Silicon nitride built-in heater

Abstract

The utility model provides a silicon nitride built-in heater, and belongs to the technical field of silicon nitride heaters. Comprising a heating assembly, the heating assembly is arranged in a fixing seat, the heating assembly comprises a second connecting column fixed to the bottom of the fixing seat, a connecting ring is arranged at the top of the second connecting column, a connecting end is fixed in the connecting ring, a fixing end is clamped to the top of the connecting end, and a heating assembly is arranged in the fixing seat. A heating wire is arranged at the top of the fixing end, the heating assembly is arranged in the fixing base, a second connecting column at the bottom is stably fixed to the bottom of the fixing base and used for being connected with a power source connecting wire, the connecting end is fixed in a connecting ring at the top of the heating assembly, and the connecting end is matched with the fixing end clamped to the top to achieve stable connection. The current is conducted to the heating wire at the top through the second connecting column, the connecting end and the fixed end, the heating wire emits heat, and therefore the using effect of heating is achieved.

Description

Technical Field

[0001] This utility model relates to the field of silicon nitride heater technology, and in particular to a silicon nitride built-in heater. Background Technology

[0002] A silicon nitride built-in heater is a device that utilizes the high thermal conductivity and electrothermal properties of silicon nitride material to achieve efficient heating through internal resistance wires or thin-film heating elements. Its main functions include providing stable and precise temperature control, and it is widely used in high-temperature environments such as semiconductor manufacturing, optoelectronic equipment, and material heat treatment. Silicon nitride material possesses excellent oxidation resistance, high-temperature resistance, and thermal stability, enabling the heater to operate stably for extended periods under extreme conditions.

[0003] However, during long-term continuous operation, existing silicon nitride built-in heaters are prone to aging and breakage of key internal components such as heating wires and connecting ends due to high temperatures and frequent thermal expansion and contraction. When damaged components need to be replaced, the replacement process is cumbersome, the connections of each component are complex, and special tools are required for careful disassembly, resulting in slow replacement speed, which greatly affects the normal operating efficiency of the equipment and delays the production schedule.

[0004] Therefore, this application provides a silicon nitride built-in heater to meet the requirements. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a silicon nitride built-in heater.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a silicon nitride built-in heater, comprising:

[0007] Fixed base;

[0008] A heating assembly is placed inside a fixed base. The heating assembly includes a second connecting post fixed to the bottom of the fixed base. A connecting ring is provided at the top of the second connecting post. A connecting end is fixed inside the connecting ring. A fixed end is snapped into the top of the connecting end. A heating wire is provided at the top of the fixed end.

[0009] The replacement component is located on the side of the fixed base away from the heating component. The replacement component includes a second clamping block disposed inside the fixed base. A second damping spring is disposed on one side of the second clamping block. A first clamping block is disposed on the other side of the fixed base away from the second clamping block. A first damping spring is disposed on one side of the first clamping block. A first connecting post is fixed on the side of the first clamping block away from the first damping spring. A handle is fixed on the other end of the first connecting post. Each of the first clamping blocks is provided with a snap-fit ​​ball.

[0010] Furthermore, the fixed base has a fixed slot inside, and the other end of the second damping spring away from the second clamping block is fixed inside the fixed slot.

[0011] The beneficial effects of adopting the above-mentioned further solution are: the fixing slot inside the fixing seat is used to house the second damping spring. When the component is replaced, the second clamping block moves, and the second damping spring extends and retracts in the fixing slot, providing buffering and restoring force to facilitate component replacement.

[0012] Furthermore, a silicon nitride shell is provided on the top of the fixing base, and the heating wire is disposed inside the silicon nitride shell.

[0013] The beneficial effects of adopting the above-mentioned further solution are: the silicon nitride shell on the top of the fixing base wraps the heating wire. When working, the heating wire heats up, and the silicon nitride shell protects the heating wire while also assisting in uniform heat dissipation.

[0014] Furthermore, the cooling component includes a fixed box fixed to the bottom of the fixed base, a fixed ring is provided inside the fixed box, a rotating shaft is provided in the middle of the fixed ring, a rotating ring is sleeved on the rotating shaft, an arc plate is fixed between the rotating rings, and a fan blade is provided on the side of the rotating shaft away from the rotating ring.

[0015] The beneficial effects of adopting the above-mentioned further solution are as follows: the cooling component is installed at the bottom of the fixed base, the fixed ring inside the fixed box supports the rotating shaft, the rotating shaft is fitted with the rotating ring, and the rotating ring is connected to the arc plate. When working, the external force drives the rotating shaft to rotate, and the rotating ring and the arc plate rotate with it, thereby driving the fan blade to rotate. The arc plate can disrupt the airflow, making the airflow smooth when the fan blade rotates, reducing noise, and at the same time quickly removing the heat from the fixed base and internal components to achieve efficient cooling.

[0016] Furthermore, the mounting base is provided with cooling fins inside, and a cooling groove is provided at the other end of the cooling fins.

