Z-axis probe cleaning and positioning structure for probe station

By combining Z-axis lifting and lateral movement cylinders, the probe station cleaning plate is positioned high and moved stably, solving the problems of probe contamination and inaccurate positioning, improving the test pass rate and reducing costs.

CN223977255UActive Publication Date: 2026-03-06ACROVIEW TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-02
Publication Date
2026-03-06

AI Technical Summary

Technical Problem

The probe tips of existing probe stations are prone to oxidation and contamination after prolonged use, leading to a decrease in the pass rate of functional tests. At the same time, existing needle cleaning structures are costly or prone to wear and tear, and have problems with inaccurate positioning.

Method used

The Z-axis lifting control is used to control the position of the needle cleaning table, and the lateral movement cylinder ensures the accuracy of the Z-axis. The lifting cylinder and the lateral movement cylinder work together to achieve high positioning and stable movement of the needle cleaning plate, avoiding friction damage.

Benefits of technology

It improves the needle cleaning effect, reduces costs, enhances the stability and positioning accuracy of the probe station, avoids probe damage, and saves space.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a Z-axis probe cleaning and positioning structure for a probe station. The Z-axis probe cleaning and positioning structure comprises a supporting mechanism, a lifting mechanism and a transverse moving mechanism, the supporting mechanism comprises a needle cleaning table bottom plate, and a needle cleaning plate assembly, a needle cleaning plate bottom plate and a positioning plate are sequentially arranged above the needle cleaning table bottom plate from top to bottom; the lifting mechanism comprises a lifting connecting rod, a first sliding block guide rail assembly and a lifting air cylinder. The transverse moving mechanism comprises a transverse moving connecting rod, a second sliding block guide rail assembly and a transverse moving air cylinder. By arranging a lifting mechanism and a transverse moving mechanism, a lifting air cylinder lifts a probe cleaning table to enable a probe cleaning plate to be in a high position, a positioning plate is pulled in from the outer side through a transverse moving air cylinder, a second sliding block guide rail assembly is installed below the positioning plate, the Z-axis precision is further ensured, the probe cleaning effect is improved, damage to probes is effectively avoided, and cost is reduced; the needle cleaning table bottom plate is integrally formed and serves as a mechanism support, and the mechanism stability is enhanced; and the first strip-shaped opening and the second strip-shaped opening are formed, so that the structure is compact.
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Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a Z-axis needle cleaning and positioning structure for a probe station. Background Technology

[0002] In the manufacturing process of existing conductor devices, probe stations are used to test the electrical functions of wafers. After prolonged testing, contaminants accumulate on the probe tips, affecting the yield rate of functional tests. To ensure proper functional testing, the probes must be cleaned periodically.

[0003] After prolonged testing, the probe tip will oxidize, increasing transient impedance. Simultaneously, contaminants will accumulate on the probe surface, causing excessively large, deep, or misaligned stud marks during functional testing, thus affecting the pass / fail rate of functional tests.

[0004] Meanwhile, in the existing structures, one type of structure is to drive the cleaning plate to rise and fall through a motor screw structure, thereby achieving different position positioning of the cleaning plate; although this method is accurate in positioning, it requires an additional servo motor system and grating ruler, which is costly.

[0005] Another type of structure involves fixing the needle cleaning platform module on the Z-axis and controlling its position by raising and lowering the Z-axis. However, since the upper surface of the needle cleaning plate needs to be lower than the upper surface of the suction cup when the needle cleaning platform is not in operation, a separate lifting structure is required. The needle cleaning platform is raised by a lifting cylinder to place the needle cleaning plate in a high position, and then a rotary cylinder is used to place the stop block horizontally. The lifting cylinder is then lowered to place the needle cleaning plate in the working position. When the needle cleaning platform is not in operation, the needle cleaning plate is raised again, and the rotary cylinder rotates the stop block back to its original position, causing the needle cleaning plate to fall to a low position. However, due to friction between the stop block and the fixed frame, wear is likely to occur, and the rotation can also cause the stop block to loosen, resulting in malfunction. Summary of the Invention

