Etching equipment adsorption carrying platform and etching equipment

Abstract

The utility model relates to the technical field of battery processing, and discloses an etching equipment adsorption carrying platform and etching equipment wherein the etching equipment adsorption carrying platform comprises a carrying platform body and a plurality of adsorption modules; the plurality of adsorption modules are separately arranged on the periphery of the top surface of the carrying table body at intervals, and the plurality of adsorption modules support the peripheral edge area of the battery substrate; each adsorption module comprises a supporting block and at least one adsorption device, the adsorption devices are suitable for adsorbing battery substrates, and the battery substrates fall on the supporting blocks. According to the utility model, the plurality of adsorption modules are used for bearing the peripheral edge area of the battery substrate, the supporting blocks of the adsorption modules are used for supporting the battery substrate, and the adsorption devices of the adsorption modules are used for adsorbing the battery substrate, so that the effective fixation of the battery substrate is realized; and a gap is reserved between the bottom of the battery substrate and the carrying table body, so that friction loss is avoided, and front and back etching of the battery substrate by laser is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of battery processing technology, specifically to an etching equipment adsorption platform and etching equipment. Background Technology

[0002] In the fabrication of solar cells, laser etching is used to divide the cell chip into multiple sub-cells, forming series or parallel modules. During laser etching, the cell substrate is typically adsorbed onto a stage using vacuum adsorption to fix the substrate and thus ensure the laser scribing effect.

[0003] Currently, in order to improve the fixation stability of the battery substrate, the stage is usually adopted in a fully attached state, that is, the battery substrate is in complete contact with the adsorption surface of the stage.

[0004] The drawbacks of this structure are: the fully bonded stage requires dense adsorption holes, resulting in high processing costs; the battery substrate is in complete contact with the adsorption surface of the stage, making it inconvenient for laser etching on the reverse side; in addition, friction occurs between the battery substrate film surface and the stage during the placement and etching process, which can easily damage the battery substrate. Utility Model Content

[0005] In view of this, the present invention provides an etching equipment adsorption stage and etching equipment to solve the problems of existing laser etching using a fully adhesive stage, which has high processing costs, is inconvenient for reverse etching, and is prone to damaging the battery substrate.

[0006] In a first aspect, this utility model provides an adsorption stage for an etching device, comprising:

[0007] The carrier body;

[0008] Multiple adsorption modules are spaced apart around the top surface of the platform body, and the multiple adsorption modules support the periphery of the battery substrate. Each adsorption module includes a support block and at least one adsorption device, the adsorption device being adapted to adsorb the battery substrate, and the battery substrate resting on the support block.

[0009] Beneficial effects: This invention utilizes multiple adsorption modules to support the surrounding edge areas of the battery substrate. The support blocks of the adsorption modules support the battery substrate, and the adsorption devices of the adsorption modules adsorb the battery substrate, achieving effective fixation of the battery substrate. Compared to a fully adhesive platform, this invention has a smaller adsorption contact surface, resulting in lower usage and maintenance costs. Furthermore, the gap between the bottom of the battery substrate and the platform body eliminates frictional wear and facilitates laser etching of both sides of the battery substrate.

[0010] In one optional embodiment, the top of the adsorption device is provided with an adsorption end, the adsorption end is provided with a telescopic member that extends vertically, the free height H1 of the adsorption device is higher than the height H2 of the support block, and the extension stroke of the telescopic member is greater than the height difference between the telescopic member and the support block.

[0011] Beneficial effects: The adsorption end can adsorb the battery substrate. The battery substrate is first adsorbed by the adsorption end. Under the influence of its own gravity, the battery substrate compresses the telescopic component and falls to the support block, where it is supported. The telescopic component can buffer the battery substrate to prevent it from being too heavy and falling directly to the adsorption end, thus avoiding damage to the adsorption device and the battery substrate.

