Modularized target material support structure of magnetron sputtering coating equipment

Abstract

The utility model provides a modularized target material support structure of magnetron sputtering coating equipment, and relates to the technical field of target material supports. The sliding seat is fixed in the coating equipment through four screw rods, a T-shaped sliding block slides in the sliding seat, a sliding frame slides on the sliding seat, a first motor is fixed on the right end surface of the sliding frame, a threaded rod is fixed on an output shaft of the first motor through a pin, and the threaded rod is in threaded connection with the T-shaped sliding block; an electric cylinder is fixed in the sliding seat, and the extending end of the electric cylinder is fixed on the sliding frame. The heat dissipation and heat insulation design is excellent. The circular heat dissipation holes are formed in the target support in an array mode, the heat dissipation effect is greatly improved, and it is guaranteed that the temperature of the device is stable in the using process. The aluminum oxide concave heat insulation block fixed at the top effectively reduces the influence of heat on the target support, prolongs the service life of the equipment, and guarantees the stable performance of the equipment.

Description

Technical Field

[0001] This application belongs to the field of target support technology, and more specifically, relates to a modular target support structure for a magnetron sputtering coating equipment. Background Technology

[0002] The target holder in a magnetron sputtering coating equipment is an important component used to fix and support the target. It is usually made of metal, such as stainless steel or copper, and has a certain strength and rigidity to withstand the weight of the target and various forces during the sputtering process.

[0003] While the existing holding bracket can be adjusted in position, it cannot be adjusted in an emergency if the electric cylinder used for position adjustment is damaged. There is room for improvement in the heat dissipation and insulation of the existing target bracket, which affects the service life of the target bracket. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a modular target support structure for a magnetron sputtering coating equipment. This addresses the issues that while existing holding supports can be adjusted in position, they cannot be adjusted in an emergency when the electric cylinder used for position adjustment is damaged; and that existing target supports have room for improvement in heat dissipation and insulation, which affects their service life.

[0005] The purpose and function of the modular target support structure for a magnetron sputtering coating equipment disclosed in this application are achieved through the following specific technical means:

[0006] A modular target support structure for a magnetron sputtering coating equipment includes a sliding seat; the sliding seat is fixed inside the coating equipment by four screws, a T-shaped sliding block slides inside the sliding seat, a sliding frame slides on the sliding seat, a first motor is fixed to the right end face of the sliding frame, a threaded rod is fixed to the output shaft of the first motor by a pin, and the threaded rod is threadedly connected to the T-shaped sliding block; an electric cylinder is fixed inside the sliding seat, and the extended end of the electric cylinder is fixed to the sliding frame.

[0007] Furthermore, the top of the T-shaped sliding block has a rotating shaft, one end of which is welded with a target support. A worm gear is welded on the rotating shaft, and a worm rotates on the T-shaped sliding block, meshing with the worm gear.

[0008] Furthermore, a second motor is fixed on the T-shaped sliding block, and the output shaft of the second motor is fixed to the worm gear by a pin.

[0009] Furthermore, the T-shaped sliding block, sliding frame, first motor, threaded rod, electric cylinder, rotating shaft, worm gear, worm, and second motor together constitute the adjustment part.

[0010] Furthermore, the target support has a concave structure, and two target guns are fixed on the top of the target support. The target support has heat dissipation holes arranged in an array, and the heat dissipation holes are circular holes.

[0011] Furthermore, a heat insulation block is fixed on the top of the target support. The heat insulation block has a concave block structure and is made of alumina.

[0012] Compared with the prior art, this application has the following beneficial effects:

[0013] For position adjustment, a redundant adjustment mechanism was designed. The electric cylinder and the first motor within the sliding seat, working in conjunction with the threaded rod, can both adjust the left and right positions of the T-shaped sliding block and the target support. Even if the electric cylinder is damaged, the first motor can still function, ensuring the normal operation of the equipment and improving the reliability and stability of the system.

[0014] For angle adjustment, the second motor drives the worm gear to mesh with the worm wheel, precisely adjusting the rotation angle of the target support. After adjustment, the self-locking characteristics of the worm wheel and worm gear are used to prevent the support from rotating on its own, ensuring the stability after adjustment.

