Semiconductor process cavity vacuum detector with early warning mechanism
By installing warning lights and an adjustable clamping structure on the vacuum detector, the problem of vacuum detector readings being easily affected by external factors is solved, enabling more accurate detection and timely warning.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-21
- Publication Date
- 2026-03-03
AI Technical Summary
The readings of existing vacuum detectors are easily affected by external factors, resulting in inaccurate detection results.
A semiconductor process cavity vacuum detector with an early warning mechanism was designed. By installing a warning light and an adjustable clamping structure on the vacuum detector, real-time early warning of air leakage and stable clamping can be achieved.
The instrument's early warning and clamping capabilities have been improved, ensuring accurate readings and effective testing.
Smart Images
Figure CN223966197U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor process cavity vacuum detectors, specifically a semiconductor process cavity vacuum detector with an early warning mechanism. Background Technology
[0002] The semiconductor process chamber is a key piece of equipment in the semiconductor manufacturing process. It is mainly used to carry out chemical reactions such as material deposition and etching under vacuum conditions. It consists of several key components, including reaction chamber, vacuum sealing interface, gas nozzle, heating element, etc. The manufacturing precision and material selection of these components have a direct impact on the performance of the reaction chamber and the quality of the reaction.
[0003] The components of a semiconductor process chamber include a vacuum-sealed interface, which is used to ensure a high vacuum environment within the reaction chamber and prevent the leakage of reaction gases and the entry of impurities. Therefore, in order to detect the vacuum status at this location, a corresponding vacuum detector is required. Nowadays, most vacuum detectors obtain data by means of digital or pointer deflection. If the dial is blurred due to external influences, it can directly affect the operator's reading and affect the detection effect. Utility Model Content
[0004] The purpose of this invention is to provide a semiconductor process cavity vacuum detector with an early warning mechanism, in order to solve the problem mentioned in the background art that most current vacuum detectors obtain data by means of digital or pointer deflection. If the dial is blurred by external influences, it will directly affect the operator's reading and affect the detection effect.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor process cavity vacuum detector with an early warning mechanism, comprising a vacuum detector and a detection probe. A mounting base is fixed to the top of the vacuum detector. An internal threaded groove is formed in the mounting base, and a threaded post is connected to the internal threaded groove. A limiting plate for limiting the position is fixed to the top of the threaded post. A warning light is installed on the top of the limiting plate. A replacement slot for replacing the battery is provided on the side of the warning light. A connecting block is installed at the bottom of the vacuum detector. A connecting rod is fixed to the bottom of the connecting block. First telescopic rods are installed on both sides of the connecting rod. A side clamping plate is connected to the telescopic end of the first telescopic rod. A clamping block is fixed to the side of the side clamping plate. A mounting bolt for connection is fixed between the clamping block and the side clamping plate. An arc-shaped groove is formed in the clamping block, and a protective pad is fixed on the arc-shaped groove.
[0006] As a further technical solution of this utility model, the arc-shaped groove and the protective pad form an adhesive connection, and the bonding direction of the protective pad is adapted to the arc-shaped groove.
[0007] As a further technical solution of this utility model, the first telescopic rod is symmetrically distributed about the central axis of the connecting rod, and two sets of mounting bolts are assembled between the clamping block and the side clamping plate.
[0008] As a further technical solution of this utility model, the threaded column and the internal threaded groove of the mounting base form a threaded connection, and the side clamps are symmetrically distributed about the central axis of the connecting rod.
[0009] As a further technical solution of this utility model, a connecting groove is provided at the bottom of the connecting rod, and a straight groove is connected to the connecting rod above the connecting groove.
[0010] As a further technical solution of this utility model, the straight groove is straight, and the connecting groove is interconnected with the straight groove.
[0011] As a further technical solution of this utility model, a connecting post is connected to the connecting groove, and the connecting post and the connecting groove are connected by a thread.
[0012] As a further technical solution of this utility model, a detection probe is fixed at the bottom of the connecting column, and the center of the connecting column is hollow.