[0012] In one optional embodiment, the adsorption device includes:

[0013] The adjustment assembly is connected at the top to the adsorption end via the telescopic component;

[0014] A fixing component is connected at the top to the bottom of the adjusting component, and the fixing component is connected to the platform body.

[0015] Beneficial effects: The adjustment component is used to adjust the overall height of the adsorption device, thereby adapting to the usage requirements of different battery substrates and expanding the application range of the adsorption device. The fixing component is used to fix the adjustment component and the platform body, improving the connection stability of the adsorption device on the platform body.

[0016] In one optional embodiment, the adjusting assembly includes a first support rod and an elastic element. The elastic element is sleeved on the outside of the first support rod, and locking elements are respectively provided at opposite ends of the elastic element. The lower locking element is movably disposed on the first support rod, and the lower end of the telescopic element is connected to the upper locking element.

[0017] Beneficial effects: The first support rod is used to support the elastic element and the locking element. By adjusting the distance between the two locking elements on the first support rod and by pressing the locking elements with the elastic element, the relative height of the adsorption end can be adjusted and fixed.

[0018] In one optional embodiment, the platform body is provided with a plurality of mounting holes, and the fixing component includes a second support rod and at least one fastener. The second support rod passes through the mounting hole, the top of the second support rod is connected to the bottom of the first support rod, the fastener is sleeved on the outside of the second support rod, and the fastener and the locking member clamp the platform body.

[0019] Beneficial effects: The second support rod is used to support the adjustment component. The platform body is clamped by fasteners and locking parts to achieve a firm connection between the adsorption device and the platform body. The connection is strong, and the structure is simple and easy to install.

[0020] In one alternative embodiment, several of the adsorption devices are disposed separately on both sides or around the support block.

[0021] Beneficial effects: By separately setting several adsorption devices on both sides or around the support block, the battery substrate can be well adsorbed and supported.

[0022] In one optional embodiment, the telescopic component is a telescopic tube structure, with one end of the telescopic component being an adsorption end and the other end connected to the negative pressure module.

[0023] Beneficial effects: The adsorption end is connected to the negative pressure module via a telescopic component. The negative pressure module creates negative pressure at the adsorption end, effectively adsorbing the battery substrate. The telescopic component, a telescopic tube structure, simultaneously serves the functions of telescopic extension and connection of pipelines, simplifying the structure.

[0024] In one alternative embodiment, a plurality of positioning elements are further included, the plurality of positioning elements being disposed around the top surface of the platform body.

[0025] Beneficial effects: The positioning component is used to position and fix the battery substrate, which can prevent the battery substrate from shifting or moving, thereby improving the processing accuracy of laser etching.

[0026] In one optional embodiment, the top of the positioning member is provided with a stepped limiting surface, and the stepped limiting surface of each positioning member is coplanar with the top surface of each support block.

[0027] Beneficial effects: The stepped limiting surface on the top of the positioning component, which is coplanar with the top surface of each support block, can further support and limit the battery base, thereby improving the installation stability of the battery base.

[0028] Secondly, this utility model also provides an etching apparatus, including: the above-mentioned etching apparatus adsorption stage.

[0029] Beneficial effects: Because the etching equipment includes an etching equipment adsorption platform, it has the same effect as the etching equipment adsorption platform, namely, using multiple adsorption modules to support the four edges of the battery substrate, the support blocks of the adsorption modules to support the battery substrate, and the adsorption devices of the adsorption modules to adsorb the battery substrate, thus achieving effective fixation of the battery substrate. Compared with the fully adhesive platform, the adsorption contact surface of this utility model is smaller, resulting in lower usage and maintenance costs. Furthermore, the gap between the bottom of the battery substrate and the platform body eliminates frictional wear and facilitates laser etching of both sides of the battery substrate. Attached Figure Description

[0030] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of an adsorption platform for an etching device according to an embodiment of the present invention;

[0032] Figure 2 This is a schematic diagram of the adsorption device of an etching equipment adsorption platform according to an embodiment of the present invention.

