Lifting tool for disassembling and assembling lens of ion implanter

Abstract

The utility model belongs to the technical field of ion implantation, and discloses a lifting tool for dismounting and mounting a lens of an ion implanter, which comprises a guide shaft, a bearing seat and a plurality of bearings fixed on the bearing seat, the bearing seat is sleeved on the guide shaft and can rotate relative to the guide shaft and slide along the guide shaft, and inner rings of the bearings are fixedly connected with the bearing seat. Outer rings of the bearings can rotate relative to the bearing seats, the multiple bearings are arranged in the circumferential direction of the guide shaft, the axes of the bearings are obliquely arranged relative to the axis of the guide shaft, and the outer surfaces of the bearings are tangent to the surface of the guide shaft. The device is simple in structure and convenient to disassemble, assemble and maintain; the surface of the bearing is tangent to the guide shaft, the lifting function is achieved through rolling friction, friction force is small, and transmission efficiency is high; lifting is slow and stable, the lens is not prone to being damaged in the lens dismounting process, and the accuracy of the lens mounting position and the dismounting safety are improved.

Description

Technical Field

[0001] This utility model relates to the field of ion implantation technology, and more specifically, to a lifting fixture for assembling and disassembling lenses in an ion implanter. Background Technology

[0002] Ion implantation is a crucial technology in modern science. In the process of implanting ions into semiconductor wafers, lenses are often used to diffuse and focus the ion beam. In the ion implantation process, beam energy, implantation depth, implantation uniformity, implantation angle, and beam width are important standards for evaluating the maturity of ion implantation technology. To ensure the accuracy of beam diffusion, focusing, and beam angle control, a fixture is needed to ensure the accuracy of lens mounting and the safety of disassembly. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model innovatively provides a lifting fixture for lens assembly and disassembly in ion implanters. It features a simple structure, convenient assembly and disassembly, and easy maintenance. The bearing surface is tangent to the guide shaft, and the lifting function is achieved through rolling friction, resulting in low friction and high transmission efficiency. The lifting is slow and stable, reducing the risk of damaging the lens during assembly and disassembly, and improving the accuracy of lens installation and the safety of disassembly.

[0004] To achieve the aforementioned technical objectives, this utility model discloses a lifting fixture for assembling and disassembling lenses in an ion implanter, comprising a guide shaft, a bearing housing, and multiple bearings fixed on the bearing housing.

[0005] The bearing housing is sleeved on the guide shaft and can rotate relative to and slide along the guide shaft. The inner ring of the bearing is fixedly connected to the bearing housing, and the outer ring of the bearing can rotate relative to the bearing housing.

[0006] The plurality of bearings are arranged circumferentially along the guide shaft, the axis of the bearing is inclined relative to the axis of the guide shaft, and the outer surface of the bearing is tangent to the surface of the guide shaft.

[0007] Furthermore, it also includes a rotation drive sleeve, which is sleeved on the guide shaft and located on the lower side of the bearing seat. The rotation drive sleeve is fixedly connected to the bearing seat and drives the bearing seat to rotate.

[0008] Furthermore, the rotation drive sleeve includes an inner sleeve and an outer sleeve, which are fixedly connected to each other, and the inner wall of the inner sleeve has a smooth surface.

[0009] Furthermore, the inner sleeve is provided with an elastic ring, and an annular groove is provided on the inner wall of the outer sleeve, and the elastic ring is engaged in the annular groove.

[0010] Furthermore, the lower end of the outer sleeve is provided with an annular flange, and the lower end of the inner sleeve abuts against the annular flange.

[0011] Furthermore, a buffer pad is fixed to the upper end face of the bearing housing.

[0012] Furthermore, the buffer pad is a rubber pad or a nylon pad.

[0013] Furthermore, a protective sleeve is provided on the lower end of the guide shaft.

[0014] Furthermore, the protective sleeve is a rubber sleeve.