[0006] The purpose of this invention is to solve the above-mentioned problems by proposing a Z-axis needle cleaning positioning structure for a probe station that uses Z-axis lifting to control the specific position of the needle cleaning stage and ensures Z-axis accuracy through a transverse cylinder.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A Z-axis needle cleaning positioning structure for a probe station includes a support mechanism, a lifting mechanism, and a lateral movement mechanism. The support mechanism includes a needle cleaning platform base plate for supporting the overall positioning mechanism. From top to bottom, a needle cleaning plate assembly, a needle cleaning plate base plate, and a positioning plate are arranged on the top of the needle cleaning platform base plate. The lifting mechanism includes a lifting linkage, a first slider guide rail assembly, and a lifting cylinder. The lateral movement mechanism includes a lateral movement linkage, a second slider guide rail assembly, and a lateral movement cylinder.

[0009] In this specific embodiment, a plurality of adjusting studs are provided between the cleaning needle plate assembly and the cleaning needle plate base plate.

[0010] In this specific embodiment, the cleaning table base plate includes a horizontal table plate and a vertical table plate. The vertical table plate is perpendicular to the horizontal table plate and is placed on one side of the horizontal table plate along its length. The two are integrally formed. The horizontal table plate and the positioning plate are respectively provided with a first strip opening and a second strip opening. Both the first strip opening and the second strip opening are used to pass through the lifting mechanism. Several protrusions are provided between the cleaning table base plate and the positioning plate.

[0011] In this specific embodiment, at least one limiting block is provided on each side of the horizontal plate of the table along the width direction, which is used to restrict the positioning plate between the limiting blocks on both sides.

[0012] In this specific embodiment, the first slider guide rail assembly consists of two vertically moving guide rails arranged side by side, which are fixedly connected to the vertical plate of the table.

[0013] In this specific embodiment, the lifting mechanism further includes a lifting guide rail bracket and a lifting cylinder seat. The lifting guide rail bracket moves up and down on the first slider guide rail assembly. The lifting guide rail bracket passes through the first strip opening and the second strip opening. The top of the lifting guide rail bracket is provided with a lifting component, which is connected to the lower surface of the cleaning needle plate base plate. The lifting cylinder seat is used to fix the lifting cylinder. The lifting cylinder seat and the lifting connecting rod are connected through the first cylinder connector.

[0014] In this specific embodiment, the transverse movement mechanism further includes a transverse movement cylinder seat, which is connected to the lower surface of the transverse plate of the table by screws for fixing the transverse movement cylinder. The transverse movement cylinder seat and the transverse movement connecting rod are connected by a second cylinder connector.

[0015] In this specific embodiment, the second slider guide rail assembly consists of two horizontally moving guide rails arranged side by side, which are fixedly connected to the upper surface of the horizontal plate of the table.

[0016] In this specific embodiment, the transverse linkage is fixedly connected to the side of the positioning plate along its length, and is used to drive the positioning plate to perform left and right reciprocating motion.

[0017] In this specific embodiment, the cleaning needle plate assembly and the cleaning needle plate base plate are fixedly connected by adjusting studs through screws, the cleaning needle plate base plate and the lifting guide rail bracket are fixedly connected by screws, the lifting guide rail bracket and the first slider guide rail assembly are fixedly connected by screws, and the positioning plate and the second slider guide rail assembly are fixedly connected by screws.

[0018] Compared with the prior art, this utility model provides a Z-axis needle cleaning and positioning structure for a probe station, which has the following advantages:

[0019] This utility model, by setting up a lifting mechanism and a transverse movement mechanism, still fixes the needle cleaning table on the Z-axis. The Z-axis lifting mechanism is used to control the specific position of the needle cleaning table. The lifting cylinder raises the needle cleaning table to make the needle cleaning plate high. Then, the transverse movement cylinder pulls the positioning plate in from the outside. A second slider guide rail assembly is installed below the positioning plate to further ensure the Z-axis accuracy, improve the needle cleaning effect, effectively avoid damage to the probe, and reduce costs.

[0020] By setting the horizontal and vertical plates of the tabletop to be integrally formed, the bottom plate of the cleaning table can serve as the support for the overall mechanism of this utility model, so that the lifting mechanism and the horizontal movement mechanism are both installed on the bottom plate of the cleaning table, thereby enhancing the stability of this utility model.