[0013] Compared with the prior art, the beneficial effects of this utility model are: the semiconductor process cavity vacuum detector with an early warning mechanism not only improves the early warning capability, but also improves the assembly clamping capability and connection capability of the semiconductor process cavity vacuum detector.
[0014] (1) By fixing the mounting base to the top of the vacuum testing instrument and opening an internal thread groove in the mounting base, the threaded column can be connected to the internal thread groove by rotation during operation. After assembly, the position is limited by the limiting plate. The warning light is fixed at the top of the limiting plate. Therefore, when the detection probe is used for testing, when air leakage occurs, the warning light can be used to sound an alarm, so that the staff can know the warning information in time. This improves the overall warning capability during the operation.
[0015] (2) By fixing the connecting rod at the bottom of the connecting block, and installing the first telescopic rod on both sides of the connecting rod, the side clamp can be pushed to move laterally after the first telescopic rod is in operation. Therefore, the spacing of different side clamps can be adjusted according to the detection position. Then, the clamp is used to clamp the two sides of the detection point. The clamp is installed on the side of the side clamp with mounting bolts, which facilitates the replacement of the clamp. Therefore, the overall assembly and clamping ability is improved in the working process.
[0016] (3) By opening a straight groove inside the connecting rod, and the bottom of the straight groove is connected to the connecting groove, when assembling the detection probe, since the top of the detection probe is fixed with the connecting post, the connecting post can be used to complete the connection and assembly with the connecting groove, which facilitates the assembly of the detection probe at the lower position of the connecting rod, thereby improving the overall connection capability. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the main structure of this utility model;
[0018] Figure 2 This is a front view structural diagram of the warning light of this utility model;
[0019] Figure 3 This is a top view of the clamping block structure of this utility model;
[0020] Figure 4 For the present utility model Figure 1 Enlarged cross-sectional view of point A in the middle.
[0021] In the diagram: 1. Vacuum testing instrument; 2. Warning light; 3. Connecting block; 4. Connecting rod; 5. Clamping block; 6. Side clamping plate; 7. First telescopic rod; 8. Threaded post; 9. Mounting seat; 10. Replacement slot; 11. Limiting plate; 12. Mounting bolt; 13. Arc groove; 14. Protective pad; 15. Connecting groove; 16. Connecting post; 17. Testing probe; 18. Straight groove. Detailed Implementation
[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0023] Please see Figure 1-4An embodiment of this utility model provides a semiconductor process cavity vacuum detector with an early warning mechanism, comprising a vacuum detector 1 and a detection probe 17. A mounting base 9 is fixed to the top of the vacuum detector 1. An internal thread groove is opened in the mounting base 9. A threaded post 8 is connected to the internal thread groove. A limiting plate 11 for limiting is fixed to the top of the threaded post 8. A warning light 2 is installed on the top of the limiting plate 11. A replacement slot 10 for replacing the battery is provided on the side of the warning light 2. A connecting block 3 is installed at the bottom of the vacuum detector 1. A connecting rod 4 is fixed to the bottom of the connecting block 3. A first telescopic rod 7 is installed on both sides of the connecting rod 4. A side clamping plate 6 is connected to the telescopic end of the first telescopic rod 7. A clamping block 5 is fixed to the side of the side clamping plate 6. A mounting bolt 12 for connection is fixed between the clamping block 5 and the side clamping plate 6. An arc-shaped groove 13 is formed in the clamping block 5. A protective pad 14 is fixed on the arc-shaped groove 13.
[0024] An adhesive connection is formed between the arc-shaped groove 13 and the protective pad 14, and the bonding direction of the protective pad 14 is adapted to the arc-shaped groove 13.
[0025] The first telescopic rod 7 is symmetrically distributed about the central axis of the connecting rod 4, and two sets of mounting bolts 12 are assembled between the clamping block 5 and the side clamping plate 6.
[0026] A threaded connection is formed between the threaded column 8 and the internal threaded groove of the mounting base 9, and the side clamps 6 are symmetrically distributed about the central axis of the connecting rod 4.