[0033] Figure 3 This is a schematic diagram of the first structure of the adsorption module of the adsorption stage of an etching device according to an embodiment of the present invention.

[0034] Figure 4 This is a schematic diagram of a second structure of the adsorption module of an adsorption stage for an etching device according to an embodiment of the present invention.

[0035] Figure 5 This is a schematic diagram of a third structure of the adsorption module of the adsorption stage of an etching device according to an embodiment of the present utility model.

[0036] Figure 6 This is a schematic diagram of the fourth structure of the adsorption module of the adsorption stage of an etching device according to an embodiment of the present utility model.

[0037] Figure 7 This is a fifth structural schematic diagram of the adsorption module of the adsorption stage of an etching device according to an embodiment of the present invention.

[0038] Figure 8 This is a sixth structural schematic diagram of the adsorption module of the adsorption stage of an etching device according to an embodiment of the present invention.

[0039] Explanation of reference numerals in the attached figures:

[0040] 1. Platform body; 2. Adsorption module; 201. Support block; 202. Adsorption device; 2021. Adsorption end; 2022. Telescopic component; 2023. Adjustment component; 20231. First support rod; 20232. Elastic component; 20233. Locking component; 2024. Fixing component; 20241. Second support rod; 20242. Fastener; 3. Positioning component; 301. Stepped limiting surface. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0042] The following is combined Figures 1 to 8 The following describes embodiments of the present invention.

[0043] According to embodiments of the present invention, on the one hand, such as Figure 1 As shown, an etching equipment adsorption platform is provided, mainly including: a platform body 1 and multiple adsorption modules 2. The multiple adsorption modules 2 are respectively spaced around the top surface of the platform body 1, and the multiple adsorption modules 2 support the periphery of the battery substrate; each adsorption module 2 includes a support block 201 and at least one adsorption device 202, the adsorption device 202 is adapted to adsorb the battery substrate, and the battery substrate rests on the support block 201.

[0044] The etching equipment adsorption platform provided in this embodiment of the utility model utilizes multiple adsorption modules 2 to support and adsorb the surrounding edge area of ​​the battery substrate. The support block 201 of the adsorption module 2 supports the battery substrate, and the adsorption device 202 of the adsorption module 2 adsorbs the battery substrate, thereby achieving effective fixation of the battery substrate.

[0045] Traditional fully-mounted etching stages require a dense adsorption surface on the stage top, resulting in higher operating costs, greater weight, and decreased operational accuracy and maintenance costs over long-term use. The battery substrate needs to be completely adsorbed onto the stage surface under negative pressure, allowing the laser to directly etch the front side of the film, preventing back-side etching through the substrate. When the battery substrate is thin, the laser etching energy can easily penetrate the substrate and act on the stage, causing damage to both the substrate and the stage.

[0046] This embodiment of the invention places the adsorption area around the bottom perimeter of the battery substrate, resulting in a smaller adsorption contact surface, lower usage and maintenance costs, lighter weight, and guaranteed operational accuracy over long-term use. Furthermore, the gap between the bottom of the battery substrate and the platform body 1 eliminates frictional loss and facilitates laser etching of both sides of the battery substrate. When the battery substrate is thin, the laser etching energy is lost at the gap between the battery substrate and the platform body 1 after passing through the battery substrate, without affecting the adsorption module 2, thus ensuring higher operational stability.

[0047] Specifically, the support block 201 is fixedly mounted on the platform body 1. The fixing method can adopt any existing structure, such as snap-fit ​​or integral molding.

[0048] In one embodiment, such as Figure 2 and Figure 3 As shown, the top of the adsorption device 202 is provided with an adsorption end 2021, and the adsorption end 2021 is provided with a telescopic member 2022 that extends vertically. The free height H1 of the adsorption device 202 is higher than the height H2 of the support block 201, and the extension stroke of the telescopic member 2022 is greater than the height difference between the telescopic member 2022 and the support block 201. The adsorption end 2021 can adsorb the battery substrate. The battery substrate is first adsorbed by the adsorption end 2021. Under the influence of its own gravity, the battery substrate compresses the telescopic member 2022 and falls to the support block 201, where it is supported. The telescopic member 2022 can buffer the battery substrate to prevent it from being too heavy and falling directly onto the adsorption end 2021, thus avoiding damage to the adsorption device 202 and the battery substrate.

