Rapid cooling device for vacuum furnace

Abstract

The utility model discloses a rapid cooling device for a vacuum furnace, and relates to the technical field of vacuum furnaces. The device comprises a vacuum furnace, a sliding placement assembly is arranged in the vacuum furnace, an injection assembly is arranged on the outer side of the sliding placement assembly, a driving assembly is arranged at one end of the injection assembly, the driving assembly is in power connection with the injection assembly, and a recovery assembly is arranged on the outer side of the vacuum furnace. The driving assembly drives the spraying assembly to rotate in the circumferential direction of the outer side of the sliding placement assembly, so that the multiple spraying ends of the spraying assembly can directly spray inert gas to the surfaces of workpieces distributed on the sliding placement assembly; according to the rotary spraying mode, the problem of local temperature difference accumulation caused by gas heat capacity attenuation in traditional long-distance flowing is avoided by shortening a gas forced convection path, so that uniform transient heat exchange sections can be formed on the outer surfaces of all workpieces, and the consistency of the cooling rate of batch workpieces is guaranteed.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum furnace technology, and more specifically, it relates to a rapid cooling device for a vacuum furnace. Background Technology

[0002] With the rapid development of high-end material manufacturing technology, vacuum furnaces have become core equipment in fields such as metal heat treatment, semiconductor precision machining, and high-performance ceramic sintering due to their oxidation-free and low-pollution process characteristics. To meet the rapid cooling requirements of workpieces after high-temperature processes, existing technologies inject inert gases (such as nitrogen and argon) into the vacuum furnace and utilize the forced convection heat exchange principle between the gas and the surface of the high-temperature workpiece to accelerate heat dissipation, thereby achieving a controllable and efficient cooling process.

[0003] In the forced convection heat transfer process of a vacuum furnace, inert gas generally flows from one end of the vacuum furnace to the other. During this process, the inert gas flows over the surface of the high-temperature workpiece and absorbs heat. However, as the gas continues to flow, its own temperature gradually increases due to continuous heat exchange, resulting in a decrease in the gas's heat capacity and a reduction in the temperature difference with the subsequent workpiece. Consequently, the thermodynamic heat transfer driving force decreases. This phenomenon of a gradient decrease in heat transfer efficiency caused by gas thermal saturation leads to a significant reduction in the heat dissipation rate of the workpiece placed at the end of the vacuum furnace, affecting the overall process uniformity. Utility Model Content

[0004] To address the problem that the heat capacity of inert gas continuously decreases as it moves within a vacuum furnace and exchanges heat with the workpiece, resulting in a significant reduction in the heat dissipation rate of the workpiece placed at the end of the vacuum furnace, this invention proposes a rapid cooling device for a vacuum furnace to overcome the aforementioned technical problems in existing related technologies.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model is a rapid cooling device for a vacuum furnace, including a vacuum furnace, a sliding placement assembly inside the vacuum furnace, a spray assembly outside the sliding placement assembly, a driving assembly at one end of the spray assembly, the driving assembly being poweredly connected to the spray assembly, and a recovery assembly outside the vacuum furnace.

[0007] The sliding placement assembly is used to support the workpiece, the driving assembly is used to drive the spraying assembly to rotate outside the sliding placement assembly so that the spraying assembly rotates to spray inert gas onto the workpiece, and the recovery assembly is used to extract the inert gas inside the vacuum furnace.

[0008] Furthermore, the sliding placement assembly includes a fixed plate, several of which are fixedly connected inside the vacuum furnace. A support frame is fixedly connected to the top of the fixed plate, and a support groove is provided on the inner wall of the support frame. An I-shaped placement frame is movably connected inside the support groove, and several placement rods are fixedly connected to the inner wall of the I-shaped placement frame.

[0009] Furthermore, the bottom of the vacuum furnace is fixedly connected to a support leg, and a T-shaped movable rod is movably connected to one side of the support leg. One end of the T-shaped movable rod passes through the support leg and is fixedly connected to a movable leg. The top of the movable leg and the top of the I-shaped placement frame are both provided with insertion slots, and an L-shaped fixing plate is movably connected inside the insertion slot.

[0010] Furthermore, a storage tube is fixedly connected to the front of the movable leg, a connecting plate is movably connected inside the storage tube, a connecting rod is fixedly connected to the bottom of the connecting plate, the connecting rod passes through the storage tube and is fixedly connected to the L-shaped fixing plate, a spring is fixedly connected between the bottom of the connecting plate and the inner wall of the storage tube, and a handle is fixedly connected to the top of the L-shaped fixing plate.

