Pretreatment device

Abstract

The utility model discloses a pretreatment device which comprises a device frame body, an ultrasonic cleaning machine, a nitrogen tank, a mesh basket and a C-shaped drying cover, the ultrasonic cleaning machine is arranged below the device frame body, a cleaning tank is installed in the ultrasonic cleaning machine, ultrasonic transducers are installed at the bottom end of the cleaning tank at equal intervals, and the nitrogen tank is arranged in the cleaning tank. The C-shaped drying cover is fixed in the device frame body above the ultrasonic cleaning machine, a C-shaped pipe is installed on the inner wall of the C-shaped drying cover, air outlet holes are formed in the inner surface of the C-shaped pipe at equal intervals, a lifting arm is arranged above the C-shaped drying cover, the mesh basket is arranged below the lifting arm, and the air outlet holes are formed in the upper portion of the C-shaped drying cover. And the nitrogen tank is arranged on one side of the device frame body. According to the utility model, the surface flatness, cleanliness, no surface oxide and no water mark of the wafer are ensured, a good foundation is provided for subsequent processing, and a cleaning agent can be automatically added, so that the cleaning agent can be uniformly stirred.

Description

Technical Field

[0001] This utility model relates to the field of crystal material processing technology, specifically a pretreatment device. Background Technology

[0002] Crystalline materials are solid materials composed of crystalline substances, in which atoms, ions, molecules, or particle groups are arranged in a periodic and regular manner. This regular arrangement makes crystalline materials widely found in nature and forms the basis for the manufacture of many materials. Crystalline materials have a wide range of applications, mainly including optics, electronics, optoelectronic devices, chemical catalysts, and biomedicine.

[0003] When processing crystal materials, pretreatment through cleaning is required. Cleaning can remove impurities from the surface of the crystal materials and improve the surface smoothness. After cleaning, hot air drying is generally used. However, hot air drying is prone to oxidation of the crystal surface and water marks are easy to appear on the crystal surface, which affects the cleanliness of the crystal surface and is not conducive to subsequent processing. Therefore, it is urgent to improve this method. Utility Model Content

[0004] The purpose of this invention is to provide a pretreatment device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a pretreatment device, comprising a device frame, an ultrasonic cleaner, a nitrogen tank, a mesh basket, and a C-shaped drying hood. The ultrasonic cleaner is located below the device frame, and a cleaning tank is installed inside the ultrasonic cleaner. Equally spaced ultrasonic transducers are installed at the bottom of each cleaning tank. The C-shaped drying hood is fixed inside the device frame above the ultrasonic cleaner. A C-shaped tube is installed on the inner wall of the C-shaped drying hood, and equally spaced air outlets are provided on the inner surface of each C-shaped tube. A lifting arm is located above the C-shaped drying hood, and the mesh basket is located below the lifting arm. The hanging lugs on the top of the mesh basket are engaged with hooks inside the lifting arm. The nitrogen tank is located on one side of the device frame, and an air pump is installed on one side of the nitrogen tank.

[0006] Preferably, a drive groove is provided on one side of the device frame, and a lifting screw is installed inside the drive groove. A first motor is installed at the top of the device frame at the position of the lifting screw. The output end of the first motor is fixedly connected to the lifting screw, and one end of the lifting arm extends into the drive groove and is threadedly connected to the lifting screw.

[0007] Preferably, a drain pipe is installed on the outer wall of the bottom of the cleaning tank, and one end of the drain pipe extends to the outside of the ultrasonic cleaner, and a drain valve is installed inside the drain pipe.

[0008] Preferably, the input end of the air pump is connected to the nitrogen tank via a pipe, and the output end of the air pump is connected to the C-shaped pipe via a pipe.

[0009] Preferably, a support base is fixed on the inner wall of the device frame on one side of the ultrasonic cleaner, and a third motor is installed inside the support base. A support arm is rotatably installed on the top of the support base, and one end of the support arm is fixedly connected to the output end of the third motor.

[0010] Preferably, a liquid storage box is installed at one end of the support arm, and a liquid filling pipe is installed at the bottom end of the liquid storage box, and a liquid filling valve is installed inside the liquid filling pipe.

[0011] Preferably, a second motor is installed at one end inside the support arm, and the output end of the second motor extends to the bottom of the support arm and is fixed with a rotating plate, and a stirring rod is installed at one end of the rotating plate.

