Automatic needle card mounting assembly and wafer detection device

Abstract

The utility model provides an automatic needle card mounting assembly and a wafer detection device, the automatic needle card mounting assembly comprises a needle card bearing mechanism, a motion platform mechanism and a first detection assembly, the needle card bearing mechanism comprises a needle card bearing base, an overturning and lifting structure and a needle card structure, one end of the overturning and lifting structure is arranged on the needle card bearing base, and the other end of the overturning and lifting structure is arranged on the needle card bearing base; the other end of the turnover lifting structure is connected with the needle clamping structure; the motion platform mechanism comprises a motion base station and a movable base station. The movable base station is at least used for driving the needle card bearing mechanism to move to the card feeding position from the fixed position in the first direction. The first detection assembly comprises a first detector and a second detector, the first detector is arranged at a first position on the movable base table, the second detector is arranged on the needle card bearing base, and when the needle card bearing mechanism hooks the movable base table, the second detector and the first detector are at least partially opposite to each other; and the second detector is matched with the first detector to detect whether the needle card bearing mechanism hooks the movable base station or not.

Description

Technical Field

[0001] This application relates to the technical field of wafer inspection, specifically to an automatic pin loading card assembly and a wafer inspection device. Background Technology

[0002] Probe cards play a crucial role in semiconductor manufacturing, primarily used for testing before chip packaging to ensure each chip functions correctly, thereby improving chip yield and quality. As the interface between testing equipment and the wafer, the probe card uses probes to directly contact the solder joints or bumps on the chip surface, transmitting test signals to automated testing equipment to help determine whether the chip's electrical performance is up to standard.

[0003] Currently, the probe card can be moved from its initial mounting position to its mounting position on the wafer inspection device for installation. During this process, ensuring precise alignment between the probe card and the probe card transport structure, enabling its movement to the mounting position via the transport structure, becomes a key technical challenge. Utility Model Content

[0004] This application provides an automatic probe card loading assembly and wafer inspection device that enables precise docking of probe cards with probe card transport structures, allowing the probe cards to move to the card loading position via the probe card transport structures.

[0005] In a first aspect, this application provides an automatic needle loading card assembly, the automatic needle loading card assembly comprising:

[0006] The needle card support mechanism includes a needle card support base, a flip-up and lifting structure, and a needle card structure. One end of the flip-up and lifting structure is disposed on the needle card support base, and the other end of the flip-up and lifting structure is connected to the needle card structure. The flip-up and lifting structure is used to drive the needle card structure to flip and lift.

[0007] A motion platform mechanism includes a motion base and a movable base. The pin card carrier mechanism is disposed on the motion base. The movable base and the pin card carrier mechanism are arranged along a first direction. The movable base is capable of moving on the motion base. The movable base is at least used to drive the pin card carrier mechanism to move from a fixed position to the card-attaching position along the first direction.

[0008] The first detection component includes a first detector and a second detector. The first detector is located at a first position on the movable base, and the second detector is located on the needle card support base. When the needle card support mechanism hooks onto the movable base, the second detector and the first detector are at least partially opposite to each other.

[0009] This application provides an automatic needle card loading assembly, which includes a needle card carrying mechanism, a motion platform mechanism, and a first detection component. The needle card carrying mechanism includes a needle card carrying base, a flip-up lifting structure, and a needle card structure. One end of the flip-up lifting structure is located on the needle card carrying base, and the other end is connected to the needle card structure. The flip-up lifting structure is used to drive the needle card structure to flip and lift. The motion platform mechanism includes a motion base and a movable base. The needle card carrying mechanism is located on the motion base, and the movable base and the needle card carrying mechanism are arranged along a first direction. The movable base is movable on the motion base. The movable base is used to drive the needle card carrying mechanism to move from a fixed position to the upper card position along the first direction. The first detection component includes a first detector and a second detector. The first detector is located at a first position on the movable base, and the second detector is located on the needle card carrying base. When the needle card carrying mechanism hooks onto the movable base, the second detector and the first detector are at least partially opposite each other. The second detector and the first detector cooperate to detect whether the needle card carrying mechanism hooks onto the movable base, so that the probe card and the needle card transport structure are accurately docked, and the probe card is moved to the upper card position by the needle card transport structure.

[0010] In one optional embodiment, the pin holder support base is provided with a hook, the hook having a first hook portion, the opening of the first hook portion facing a second direction;

[0011] A cam follower is also provided at a first position on the movable base. The first detector is provided on the cam follower, and the second detector is provided on the hook. The second detector is directly opposite the first hook groove formed by the first hook in the height direction. When the first hook hooks the cam follower, the pin clip bearing mechanism hooks the movable base. The second detector and the first detector are arranged opposite each other in the height direction. The first detector and the second detector form a capacitive detector.