[0011] Furthermore, the spraying assembly includes a connecting pipe, which is fixedly connected to one end of the vacuum furnace. One end of the connecting pipe extends into the interior of the vacuum furnace and is fixedly connected to a rotary joint. A rotating pipe is fixedly installed at one end of the rotary joint, and several nozzles are fixedly connected to the outer surface of the rotating pipe.

[0012] Furthermore, the drive assembly includes a storage box, which is fixedly installed on the inner wall of the vacuum furnace. The rotating tube is rotatably connected to the storage box. A driven gear is rotatably connected inside the storage box. The driven gear is fixedly connected to the rotating tube. A driving gear meshes with the outer surface of the driven gear. A drive motor is fixedly installed on the outer surface of the vacuum furnace. The drive motor is fixedly connected to the driving gear.

[0013] Furthermore, the recycling component includes recycling holes, a plurality of which are provided on the inner wall of the vacuum furnace, and a plurality of branch pipes are fixedly connected to the outer surface of the vacuum furnace corresponding to the recycling holes, and a return pipe is fixedly connected to one end of the plurality of branch pipes.

[0014] This utility model has the following beneficial effects:

[0015] 1. This utility model drives the spraying assembly to rotate circumferentially along the outer side of the sliding placement assembly through the driving assembly, so that several spraying ends of the spraying assembly can directly spray inert gas onto the workpiece surface distributed on the sliding placement assembly; this rotating spraying mode avoids the problem of local temperature difference accumulation caused by gas heat capacity decay in traditional long-distance flow by shortening the forced gas convection path, so that the outer surface of all workpieces can form a uniform transient heat transfer cross section, ensuring the consistency of the cooling rate of batch workpieces.

[0016] 2. This utility model involves pressing the L-shaped fixing plate downwards with the handle while simultaneously pulling the I-shaped placement frame. Once the insertion slot on the I-shaped placement frame aligns vertically with the L-shaped fixing plate, the handle is released. At this point, the spring pushes the L-shaped fixing plate into the insertion slot on the I-shaped placement frame via the connecting plate and connecting rod, connecting the moving leg to the I-shaped placement frame. The moving leg then supports the I-shaped placement frame. This design allows the workpiece to be removed from the I-shaped placement frame outside the vacuum furnace, while ensuring the overall stability of the I-shaped placement frame.

[0017] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the utility model embodiments, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the external outline structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the open structure of the vacuum furnace of this utility model;

[0021] Figure 3 This is a rear view schematic diagram of the vacuum furnace structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the sliding placement component structure of this utility model;

[0023] Figure 5 This is a schematic diagram of the spray assembly structure of this utility model;

[0024] Figure 6 This is a schematic diagram of the movable leg structure of this utility model.

[0025] The attached diagram lists the components represented by each number as follows:

[0026] 1. Vacuum furnace; 2. Sliding placement assembly; 201. Fixing plate; 202. Support frame; 203. Support groove; 204. I-shaped placement rack; 205. Placement rod; 206. Support leg; 207. T-shaped movable rod; 208. Moving leg; 209. Insertion groove; 210. L-shaped fixing plate; 211. Storage cylinder; 212. Connecting plate; 213. Connecting rod; 214. Spring; 215. Handle; 3. Spray assembly; 301. Connecting pipe; 302. Rotary joint; 303. Rotating pipe; 304. Nozzle; 4. Drive assembly; 401. Storage box; 402. Driven gear; 403. Drive gear; 404. Drive motor; 5. Recovery assembly; 501. Recovery hole; 502. Branch pipe; 503. Return pipe. Detailed Implementation

[0027] The technical solutions of the utility model embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the utility model, and not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the utility model.

[0028] In the description of this utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inner", etc., which indicate orientation or positional relationship, are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0029] Please see Figures 1-6 As shown, this utility model is a rapid cooling device for a vacuum furnace, including a vacuum furnace 1. The vacuum furnace 1 is characterized in that a sliding placement component 2 is provided inside the vacuum furnace 1, a spray component 3 is provided outside the sliding placement component 2, a driving component 4 is provided at one end of the spray component 3, the driving component 4 is poweredly connected to the spray component 3, and a recovery component 5 is provided outside the vacuum furnace 1.

[0030] The sliding placement assembly 2 is used to support the workpiece, the driving assembly 4 is used to drive the spraying assembly 3 to rotate outside the sliding placement assembly 2 so that the spraying assembly 3 rotates to spray inert gas onto the workpiece, and the recovery assembly 5 is used to extract the inert gas inside the vacuum furnace 1.

