Inspection device
By designing an inspection device that links the supporting and rotating components, the problem of specification matching in folding tests of foldable display devices was solved, resulting in more accurate folding experiments and improved reliability.
Patent Information
- Application Number
- CN202423065792.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-03-25
- Filing Date
- 2024-12-12
- Publication Date
- 2026-03-03
- Estimated Expiration
- 2034-12-12
AI Technical Summary
When testing foldable display devices, existing technologies struggle to accurately match the specifications of the display device and the folding inspection device, resulting in insufficient reliability.
An inspection device is designed, including a support member, a plate, and a rotating member. By moving the support member and rotating the plate, the device can be folded and unfolded in conjunction with the display device. An elastic member is used to provide elastic support to ensure the accurate movement of the support member.
This improved the accuracy of the folding test, reduced the defect rate of the display device, and enhanced the reliability of the inspection device.
Smart Images

Figure CN223966499U_ABST
Abstract
Description
Technical Field
[0001] This invention relates to an inspection device. More specifically, this invention relates to an inspection device used in a folding experiment of a display device. Background Technology
[0002] With the advancement of information technology, display devices, as the connection medium between users and information, are becoming increasingly important. Correspondingly, the use of display devices such as liquid crystal displays (LCDs), organic light-emitting displays (OLEDs), and plasma displays is gradually increasing.
[0003] Recently, unlike conventional flat display devices that use glass substrates, foldable display devices, which can be folded or bent by using flexible plastic substrates, have attracted attention.
[0004] However, such foldable display devices need to undergo folding tests before leaving the factory. This requires matching the specifications, such as size and movement, between the foldable display device and the folding inspection device during the folding test. Utility Model Content
[0005] The purpose of this invention is to provide an inspection device with improved reliability.
[0006] However, the purpose of this utility model is not limited to the above-mentioned purpose, but can be extended in various ways without departing from the idea and field of this utility model.
[0007] To achieve the aforementioned objective of this utility model, an inspection device according to an embodiment of this utility model may include: a support member for supporting an object and capable of moving in a first direction and the opposite direction; a first plate spaced apart from the support member in a second direction intersecting the first direction, the first plate being used to lift the support member in the first direction; a second plate spaced apart from the support member in the opposite direction to the second direction, the second plate being used to lift the support member in the first direction; a first rotating member connected to the first plate and used to rotate the first plate; and a second rotating member connected to the second plate and used to rotate the second plate.
[0008] In one embodiment, the inspection device may further include a plurality of elastic members disposed at the lower part of the support member.
[0009] In one embodiment, a plurality of the elastic members may be respectively disposed at the ends of the support member.
[0010] In one embodiment, two elastic members may be arranged at the lower part of the support member.
[0011] In one embodiment, the elastic member may include a spring.
[0012] In one embodiment, the elastic member may include a sponge.
[0013] In one embodiment, the first plate may include at least one first protrusion protruding in the opposite direction to the second direction, and the second plate may include at least one second protrusion protruding in the second direction.
[0014] In one embodiment, the number of the first protrusion and the second protrusion can each be two or more.
[0015] In one embodiment, the inspection device may further include a coating film surrounding the respective surfaces of the first protrusion and the second protrusion.
[0016] In one embodiment, at least one opening that opens toward the second direction may be defined at the lower part of the support member.
[0017] In one embodiment, the number of the first protrusions may be the same as the number of the second protrusions.
[0018] In one embodiment, the number of the first protrusions may be the same as the number of the openings.
[0019] In one embodiment, the first protrusion may correspond one-to-one with the opening.
[0020] In one embodiment, when the object is unfolded, the first protrusion and the second protrusion can be inserted into the lower part of the support member.
[0021] In one embodiment, when the object is folded, the first protrusion and the second protrusion can be disengaged from the lower part of the support member.
[0022] In one embodiment, the first rotating member can reciprocate between the first direction and the second direction, and the second rotating member can reciprocate between the opposite directions of the first direction and the second direction.
[0023] In one embodiment, the object may be a flexible member.
[0024] To achieve the aforementioned objective of this utility model, an inspection device according to another embodiment of this utility model may include: a support member for supporting an object and capable of moving in a first direction and the opposite direction of the first direction, and having an opening defined at the lower part of the support member; a plurality of elastic members disposed at the lower part of the support member; a first plate spaced apart from the support member in a second direction intersecting the first direction and having a first protrusion protruding in the opposite direction of the second direction, the first plate being used to lift the support member in the first direction; and a second plate spaced apart from the support member in the opposite direction of the second direction and having a second protrusion protruding in the second direction, the second plate being used to lift the support member in the first direction.