[0012] In one optional embodiment, the automatic needle loading assembly includes a second detection component, which includes a third detector and a fourth detector. The third detector is disposed at a second position on the moving base. The third detector, the needle loading base, and the first detector are arranged sequentially. The fourth detector is disposed on the needle loading base and is located on the side of the second detector away from the moving base. When the needle loading mechanism is in the fixed position, the third detector and the fourth detector are at least partially opposite to each other.

[0013] In one optional embodiment, the hook member has a second hook portion, the opening of which faces the opposite direction to the second direction;

[0014] A positioning post is also provided at the second position on the motion base. The third detector is located on the positioning post, and the fourth detector is located on the hook. The fourth detector is directly opposite the second hook groove formed by the second hook in the height direction. When the needle holder bearing mechanism is located in the fixed position, the second hook hooks the positioning post. The fourth detector and the third detector are arranged opposite each other in the height direction. The third detector and the fourth detector form a capacitive detector.

[0015] In one optional embodiment, the needle card carrying mechanism further includes a first driving structure and a first driving block. The first driving structure is disposed on the needle card carrying base, the first driving block is connected to the first driving structure, and the hook is disposed on the first driving block. The first driving structure is used to drive the first driving block and the hook to move along the second direction, so that the hook moves from the first hook portion to hook the cam follower to the second hook portion to hook the positioning post.

[0016] In one optional embodiment, the pin card carrying mechanism further includes a fixing plate, which is disposed on the pin card carrying base;

[0017] The tilting and lifting structure includes:

[0018] A lifting drive structure is provided on the fixed plate;

[0019] A lifting plate is provided opposite to the fixed plate, and the top of the lifting plate is rotatably connected to the first end of the pin clamp structure.

[0020] A lifting block, one side of which is connected to the lifting drive structure, and the other side of which is fixedly connected to the top of the lifting plate, wherein the lifting drive structure and the lifting block are used to drive the pin card structure to lift.

[0021] Two sets of first guide rails are respectively disposed on both sides of the fixed plate, and each set of first guide rails is disposed along the height direction;

[0022] Two sets of first sliders, each set of first sliders is fixedly connected to the lifting plate and slidably connected to a set of first guide rails.

[0023] In one optional embodiment, the pin card carrying mechanism further includes at least one elastic connector, one end of which is connected to the bottom of the lifting plate, and the other end of which is connected to the pin card carrying base; and / or,

[0024] The lifting block further includes a first lifting block, a buffer, and a second lifting block arranged sequentially. The lifting drive structure is connected to the first lifting block, the buffer abuts against the second lifting block and the first lifting block, and the second lifting block is fixedly connected to the top of the lifting plate.

[0025] In one optional embodiment, the tilting and lifting structure further includes a tilting drive structure and a telescopic rod. One end of the tilting drive structure is fixedly connected to the bottom of the lifting plate, and the other end of the tilting drive structure is rotatably connected to the first end of the pin clamp structure. One end of the telescopic rod is rotatably connected to the bottom of the lifting plate, and the other end of the telescopic rod is rotatably connected to the lifting plate.

[0026] In one optional embodiment, the needle clip structure includes a needle clip tray, a needle clip, and a needle clip mounting base. The needle clip is disposed on the needle clip tray, and the needle clip tray is disposed on the needle clip mounting base. The needle clip mounting base is provided with a first positioning pin, a second positioning pin, and at least one pressure block hole. The needle clip tray is provided with a first positioning hole and a second positioning hole. The size of the first positioning hole is larger than the size of the second positioning hole. The first positioning pin is inserted into the first positioning hole, and the second positioning pin is inserted into the second positioning hole.

[0027] The pin clip structure also includes at least one pressure block, an elastic sensing sheet, and a sensor. The sensor is located on the side of the pin clip mounting base away from the pin clip tray. One end of the elastic sensing sheet is fixed to the side of the pin clip mounting base away from the pin clip tray. The pressure block is fixed to the middle of the elastic sensing sheet. The pressure block protrudes from the pin clip mounting base through the pressure block hole.

[0028] When the pin card tray is installed on the pin card mounting chassis, the pressure block moves under the pressure of the pin card tray, and the other end of the elastic sensing sheet is located within the sensing range of the sensor;

[0029] When the pin card tray detaches from the pin card mounting chassis, the pressure block returns to its original position, protruding from the pin card mounting chassis through the pressure block hole, and the other end of the elastic sensing sheet is located outside the sensing range of the sensor.