[0021] By opening the first and second slots, the lifting guide rail bracket passes through the first and second slots and connects to the bottom plate of the cleaning plate, making its structure more compact and saving space in the equipment.

[0022] By setting an adjustment thread, the levelness of the needle cleaning plate assembly can be further adjusted to prevent the needle cleaning plate assembly from tilting. By setting a boss, when the first slider guide assembly moves downward, the bottom plate of the needle cleaning table can fall on the boss on the positioning plate, so that the bottom plate of the needle cleaning table and the needle cleaning plate assembly have better support and further enhance the stability of the mechanism. Attached Figure Description

[0023] The above and other objects, features, and advantages of exemplary embodiments of the present disclosure will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the present disclosure are illustrated by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0024] Figure 1 This is an exploded view of the Z-axis needle cleaning and positioning structure for the probe station according to this utility model;

[0025] Figure 2 This is a schematic diagram of the Z-axis needle cleaning and positioning structure of the present invention for a probe station;

[0026] Figure 3This is a low-position diagram of the Z-axis needle cleaning and positioning structure for the probe station according to this utility model;

[0027] Figure 4 This is a high-position diagram of the Z-axis needle cleaning and positioning structure of the probe station according to this utility model;

[0028] Figure 5 This is a diagram showing the lateral movement state of the Z-axis needle cleaning and positioning structure of the probe station according to this utility model;

[0029] Figure 6 This is a working position diagram of the Z-axis needle cleaning positioning structure for the probe station according to this utility model.

[0030] Reference numerals: 1. Support mechanism; 11. Needle cleaning table base plate; 12. Needle cleaning plate assembly; 13. Needle cleaning plate base plate; 14. Positioning plate; 15. Adjusting stud; 16. First slot; 17. Second slot; 18. Boss; 19. Limiting block; 2. Lifting mechanism; 21. Lifting connecting rod; 22. First slider guide rail assembly; 23. Lifting cylinder; 24. Lifting guide rail bracket; 241. Lifting component; 25. Lifting cylinder seat; 251. First cylinder connector; 3. Lateral movement mechanism; 31. Lateral movement connecting rod; 32. Second slider guide rail assembly; 33. Lateral movement cylinder; 34. Lateral movement cylinder seat; 341. Second cylinder connector. Detailed Implementation

[0031] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0032] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] Traditional probe cleaning mechanisms have poor positioning accuracy and often require additional servo motor systems and grating rulers, resulting in higher costs. In addition, friction and collisions between components can easily occur, causing abnormal functioning of the probe cleaning mechanism.

[0034] In view of this, such as Figure 1 and Figure 2 As shown, a Z-axis needle cleaning positioning structure for a probe station includes a support mechanism 1, a lifting mechanism 2, and a transverse movement mechanism 3.

[0035] Furthermore, the supporting mechanism 1 includes a cleaning table base plate 11 for supporting the overall positioning mechanism. The cleaning table base plate 11 includes a horizontal table plate 111 and a vertical table plate 112. The vertical table plate 112 is perpendicular to the horizontal table plate 111 and is placed on one side of the horizontal table plate 111. The two are integrally formed, which facilitates installation and disassembly. In this way, the cleaning table base plate 11 can further fix the lifting mechanism 2 and the transverse movement mechanism 3, which not only reduces the cost of this utility model, but also further enhances its stability.

[0036] Specifically, at least one limiting block 19 is provided on each side of the horizontal plate 111 of the tabletop, which is used to restrict the positioning plate 14 between the limiting blocks 19 on both sides. A shim can be added to the inner side of the limiting block 19 near the positioning plate 14. The shim can be made of different materials according to the actual needs, so as to prevent the limiting block 19 and the positioning plate 14 from colliding and causing abnormal functioning of the mechanism.