[0012] Preferably, a small geared motor is installed on the outer wall of one end of the rotating plate, and the output end of the small geared motor is fixedly connected to the stirring rod.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] The crystal material to be processed is placed in a mesh basket, which is then suspended below the lifting arm using lugs and hooks. The first motor is started to drive the lifting screw to rotate, causing the lifting arm to move down along the screw and simultaneously lowering the mesh basket. The mesh basket passes through the C-shaped drying hood and is immersed in the water inside the cleaning tank to clean the crystal material. After cleaning, the first motor drives the lifting screw to rotate in the opposite direction, causing the lifting arm to move the mesh basket up into the C-shaped drying hood. At this time, the air pump extracts nitrogen from the nitrogen tank and delivers it into the C-shaped tube. The nitrogen is discharged from the air outlet and blown evenly onto the crystal material inside the mesh basket. The high-purity nitrogen is blown rapidly and continuously onto the crystal surface, causing the surface moisture to evaporate quickly, thus keeping the crystal dry and clean. Compared with hot air drying, nitrogen drying ensures the surface flatness, cleanliness, absence of surface oxides, and absence of watermarks on the wafer, providing a good foundation for subsequent processing.

[0015] The third motor drives the support arm to rotate above the ultrasonic cleaner. The liquid filling valve opens, allowing the cleaning agent inside the storage box to drip into the water inside the cleaning tank through the liquid filling pipe. Next, the small geared motor drives the stirring rod to rotate to a vertical position and extend into the water inside the cleaning tank. The second motor drives the rotating plate to rotate, which in turn drives the stirring rod to rotate, stirring the water to ensure that the cleaning agent and water are evenly mixed. Then, the small geared motor drives the stirring rod to rotate to a horizontal position for folding and storage. The third motor drives the support arm to rotate and move it away from above the ultrasonic cleaner. This design can automatically add cleaning agent and facilitates the even mixing of the cleaning agent. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0017] Figure 2 This is an enlarged structural schematic diagram of the ultrasonic cleaner of this utility model;

[0018] Figure 3 This is an enlarged schematic diagram of the basket structure of this utility model;

[0019] Figure 4 This is an enlarged structural schematic diagram of the support arm of this utility model;

[0020] Figure 5 This is a top-view enlarged structural diagram of the C-shaped drying hood of this utility model.

[0021] In the diagram: 1. Device frame; 2. Ultrasonic cleaner; 3. Cleaning tank; 301. Drain pipe; 302. Drain valve; 4. Ultrasonic transducer; 5. Air pump; 6. Nitrogen tank; 7. Drive tank; 8. Lifting screw; 9. First motor; 10. Lifting arm; 1001. Hook; 11. Wire basket; 1101. Hanging ear; 12. C-type drying hood; 13. C-type tube; 14. Air outlet; 15. Support arm; 16. Liquid storage box; 1601. Liquid filling pipe; 1602. Liquid filling valve; 17. Second motor; 18. Rotating plate; 19. Small geared motor; 20. Stirring rod; 21. Support base; 22. Third motor. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Therefore, the following detailed description of the embodiments of this utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0024] Please see Figure 1-5 The present invention provides an embodiment of a pretreatment device, comprising a device frame 1, an ultrasonic cleaner 2, a nitrogen tank 6, a mesh basket 11 and a C-type drying hood 12. The ultrasonic cleaner 2 is located below the device frame 1, and a cleaning tank 3 is installed inside the ultrasonic cleaner 2. Ultrasonic transducers 4 with equal spacing are installed at the bottom of the cleaning tank 3.

[0025] The C-type drying hood 12 is fixed inside the device frame 1 above the ultrasonic cleaner 2, and a C-type tube 13 is installed on the inner wall of the C-type drying hood 12, and air outlet holes 14 with equal spacing are provided on the inner surface of the C-type tube 13.

[0026] A lifting arm 10 is provided above the C-type drying hood 12, and a net basket 11 is provided below the lifting arm 10. The hanging ear 1101 on the top of the net basket 11 is attached to the hook 1001 inside the lifting arm 10.

[0027] Specifically, the crystal material to be processed is placed in the basket 11, and the basket 11 is suspended below the lifting arm 10 by the hanging ears 1101 and the hooks 1001. The first motor 9 is started to drive the lifting screw 8 to rotate, so that the lifting arm 10 moves down along the lifting screw 8 and moves the basket 11 down synchronously. The basket 11 passes through the C-shaped drying hood 12 and is immersed in the water inside the cleaning tank 3. The ultrasonic transducer 4 converts high-frequency electrical energy into ultrasonic mechanical vibration, and transmits ultrasonic waves to the cleaning liquid through vibration to clean the crystal material.