[0017] The beneficial effects of adopting the above-mentioned further solution are: the cooling fins inside the mounting base increase the heat dissipation area, heat is transferred to the cooling fins, and the cooling slots accelerate air circulation, efficiently dissipating heat and achieving rapid cooling.

[0018] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0019] 1. The heating component is placed inside the fixed base. The second connecting post at the bottom is firmly fixed to the bottom of the fixed base for connecting to the power supply line. The connecting end is fixed inside the connecting ring at the top. The connecting end cooperates with the fixed end that is snapped on at the top to achieve a stable connection. When the power is turned on, the current is conducted through the second connecting post, the connecting end and the fixed end to the heating wire at the top. The heating wire heats up, thereby achieving the heating effect.

[0020] 2. The replacement component is located on the side of the mounting base away from the heating component. Inside the mounting base, a second damping spring is connected to one side of the second clamping block to provide reverse support force. The first clamping block on the other side of the mounting base has a first damping spring on one side, which also plays a role in buffering and resetting. Pulling the handle will drive the first connecting post connected to it, thereby moving the first clamping block and locking the ball for auxiliary fixation. When it is necessary to replace the relevant parts, the first and second clamping blocks work together by operating the handle to loosen or clamp the parts, making it easy to replace and greatly improving the convenience of maintenance. Attached Figure Description

[0021] Figure 1 This is a front view of a silicon nitride built-in heater according to this utility model;

[0022] Figure 2 This is a cross-sectional view of a silicon nitride built-in heater according to the present invention;

[0023] Figure 3 This is a structural diagram of a replacement component in a silicon nitride built-in heater according to the present invention;

[0024] Figure 4 This is a structural diagram of the heating component in a silicon nitride built-in heater according to this utility model;

[0025] Figure 5 This is a structural diagram of a cooling component in a silicon nitride built-in heater according to this utility model.

[0026] Attached Figure

[0027] 1. Mounting base; 2. Silicon nitride housing;

[0028] 3. Replace components; 31. Handle; 32. First connecting post; 33. First clamping block; 34. First damping spring; 35. Snap-on ball; 36. Second clamping block; 37. Second damping spring;

[0029] 4. Heating assembly; 41. Second connecting post; 42. Connecting ring; 43. Connecting end; 44. Fixing slot; 45. Fixing end; 46. Heating wire;

[0030] 5. Power cord;

[0031] 6. Cooling component; 61. Fixing box; 62. Fixing ring; 63. Rotating ring; 64. Rotating shaft; 65. Arc plate; 66. Fan blade; 67. Cooling fins; 68. Cooling groove. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] like Figure 1 - Figure 5 As shown, this utility model provides a technical solution: a silicon nitride built-in heater, including: a fixing base 1;

[0034] Heating component 4 is placed inside the fixed base 1. Heating component 4 includes a second connecting post 41 fixed to the bottom of the fixed base 1. A connecting ring 42 is provided on the top of the second connecting post 41. A connecting end 43 is fixed inside the connecting ring 42. A fixed end 45 is snapped onto the top of the connecting end 43. A heating wire 46 is provided on the top of the fixed end 45. Heating component 4 is placed inside the fixed base 1. The second connecting post 41 at the bottom is firmly fixed to the bottom of the fixed base 1 for connection with the power connection line 5. The connecting end 43 is fixed inside the connecting ring 42 at the top. The connecting end 43 cooperates with the fixed end 45 snapped onto the top to achieve a stable connection. When the power is turned on, the current is conducted through the second connecting post 41, the connecting end 43 and the fixed end 45 to the heating wire 46 at the top. The heating wire 46 heats up, thereby achieving the heating effect.

[0035] Replacement component 3 is located on the side of the fixed base 1 away from the heating component 4. Replacement component 3 includes a second clamping block 36 disposed inside the fixed base 1. A second damping spring 37 is disposed on one side of the second clamping block 36. A first clamping block 33 is disposed on the other side of the fixed base 1 away from the second clamping block 36. A first damping spring 34 is disposed on one side of the first clamping block 33. A first connecting post 32 is fixed on the side of the first clamping block 33 away from the first damping spring 34. A handle 31 is fixed to the other end of the first connecting post 32. Each of the first clamping blocks 33 is provided with a locking ball 35. Replacement component 3 is located on the fixed base. On the side away from the heating component 4, inside the fixing base 1, the second clamping block 36 is connected to a second damping spring 37 on one side to provide reverse support force. The first clamping block 33 on the other side of the fixing base 1 has a first damping spring 34 on one side, which also plays a role in buffering and resetting. Pulling the handle 31 drives the first connecting post 32 connected to it, thereby moving the first clamping block 33. The locking ball 35 assists in fixing. When it is necessary to replace related parts, by operating the handle 31, the first clamping block 33 and the second clamping block 36 work together to loosen or clamp the parts, making it easy to replace and greatly improving the convenience of maintenance.