[0015] The heat dissipation and insulation design are equally excellent. The array of circular heat dissipation holes on the target support significantly improves heat dissipation, ensuring stable temperature during operation. The concave heat insulation block made of alumina fixed to the top effectively reduces the impact of heat on the target support, extending the equipment's lifespan and ensuring stable performance. Attached Figure Description

[0016] Figure 1 This is an axial view of the modular target support structure of the magnetron sputtering coating equipment of this application.

[0017] Figure 2 This application Figure 1 A magnified structural diagram at point A.

[0018] Figure 3 This application Figure 1 A schematic diagram of the rotated axial view structure.

[0019] Figure 4 This is a top view schematic diagram of the modular target support structure of the magnetron sputtering coating equipment of this application.

[0020] Figure 5 This is a left-side structural schematic diagram of the modular target support structure of the magnetron sputtering coating equipment of this application.

[0021] Figure 6 This application Figure 5 A magnified structural diagram at point B.

[0022] In the diagram, the correspondence between component names and drawing numbers is as follows:

[0023] 1. Sliding seat; 2. Adjustment part; 201. T-shaped sliding block; 202. Sliding frame; 203. First motor; 204. Threaded rod; 205. Electric cylinder; 206. Rotating shaft; 207. Worm gear; 208. Worm; 209. Second motor; 3. Target support; 301. Heat dissipation hole; 4. Heat insulation block; 5. Target gun. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the described embodiments of this application without creative effort are within the scope of protection of this application.

[0025] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The use of terms such as “a,” “an,” or “the” in the patent application specification and claims does not indicate a quantity limitation, but rather indicates the presence of at least one. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0026] The embodiments of this application will be described in further detail below with reference to the accompanying drawings and examples.

[0027] Example 1:

[0028] As attached Figure 1 To be continued Figure 6 As shown:

[0029] This application provides a modular target support structure for a magnetron sputtering coating equipment, including a sliding seat 1. The sliding seat 1 is fixed inside the coating equipment by four screws. A T-shaped sliding block 201 slides inside the sliding seat 1, and a sliding frame 202 slides on the sliding seat 1. A first motor 203 is fixed to the right end face of the sliding frame 202. A threaded rod 204 is fixed to the output shaft of the first motor 203 by a pin. The threaded rod 204 is threadedly connected to the T-shaped sliding block 201. An electric cylinder 205 is fixed inside the sliding seat 1. The extended end of the electric cylinder 205 is fixed to the sliding frame 202. When adjusting the left and right position of the target support 3, the electric cylinder 205 can be driven to extend or retract. When the electric cylinder 205 is damaged and cannot extend or retract, the first motor 203 can be driven to rotate. The first motor 203 drives the threaded rod 204 to rotate. Under the threaded drive of the threaded rod 204, the left and right adjustment of the T-shaped sliding block 201 can be realized, thus realizing the left and right adjustment of the target support 3.

[0030] Among them, a rotating shaft 206 is rotatably mounted on the top of the T-shaped sliding block 201, a target support 3 is welded to one end of the rotating shaft 206, a worm gear 207 is welded on the rotating shaft 206, and a worm 208 rotates on the T-shaped sliding block 201, the worm 208 meshing with the worm gear 207.

[0031] A second motor 209 is fixed on the T-shaped sliding block 201. The output shaft of the second motor 209 is fixed to the worm gear 208 by a pin. When adjusting the rotation angle of the target support 3, the second motor 209 is driven to rotate. The second motor 209 drives the worm gear 208 to rotate. Under the meshing transmission of the worm gear 208 and the worm wheel 207, the angle of the target support 3 can be adjusted. The adjustment is convenient and can prevent the target support 3 from rotating on its own after adjustment.

[0032] The adjustment part 2 is composed of the T-shaped sliding block 201, the sliding frame 202, the first motor 203, the threaded rod 204, the electric cylinder 205, the rotating shaft 206, the worm gear 207, the worm 208, and the second motor 209.