[0031] By placing the workpiece on top of the sliding placement assembly 2 and then pushing the sliding placement assembly 2 into the vacuum furnace 1, once the inside of the vacuum furnace 1 is in a vacuum state, the drive assembly 4 drives the spray assembly 3, so that the spray assembly 3 can rotate outside the sliding placement assembly 2. At this time, the rotating spray assembly 3 can evenly spray inert gas onto the outer surface of the workpiece, so that the inert gas and the workpiece can exchange heat. At the same time, the recovery assembly 5 can continuously extract the high-temperature inert gas inside the vacuum furnace 1.

[0032] The spraying assembly 3 is driven by the driving assembly 4 to rotate circumferentially along the outer side of the sliding placement assembly 2, so that several spraying ends of the spraying assembly 3 can directly spray inert gas onto the workpiece surfaces distributed on the sliding placement assembly 2. This rotating spraying mode avoids the problem of local temperature difference accumulation caused by gas heat capacity decay in traditional long-distance flow by shortening the forced gas convection path, so that the outer surface of all workpieces can form a uniform transient heat transfer cross section, ensuring the consistency of the cooling rate of batch workpieces.

[0033] In one embodiment, the sliding placement assembly 2 includes a fixed plate 201. Several fixed plates 201 are fixedly connected inside the vacuum furnace 1. A support frame 202 is fixedly connected to the top of the fixed plate 201. A support groove 203 is provided on the inner wall of the support frame 202. An I-shaped placement rack 204 is movably connected inside the support groove 203. Several placement rods 205 are fixedly connected to the inner wall of the I-shaped placement rack 204.

[0034] The support frame 202 supports the I-shaped placement rack 204 through the support groove 203, so that the bottom of the I-shaped placement rack 204 is at a certain distance from the inner wall of the vacuum furnace 1. Since the I-shaped placement rack 204 supports the workpiece through several placement rods 205, the bottom of the workpiece can be in a hollow state. This setting allows the inert gas ejected from the spraying end of the spraying assembly 3 to come into normal contact with the bottom of the workpiece after rotating to the bottom of the I-shaped placement rack 204, so that the workpiece can be cooled from all directions. Since the fixing plate 201 supports the support frame 202, this setting allows the spraying assembly 3 to rotate in the direction after rotating to one side of the fixing plate 201, and continuously repeat the above rotation process.

[0035] In one embodiment, for the vacuum furnace 1 described above, a support leg 206 is fixedly connected to the bottom of the vacuum furnace 1, and a T-shaped movable rod 207 is movably connected to one side of the support leg 206. One end of the T-shaped movable rod 207 passes through the support leg 206 and is fixedly connected to a movable leg 208. The top of the movable leg 208 and the top of the I-shaped placement frame 204 are both provided with insertion slots 209, and an L-shaped fixing plate 210 is movably connected inside the insertion slots 209.

[0036] When removing the workpiece from the placement rod 205, the furnace door of the vacuum furnace 1 is opened, and then the I-shaped placement frame 204 is pulled, causing it to continuously move out of the support frame 202. When it moves to the appropriate position, the L-shaped fixing plate 210 moves upward and into the insertion slot 209 on the I-shaped placement frame 204. At this time, the moving leg 208 can support the I-shaped placement frame 204, and the moving leg 208 moves together with the I-shaped placement frame 204. This arrangement ensures that after most of the I-shaped placement frame 204 has been moved out, it will not tilt due to the lack of support at the front end. When the moving leg 208 moves, the T-shaped movable rod 207 can guide it, and the L-shaped fixing plate 210 limits the moving leg 208 through the insertion slot 209, so that the moving leg 208 will not wobble when supporting the I-shaped placement frame 204.

[0037] In one embodiment, for the aforementioned movable leg 208, a storage tube 211 is fixedly connected to the front of the movable leg 208, a connecting plate 212 is movably connected inside the storage tube 211, a connecting rod 213 is fixedly connected to the bottom of the connecting plate 212, the connecting rod 213 passes through the storage tube 211 and is fixedly connected to the L-shaped fixing plate 210, a spring 214 is fixedly connected between the bottom of the connecting plate 212 and the inner wall of the storage tube 211, and a handle 215 is fixedly connected to the top of the L-shaped fixing plate 210.