[0025] In one embodiment, when the object is unfolded, the first protrusion and the second protrusion are each inserted into the opening of the support member.
[0026] In one embodiment, when the object is folded, the first protrusion and the second protrusion each disengage from the opening in the support member.
[0027] (Utility Model Effect)
[0028] An inspection device according to an embodiment of the present invention may include: a support member for supporting an object and movable in a first direction and in the opposite direction; a first plate spaced apart from the support member in a second direction intersecting the first direction, the first plate being used to lift the support member in the first direction; a second plate spaced apart from the support member in the opposite direction to the second direction, the second plate being used to lift the support member in the first direction; a first rotating member connected to the first plate and used to rotate the first plate; and a second rotating member connected to the second plate and used to rotate the second plate.
[0029] Therefore, when the object is folded and unfolded, by moving the support member in a first direction and the opposite direction, a folding test can be performed in conjunction with the object. That is, the support member can move a distance corresponding to the distance the object moves when folded. This allows for accurate folding tests on the object located in the inspection device. As a result, the defect rate of the object is reduced, the reliability of the inspection device is increased, and more accurate folding tests can be achieved.
[0030] However, the effects of this utility model are not limited to the above-mentioned effects, and various extensions are possible without departing from the spirit and field of this utility model. Attached Figure Description
[0031] Figure 1 This is a perspective view of an inspection device according to an embodiment of the present invention.
[0032] Figure 2 It is shown Figure 1 Top view of the supporting components.
[0033] Figure 3 It is shown Figure 1 A sectional view of the supporting components.
[0034] Figure 4 It is shown Figure 1 Top view of the board.
[0035] Figure 5 It is shown Figure 1 A three-dimensional diagram of the plate.
[0036] Figure 6 It is shown Figure 1 A perspective view of an embodiment of the inspection device when folded.
[0037] Figure 7 It is shown Figure 1 A perspective view of an embodiment of the inspection device when it is deployed.
[0038] Figure 8 It shows the placement in Figure 1 A top view of the display device when it is unfolded.
[0039] Figure 9 It shows the placement in Figure 1 A cross-sectional view of the display device when folded.
[0040] Figures 10 to 13 It is shown Figure 1 The diagram shows the folding process of the inspection device.
[0041] Explanation of reference numerals in the attached figures
[0042] ID: Inspection device; SP: Support member; WN: Plate; RT: Rotating member; SR: Elastic member; FP: Fixed member; GB: Gearbox; PT: Protrusion; BD: Main body; DD: Display device; DA: Display area; SA: Peripheral area; FA: Folding area; SCR: Screw; OA: Opening; DD: Display device Detailed Implementation
[0043] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals will be used for the same constituent elements in the drawings, and repeated descriptions of the same constituent elements will be omitted.
[0044] In this specification, a plane can be defined by a first direction D1 and a second direction D2 intersecting the first direction D1. For example, the second direction D2 can be perpendicular to the first direction D1. Furthermore, a third direction D3 can be the normal direction of the plane. That is, the third direction D3 can be perpendicular to the plane formed by the first direction D1 and the second direction D2.
[0045] Figure 1 This is a perspective view of an inspection device according to an embodiment of the present invention.
[0046] Reference Figure 1 The inspection device ID may include a gearbox GB and a rotating component RT.
[0047] The inspection device ID may further include a support member SP, a plate WN, a fixing member FP, and an elastic member SR disposed in the gearbox GB. The plate WN may include a first plate WN1 and a second plate WN2. The gearbox GB may be connected to the rotating member RT. That is, the inspection device ID may be an inspection device that folds and unfolds an object located in the inspection device ID via the gearbox GB and the rotating member RT, etc. For example, the object may be a display device (e.g., Figure 10 Display device (DD).
[0048] The support member SP can be disposed on the gearbox GB. Specifically, the support member SP can be disposed on the gearbox GB in conjunction with a fixing member FP disposed at the lower part of the gearbox. That is, the support member SP can be coupled to the fixing member FP by a plurality of screws SCR and disposed at the center of the gearbox GB. The support member SP can support the object located on the inspection device ID.