[0015] Furthermore, the lower end face of the bearing housing is provided with a bearing fixing groove, the center of the bearing fixing groove is provided with a protrusion, the bearing is disposed in the bearing fixing groove, and the inner ring of the bearing is sleeved on the protrusion and fixedly connected to the protrusion.

[0016] The beneficial effects of this utility model are as follows:

[0017] This utility model discloses a lifting fixture for lens assembly and disassembly in an ion implanter. It has a simple structure, is easy to assemble and disassemble, and is convenient to maintain. The bearing surface is tangent to the guide shaft, and the lifting function is achieved through rolling friction, resulting in low friction and high transmission efficiency. The lifting is slow and stable, which makes it less likely to damage the lens during lens assembly and disassembly, thereby improving the accuracy of lens installation position and the safety of disassembly. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the lifting fixture for disassembling and assembling lenses in an ion implanter, according to an embodiment of this utility model.

[0019] Figure 2 This is a structural schematic diagram from another perspective of the lifting fixture (hidden outer sleeve) for disassembling and assembling the lens of an ion implanter, according to an embodiment of this utility model.

[0020] Figure 3 This is a schematic diagram of multiple bearings arranged circumferentially along the conductor axis according to an embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the lower end face structure of the bearing housing according to an embodiment of the present invention.

[0022] Figure 5 This is a side view of the outer sleeve according to an embodiment of the present utility model.

[0023] Figure 6 yes Figure 5 A sectional view along line AA.

[0024] Figure 7This is a schematic diagram of the lower end structure of the outer sleeve according to an embodiment of the present invention.

[0025] Figure 8 This is a schematic diagram of the upper structure of the outer sleeve according to an embodiment of the present invention.

[0026] In the picture,

[0027] 1. Guide shaft; 2. Bearing housing; 21. Bearing fixing groove; 22. Protrusion; 23. Through hole; 24. First threaded hole; 3. Bearing; 4. Rotation drive sleeve; 41. Inner sleeve; 42. Outer sleeve; 421. Annular groove; 422. Annular flange; 423. Second threaded hole; 43. Elastic ring; 5. Buffer pad; 51. First through hole; 6. Protective sleeve; 7. Shoulder screw; 8. Countersunk screw. Detailed Implementation

[0028] The lifting fixture for lens assembly and disassembly of an ion implanter provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0029] This embodiment specifically discloses a lifting fixture for lens assembly and disassembly in an ion implanter, such as... Figure 1 and 2 As shown, it includes a guide shaft 1, a bearing housing 2, and multiple bearings 3 fixed on the bearing housing 2. The bearing housing 2 is sleeved on the guide shaft 1 and can rotate relative to the guide shaft 1 and slide along the guide shaft 1, as shown. Figure 4 As shown, a through hole 23 is provided in the center of the bearing housing 2. The bearing housing 2 is fitted onto the guide shaft 1 through the through hole 23. The diameter of the through hole 23 is slightly larger than the diameter of the guide shaft 1, thus allowing the bearing housing 2 to rotate relative to the guide shaft 1 and also slide along the guide shaft 1. The inner ring of the bearing 3 is fixedly connected to the bearing housing 2, and the outer ring of the bearing 3 can rotate relative to the bearing housing 2. Figure 2 and 3 As shown, multiple bearings 3 are arranged circumferentially along the guide shaft 1. Preferably, the multiple bearings 3 are evenly distributed circumferentially along the guide shaft 1, such as... Figure 3 As shown, the axis of bearing 3 is inclined relative to the axis of guide shaft 1, and all bearings 3 have the same inclination angle, that is, the angle between the axis of all bearings 3 and the axis of guide shaft 1 is the same, and the outer surface of bearing 3 is tangent to the surface of guide shaft 1. The number of bearings 3 and the inclination angle of bearing 3 are set according to actual needs, and this application does not impose any special limitations. In this embodiment, the number of bearings 3 is 3.