[0028] Nitrogen tank 6 is located on one side of the device frame 1, and a gas pump 5 is installed on one side of nitrogen tank 6.

[0029] Specifically, the first motor 9 drives the lifting screw 8 to rotate in the opposite direction, causing the lifting arm 10 to move the basket 11 upward into the C-shaped drying hood 12. At this time, the air pump 5 extracts nitrogen from the nitrogen tank 6 and delivers it into the C-shaped tube 13. The nitrogen is discharged from the air outlet 14 and blown evenly onto the crystal material inside the basket 11. High-purity nitrogen is blown rapidly and continuously onto the crystal surface, causing the surface moisture to evaporate quickly, thereby keeping the crystal dry and clean. Compared with hot air drying, nitrogen drying ensures the surface flatness, cleanliness, absence of surface oxides, and absence of water marks on the wafer, providing a good foundation for subsequent processing.

[0030] A drive groove 7 is provided on one side inside the device frame 1, and a lifting screw 8 is installed inside the drive groove 7. A first motor 9 is installed at the top of the device frame 1 at the position of the lifting screw 8. The output end of the first motor 9 is fixedly connected to the lifting screw 8. One end of the lifting arm 10 extends into the drive groove 7 and is threadedly connected to the lifting screw 8.

[0031] A drain pipe 301 is installed on the outer wall of the bottom of the cleaning tank 3, and one end of the drain pipe 301 extends to the outside of the ultrasonic cleaner 2, and a drain valve 302 is installed inside the drain pipe 301.

[0032] The input end of the air pump 5 is connected to the nitrogen tank 6 through a pipe, and the output end of the air pump 5 is connected to the C-shaped pipe 13 through a pipe.

[0033] A support base 21 is fixed on the inner wall of the device frame 1 on one side of the ultrasonic cleaner 2, and a third motor 22 is installed inside the support base 21. A support arm 15 is rotatably installed on the top of the support base 21, and one end of the support arm 15 is fixedly connected to the output end of the third motor 22.

[0034] One end of the support arm 15 is equipped with a liquid storage box 16, and the bottom end of the liquid storage box 16 is equipped with a liquid filling pipe 1601, and the inside of the liquid filling pipe 1601 is equipped with a liquid filling valve 1602.

[0035] A second motor 17 is installed at one end inside the support arm 15, and the output end of the second motor 17 extends to the bottom of the support arm 15 and is fixed with a rotating plate 18, and a stirring rod 20 is installed at one end of the rotating plate 18.

[0036] A small geared motor 19 is installed on the outer wall of one end of the rotating plate 18, and the output end of the small geared motor 19 is fixedly connected to the stirring rod 20.

[0037] Specifically, the third motor 22 is controlled to drive the support arm 15 to rotate above the ultrasonic cleaner 2. The liquid addition valve 1602 is opened so that the cleaning agent inside the liquid storage box 16 is dripped into the water inside the cleaning tank 3 through the liquid addition pipe 1601. Then, the small geared motor 19 drives the stirring rod 20 to rotate to a vertical position and extend into the water inside the cleaning tank 3. The second motor 17 drives the rotating plate 18 to rotate. The rotating plate 18 drives the stirring rod 20 to rotate, stirring the water so that the cleaning agent and water are evenly mixed.

[0038] The small geared motor 19 drives the stirring rod 20 to rotate to a horizontal position for folding and storage, and the third motor 22 drives the support arm 15 to rotate and move away from above the ultrasonic cleaner 2.