[0049] In one embodiment, the support member SP can move in the first direction D1 and / or the opposite direction of the first direction D1. The support member SP can move in the first direction D1 and / or the opposite direction of the first direction D1 when the inspection device ID is folded and unfolded. For example, when the inspection device ID is folded, the support member SP can move in the opposite direction of the first direction D1. When the inspection device ID is unfolded, the support member SP can move in the first direction D1. The shape of the support member SP will be referred to... Figure 2 and Figure 3This will be discussed later.
[0050] An elastic member SR may be disposed between the support member SP and the fixing member FP. The elastic member SR can provide elasticity, enabling the support member SP to move along the first direction D1 and / or the opposite direction of the first direction D1. For example, the elastic member SR can be stretched when the inspection device ID is unfolded. The elastic member SR can return to its original position when the inspection device ID is folded.
[0051] In one embodiment, the elastic member SR may include a spring. In another embodiment, the elastic member SR may include a sponge. However, the embodiments of this utility model are not limited thereto.
[0052] The first plate WN1 and the second plate WN2 can be disposed on both sides of the support member SP. Specifically, the first plate WN1 can be disposed spaced apart from the support member SP along the second direction D2. The second plate WN2 can be disposed spaced apart from the support member SP along the opposite direction of the second direction D2.
[0053] In one embodiment, when the inspection device ID is folded and unfolded, the first plate WN1 and the second plate WN2 can move the support member SP in the first direction D1 and / or the opposite direction of the first direction D1. For example, when the inspection device ID is folded, the first plate WN1 and the second plate WN2 can move the support member SP in the opposite direction of the first direction D1. As another example, when the inspection device ID is unfolded, the first plate WN1 and the second plate WN2 can move the support member SP in the first direction D1.
[0054] The shapes of the first plate WN1 and the second plate WN2 will be referenced. Figure 4 and Figure 5 The details will be discussed later.
[0055] The rotating component RT may include a first rotating component RT1 and a second rotating component RT2. Specifically, the first rotating component RT1 may be engaged with one side of the gearbox GB in the second direction D2. The second rotating component RT2 may be engaged with the other side of the gearbox GB in the opposite direction of the second direction D2.
[0056] The first rotating member RT1 and the second rotating member RT2 can be coupled with the gearbox GB to rotate the gearbox GB. Thus, when the first rotating member RT1 rotates, the first plate WN1 can rotate together. When the second rotating member RT2 rotates, the second plate WN2 can rotate together.
[0057] In one embodiment, the first rotating member RT1 can reciprocate between the first direction D1 and the second direction D2. That is, the first rotating member RT1 can rotate between the first direction D1 and the second direction D2 with a rotation angle of approximately 90 degrees. The second rotating member RT2 can reciprocate between the first direction D1 and the second direction D2 in opposite directions. That is, the second rotating member RT2 can rotate between the first direction D1 and the second direction D2 in opposite directions with a rotation angle of approximately 90 degrees. In other words, the inspection device ID can be an inward folding inspection device that rotates the upper surface of the object inward. However, the embodiments of this utility model are not limited to this. The inspection device ID can also be an outward folding inspection device that rotates the upper surface of the object outward.
[0058] Figure 2 It is shown Figure 1 Top view of the supporting components. Figure 3 It is shown Figure 1 A sectional view of the supporting components.
[0059] Reference Figures 1 to 3 The support member SP may have a rectangular shape in a plane. However, embodiments of the present invention are not limited to this. The shape of the support member SP in a plane can be defined in various ways according to the shape of the object located in the inspection device ID.
[0060] The support member SP may have an opening OA defined at its lower part. In one embodiment, the support member SP may have an opening OA that opens in the cross-section toward the second direction D2. Multiple openings OA may be defined along the third direction D3. For example, the openings OA may include a first opening OA1 and a second opening OA2 defined along the third direction D3. However, embodiments of the present invention are not limited thereto. The openings OA of the support member SP may also be defined as one or more.
[0061] The opening OA provides space for the plate WN to be inserted. Therefore, when the plate WN needs to lift the support member SP, it can enter the opening OA and lift the support member SP. That is, the support member SP can be lifted by the plate WN under the action of the opening OA.
[0062] In one embodiment, the elastic member SR may be disposed between the supporting member SP and the fixing member FP. For example... Figure 3 As shown, the elastic member SR can be configured at the end of the support member SP along the third direction D3. That is, the opening OA can be defined between the elastic members SR, and the elastic members SR can be configured spaced apart from each other along the third direction D3.