[0033] The target support 3 has a concave structure, and two target guns 5 are fixed on the top of the target support 3. The target support 3 has an array of heat dissipation holes 301, which are circular holes. During use, the array of heat dissipation holes 301 can help dissipate heat from the target support 3, thus improving the heat dissipation effect of the target support 3.

[0034] Example 2:

[0035] Based on Embodiment 1, a heat insulation block 4 is fixed on the top of the target support 3. The heat insulation block 4 has a concave block structure and is made of aluminum oxide. During use, the heat insulation of the heat insulation block 4 can reduce the impact of heat on the target support 3.

[0036] Working principle: When adjusting the left and right position of the target support 3, the electric cylinder 205 can be extended or retracted. When the electric cylinder 205 is damaged and cannot extend or retract, the first motor 203 can be rotated. The first motor 203 drives the threaded rod 204 to rotate. Under the threaded drive of the threaded rod 204, the left and right adjustment of the T-shaped sliding block 201 can be realized, thus realizing the left and right adjustment of the target support 3. When adjusting the rotation angle of the target support 3, the second motor 209 can be rotated. The second motor 209 drives the worm gear 208 to rotate. Under the meshing transmission of the worm gear 208 and the worm wheel 207, the angle adjustment of the target support 3 can be realized.

[0037] Although this application has been described with reference to the foregoing embodiments, those skilled in the art will understand that various changes can be made without departing from the spirit and scope of this application as defined by the appended claims. While this specification contains details of many specific implementations, these should not be construed as limiting the scope of the claims, but rather as descriptions of features specific to particular embodiments. The scope of this application is defined by the appended claims and their equivalents, and is not limited to the embodiments described above.

Claims

1. A modular target support structure for a magnetron sputtering coating equipment, characterized in that: Including sliding seat (1), four screw rods are fixed in the coating equipment, a T-shaped sliding block (201) is slid in the sliding seat (1), a sliding frame (202) is slid on the sliding seat (1), a first motor (203) is fixed on the right end surface of the sliding frame (202), a threaded rod (204) is fixed on the output shaft of the first motor (203) through a pin, the threaded rod (204) is threadedly connected on the T-shaped sliding block (201), an electric cylinder (205) is fixed in the sliding seat (1), the extending end of the electric cylinder (205) is fixed on the sliding frame (202).

2. The modular target support structure of claim 1, wherein: the target support structure is configured to be removably coupled to a magnetron sputter deposition system. The T-shaped sliding block (201) rotates a rotating shaft (206) on the top, the upper end of the rotating shaft (206) is welded with a target material support (3), a worm wheel (207) is welded on the rotating shaft (206), a worm gear (208) is rotated on the T-shaped sliding block (201), the worm gear (208) is engaged with the worm wheel (207).

3. The modular target support structure of claim 2, wherein: the target support structure is configured to be removably coupled to a magnetron sputter deposition system. The T-shaped sliding block (201) is fixed with a second motor (209), the output shaft of the second motor (209) is fixed on the worm gear (208) through a pin.

4. The modular target support structure of claim 3, wherein: the plurality of target support members are arranged in a plurality of rows; and the plurality of target support members are arranged in a plurality of columns. The T-shaped sliding block (201), the sliding frame (202), the first motor (203), the threaded rod (204), the electric cylinder (205), the rotating shaft (206), the worm wheel (207), the worm gear (208) and the second motor (209) jointly constitute an adjusting part (2).

5. The modular target support structure of claim 4, wherein: the plurality of target support members are arranged in a plurality of rows; and the plurality of target support members in each row are arranged in a plurality of columns. The target material support (3) is a concave structure, two target guns (5) are fixed above the target material support (3), the target material support (3) is arrayed with heat dissipation holes (301), the heat dissipation holes (301) are circular hole structures.

6. The modular target support structure of claim 5, wherein: the target support structure is configured to be removably coupled to a magnetron sputter deposition coating apparatus. The top of the target material support (3) is fixed with a heat insulation block (4), the heat insulation block (4) is a concave block structure, and the heat insulation block (4) is made of aluminum oxide.

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