[0049] Specifically, the adsorption end 2021 can be a suction cup with an adsorption hole at its center. The diameter D of the suction cup satisfies 0cm < D < 5cm, for example, the diameter D of the suction cup is 1cm, 2cm, 3cm, etc. The vacuum pressure of the suction cup can be 5Kpa, and the length is 3cm. The suction cup can be made of one of the following materials: sponge, rubber, silicone, etc. The diameter d of the adsorption hole satisfies 1mm < d < 5mm, for example, the diameter d of the adsorption hole is 3mm.

[0050] Furthermore, in one embodiment, such as Figure 2 As shown, the adsorption device 202 mainly includes an adjusting component 2023 and a fixing component 2024. The top of the adjusting component 2023 is connected to the adsorption end 2021 via a telescopic component 2022. The top of the fixing component 2024 is connected to the bottom of the adjusting component 2023, and the fixing component 2024 is connected to the platform body 1.

[0051] The adjustment component 2023 is used to adjust the overall height of the adsorption device 202, thereby adapting to the usage requirements of different types of battery substrates, especially for fixing irregularly shaped battery substrates, to improve the application range of the adsorption device 202. The fixing component 2024 is used to fix the adjustment component 2023 and the platform body 1, improving the connection stability of the adsorption device 202 on the platform body 1.

[0052] Furthermore, in one embodiment, such as Figure 2As shown, the adjustment assembly 2023 includes a first support rod 20231 and an elastic member 20232. The elastic member 20232 is sleeved on the outside of the first support rod 20231. Locking members 20233 are respectively provided at opposite ends of the elastic member 20232. The lower locking member 20233 is movably provided on the first support rod 20231. The lower end of the telescopic member 2022 is connected to the upper locking member 20233.

[0053] The first support rod 20231 is used to support the elastic element 20232 and the locking element 20233. By adjusting the distance between the two locking elements 20233 on the first support rod 20231 and by pressing the locking element 20233 with the elastic element 20232, the relative height of the adsorption end 2021 can be adjusted and fixed.

[0054] Specifically, the elastic element 20232 can be a rectangular flat wire compression spring with a maximum compression ratio (compression distance) of 40%. The locking element 20233 can be a nut. Correspondingly, the first support rod 20231 is provided with threads. The first support rod 20231 and the elastic element 20232 can be made of alloy steel.

[0055] In one embodiment, the platform body 1 is provided with multiple mounting holes (not shown in the figure), such as... Figure 2 As shown, the fixing component 2024 includes a second support rod 20241 and at least one fastener 20242. The second support rod 20241 passes through the mounting hole, and its top is connected to the bottom of the first support rod 20231. The fastener 20242 is sleeved on the second support rod 20241, and the fastener 20242 and the locking member 20233 clamp the platform body 1. The second support rod 20241 supports the adjusting component 2023, and the platform body 1 is clamped by the fastener 20242 and the locking member 20233, thus achieving a secure connection between the adsorption device 202 and the platform body 1. The connection is firm, and the structure is simple and easy to install.

[0056] Specifically, fastener 20242 can be a nut. The second support rod 20241 has corresponding threads.

[0057] For example, such as Figure 2 As shown, the fixing component 2024 includes two fasteners 20242, both of which are nuts, which limit each other to improve the connection stability between the adsorption device 202 and the platform body 1.

[0058] It should be noted that the shape of the support block 201 is not limited in this embodiment of the utility model. Any existing shape can be selected as needed, such as a cuboid, a cylinder, etc.