[0063] Multiple elastic members SR may be arranged at the lower part of the support member SP. For example, two elastic members SR may be arranged at the lower part of the support member SP.
[0064] For example, the elastic member SR may include a first elastic member SR1 and a second elastic member SR2 along the third direction D3. However, the embodiments of this utility model are not limited thereto. The elastic member SR may also be one or more arranged at the lower part of the support member SP.
[0065] Figure 4 It is shown Figure 1 Top view of the board. Figure 5 It is shown Figure 1 A three-dimensional diagram of the plate. Figure 6 It is shown Figure 1 A perspective view of an embodiment of the inspection device when folded. Figure 7 It is shown Figure 1 A perspective view of an embodiment of the inspection device when it is deployed.
[0066] Since the second plate WN2 will also have the same shape and function as the first plate WN1, therefore... Figure 4 and Figure 5 The description focuses on the first plate WN1. That is, the second plate WN2 may have a shape symmetrical to the first plate WN1.
[0067] Reference Figures 3 to 7The first plate WN1 may include a first main body portion BD1 and a first protrusion PT1. The first protrusion PT1 may protrude from the first main body portion BD1 in the opposite direction to the second direction D2. The first protrusion PT1 may include a first-1 protrusion PT1-1 and a first-2 protrusion PT1-2. The first-1 protrusion PT1-1 and the first-2 protrusion PT1-2 of the first protrusion PT1 may be spaced apart from each other on the third direction D3. However, the embodiments of this utility model are not limited thereto. The first protrusion PT1 may also include one or more protrusions.
[0068] The number of the first protrusions PT1 can be the same as the number of openings OA of the support member SP. For example, the first protrusions PT1 may include the first-1 protrusion PT1-1 and the first-2 protrusion PT1-2, and the openings OA may include the first opening OA1 and the second opening OA2. In this case, the first protrusions PT1 can correspond one-to-one with the openings OA. That is, the first-1 protrusion PT1-1 can correspond to the second opening OA2, and the first-2 protrusion PT1-2 can correspond to the first opening OA1.
[0069] In one embodiment, the second plate WN2 may include a second protrusion extending from the second plate WN2 in the second direction D2. The number of the second protrusions may be the same as the number of the first protrusions PT1. For example, the number of the first protrusions PT1 and the number of the second protrusions may each be two. However, the embodiments of this utility model are not limited thereto.
[0070] In one embodiment, in the inspection device (e.g., Figure 1 When the inspection device (ID) is folded, the first protrusion PT1 can disengage from the opening OA at the lower part of the support member SP. That is, as Figure 6 As shown, in the inspection device (e.g., Figure 1 When the inspection device (ID) is folded, the first-1 protrusion PT1-1 and the first-2 protrusion PT1-2 of the first plate WN1 can be dislodged from the lower part of the support member SP. Thus, the support member SP can move in the opposite direction to the first direction D1.
[0071] In one embodiment, in the inspection device (e.g., Figure 1 When the inspection device (ID) is deployed, the first protrusion PT1 can enter the opening OA at the lower part of the support member SP. That is, as Figure 7 As shown, in the inspection device (e.g., Figure 1When the inspection device (ID) is unfolded, the first-1 protrusion PT1-1 and the first-2 protrusion PT1-2 of the first plate WN1 can be inserted into the lower part of the support member SP. Thus, the support member SP can be lifted by the first plate WN1 and the second plate WN2 and moved in the first direction D1.
[0072] In one embodiment, the elastic member SR can be stretched when the inspection device ID is deployed. Specifically, when the inspection device ID is deployed, the elastic member SR can be stretched in the first direction D1. That is, as the first plate WN1 and the second plate WN2 lift the support member SP in the first direction D1, the elastic member SR can be stretched in the first direction D1.
[0073] In one embodiment, when the inspection device ID is folded, the elastic member SR can be restored. Specifically, when the inspection device ID is folded, the elastic member SR can be restored in the opposite direction to the first direction D1. That is, as the first plate WN1 and the second plate WN2 disengage from the support member SP, the elastic member SR can be restored in the opposite direction to the first direction D1.