[0038] Spring 214 pushes the connecting rod 213 upward through connecting plate 212, causing the upper side of L-shaped fixing plate 210 to be outside the moving leg 208. When the I-shaped placement frame 204 is pulled, the handle 215 presses down on the L-shaped fixing plate 210, allowing the L-shaped fixing plate 210, which is outside the moving leg 208, to move into the moving leg 208. When the insertion slot 209 on the I-shaped placement frame 204 is aligned vertically with the L-shaped fixing plate 210, the handle 215 is released. At this time, spring 214 pushes the connecting rod 213 upward through connecting plate 212, causing the upper side of L-shaped fixing plate 210 to be outside the moving leg 208. 14. The connecting rod 213 is pushed upward by the connecting plate 212, so that the L-shaped fixing plate 210 can be directly moved into the insertion slot 209 on the I-shaped placement frame 204, and the moving leg 208 is connected to the I-shaped placement frame 204. The above arrangement ensures that the L-shaped fixing plate 210 will not move downward randomly after moving into the insertion slot 209. At the same time, when separating the moving leg 208 from the I-shaped placement frame 204, the handle 215 can be pressed downward, which is convenient to operate.

[0039] In one embodiment, the above-mentioned spraying assembly 3 includes a connecting pipe 301, which is fixedly connected to one end of the vacuum furnace 1. One end of the connecting pipe 301 extends into the interior of the vacuum furnace 1 and is fixedly connected to a rotary joint 302. A rotating pipe 303 is fixedly installed at one end of the rotary joint 302, and a plurality of nozzles 304 are fixedly connected to the outer surface of the rotating pipe 303.

[0040] The other end of the connecting pipe 301 is connected to an external gas source. When cooling the workpiece inside the vacuum furnace 1, the inert gas inside the external gas source flows continuously into the interior of the rotating pipe 303 through the connecting pipe 301 and the rotary joint 302. When the pressure inside the rotating pipe 303 is high, several nozzles 304 on the rotating pipe 303 can spray out the inert gas inside the rotating pipe 303. The setting of the rotary joint 302 ensures that the connection between the rotating pipe 303 and the connecting pipe 301 is sealed when the rotating pipe 303 is rotating.

[0041] In one embodiment, the drive assembly 4 includes a storage box 401, which is fixedly installed on the inner wall of the vacuum furnace 1. The rotating tube 303 is rotatably connected to the storage box 401. A driven gear 402 is rotatably connected inside the storage box 401. The driven gear 402 is fixedly connected to the rotating tube 303. A drive gear 403 meshes with the outer surface of the driven gear 402. A drive motor 404 is fixedly installed on the outer surface of the vacuum furnace 1 and is fixedly connected to the drive gear 403.

[0042] The drive motor 404 drives the drive gear 403 to rotate inside the storage box 401. The rotating drive gear 403 drives the rotating tube 303 to rotate inside the vacuum furnace 1 through the driven gear 402. This allows the nozzle 304 on the rotating tube 303 to directly spray inert gas onto the outer surface of the workpiece. At the same time, the output end of the drive motor 404 is equipped with an encoder. This setting allows the drive motor 404 to reverse after rotating to a certain angle, thereby avoiding the phenomenon of the rotating tube 303 colliding with the fixed plate 201 during reverse rotation.

[0043] In one embodiment, the recycling component 5 includes a recycling hole 501, a plurality of recycling holes 501 are provided on the inner wall of the vacuum furnace 1, a plurality of branch pipes 502 are fixedly connected to the outer surface of the vacuum furnace 1 corresponding to the recycling holes 501, and a return pipe 503 is fixedly connected to one end of the plurality of branch pipes 502.

[0044] A vortex tube cooler is installed on the outside of the vacuum furnace 1. The return pipe 503 is connected to the air inlet of the vortex tube cooler, and the connecting pipe 301 is connected to the air outlet of the vortex tube cooler. When cooling the workpiece, the vortex tube cooler extracts the inert gas inside the vacuum furnace 1 through the return pipe 503, the branch pipe 502 and the recovery hole 501. After being cooled by the vortex tube cooler, the extracted inert gas can flow back into the rotating tube 303 through the connecting pipe 301, so that the inert gas can be recycled.

[0045] Through the above technical solution, 1. The driving component 4 drives the spraying component 3 to rotate circumferentially along the outer side of the sliding placement component 2, so that several spraying ends of the spraying component 3 can directly spray inert gas onto the workpiece surfaces distributed on the sliding placement component 2; this rotating spraying mode avoids the problem of local temperature difference accumulation caused by gas heat capacity attenuation in traditional long-distance flow by shortening the forced gas convection path, thereby forming a uniform transient heat exchange interface on the outer surface of all workpieces and ensuring the consistency of the cooling rate of batch workpieces; 2. While pressing the L-shaped fixing plate 210 downwards with the handle 215, the I-shaped placement frame 20 is also... 4. Pull: When the insertion slot 209 on the I-shaped placement rack 204 is aligned vertically with the L-shaped fixing plate 210, release the handle 215. At this time, the spring 214 pushes the L-shaped fixing plate 210 into the insertion slot 209 on the I-shaped placement rack 204 through the connecting plate 212 and the connecting rod, and connects the moving leg 208 with the I-shaped placement rack 204. At this time, the moving leg 208 can support the I-shaped placement rack 204. The above arrangement allows the workpieces on the I-shaped placement rack 204 to be taken out outside the vacuum furnace 1, and the overall stability of the I-shaped placement rack 204 can be guaranteed.