[0030] When the bearing housing 2 moves around the guide shaft 1, the outer ring of the bearing 3 rolls and rubs against the surface of the guide shaft 1. Since the axial direction of the bearing 3 is inclined relative to the axis of the guide shaft 1, the bearing housing 2 and the bearing 3 move obliquely relative to the guide shaft 1 and move up and down in a straight line along the guide shaft 1 while rotating.

[0031] When using the lifting fixture of this application to install or remove a lens, the guide shaft 1 is placed vertically, the lens is fitted onto the guide shaft 1 and positioned above the bearing seat 2, and the lens is tilted. The lens can be raised and lowered along the guide shaft 1 via the linear movement of the bearing seat 2, thus enabling installation and removal. The bearing 3 and the guide shaft 1 experience rolling friction, resulting in low friction, high transmission efficiency, and slow, stable lifting, reducing the probability of lens damage during the lens's movement along the guide shaft 1.

[0032] To further reduce lens damage, such as Figure 1 As shown, a buffer pad 5 is fixed to the upper end face of the bearing housing 2. The buffer pad 5 is annular, sleeved on the guide shaft 1, and fixedly connected to the upper end face of the bearing housing 2. The buffer pad 5 is fixed to the upper end face of the bearing housing 2 by countersunk screws 8. The buffer pad 5 has multiple first through holes 51 along its circumference. The first through holes 51 are stepped, as shown... Figure 4 As shown, the bearing housing 2 has a first threaded hole 24 that matches the countersunk screw 8. The number and position of the first threaded holes 24 correspond to the number and position of the first through holes 51. The screw of the countersunk screw 8 passes through the first through hole 51 and is screwed into the first threaded hole 24. The nut of the countersunk screw 8 is pressed on the stepped surface of the first through hole 51. The top of the countersunk screw 8 does not exceed the top of the buffer pad 5.

[0033] Preferably, the buffer pad 5 is a rubber pad or a nylon pad. The rubber pad is elastic and relatively smooth, while the nylon pad is relatively soft, which avoids the lens from directly contacting the bearing seat 2 and causing impacts, thus reducing damage to the lens.

[0034] Optionally, such as Figure 2 and 4 As shown, the lower end face of the bearing housing 2 is provided with a bearing fixing groove 21, which surrounds the through hole 23 and communicates with it. A protrusion 22 is provided at the center of the bearing fixing groove 21. The bearing 3 is disposed within the bearing fixing groove 21, and its inner ring is fitted onto and fixedly connected to the protrusion 22. Optionally, a threaded hole is provided at the center of the protrusion 22. A shoulder screw 7, connected by an internal thread in the threaded hole, presses the inner ring of the bearing 3 onto the protrusion 22. The nut of the shoulder screw 7 presses against the lower end face of the inner ring of the bearing 3, and the screw of the shoulder screw 7 is screwed into the threaded hole at the center of the protrusion 22. A gap exists between the outer ring of the bearing 3 and the groove wall of the bearing fixing groove 21, allowing the outer ring of the bearing 3 to rotate. The portion of the outer ring of the bearing 3 near the guide shaft 1 is located at the connection between the bearing fixing groove 21 and the through hole 23, and is tangent to the surface of the guide shaft 1.

[0035] In some embodiments, such as Figure 1 and 2As shown, the lifting fixture for lens assembly and disassembly of an ion implanter according to this application also includes a rotating drive sleeve 4. The rotating drive sleeve 4 is sleeved on the guide shaft 1 and located below the bearing seat 2. The rotating drive sleeve 4 is fixedly connected to the bearing seat 2, and drives the bearing seat 2 to rotate. The rotating drive sleeve 4 facilitates the application of force by the operator, and its length allows the hand to maintain a certain distance from the ion implanter, facilitating operation. The inner diameter of the rotating drive sleeve 4 is slightly larger than the diameter of the guide shaft 1, allowing it to rotate and slide relative to the guide shaft 1.