[0074] In one embodiment, the first protrusion PT1 of the first plate WN1 may further include a coating film surrounding the first protrusion PT1. When the first protrusion PT1 contacts the gearbox GB and / or the support member SP, the coating film can reduce wear on the first protrusion PT1. For example, the coating film may contain alkyd release agents, silicone release agents, fluorinated release agents, unsaturated ester release agents, polyolefin release agents, wax release agents, etc. These can be used alone or in combination with each other. However, embodiments of this invention are not limited thereto.
[0075] Figure 8 It shows the placement in Figure 1 A top view of the display device when it is unfolded. Figure 9 It shows the placement in Figure 1 A cross-sectional view of the display device when folded.
[0076] Reference Figure 8 and Figure 9 The upper surface of the display device DD can be defined as the display surface DS. The display surface DS can have a plane defined by the second direction D2 and the third direction D3. Images generated in the display device DD can be provided to the user through the display surface DS.
[0077] The display surface DS may include a display area DA and a peripheral area SA. The display area DA may display an image, while the peripheral area SA may not display an image. The peripheral area SA may be located around the display area DA. For example, the peripheral area SA may surround the display area DA on a plane.
[0078] The display device DD can be a flexible display device. The display device DD can be a foldable display device that can be folded or unfolded. The display device DD can include a first non-foldable region NFA1, a second non-foldable region NFA2, and a foldable region FA. The first non-foldable region NFA1 can be arranged adjacent to the foldable region FA in the second direction D2. The second non-foldable region NFA2 can be spaced apart from the first non-foldable region NFA1 in the opposite direction of the second direction D2. That is, the foldable region FA can be located between the first non-foldable region NFA1 and the second non-foldable region NFA2.
[0079] The folding region FA can be bent with reference to a folding axis FX parallel to the third direction D3, thereby folding the display device DD. In one embodiment, as... Figure 9 As shown, the display device DD can be in-folded so that the display surface DS is not exposed to the outside. That is, when the display device DD is folded, the first non-folded region NFA1 and the second non-folded region NFA2 of the display surface DS can face each other. However, the embodiments of this utility model are not limited to this. In another embodiment, the display device DD can also be out-folded so that the display surface DS is exposed to the outside.
[0080] Figure 8 The illustration shows that the display device DD includes two non-folding regions (the first non-folding region NFA1 and the second non-folding region NFA2) and one folding region (the folding region FA), but this is merely illustrative and the present invention is not limited thereto. For example, the display device DD may also include three or more non-folding regions and two or more folding regions located between the non-folding regions.
[0081] Figures 10 to 13 It is shown Figure 1 The diagram shows the folding process of the inspection device.
[0082] Reference Figure 1 and Figure 10The display device DD can be located on the inspection device ID. The display device DD can be located on the support member SP and the plate WN. Specifically, the folded area FA of the display device DD can be configured on a plane to overlap with the support member SP. Furthermore, the first non-folded area NFA1 and the second non-folded area NFA2 of the display device DD can be configured to partially overlap with the plate WN.
[0083] like Figure 10 As shown, when the inspection device ID is deployed, the first plate WN1 and the second plate WN2 can be located at the lower part of the support member SP. Specifically, when the inspection device ID is deployed, the first plate WN1 and the second plate WN2 can contact the lower part of the support member SP and lift the support member SP. Thus, the elastic member (e.g., ...) located at the lower part of the support member SP... Figure 3 The elastic member SR can be stretched in the first direction D1.
[0084] Further reference Figures 11 to 13 The inspection device ID can be folded via the rotating member RT. The first plate WN1 can be rotated from the second direction D2 to the first direction D1 via the first rotating member RT1. The second plate WN2 can be rotated from the opposite direction of the second direction D2 to the first direction D1 via the second rotating member RT2.
[0085] As the inspection device ID is folded, the first protrusion of the first plate WN1 (e.g., Figure 4 The first protrusion PT1 and the second protrusion of the second plate WN2 can be disengaged from the lower part of the support member SP. Specifically, the first protrusion (e.g., Figure 4 The first protrusion PT1) and the second protrusion can be seen from the opening of the support member SP (e.g., Figure 3 The opening (OA) is dislodged.
[0086] As the inspection device ID is folded, the support member SP can descend in the opposite direction to the first direction D1. That is, the first plate WN1 and the second plate WN2 can be disengaged from the support member SP, which is located in the elastic member (e.g., Figure 3 Under the action of the elastic force of the elastic member SR, it descends in the opposite direction to the first direction D1.