[0027] A connecting groove 15 is provided at the bottom of the connecting rod 4, and a straight groove 18 is connected to the connecting rod 4 above the connecting groove 15.
[0028] The straight groove 18 is straight, and the connecting groove 15 is interconnected with the straight groove 18.
[0029] A connecting post 16 is connected to the connecting groove 15, and the connecting post 16 and the connecting groove 15 are connected by a thread.
[0030] A detection probe 17 is fixed at the bottom of the connecting post 16, and the center of the connecting post 16 is hollow.
[0031] Further, the detection probe 17 is assembled below the connecting rod 4. Depending on the detection point, which depends on the location of the vacuum sealing interface, a suitable detection probe 17 is selected for use.
[0032] Further design based on the straight groove 18 allows the wiring to run from the location of the straight groove 18.
[0033] Working principle: First, during operation, the connecting column 16 is used to connect and assemble with the connecting groove 15, thereby assembling the detection probe 17 below the connecting rod 4. The first telescopic rod 7 is activated to push the side clamping plate 6 to move laterally. Therefore, the spacing of different side clamping plates 6 can be adjusted according to the detection position. Then, clamping blocks 5 are used to clamp the detection point on both sides. The clamping blocks 5 are installed on the side of the side clamping plate 6 with mounting bolts 12, which facilitates the replacement of clamping blocks 5. After the clamping blocks 5 are clamped on both sides of the detection point, vacuum detection is performed using the detection probe 17. When air leakage occurs during detection using the detection probe 17, the warning light 2 will sound an alarm, and the staff can handle it in time.
[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
Claims
1. A semiconductor process cavity vacuum detector with an early warning mechanism, comprising a vacuum detection instrument (1) and a detection probe (17), characterized in that: The vacuum testing instrument (1) has a mounting base (9) fixed on its top. The mounting base (9) has an internal threaded groove, and a threaded post (8) is connected to the internal threaded groove. A limiting plate (11) for limiting the position is fixed on the top of the threaded post (8). A warning light (2) is installed on the top of the limiting plate (11). A replacement slot (10) for replacing the battery is provided on the side of the warning light (2). A connecting block (3) is installed on the bottom of the vacuum testing instrument (1). A connecting rod (4) is fixed to the bottom of the connecting block (3). A first telescopic rod (7) is installed on both sides of the connecting rod (4). A side clamp (6) is connected to the telescopic end of the first telescopic rod (7). A clamping block (5) is fixed to the side of the side clamp (6). An installation bolt (12) for connection is fixed between the clamping block (5) and the side clamp (6). An arc groove (13) is formed in the clamping block (5). A protective pad (14) is fixed on the arc groove (13).
2. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 1, characterized in that: An adhesive connection is formed between the arc-shaped groove (13) and the protective pad (14), and the bonding direction of the protective pad (14) is adapted to the arc-shaped groove (13).
3. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 1, characterized in that: The first telescopic rod (7) is symmetrically distributed about the central axis of the connecting rod (4), and two sets of mounting bolts (12) are assembled between the clamping block (5) and the side clamping plate (6).
4. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 1, characterized in that: The threaded column (8) and the internal threaded groove of the mounting base (9) form a threaded connection, and the side clamps (6) are symmetrically distributed about the central axis of the connecting rod (4).
5. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 1, characterized in that: A connecting groove (15) is provided at the bottom of the connecting rod (4), and a straight groove (18) is connected to the connecting rod (4) above the connecting groove (15).
6. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 5, characterized in that: The straight groove (18) is straight, and the connecting groove (15) is interconnected with the straight groove (18).
7. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 5, characterized in that: A connecting post (16) is connected to the connecting groove (15), and the connecting post (16) and the connecting groove (15) are connected by a thread.
8. A semiconductor process cavity vacuum detector with an early warning mechanism according to claim 7, characterized in that: The bottom of the connecting post (16) is fixed with a detection probe (17), and the center of the connecting post (16) is hollow.