Coating chamber convenient to maintain

Abstract

The utility model discloses a coating chamber convenient to maintain, which relates to the field of magnetron sputtering equipment maintenance and comprises a coating chamber and two side walls of the coating chamber, namely a first side wall and a second side wall, a movable baffle plate is arranged in an inner cavity of the coating chamber, a first driving device for driving the baffle plate to move is arranged at the upper end of the baffle plate, and a second driving device for driving the baffle plate to move is arranged at the lower end of the baffle plate. And a first guide device for moving the baffle plate is arranged at the bottom end of the baffle plate. According to the utility model, the baffle plate is arranged in the coating chamber, so that the deposition of residues on the inner wall of the cavity can be reduced after the baffle plate is used, and the baffle plate can be continuously driven in a continuous production line, taken out along with the substrate I, maintained or replaced at any time and shielded at any time. The difficulty of cleaning work in the cavity is reduced, the cleaning work is convenient to carry out, cavity opening treatment does not need to be carried out on the coating chamber, the risk of equipment damage is reduced, equipment recovery does not need to be carried out, continuous production is carried out, and the influence of equipment maintenance is avoided.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering equipment maintenance, and in particular to a coating chamber that is easy to maintain. Background Technology

[0002] During the operation of magnetron sputtering equipment, a large amount of sputtering residue accumulates inside the chamber, affecting equipment performance and coating quality. Currently, cleaning the coating chamber mainly involves manual wiping or disassembly, but these methods have several problems. Firstly, during cleaning, it's difficult to avoid accidental collisions and damage to delicate components inside the chamber, affecting normal equipment operation. Secondly, disassembling and reassembling the equipment is time-consuming and labor-intensive, increasing the risk of damage during restoration. Overall, these factors negatively impact equipment operation and coating quality. Utility Model Content

[0003] The purpose of this invention is to provide a coating chamber that is easy to maintain, so as to solve the problem mentioned in the background art that existing magnetron sputtering equipment requires disassembly of the cavity to remove internal sputtering residues during maintenance, which makes the cleaning of magnetron sputtering equipment difficult.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a coating chamber that is easy to maintain, comprising a coating chamber and two side walls, a first side wall and a second side wall. A movable baffle is provided in the inner cavity of the coating chamber. A first driving device for moving the baffle is provided at the upper end of the baffle, and a first guiding device for moving the baffle is provided at the lower end of the baffle. A movable substrate is provided in the inner cavity of the coating chamber. The cross-sectional dimension of the substrate is smaller than that of the baffle. A second driving device is provided at the upper end of the substrate, and a second guiding device is provided below the substrate. A coating device is provided on one side of the first side wall.

[0005] Preferably, both the first driving and the second driving devices include a magnetic guide rail fixedly connected to the upper wall of the coating chamber. The magnetic guide rail has magnetic poles inside, and the top of the shielding plate and the substrate are each provided with an electromagnet that matches the magnetic poles of the magnetic guide rail.

[0006] Preferably, the coating apparatus includes a mounting port on one side of a sidewall, the mounting port being fixedly connected to a coating machine, and the target material being located inside the sidewall.

[0007] Preferably, the first guiding device includes a rotating rod that is rotatably connected to the side wall, and a roller is rotatably connected to one end of the rotating rod.

[0008] Preferably, the second guiding device includes a rotating rod rotatably connected to a side wall, and a roller rotatably connected to one end of the rotating rod.

[0009] Preferably, the top of the shield is provided with a hoisting device for guiding the shield, the bottom of the shield is provided with a magnetic guide rail II for driving the shield, and the magnetic guide rail II is provided with magnetic poles inside, and the bottom of the shield is provided with an electromagnet adapted to the magnetic poles.

[0010] The technical effects and advantages of this utility model are as follows: By installing a baffle inside the coating chamber, this utility model reduces the deposition of residue on the inner wall of the chamber. Furthermore, this baffle can be continuously moved in a continuous production line, allowing for maintenance or replacement as the substrate is removed, and providing continuous shielding. This reduces the difficulty of cleaning the interior of the chamber, making cleaning easier, and eliminates the need for opening the coating chamber, reducing the risk of equipment damage. It also eliminates the need for equipment restoration, allowing for continuous production unaffected by equipment maintenance. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the baffle driving method of this utility model. Figure 1 .

[0012] Figure 2 This is a schematic diagram of the baffle driving method of this utility model. Figure 2 .

[0013] Figure 3 This is a schematic diagram of the substrate of this utility model in the direction of movement in the coating chamber.

[0014] In the diagram: 1. Coating chamber; 2. Side wall one; 3. Side wall two; 4. Rotating rod one; 5. Roller one; 6. Lifting device; 7. Roller two; 8. Baffle plate; 9. Magnetic guide rail one; 10. Rotating rod two; 11. Substrate; 12. Mounting port; 13. Target material; 14. Magnetic guide rail two. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] This utility model provides, for example Figure 1-3The coating chamber shown includes a coating chamber 1 and two side walls 2 and 3 of the coating chamber 1. A movable baffle 8 is provided in the inner cavity of the coating chamber 1. A first driving device for driving the baffle 8 to move is provided at the upper end of the baffle 8. A first guiding device for driving the baffle 8 to move is provided at the lower end of the baffle 8. A movable substrate 11 is provided in the inner cavity of the coating chamber 1. The cross-sectional dimension of the substrate 11 is smaller than that of the baffle 8. A second driving device is provided at the upper end of the substrate 11. A second guiding device is provided at the lower end of the substrate 11. A coating device is provided on one side of the side wall 2.