[0087] The inspection device ID can also be executed in reverse order. Figures 10 to 13 The process of folding in the middle. That is, by performing a folding operation from... Figure 13 Start to Figure 10 During the corresponding process up to this point, the inspection device ID can also be deployed. At this time, the first plate WN1 and the second plate WN2 can be inserted into the lower part of the support member SP, and the support member SP can rise in the first direction D1.
[0088] In one embodiment, when the display device DD is folded and unfolded, the display device DD can move in the first direction D1 and in the opposite direction of the first direction D1. Specifically, the folding area of the display device DD (e.g., Figure 8 The folding area FA can move in the first direction D1 and the opposite direction of the first direction D1 when folded and unfolded. During the folding and unfolding experiment of the inspection device ID, the support member SP can also move in the first direction D1 and the opposite direction of the first direction D1. That is, the support member SP of the inspection device ID can move in conjunction with the display device DD.
[0089] For example, the folded area of the display device DD (e.g., Figure 8 When the folded area FA is folded and unfolded, the folded area can move any distance along the first direction D1. The support member SP of the inspection device ID can also move substantially the same distance along the first direction D1 when folded and unfolded. That is, the inspection device ID can be implemented in substantially the same shape as the display device DD when folded and unfolded.
[0090] Therefore, when the display device DD, which is the object, is folded and unfolded, the folding test can be performed in conjunction with the object by moving the support member SP in the first direction D1 and the opposite direction of the first direction D1. That is, the support member SP can move a distance corresponding to the distance the object moves when it is folded. Thus, compared with the fixed type in which the support member SP does not move, an accurate folding test can be performed on the object located in the inspection device ID. As a result, the defect rate of the object is reduced, the reliability of the inspection device ID is increased, and a more accurate folding test can be achieved.
[0091] This invention can be applied to display devices and electronic devices including them. For example, this invention can be applied to high-resolution smartphones, mobile phones, smart pads, smartwatches, tablet PCs, vehicle navigation systems, televisions, computer monitors, laptops, etc.
[0092] While the above description has been based on exemplary embodiments of the present invention, it should be understood by those skilled in the art that various modifications and alterations can be made to the present invention without departing from the spirit and scope of the present invention as set forth in the appended claims.
Claims
1. An inspection apparatus characterized by comprising: a support member for supporting an object and capable of moving in a first direction and a direction opposite to the first direction; a first plate disposed apart from the support member in a second direction intersecting the first direction, the first plate for lifting the support member in the first direction; a second plate disposed apart from the support member in a direction opposite to the second direction, the second plate for lifting the support member in the first direction; a first rotating member connected to the first plate and for rotating the first plate; and a second rotating member connected to the second plate and for rotating the second plate.
2. The inspection apparatus according to claim 1, further characterized by comprising: a plurality of elastic members disposed at a lower portion of the support member.
3. The inspection apparatus according to claim 2, wherein the plurality of elastic members are respectively disposed at ends of the support member.
4. The inspection apparatus according to claim 1, wherein the first plate includes at least one first protrusion protruding in a direction opposite to the second direction, the second plate includes at least one second protrusion protruding in the second direction.
5. The inspection apparatus according to claim 4, wherein the first protrusion and the second protrusion are each two or more in number.
6. The inspection apparatus according to claim 4, further characterized by comprising: a coating film covering surfaces of the first protrusion and the second protrusion.
7. The inspection apparatus according to claim 4, wherein when the object is unfolded, the first protrusion and the second protrusion are inserted into a lower portion of the support member.
8. The inspection apparatus according to claim 4, wherein when the object is folded, the first protrusion and the second protrusion are withdrawn from the lower portion of the support member.
9. The inspection apparatus according to claim 1, wherein the first rotating member reciprocally rotates between the first direction and the second direction, the second rotating member reciprocally rotates between the first direction and a direction opposite to the second direction.
10. An inspection apparatus characterized by comprising: a support member for supporting an object and capable of moving in a first direction and a direction opposite to the first direction, and defining an opening at a lower portion of the support member; a plurality of elastic members disposed at the lower portion of the support member; a first plate disposed apart from the support member in a second direction intersecting the first direction, and having a first protrusion protruding in a direction opposite to the second direction, the first plate for lifting the support member in the first direction; and a second plate disposed apart from the support member in a direction opposite to the second direction, and having a second protrusion protruding in the second direction, the second plate for lifting the support member in the first direction.