[0037] Furthermore, from top to bottom, a cleaning plate assembly 12, a cleaning plate base plate 13, and a positioning plate 14 are sequentially arranged above the cleaning plate base plate 11. Specifically, a plurality of adjusting studs 15 are provided between the cleaning plate assembly 12 and the cleaning plate base plate 13. At least two adjusting studs 15 are provided; in one embodiment, four adjusting studs 15 are used. This allows for further adjustment of the levelness of the cleaning plate assembly 12, preventing it from tilting. The adjusting studs 15 also maintain a specific distance between the cleaning plate assembly 12 and the cleaning plate base plate 13, preventing collisions and potential machine malfunctions. Specifically, the cleaning plate assembly 12 and the cleaning plate base plate 13 are fixedly connected by screws through the adjusting studs 15. Simultaneously, a plurality of bosses 18 are provided between the cleaning plate base plate 13 and the positioning plate 14; in one embodiment, four bosses 18 are used. When the first slider guide rail assembly 22 moves downward, the cleaning table base plate 11 can rest on the boss 18 on the positioning plate 14, providing better support for the cleaning table base plate 11 and the cleaning plate assembly 12, further enhancing the stability of the mechanism. In this specific embodiment, four adjusting studs 15 and four bosses 18 are provided, with the four adjusting studs 15 located at the four corners of the cleaning plate base plate 13. Of course, the number of adjusting studs 15 and bosses 18 can be increased or decreased according to actual needs.

[0038] Furthermore, the horizontal plate 111 and the positioning plate 14 of the tabletop are respectively provided with a first slot 16 and a second slot 17, both of which are used to pass through the lifting mechanism 2. Specifically, the lifting guide rail bracket 24 and the lifting connecting rod 21 are connected to the lower surface of the cleaning plate base plate 13 through the first slot 16 and the second slot 17. At the same time, the top of the lifting guide rail bracket 24 is provided with a supporting component 241, which is fixedly connected to the lower surface of the cleaning plate base plate 13 by screws. The upper surface of the supporting component 241 is in contact with the lower surface of the cleaning plate base plate 13, which further enhances the stability of the cleaning table mechanism and makes its structure more compact.

[0039] Furthermore, the lifting mechanism 2 includes a lifting link 21, a first slider guide rail assembly 22, and a lifting cylinder 23. In this specific embodiment, the first slider guide rail assembly 22 consists of two parallel vertical moving guide rails, fixedly connected to the vertical plate 112 of the platform. This is not limited to two parallel vertical moving guide rails; multiple parallel vertical moving guide rails can also be used.

[0040] Furthermore, the lifting mechanism 2 also includes a lifting guide rail bracket 24 and a lifting cylinder seat 25. The lifting guide rail bracket 24 reciprocates up and down on the first slider guide rail assembly 22. Simultaneously, the lifting cylinder seat 25 is fixedly mounted on the vertical plate 112 of the table with screws to further enhance the stability of the needle-cleaning positioning mechanism. The lifting cylinder seat 25 is used to fix the lifting cylinder 23, firmly securing the lifting cylinder 23 to the lifting cylinder seat 25. The lifting cylinder seat 25 and the lifting connecting rod 21 are connected through a first cylinder connector 251. Of course, this is not limited to a cylinder; the lifting cylinder 23 can also be replaced with a motor-driven mechanism as needed.

[0041] Specifically, in the operation of this specific embodiment, the lifting cylinder 23 drives the first cylinder connector 251, thereby causing the lifting guide rail bracket 24 to reciprocate up and down on the first slider guide rail assembly 22. Since the top of the lifting guide rail bracket 24 is provided with a lifting component 241, the upper surface of which is in contact with the lower surface of the cleaning needle plate base plate 13, the cleaning needle plate base plate 13 can be raised and lowered, thereby controlling the specific position of this utility model.

[0042] Furthermore, the transverse movement mechanism 3 includes a transverse movement link 31, a second slider guide rail assembly 32, and a transverse movement cylinder 33. The transverse movement mechanism 3 also includes a transverse movement cylinder seat 34. The transverse movement cylinder seat 34 is fixedly mounted on the lower surface of the horizontal plate 111 of the table with screws to further enhance the stability of the needle cleaning positioning mechanism. The transverse movement cylinder seat 34 is used to fix the transverse movement cylinder 33, firmly securing the transverse movement cylinder 33 to the transverse movement cylinder seat 34. The transverse movement cylinder seat 34 and the transverse movement link 31 are connected via a second cylinder connector 341. Of course, this is not limited to a cylinder; the transverse movement cylinder 33 can also be replaced with a motor-driven mechanism as needed.