[0036] Furthermore, such as Figure 1 - Figure 3 As shown: The fixed base 1 has a fixed slot 44 inside. The other end of the second damping spring 37 away from the second clamping block 36 is fixed inside the fixed slot 44. The fixed slot 44 inside the fixed base 1 is used to house the second damping spring 37. When the component 3 is replaced, the second clamping block 36 moves, and the second damping spring 37 extends and retracts in the fixed slot 44 to provide buffering and restoring force, which helps to replace the component.

[0037] The above solutions also suffer from uneven heating, such as... Figure 1 - Figure 4 As shown: In this solution, a silicon nitride shell 2 is provided on the top of the fixing base 1, and the heating wire 46 is located inside the silicon nitride shell 2. The silicon nitride shell 2 on the top of the fixing base 1 wraps the heating wire 46. When working, the heating wire 46 heats up, and the silicon nitride shell 2 protects the heating wire 46 and at the same time assists in uniform heat dissipation.

[0038] The above solutions still have the problem of equipment cooling, such as... Figure 1 - Figure 5As shown: In this solution, the cooling component 6 includes a fixed box 61 fixed to the bottom of the fixed base 1. A fixed ring 62 is provided inside the fixed box 61. A rotating shaft 64 is located in the middle of the fixed ring 62. A rotating ring 63 is fitted onto the rotating shaft 64. Arc-shaped plates 65 are fixed between each of the rotating rings 63. Fan blades 66 are provided on the side of the rotating shaft 64 away from the rotating rings 63. The cooling component 6 is mounted on the bottom of the fixed base 1. The fixed ring 62 inside the fixed box 61 supports the rotating shaft 64. The rotating rings 63 are fitted onto the rotating shaft 64 and connected to the arc-shaped plates 65. During operation, external forces... The rotating shaft 64 rotates, and the rotating ring 63 and the arc plate 65 rotate accordingly, which in turn drives the fan blade 66 to rotate. The arc plate 65 can disrupt the airflow, making the airflow smooth when the fan blade 66 rotates, reducing noise, and at the same time quickly removing the heat from the mounting base 1 and internal components to achieve efficient cooling. The mounting base 1 is equipped with cooling fins 67 inside, and the other end of the cooling fins 67 is equipped with a cooling slot 68. The cooling fins 67 inside the mounting base 1 increase the heat dissipation area. Heat is transferred to the cooling fins 67, and the cooling slot 68 accelerates the airflow, efficiently dissipating heat and achieving rapid cooling.

[0039] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A silicon nitride built-in heater characterized by, Include: Fixed seat (1); Heating assembly (4), the heating assembly (4) is placed in the inside of fixed seat (1), the heating assembly (4) includes the second connecting column (41) fixed in the bottom of fixed seat (1), the top of second connecting column (41) is provided with connecting ring (42), the inside of connecting ring (42) is fixed with connecting end (43), the top of connecting end (43) is clamped with fixed end (45), the top of fixed end (45) is provided with heating wire (46); Replacement assembly (3), the replacement assembly (3) is placed in the side of fixed seat (1) away from heating assembly (4), the replacement assembly (3) includes the second clamping block (36) provided in the inside of fixed seat (1), one side of second clamping block (36) is provided with second damping spring (37), the other side of fixed seat (1) away from second clamping block (36) is provided with first clamping block (33), one side of first clamping block (33) is provided with first damping spring (34), one side of first clamping block (33) away from first damping spring (34) is fixed with first connecting column (32), the other end of first connecting column (32) is fixed with handle (31), the first clamping block (33) is provided with clamping ball (35).

2. The silicon nitride built-in heater according to claim 1, wherein The inside of fixed seat (1) is provided with fixed slot (44), the other end of second damping spring (37) away from second clamping block (36) is fixed in the inside of fixed slot (44).

3. The silicon nitride built-in heater according to claim 1, wherein The top of fixed seat (1) is provided with silicon nitride shell (2), the heating wire (46) is provided in the inside of silicon nitride shell (2).

4. The silicon nitride built-in heater according to claim 1, wherein The bottom of second connecting column (41) is fixedly connected with power supply connecting line (5).

5. The silicon nitride built-in heater according to claim 1, wherein The side of fixed seat (1) away from heating assembly (4) is provided with cooling assembly (6).

6. The silicon nitride built-in heater according to claim 5, wherein The cooling assembly (6) includes fixed box (61) fixed in the bottom of fixed seat (1), the inside of fixed box (61) is provided with fixed ring (62), the middle part of fixed ring (62) is provided with rotating shaft (64), the rotating shaft (64) is provided with rotating ring (63), the rotating ring (63) is fixed with arc plate (65), one side of rotating shaft (64) away from rotating ring (63) is provided with fan blade (66).

7. The silicon nitride in-line heater of claim 1, wherein, The inside of fixed seat (1) is provided with cooling fin (67), the other end of cooling fin (67) is provided with cooling slot (68).

Images