[0059] Furthermore, there are no restrictions on the relative positional relationship between the support block 201 and the adsorption module 2; any existing positional relationship can be selected as needed.

[0060] In one embodiment, a plurality of adsorption devices 202 are disposed separately on both sides or around the support block 201. Distributing the plurality of adsorption devices 202 separately on both sides or around the support block 201 enables effective adsorption and support of the battery substrate.

[0061] Example 1: such as Figure 1 and Figure 3 As shown, the support block 201 is a cuboid, and multiple adsorption devices 202 are arranged in a row at opposite ends of the support block 201 along its length.

[0062] Furthermore, such as Figure 3 As shown, the distance L2 between adjacent adsorption devices 202 satisfies 0cm < L2 < 10cm. For example, L2 can be 1cm, 5cm, 8cm, etc.

[0063] And / or, the distance L3 between the adsorption device 202 near the support block 201 and the support block 201 satisfies 0cm < L3 < 10cm. For example, L3 is 1cm, 4cm, 8cm, etc.

[0064] Furthermore, such as Figure 3 As shown, the height H2 of the support block 201 satisfies 0cm < H2 < 10cm. For example, the height H2 of the support block 201 is 1cm, 6cm, 8cm, etc.

[0065] And / or, the length L1 of the support block 201 satisfies 0cm < L1 < 20cm, for example, the length L1 of the support block 201 is 1cm, 10cm, 15cm, etc.

[0066] Example 2: such as Figure 4 As shown, the support block 201 is a cuboid, and multiple adsorption devices 202 are respectively provided on the opposite sides of the support block 201 in the width direction.

[0067] Example 3: such as Figure 5 As shown, the support block 201 is cross-shaped, and multiple adsorption devices 202 are arranged in rows at opposite ends of the support block 201 along its length.

[0068] Example 4: (e.g.) Figure 6 As shown, the support block 201 is cross-shaped, and four adsorption devices 202 are arranged on the periphery of the support block 201.

[0069] Example 5: such as Figure 7 As shown, the support block 201 is a cuboid with inward notches at its four corners. Four adsorption devices 202 are respectively located at the notches.

[0070] Example 6: (e.g.) Figure 8 As shown, the support block 201 is an annular column with a columnar groove in the middle, and the adsorption device 202 is located in the columnar groove.

[0071] In one embodiment, the telescopic component 2022 is a telescopic tube structure, with one end of the telescopic component 2022 serving as the adsorption end 2021 and the other end connected to the negative pressure module. Specifically, the telescopic component 2022 can be a telescopic silicone tube. The adsorption end 2021 is connected to the negative pressure module through the telescopic component 2022, and the negative pressure module creates a negative pressure at the adsorption end 2021, thereby effectively adsorbing the battery substrate. The telescopic component 2022, being a telescopic tube structure, can simultaneously serve the functions of telescopic extension and connection of pipelines, which helps to simplify the structure.

[0072] It should be noted that this embodiment of the invention does not limit the negative pressure extraction module; any existing structure can be used. For example, the negative pressure extraction module can be a vacuum pump.

[0073] In one embodiment, such as Figure 1 As shown, the etching equipment's adsorption stage also includes multiple positioning elements 3, which are disposed around the top surface of the stage body 1. The positioning elements 3 are used to position and fix the battery substrate, preventing the battery substrate from shifting or moving, thereby improving the processing accuracy of laser etching.

[0074] Furthermore, in one embodiment, such as Figure 1 As shown, the top of the positioning component 3 is provided with a stepped limiting surface 301, and the stepped limiting surface 301 of each positioning component 3 is coplanar with the top surface of each support block 201. The step limiting surface 301 on the top of the positioning component 3, and the fact that the step limiting surface 301 is coplanar with the top surface of each support block 201, can further support and limit the battery base, thereby improving the installation stability of the battery base.

[0075] Specifically, the battery substrate is generally a rectangular thin sheet, and the positioning component 3 can be correspondingly set as L-shaped, made of stainless steel. Four positioning components 3 are provided, located at the four corners of the top surface of the platform body 1.