[0043] Specifically, the second slider guide rail assembly 32 consists of two parallel transverse moving guide rails, fixedly connected to the upper surface of the horizontal plate 111 of the table. The second slider guide rail assembly 32 is also distributed on both sides of the first strip opening 16 along its length. In this specific embodiment, the second slider guide rail assembly 32 consists of two parallel transverse moving guide rails, fixedly connected to the upper surface of the horizontal plate 111 of the table. However, this is not limited to two parallel transverse moving guide rails; multiple rows of parallel transverse moving guide rails can also be used.

[0044] Furthermore, the transverse linkage 31 is fixedly connected to the side of the positioning plate 14 along its length, and is used to drive the positioning plate 14 to perform left and right reciprocating motion. In this specific embodiment, a shim can be added to the contact surface between the transverse linkage 31 and the positioning plate 14. The shim can be made of different materials according to actual needs, so as to prevent the transverse linkage 31 from shaking during the movement of the positioning plate 14, which would damage the stability of the needle cleaning table positioning mechanism and cause abnormal mechanism function.

[0045] Specifically, in the operation of this specific embodiment, the transverse cylinder 33 drives the second cylinder connector 341, thereby causing the transverse connecting rod 31 to move. Since the transverse connecting rod 31 is fixedly connected to the side of the positioning plate 14 along the length direction, the transverse connecting rod 31 causes the positioning plate 14 to reciprocate left and right on the second slider guide rail assembly 32.

[0046] Please refer to further information. Figures 3-6 In actual operation, the non-working state of this utility model is as follows: Figure 3 The diagram shows the low-position state. When the mechanism needs to work, the cylinder rod inside the lifting cylinder 23 extends and is driven by the lifting connecting rod 21 to move the cleaning plate assembly 12, the adjusting stud 15, and the cleaning plate base plate 13 upwards using the guiding action of the first slider guide rail assembly 22. That is, the lifting guide rail bracket 24 moves upwards along the first slider guide rail assembly 22 until it rises to the high position. Figure 4The cylinder rod inside the transverse cylinder 33 retracts, causing the transverse connecting rod 31 to drive the positioning plate 14. Utilizing the guiding action of the second slider guide rail assembly 32, the second slider guide rail assembly 32 moves to the right along the guide rail. After moving to the right, it stops at the position of the limit block 19. Figure 5 State; Finally, the inner cylinder rod of the lifting cylinder 23 retracts, which drives the cleaning plate assembly 12, adjusting stud 15, and cleaning plate base plate 13 via the lifting connecting rod 21. Utilizing the downward guiding action of the first slider guide rail assembly 22, the lifting guide rail bracket 24 moves downward along the first slider guide rail assembly 22 and lands on the boss 18 of the positioning plate 14, thus... Figure 6 In this state, the machine is in the working position. The base plate 11 of the cleaning table is the overall support mechanism for the machine frame. The limit block 19 has a limiting function to prevent parts from rushing out of the mechanism and causing greater failures when the left and right movement of the mechanism is abnormal.

[0047] In the foregoing description of this specification, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this specification, those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0048] Based on the above description in this specification, those skilled in the art will also understand that terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this specification. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not imply that the devices or elements involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms should not be understood or interpreted as limitations on the present invention.

[0049] Furthermore, the terms "first" or "second," etc., used in this specification to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as indicating, explicitly or implicitly, relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this specification, "a plurality of" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0050] While various embodiments of the invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and essence of the invention. It should be understood that various alternatives to the embodiments of the invention described herein may be employed in the practice of the invention. The appended claims are intended to define the scope of protection of the invention and therefore cover modular compositions, equivalents, or alternatives within the scope of these claims.

