Heating device in scanning electron microscope

Abstract

The utility model discloses a heating device in a scanning electron microscope, which relates to the technical field of heating in scanning electron microscopes and comprises a base, a heating groove, a heating wire and an electric push rod are arranged in the base, a supporting plate is arranged at the output end of the electric push rod, and a limiting block is arranged at the upper end of the supporting plate. A placement plate is arranged at the upper end of the limiting block, an installation frame is arranged in the base, a servo motor is arranged on the side wall of the base, the output end of the servo motor is fixedly connected with a threaded rod, the side wall of the threaded rod is in threaded connection with a sliding block, and the side wall of the sliding block is fixedly connected with a limiting frame. The electric push rod drives a workpiece sample on the upper surface of the supporting plate to move to the middle of the heating groove, then the heating wire is used for heating, the periphery of the workpiece sample is evenly heated, the heating efficiency is high, the heating device and the scanning electron microscope body are arranged in different areas, and the scanning electron microscope body is prevented from being located in the scanning electron microscope body with high strength. And the normal work of the scanning electron microscope body is maintained.

Description

Technical Field

[0001] This utility model relates to the field of heating technology in scanning electron microscopes, and more particularly to a heating device for scanning electron microscopes. Background Technology

[0002] When metallic materials are used at high temperatures, they are prone to microstructural instability, such as recovery softening, phase transformation, and creep, which are key reasons for reduced mechanical properties and service life. To study the evolution mechanism of the microstructure of metallic materials under high-temperature service conditions at the microscale, many electron microscope manufacturers, accessory suppliers, and research institutes have introduced in-situ heating devices as accessories for microscopic analysis equipment, especially heating rods for transmission electron microscopes and heating stages for scanning electron microscopes. These devices simulate the high-temperature operating conditions of metallic materials within an electron microscope, enabling in-situ detection and analysis of the changes in the material's microstructure.

[0003] Chinese patent document CN216624197U discloses a heating device for use in the vacuum chamber of a benchtop scanning electron microscope (SEM). The device includes a ceramic base, a heating core assembly on top of the ceramic base, a workpiece sample embedded in the upper end of the heating core assembly, a rigid ceramic insulation surrounding the heating core assembly, a ceramic support column between the upper rear end of the ceramic base and the rigid ceramic insulation, and a ceramic wiring block between the upper front end of the ceramic base and the rigid ceramic insulation. This heating device for the vacuum chamber of a benchtop SEM has shortcomings. While it reduces the impact of heat on the SEM, it has limitations. Heating and cooling occur simultaneously, and the heating device is located below the workpiece sample, resulting in low heating efficiency, slow heating, and energy waste.

[0004] Therefore, in order to solve such problems, we propose a heating device for scanning electron microscopes. Utility Model Content

[0005] The purpose of this invention is to provide a heating device for a scanning electron microscope, which aims to solve the problem in the background art that the existing heating devices in the vacuum chamber of a desktop scanning electron microscope have low heating efficiency, resulting in slow heating and energy waste.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a heating device for a scanning electron microscope, comprising a base, a heating groove inside the base, a heating wire inside the base located on the side wall of the heating groove, an electric push rod inside the base located on the bottom wall of the heating groove, a support plate fixedly connected to the output end of the electric push rod, a limit block provided at the end of the support plate away from the electric push rod, a placement plate fixedly connected to the end of the limit block away from the support plate, a mounting frame inside the base, a mounting groove inside the mounting frame, a servo motor provided on the side wall of the base, a threaded rod fixedly connected to the output end of the servo motor located in the mounting groove, a slider threadedly connected to the side wall of the threaded rod, a limit frame fixedly connected to the side wall of the slider, and a scanning electron microscope body inside the base.

[0007] Preferably, a limiting plate is fixedly connected to the inner sidewall of the mounting frame.

[0008] Preferably, the limiting frame is C-shaped.

[0009] Preferably, the sidewall of the electric push rod is provided with an inorganic heat-insulating coating layer.