[0076] According to an embodiment of the present invention, another aspect provides an etching apparatus, comprising: the above-described etching apparatus adsorption stage.

[0077] Because the etching equipment includes an etching equipment adsorption platform, it has the same effect as the etching equipment adsorption platform, that is, multiple adsorption modules 2 are used to support the four edges of the battery substrate, the support block 201 of the adsorption module 2 supports the battery substrate, and the adsorption device 202 of the adsorption module 2 adsorbs the battery substrate, thereby achieving effective fixation of the battery substrate. Compared with the fully adhesive platform, the adsorption contact surface of this utility model embodiment is smaller, the use cost and maintenance cost are lower, and there is a gap between the bottom of the battery substrate and the platform body 1, so there is no frictional loss, which also facilitates laser etching of the front and back sides of the battery substrate.

[0078] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. An etching apparatus chuck, comprising: It comprises: a carrier body (1); a plurality of adsorption modules (2) are respectively arranged at intervals around the top surface of the carrier body (1), and the plurality of adsorption modules (2) support the four edge regions of the battery substrate; each adsorption module (2) comprises a support block (201) and at least one adsorption device (202), the adsorption device (202) is suitable for adsorbing the battery substrate, and the battery substrate falls on the support block (201).

2. The etching apparatus chuck of claim 1, wherein, The top of the adsorption device (202) is provided with an adsorption end (2021), the adsorption end (2021) is provided with an up-down telescopic telescopic piece (2022), the free height H1 of the adsorption device (202) is higher than the height H2 of the support block (201), and the telescopic stroke of the telescopic piece (2022) is greater than the height difference between the telescopic piece (2022) and the support block (201).

3. The etching apparatus chuck of claim 2, wherein, The adsorption device (202) comprises: an adjusting assembly (2023) connected with the adsorption end (2021) at the top through the telescopic piece (2022); a fixing assembly (2024) connected with the bottom of the adjusting assembly (2023) at the top, and the fixing assembly (2024) is connected with the carrier body (1).

4. The etching apparatus chuck of claim 3, wherein, The adjusting assembly (2023) comprises a first support rod (20231) and an elastic piece (20232), the elastic piece (20232) is sleeved outside the first support rod (20231), opposite ends of the elastic piece (20232) are respectively provided with locking pieces (20233), the lower locking piece (20233) is movably arranged on the first support rod (20231), and the lower end of the telescopic piece (2022) is connected with the locking piece (20233) at the upper end.

5. The etching apparatus chuck of claim 4, wherein, A plurality of mounting holes are arranged on the carrier body (1), the fixing assembly (2024) comprises a second support rod (20241) and at least one fastener (20242), the second support rod (20241) penetrates the mounting hole, the top of the second support rod (20241) is connected with the bottom of the first support rod (20231), the fastener (20242) is sleeved outside the second support rod (20241), and the fastener (20242) clamps the carrier body (1) together with the locking piece (20233).

6. The etching apparatus chuck of claim 1, wherein, Several adsorption devices (202) are arranged separately on both sides or around the support block (201).

7. The etching apparatus chuck of claim 2, wherein, The telescopic piece (2022) is a telescopic pipe body structure, one end of the telescopic piece (2022) is the adsorption end (2021), and the other end is communicated with the negative pressure extraction module.

8. The etching apparatus chuck of any one of claims 1 to 7, wherein, It also comprises a plurality of positioning pieces (3), and the plurality of positioning pieces (3) are arranged around the top surface of the carrier body (1).

9. The etching apparatus chuck of claim 8, wherein, The top of the positioning piece (3) is provided with a stepped limiting surface (301), and the stepped limiting surface (301) of each positioning piece (3) is coplanar with the top surface of each support block (201).

10. An etching apparatus, characterized by, It comprises: The etching equipment adsorption carrier of any one of claims 1-9.

Images