Claims

1. A Z-axis needle cleaning positioning structure for a probe station, comprising: It comprises a supporting mechanism (1), a lifting mechanism (2) and a horizontal moving mechanism (3); The supporting mechanism (1) comprises a needle cleaning table bottom plate (11) for supporting an overall positioning mechanism, and a needle cleaning plate assembly (12), a needle cleaning plate bottom plate (13) and a positioning plate (14) are sequentially arranged above the needle cleaning table bottom plate (11) from top to bottom. The lifting mechanism (2) comprises a lifting connecting rod (21), a first sliding block guide rail assembly (22) and a lifting cylinder (23). The horizontal moving mechanism (3) comprises a horizontal moving connecting rod (31), a second sliding block guide rail assembly (32) and a horizontal moving cylinder (33).

2. The Z-axis needle cleaning positioning structure for a probe station according to claim 1, wherein, The needle cleaning plate assembly (12) and the needle cleaning plate bottom plate (13) are fixedly connected through the adjusting stud (15) by screwing.

3. The Z-axis needle cleaning positioning structure for a probe station according to claim 1, wherein, The needle cleaning table bottom plate (11) comprises a table top horizontal plate (111) and a table top vertical plate (112), the table top vertical plate (112) is perpendicular to the table top horizontal plate (111) and is placed on one side of the table top horizontal plate (111) along the length direction, and the two are integrally formed, a first strip-shaped hole (16) and a second strip-shaped hole (17) are respectively arranged on the table top horizontal plate (111) and the positioning plate (14), and the first strip-shaped hole (16) and the second strip-shaped hole (17) are used for penetrating the lifting mechanism (2), and a plurality of bosses (18) are arranged between the needle cleaning plate bottom plate (13) and the positioning plate (14).

4. The Z-axis needle cleaning positioning structure for a probe station according to claim 3, wherein, At least one limiting block (19) is arranged on each side of the table top horizontal plate (111) along the width direction, and the positioning plate (14) is limited between the limiting blocks (19) on the two sides.

5. The Z-axis needle cleaning positioning structure for a probe station according to claim 3, wherein, The first sliding block guide rail assembly (22) is two vertically moving guide rails arranged side by side and fixedly connected to the table top vertical plate (112).

6. The Z-axis needle cleaning positioning structure for a probe station according to claim 3, wherein, The lifting mechanism further comprises a lifting guide rail support (24) and a lifting cylinder seat (25), the lifting guide rail support (24) reciprocates up and down on the first sliding block guide rail assembly (22), the lifting guide rail support (24) penetrates the first strip-shaped hole (16) and the second strip-shaped hole (17), a lifting part (241) is arranged at the top end of the lifting guide rail support (24), the lifting part (241) is connected to the lower surface of the needle cleaning plate bottom plate (13), the lifting cylinder seat (25) is used for fixedly installing the lifting cylinder (23), and the lifting cylinder seat (25) is connected with the lifting connecting rod (21) through a first cylinder joint (251).

7. The Z-axis needle cleaning positioning structure for a probe station according to claim 3, wherein, The horizontal moving mechanism (3) further comprises a horizontal moving cylinder seat (34), the horizontal moving cylinder seat (34) is connected to the lower surface of the table top horizontal plate (111) through a screw and is used for fixedly installing the horizontal moving cylinder (33), and the horizontal moving cylinder seat (34) is connected with the horizontal moving connecting rod (31) through a second cylinder joint (341).

8. The Z-axis probe cleaning positioning structure for a probe station according to claim 3, wherein, The second sliding block guide rail assembly (32) is two horizontally moving guide rails arranged side by side and fixedly connected to the upper surface of the table top horizontal plate (111).

9. The Z-axis needle cleaning positioning structure for a probe station according to claim 1, wherein, The transverse connecting rod (31) is fixedly connected to the length direction side edge of the positioning plate (14) and is used for driving the positioning plate (14) to make left-right reciprocating movement.

10. The Z-axis needle cleaning positioning structure for a probe station according to any one of claims 1-9, wherein, The needle cleaning plate bottom plate (13) and the lifting guide rail support (24) are fixedly connected through screws, the lifting guide rail support (24) and the first sliding block guide rail assembly (22) are fixedly connected through screws, and the positioning plate (14) and the second sliding block guide rail assembly (32) are fixedly connected through screws.