[0010] Preferably, the limiting frame is slidably connected to the mounting groove.

[0011] Preferably, the heating wire is arranged in a spiral on the inner wall of the heating tank.

[0012] This utility model has the following beneficial effects:

[0013] This invention includes a heating tank, heating wire, electric push rod, support plate, and limiting block. The electric push rod moves the workpiece sample on the upper surface of the support plate to the center of the heating tank, where it is then heated by the heating wire. This ensures that the workpiece sample is heated evenly around its perimeter, resulting in high heating efficiency, rapid heating, reduced energy waste, and increased practicality. Furthermore, this design separates the heating device and the scanning electron microscope (SEM) body into distinct areas. The mounting frame, mounting tank, servo motor, threaded rod, slider, limiting frame, and limiting plate are used to move the workpiece sample on the upper surface of the support plate to the lower end of the SEM body for scanning. This avoids placing the SEM body in a high-intensity thermal field, which is beneficial for maintaining the normal operation of the SEM body. Attached Figure Description

[0014] Figure 1 A three-dimensional schematic diagram of a heating device in a scanning electron microscope according to this utility model. Figure 1 ;

[0015] Figure 2 A three-dimensional schematic diagram of a heating device in a scanning electron microscope according to this utility model. Figure 2 ;

[0016] Figure 3This is a three-dimensional exploded view of a heating device in a scanning electron microscope according to the present invention;

[0017] Figure 4 This is a three-dimensional exploded view of the mounting frame in the heating device of a scanning electron microscope according to the present invention.

[0018] Figure 5 This is a three-dimensional schematic diagram of a limiting block in a heating device for a scanning electron microscope according to the present invention.

[0019] Legend:

[0020] 1. Base; 101. Heating groove; 11. Heating wire; 12. Electric push rod; 13. Support plate; 14. Limiting block; 15. Placement plate; 2. Mounting frame; 201. Mounting groove; 21. Servo motor; 22. Threaded rod; 23. Slider; 24. Limiting frame; 25. Limiting plate; 3. Scanning electron microscope body. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In addition, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be a direct connection or an indirect connection through an intermediate medium, and it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0023] Reference Figure 1-5This utility model provides an embodiment of a heating device for a scanning electron microscope, comprising a base 1, a heating groove 101 inside the base 1, a heating wire 11 inside the base 1 located on the side wall of the heating groove 101, an electric push rod 12 inside the base 1 located on the bottom wall of the heating groove 101, a support plate 13 fixedly connected to the output end of the electric push rod 12, a limit block 14 provided at the end of the support plate 13 away from the electric push rod 12, a placement plate 15 fixedly connected to the end of the limit block 14 away from the support plate 13, a mounting frame 2 inside the base 1, a mounting groove 201 inside the inner side wall of the mounting frame 2, a servo motor 21 provided on the side wall of the base 1, a threaded rod 22 fixedly connected to the output end of the servo motor 21 located in the mounting groove 201, a slider 23 threadedly connected to the side wall of the threaded rod 22, a limit frame 24 fixedly connected to the side wall of the slider 23, and a scanning electron microscope body 3 inside the base 1.

[0024] This setup involves placing the workpiece sample on the upper surface of the placement plate 15, causing the electric push rod 12 to drive the support plate 13 to move vertically, which in turn drives the limiting block 14 to move vertically, which in turn drives the placement plate 15 to move vertically. The placement plate 15 then moves the workpiece sample to the middle of the heating tank 101, where the heating wire 11 heats the workpiece sample. After heating is complete, the electric push rod 12 is activated, moving the workpiece sample via the placement plate 15 to above the heating tank 101. This causes the drive servo motor 21 to rotate the threaded rod 22, which in turn drives the slider 23 to move horizontally, which in turn drives the limiting frame 24 to move horizontally, which in turn drives the limiting block 14 to move horizontally. The limiting block 14 then moves the workpiece sample from the upper surface of the placement plate 15 directly below the scanning electron microscope 3, allowing the scanning electron microscope 3 to scan the workpiece sample.