[0039] In this embodiment, the following steps are taken: First, the crystal material to be processed is placed in the basket 11, and the basket 11 is suspended below the lifting arm 10 by the hanging ears 1101 and the hooks 1001. Second, by operating the external control panel, the third motor 22 is controlled to drive the support arm 15 to rotate above the ultrasonic cleaner 2. The liquid addition valve 1602 is opened, allowing the cleaning agent inside the storage box 16 to drip into the water inside the cleaning tank 3 through the liquid addition pipe 1601. Immediately afterwards, the small geared motor 19 drives the stirring rod 20 to rotate to a vertical position and extend into the cleaning tank. Inside the washing tank 3, the second motor 17 drives the rotating plate 18 to rotate, which in turn drives the stirring rod 20 to rotate, stirring the water to ensure the cleaning agent and water are evenly mixed. Next, the small geared motor 19 drives the stirring rod 20 to rotate to a horizontal position for folding and storage. The third motor 22 drives the support arm 15 to rotate and move it away from above the ultrasonic cleaner 2. This design allows for automatic addition of cleaning agent and facilitates even mixing. Then, the first motor 9 is activated to drive the lifting screw 8 to rotate, causing the lifting arm 10 to move along the lifting screw... The lifting arm 10 moves downwards, simultaneously lowering the basket 11. The basket 11 passes through the C-shaped drying hood 12 and is immersed in the water inside the cleaning tank 3. The ultrasonic transducer 4 converts high-frequency electrical energy into ultrasonic mechanical vibration, which is then transmitted to the cleaning fluid to clean the crystal material. After cleaning, the first motor 9 drives the lifting screw 8 to rotate in the opposite direction, causing the lifting arm 10 to move the basket 11 upwards into the C-shaped drying hood 12. At this time, the air pump 5 extracts nitrogen from the nitrogen tank 6 and delivers it into the C-shaped tube 13. The nitrogen is discharged from the air outlet 14 and evenly distributed. The crystal material is evenly blown into the mesh basket 11, and high-purity nitrogen is rapidly and continuously blown onto the crystal surface to make the surface moisture evaporate quickly, thereby keeping the crystal dry and clean. Compared with hot air drying, nitrogen drying ensures the surface flatness, cleanliness, absence of surface oxides and water marks of the wafer, providing a good foundation for subsequent processing. Finally, drive the mesh basket 11 to move up to the top of the C-shaped drying hood 12, remove the mesh basket 11 to take out the crystal, and open the drain valve 302 to allow the sewage inside the cleaning tank 3 to be discharged through the drain pipe 301.

[0040] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

Claims

1. A pre-treatment device, characterized in that, Including device frame body (1), ultrasonic cleaner (2), nitrogen tank (6), net basket (11) and C type drying cover (12), ultrasonic cleaner (2) is arranged below device frame body (1), and the inside of ultrasonic cleaner (2) is installed with cleaning tank (3), and the bottom of cleaning tank (3) is installed with equal interval ultrasonic transducer (4), C type drying cover (12) is fixed in the inside of device frame body (1) above ultrasonic cleaner (2), and the inner wall of C type drying cover (12) is installed with C type pipe (13), and the inner surface of C type pipe (13) is provided with equal interval air outlet hole (14), the above of C type drying cover (12) is provided with lifting arm (10), net basket (11) is arranged below lifting arm (10), and the ear (1101) of net basket (11) top is attached with the hook (1001) in the inside of lifting arm (10), nitrogen tank (6) is arranged in one side of device frame body (1), and one side of nitrogen tank (6) is installed with gas pump (5).

2. A pre-treatment device according to claim 1, characterized in that: The inside of device frame body (1) is provided with drive groove (7), and the inside of drive groove (7) is installed with lifting lead screw (8), and the top of device frame body (1) at the position of lifting lead screw (8) is installed with first motor (9), the output end of first motor (9) is fixedly connected with lifting lead screw (8), one end of lifting arm (10) extends to the inside of drive groove (7) and is threadedly connected with lifting lead screw (8).

3. A pre-treatment device according to claim 1, characterized in that: The outer wall of the bottom of cleaning tank (3) is installed with drain pipe (301), one end of drain pipe (301) extends to the outside of ultrasonic cleaner (2), and drain valve (302) is installed in the inside of drain pipe (301).

4. A pre-treatment device according to claim 1, characterized in that: The input end of gas pump (5) is communicated with nitrogen tank (6) through pipeline, and the output end of gas pump (5) is communicated with C type pipe (13) through pipeline.

5. A pre-treatment device according to claim 1, characterized in that: The inner wall of device frame body (1) on one side of ultrasonic cleaner (2) is fixed with support seat (21), the inside of support seat (21) is installed with third motor (22), and support arm (15) is rotatably installed at the top of support seat (21), one end of support arm (15) is fixedly connected with the output end of third motor (22).

6. A pre-treatment device according to claim 5, characterised in that: One end of support arm (15) is installed with liquid storage box (16), the bottom of liquid storage box (16) is installed with liquid adding pipe (1601), and liquid adding valve (1602) is installed in the inside of liquid adding pipe (1601).

7. A pre-treatment device according to claim 5, characterized in that: One end of the inside of support arm (15) is installed with second motor (17), the output end of second motor (17) extends to the below of support arm (15) and is fixed with rotating plate (18), and one end of rotating plate (18) is installed with stirring rod (20).

8. A pre-treatment device according to claim 7, characterized in that: The outer wall of one end of rotating plate (18) is installed with small speed reducer (19), and the output end of small speed reducer (19) is fixedly connected with stirring rod (20).

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