[0017] Before the substrate 11 enters the coating chamber to begin coating, the coating apparatus has already started sputtering material into the coating chamber 1 environment. After a period of pre-sputtering, the sputtering environment inside the chamber meets the coating requirements. The substrate 11 then enters the chamber at a set speed under the action of the second transport device to begin coating. At the end of coating, the substrate 11 leaves the chamber at a set speed under the action of the second transport device. Before the substrate 11 completely leaves the chamber, the target 13 continues to work until the substrate 11 completely leaves the coating chamber. Before the substrate 11 fully enters and before it completely leaves, the material sputtered by the target 13 is caught by the baffle plate 8 to prevent sputtering onto the sidewall 3. After a period of time, depending on the production intensity and cycle, the baffle plate 8 is transported out of the chamber by the first transport device for cleaning or replacement. After cleaning, it is then transported back into the chamber by the first transport device. This maximizes the protection of the sidewall 3, keeping it clean and ensuring the quality of the coating. This also makes equipment maintenance easier and avoids equipment damage caused by directly cleaning the side wall 23.

[0018] like Figure 1 As shown, both the first drive and the second drive devices include a magnetic guide rail 9 fixedly connected to the upper wall of the coating chamber 1. The magnetic guide rail 9 has magnetic poles inside, and the top of the shielding plate 8 and the substrate 11 are both provided with electromagnets that match the magnetic poles of the magnetic guide rail 9.

[0019] like Figure 1 As shown, the coating apparatus includes a mounting port 12 on one side of the sidewall 2, and a coating machine is fixedly connected to the mounting port 12. The target material 13 is located inside the sidewall 2.

[0020] like Figure 1 The first guiding device includes a rotating rod 4 rotatably connected to the side wall 2 3, and a roller 5 is rotatably connected to one end of the rotating rod 4.

[0021] like Figure 1 As shown, the second guiding device includes a rotating rod 10 rotatably connected to the side wall 2. One end of the rotating rod 10 is rotatably connected to a roller 7. The length of the rotating rod 10 is adapted to the spray range of the coating machine.

[0022] like Figure 2 As shown, the top of the shielding plate 8 is provided with a hoisting device 6 for guiding the shielding plate 8, and the bottom of the shielding plate 8 is provided with a magnetic guide rail 2 14 for driving the shielding plate 8. The magnetic guide rail 2 14 is provided with magnetic poles inside, and the bottom of the shielding plate 8 is provided with an electromagnet that matches the magnetic poles. The hoisting device 6 can be a steel wire rope fixedly connected to the inner wall of the coating chamber 1. A hook is slidably connected to the steel wire rope, and the hook is hooked to the shielding plate 8. Through the cooperation of the magnetic guide rail 2 14 and the hoisting device 6, the distance between the shielding plate 8 and the upper and lower inner walls of the coating chamber 1 can be reduced, and the sputtering residue can be shielded to a greater extent.

[0023] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A coating chamber convenient for maintenance, comprising a coating chamber (1) and two side walls, side wall one (2) and side wall two (3) of the coating chamber (1), characterized in that: The inner cavity of the coating chamber (1) is provided with a movable shielding plate (8), the upper end of the shielding plate (8) is provided with a first driving device for driving the shielding plate (8) to move, the bottom end of the shielding plate (8) is provided with a first guide device for the shielding plate (8) to move, the inner cavity of the coating chamber (1) is provided with a movable substrate (11), the cross-sectional size of the substrate (11) is smaller than the cross-sectional size of the shielding plate (8), the upper end of the substrate (11) is provided with a second driving device, the lower side of the substrate (11) is provided with a second guide device, and one side of the side wall one (2) is provided with a coating device.

2. The maintenance-friendly coating chamber of claim 1, wherein: The first driving and second driving devices both include a magnetic guide rail one (9) fixedly connected with the upper wall of the coating chamber (1), the inside of the magnetic guide rail one (9) is provided with a magnetic pole, and the top end of the shielding plate (8) and the substrate (11) are both provided with an electromagnet matched with the magnetic pole of the magnetic guide rail one (9).

3. The maintenance-friendly coating chamber of claim 2, wherein: The coating device includes a mounting port (12) on one side of the side wall one (2), the mounting port (12) is fixedly connected with a coating machine, and the target material (13) is located inside the side wall one (2).

4. The maintenance-friendly coating chamber of claim 2, wherein: The first guide device includes a rotating rod one (4) rotationally connected with the side wall two (3), one end of the rotating rod one (4) is rotationally connected with a roller one (5).

5. The easy-to-maintain coating chamber of claim 1, wherein: The second guide device includes a rotating rod two (10) rotationally connected with the side wall one (2), one end of the rotating rod two (10) is rotationally connected with a roller two (7).

6. The easy-to-maintain coating chamber of claim 1, wherein: The top end of the shielding plate (8) is provided with a lifting device (6) for guiding the shielding plate (8), the bottom end of the shielding plate (8) is provided with a magnetic guide rail two (14) for driving the shielding plate (8), the inside of the magnetic guide rail two (14) is provided with a magnetic pole, and the bottom end of the shielding plate (8) is provided with an electromagnet matched with the magnetic pole.

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