[0025] The inner wall of the mounting frame 2 is fixedly connected to a limiting plate 25, which is used to limit the height of the vertical linear movement of the placement plate 15 and prevent the limiting frame 24 from being unable to lock onto the limiting block 14.

[0026] The limit frame 24 is C-shaped and is used to push the limit block 14 back and forth.

[0027] The side wall of the electric push rod 12 is provided with an inorganic heat-insulating coating layer to protect the electric push rod 12 and prevent it from being damaged due to excessive temperature.

[0028] The limiting frame 24 is slidably connected to the mounting groove 201, and is used to drive the workpiece sample to move directly below the scanning electron microscope body 3 through the limiting block 14.

[0029] The heating wire 11 is arranged in a spiral on the inner wall of the heating tank 101 to reduce the size of the heating device. Moreover, the spiral winding form has high heating efficiency. In addition, it can eliminate the influence of the electromagnetic field generated during the heating process on electron beam imaging.

[0030] Working principle: First, the workpiece sample is placed on the upper surface of the placement plate 15. Then, the electric push rod 12 drives the support plate 13 to move vertically, which in turn drives the limiting block 14 to move vertically. The limiting block 14 then drives the placement plate 15 to move vertically, which in turn moves the workpiece sample to the middle of the heating tank 101. The heating wire 11 then heats the workpiece sample. After heating is complete, the electric push rod 12 is activated to move the workpiece sample above the heating tank 101 via the placement plate 15. Then, the heating wire 11 heats the workpiece sample. The limiting plate 25 limits the movement, then the servo motor 21 drives the threaded rod 22 to rotate, then the threaded rod 22 drives the slider 23 to move horizontally in a straight line, then the slider 23 drives the limiting frame 24 to move horizontally in a straight line, then the limiting frame 24 drives the limiting block 14 to move horizontally in a straight line, then the limiting block 14 drives the workpiece sample on the upper surface of the placement plate 15 to move directly below the scanning electron microscope body 3, and then the scanning electron microscope body 3 scans the workpiece sample. This setting achieves uniform heating around the workpiece sample, high heating efficiency, rapid heating, and reduced energy waste.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heating device for a scanning electron microscope, comprising a base (1), characterized in that: The base (1) has a heating groove (101) inside, and a heating wire (11) is installed inside the base (1). The heating wire (11) is located on the side wall of the heating groove (101). An electric push rod (12) is installed inside the base (1) and is located on the bottom wall of the heating groove (101). A support plate (13) is fixedly connected to the output end of the electric push rod (12). A limit block (14) is provided at the end of the support plate (13) away from the electric push rod (12). The limit block (14) is located at the end away from the support plate (13). A placement plate (15) is fixedly connected. An installation frame (2) is provided inside the base (1). An installation groove (201) is opened on the inner side wall of the installation frame (2). A servo motor (21) is provided on the side wall of the base (1). A threaded rod (22) is fixedly connected to the output end of the servo motor (21). The threaded rod (22) is located in the installation groove (201). A slider (23) is threadedly connected to the side wall of the threaded rod (22). A limit frame (24) is fixedly connected to the side wall of the slider (23). A scanning electron microscope body (3) is provided inside the base (1).

2. The heating device for a scanning electron microscope according to claim 1, characterized in that: The mounting frame (2) has a limiting plate (25) fixedly connected to its inner side wall.

3. The heating device for a scanning electron microscope according to claim 1, characterized in that: The limiting frame (24) is C-shaped.

4. The heating device in a scanning electron microscope according to claim 1, characterized in that: The side wall of the electric push rod (12) is provided with an inorganic heat insulation coating layer.

5. The heating device for a scanning electron microscope according to claim 1, characterized in that: The limiting frame (24) is slidably connected to the mounting groove (201).

6. The heating device for a scanning electron microscope according to claim 1, characterized in that: The heating wire (11) is arranged in a spiral on the inner wall of the heating tank (101).

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