped clamping blocks (7) in the two clamping assemblies clamp and fix the two ends of the furnace body. Multiple identical extension covers (2) are stacked on the top of the base (1). A top cover (3) is magnetically connected to the top of the extension cover (2), and the extension cover (2) is magnetically connected to the base (1) and the extension cover (2). A push rod (5) is integrally connected to the front end of the base (1). A height adjustment assembly is provided inside the push rod (5), and the top cover (3) is limited by the limiting plate (15) in the height adjustment assembly.

2. The novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 1, characterized in that, The clamping components include: Adjusting screws (6) are threaded to both ends of the base (1); The transmission rod (17) and handle (18) are integrally connected to both ends of the adjusting screw (6), wherein the handle (18) is located outside the base (1).

3. The novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 2, characterized in that, The clamping components also include: Arc-shaped clamp (7), a bearing (16) is embedded and fixed inside the arc-shaped clamp (7), and the transmission rod (17) is fixed in the inner ring of the bearing (16); Telescopic rod (8), the fixed end of which is connected to the inner wall of the base (1), and the movable end of which is connected to one side of the arc-shaped clamp (7).

4. The novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 1, characterized in that, The base (1) has a magnetic groove (9) on its top and a magnetic ring (10) integrally connected to the bottom of the top cover (3). The upper and lower ends of the extension cover (2) are respectively provided with magnetic grooves (9) and magnetic rings (10). The magnetic rings (10) can be inserted into the magnetic grooves (9) for adsorption.

5. The novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 1, characterized in that, The base (1) is equipped with casters (4) at the four corners of its bottom.

6. The novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 1, characterized in that, The height adjustment components include: Rotate the lead screw (11) connected inside the push rod (5); A slider (13) is threadedly connected to the outside of the lead screw (11); Two push rods (14) are fixed above the slider (13), and both push rods (14) pass through the push rod (5) and are fixed to the limiting plate (15).

7. A novel high-temperature furnace body sealing box for an oxidation diffusion furnace according to claim 6, characterized in that, The height adjustment component also includes: Two guide rods (12) are fixed inside the push rod (5), and the slider (13) is slidably sleeved on the outside of the two guide rods (12); Rotate the handle two (19) connected to the bottom of the push rod (5), and fix the handle two (19) to one end of the lead screw (11).

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