[0036] Optionally, such as Figure 1 and 2 As shown, the rotating drive sleeve 4 includes an inner sleeve 41 and an outer sleeve 42, which are fixedly connected. The inner wall of the inner sleeve 41 is a smooth surface to minimize the friction between the inner sleeve 41 and the guide shaft 1. The inner sleeve 41 and the outer sleeve 42 are made of different materials, with the outer sleeve 42 having a greater structural strength than the inner sleeve 41. Preferably, the inner sleeve 41 is made of plastic.

[0037] Optionally, such as Figure 2 As shown, the inner sleeve 41 is fitted with an elastic ring 43 on the outer sleeve, such as... Figure 6 As shown, an annular groove 421 is formed on the inner wall of the outer sleeve 42, and the elastic ring 43 is engaged in the annular groove 421. After being stretched, the elastic ring 43 is firmly fitted onto the inner sleeve 41, and the outer periphery of the elastic ring 43 is engaged in the annular groove 421, realizing the fixed connection between the inner sleeve 41 and the outer sleeve 42, so that the inner sleeve 41 and the outer sleeve 42 rotate and slide synchronously. Preferably, the elastic ring 43 is fitted onto the inner sleeve 41 near the upper end.

[0038] Furthermore, such as Figure 6 and 7 As shown, the lower end of the outer sleeve 42 is provided with an annular flange 422, and the lower end of the inner sleeve 41 abuts against the annular flange 422 to prevent the inner sleeve 41 from sliding down out of the outer sleeve 42. The annular flange 422 cooperates with the elastic ring 43 to firmly fix the inner sleeve 41 and the outer sleeve 42 together.

[0039] In this embodiment, the outer sleeve 42 is fixedly connected to the bearing housing 2. For example... Figure 5-8 As shown, the front end face of the outer sleeve 42 is provided with a second threaded hole 423 corresponding to the position and number of the first threaded hole 24. The screw of the countersunk screw 8 can be screwed into the second threaded hole 423 to connect the buffer pad 5, the bearing seat 2 and the outer sleeve 42 together, so that the buffer pad 5, the bearing seat 2 and the rotation drive sleeve 4 can rotate and slide synchronously. For ease of installation and connection, the outer diameter of the front end face of the outer sleeve 42 is the same as the outer diameter of the bearing seat 2.

[0040] In some embodiments, such as Figure 1-3 As shown, a protective sleeve 6 is fitted over the lower end of the guide shaft 1, and the protective sleeve 6 can be fixed to the guide shaft 1 with screws. The protective sleeve 6 is used to protect the lens and prevent it from being bumped by the guide shaft 1 when it slides off. Preferably, the protective sleeve 6 is a rubber sleeve.

[0041] The working principle of the lifting fixture in this application is as follows:

[0042] Multiple bearings 3 have outer surfaces tangent to the guide shaft 1. By rotating the rotating drive sleeve 4, the bearings 3 are driven to rotate. The bearings 3 roll on the surface of the guide shaft 1, generating friction. This causes the rotating drive sleeve 4, bearing housing 2, and buffer pad 5, which are fixed together, to rotate while moving linearly along the guide shaft 1. This causes the rotating drive sleeve 4, bearing housing 2, and buffer pad 5, which are fixed together, to rise and fall along the guide shaft 1.

[0043] The method of using the lifting fixture in this application is as follows:

[0044] When disassembling the lens, insert the upper end of the guide shaft 1 (without the protective sleeve 6) into the lens bearing seat 2, so that the lens is fitted onto the guide shaft 1. Rotate the drive sleeve 4 in one direction, such as clockwise. The bearing 3 rolls along the guide shaft 1. Under the action of rolling friction, the drive sleeve 4, bearing seat 2, and buffer pad 5 slowly rise along the guide shaft 1, approaching the lens, until the buffer pad 5 and the lens are in close contact. Remove the lens mounting screws. Then rotate the drive sleeve 4 in the opposite direction (counterclockwise). The drive sleeve 4, bearing seat 2, and buffer pad 5 slowly descend along the guide shaft 1, while the lens moves downwards simultaneously, until the lens is safely removed from the end of the guide shaft 1 with the protective sleeve 6, completing the lens disassembly. During installation, the process is reversed. Insert the guide shaft 1 with the lens installed into the designated position, with the lens above the bearing seat 2. Rotate the drive sleeve 4 in one direction. The drive sleeve 4, bearing seat 2, and buffer pad 5 slowly rise along the guide shaft 1, while the lens moves upwards slowly, until the lens is installed in place. Remove the lifting fixture.

[0045] The guide shaft 1 of this application has a smooth surface, which will not cause wear damage to the bearing 3, bearing housing 2, rotating drive sleeve 4, and lens, and features low friction and high transmission efficiency. Furthermore, the overall structure is simple, easy to assemble and disassemble, and convenient to maintain, enabling efficient, stable, and safe disassembly and installation of the ion implanter lens. This ensures the accuracy of the lens installation position and the safety of disassembly, guaranteeing the accuracy of beam diffusion, focusing degree, and beam angle control.

[0046] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0047] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0048] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0050] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A lifting fixture for assembling and disassembling lenses in an ion implanter, characterized in that, It includes a guide shaft (1), a bearing housing (2), and multiple bearings (3) fixed on the bearing housing (2). The bearing housing (2) is sleeved on the guide shaft (1) and can rotate relative to the guide shaft (1) and slide along the guide shaft (1). The inner ring of the bearing (3) is fixedly connected to the bearing housing (2), and the outer ring of the bearing (3) can rotate relative to the bearing housing (2). The plurality of bearings (3) are arranged circumferentially along the guide shaft (1), the axis of the bearing (3) is inclined relative to the axis of the guide shaft (1), and the outer surface of the bearing (3) is tangent to the surface of the guide shaft (1).

2. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 1, characterized in that, It also includes a rotation drive sleeve (4), which is sleeved on the guide shaft (1) and located on the lower side of the bearing seat (2). The rotation drive sleeve (4) is fixedly connected to the bearing seat (2) and drives the bearing seat (2) to rotate.

3. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 2, characterized in that, The rotating drive sleeve (4) includes an inner sleeve (41) and an outer sleeve (42) with inner and outer sleeves respectively. The inner sleeve (41) is fixedly connected to the outer sleeve (42), and the inner wall of the inner sleeve (41) has a smooth surface.

4. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 3, characterized in that, The inner sleeve (41) is provided with an elastic ring (43) on its outer sleeve, and an annular groove (421) is provided on the inner wall of the outer sleeve (42), and the elastic ring (43) is engaged in the annular groove (421).

5. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 4, characterized in that, The lower end of the outer sleeve (42) is provided with an annular flange (422), and the lower end of the inner sleeve (41) abuts against the annular flange (422).

6. The lifting fixture for lens assembly and disassembly of an ion implanter according to any one of claims 1-5, characterized in that, A buffer pad (5) is fixed on the upper end face of the bearing housing (2).

7. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 6, characterized in that, The buffer pad (5) is a rubber pad or a nylon pad.

8. The lifting fixture for lens assembly and disassembly of an ion implanter according to any one of claims 1-5, characterized in that, The lower end of the guide shaft (1) is fitted with a protective sleeve (6).

9. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 8, characterized in that, The protective sleeve (6) is a rubber sleeve.

10. The lifting fixture for lens assembly and disassembly of an ion implanter according to claim 1, characterized in that, The lower end face of the bearing housing (2) is provided with a bearing fixing groove (21), and the center of the bearing fixing groove (21) is provided with a protrusion (22). The bearing (3) is disposed in the bearing fixing groove (21), and the inner ring of the bearing (3) is sleeved on the protrusion (22) and fixedly connected to the protrusion (22).

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