[0046] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] The preferred embodiments of the utility model disclosed above are merely illustrative of the utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the utility model, thereby enabling those skilled in the art to better understand and utilize it. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A vacuum furnace rapid cooling device comprising a vacuum furnace (1), characterized in that, The inside of the vacuum furnace (1) is provided with a sliding placement assembly (2), the outer side of the sliding placement assembly (2) is provided with a spraying assembly (3), one end of the spraying assembly (3) is provided with a driving assembly (4), the driving assembly (4) is power connected with the spraying assembly (3), the outside of the vacuum furnace (1) is provided with a recovery assembly (5); The sliding placement assembly (2) is used for supporting the workpiece, the driving assembly (4) is used for driving the spraying assembly (3) to rotate on the outside of the sliding placement assembly (2), so that the spraying assembly (3) rotates to spray inert gas on the workpiece, and the recovery assembly (5) is used for extracting the inert gas in the vacuum furnace (1).

2. The vacuum furnace rapid cooling device according to claim 1, characterized in that, The sliding placement assembly (2) comprises a fixed plate (201), a plurality of fixed plates (201) are fixedly connected in the vacuum furnace (1), a support frame (202) is fixedly connected to the top end of the fixed plate (201), a support groove (203) is formed in the inner wall of the support frame (202), and a work-type placement rack (204) is movably connected in the support groove (203).

3. The vacuum furnace rapid cooling device according to claim 2, characterized in that, The bottom of the vacuum furnace (1) is fixedly connected with a supporting leg (206), one side of the supporting leg (206) is movably connected with a T-shaped movable rod (207), one end of the T-shaped movable rod (207) penetrates through the supporting leg (206) and is fixedly connected with a moving leg (208), and the top of the moving leg (208) and the top of the work-type placement rack (204) are both provided with an insertion slot (209).

4. The vacuum furnace rapid cooling device according to claim 3, characterized in that, The front of the moving leg (208) is fixedly connected with a receiving cylinder (211), the inside of the receiving cylinder (211) is movably connected with a connecting disc (212), the bottom of the connecting disc (212) is fixedly connected with a connecting rod (213), the connecting rod (213) penetrates through the receiving cylinder (211) and is fixedly connected with the L-shaped fixed plate (210), the spring (214) is fixedly connected between the bottom of the connecting disc (212) and the inner wall of the receiving cylinder (211), and the top of the L-shaped fixed plate (210) is fixedly connected with a handle (215).

5. The vacuum furnace rapid cooling device of claim 1, wherein, The spraying assembly (3) comprises a connecting pipe (301), the connecting pipe (301) is fixedly connected to one end of the vacuum furnace (1), one end of the connecting pipe (301) extends into the inside of the vacuum furnace (1) and is fixedly connected with a rotary joint (302), the rotary joint (302) is fixedly installed with a rotating pipe (303), and the outer surface of the rotating pipe (303) is fixedly connected with a plurality of spray heads (304).

6. A vacuum furnace rapid cooling device according to claim 5, characterized in that, The driving assembly (4) comprises a receiving box (401), the receiving box (401) is fixedly installed on the inner wall of the vacuum furnace (1), the rotating pipe (303) is rotatably connected with the receiving box (401), a driven gear (402) is rotatably connected in the receiving box (401), the driven gear (402) is fixedly connected with the rotating pipe (303), the outer surface of the driven gear (402) is engaged with a driving gear (403), the outer surface of the vacuum furnace (1) is fixedly installed with a driving motor (404), and the driving motor (404) is fixedly connected with the driving gear (403).

7. The vacuum furnace rapid cooling device of claim 1, wherein, The recycling assembly (5) comprises recycling holes (501), a plurality of recycling holes (501) are formed in the inner wall of the vacuum furnace (1), and the outer surface of the vacuum furnace (1) is fixedly connected with a plurality of branch pipes (502) corresponding to the recycling holes (501), and one end of the plurality of branch pipes (502) is fixedly connected with a backflow pipe (503).

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