[0030] Secondly, an embodiment of this application provides a wafer inspection device, which includes the automatic pin loading card assembly described in the first aspect. Attached Figure Description

[0031] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly described below.

[0032] Figure 1This is a side view of a wafer inspection device provided in an embodiment of this application;

[0033] Figure 2 This is a three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 1 ;

[0034] Figure 3 This is a three-dimensional schematic diagram of a pin card carrier mechanism provided in an embodiment of this application;

[0035] Figure 4 This is a schematic diagram of a pin card carrier mechanism located in a fixed position according to an embodiment of this application;

[0036] Figure 5 This is a schematic diagram of the mobile base moving to the hook pin holder bearing mechanism provided in the embodiments of this application;

[0037] Figure 6 This is a schematic diagram of the movable base driving the pin card carrier mechanism to move to the card-on position according to an embodiment of this application;

[0038] Figure 7 This is a partial three-dimensional schematic diagram of the pin card carrier mechanism provided in the embodiments of this application. Figure 1 ;

[0039] Figure 8 This is a three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 2 ;

[0040] Figure 9 yes Figure 8 An enlarged view of region A in the diagram;

[0041] Figure 10 This is a three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 3 ;

[0042] Figure 11 This is a three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 4 ;

[0043] Figure 12 This is a three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 5 ;

[0044] Figure 13 This is a partial three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 1 ;

[0045] Figure 14 This is a partial three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 2 ;

[0046] Figure 15 This is a partial three-dimensional schematic diagram of an automatic needle loading card assembly provided in an embodiment of this application. Figure 3 .

[0047] Explanation of some of the icon numbers:

[0048] Wafer inspection device 1000; base 100; automatic pin loading assembly 200; housing 110; flip cover 120; pin chuck 121; pin carrying mechanism 210; motion platform mechanism 220; first inspection component 230; pin carrying base 211; flip lifting structure 212; pin structure 213; motion base 221; moving base 222; first detector 231; second detector 232; hook 2111; first hook portion 2112; cam follower 2221; second inspection component 240; third detector 241; fourth detector 242; second hook portion 2113; positioning post 2211; first drive unit Structure 214; First drive block 215; Second guide rail 2141; Fixed plate 223; Lifting drive structure 216; Lifting plate 217; Lifting block 218; First guide rail 219; First slider 2110; Elastic connector 25; First lifting block 2181; Buffer 2182; Second lifting block 2183; Tilting drive structure 2121; Telescopic rod 2122; Needle card tray 2131; Needle card 2132; Needle card mounting base 2133; First positioning pin 261; Second positioning pin 262; Pressure block hole 263; First positioning hole 264; Second positioning hole 265; Pressure block 2134; Elastic sensing sheet 2135; Sensor 2136. Detailed Implementation

[0049] The technical solution of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the embodiments described in this application are only a part of the embodiments, and not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without creative effort are within the protection scope of this application.

[0050] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a mutually exclusive, independent, or alternative embodiment to other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0051] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a particular order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, an assembly or device comprising one or more components is not limited to the one or more components listed, but may optionally also include one or more components not listed but inherent to the exemplified product, or one or more components that it should have based on the described function.

[0052] Please see Figure 1 This application provides a wafer inspection apparatus 1000. The wafer inspection apparatus 1000 includes a base 100 and an automatic pin loading assembly 200 disposed on the base 100. The base 100 includes a housing 110 and a flip-top plate 120 covering the housing 110. The automatic pin loading assembly 200 is disposed inside the housing 110 and is capable of moving pins from an initial mounting position to a loading position, and engaging with the pin chuck 121 of the flip-top plate 120 to facilitate wafer inspection, etc.

[0053] Please see Figure 2 The automatic needle loading assembly 200 includes a needle loading mechanism 210, a motion platform mechanism 220, and a first detection component 230.

[0054] Please see Figure 2 Both the needle card carrier mechanism 210 and the first detection component 230 are mounted on the motion platform mechanism 220. For ease of description, the length direction of the base 100 is defined as the first direction Y, and the width direction of the base 100 is defined as the second direction X.

[0055] Please see Figure 3 The pin holder support mechanism 210 includes a pin holder support base 211, a flip-up lifting structure 212, and a pin holder structure 213. The pin holder support base 211 is arranged along the second direction X.

[0056] In the initial installation position, the needle clip carrier mechanism 210 is located at one end of the motion platform mechanism 220 to facilitate manual replacement or installation of the needle clip.

[0057] The flip-up lifting structure 212 is arranged along the height direction. One end of the flip-up lifting structure 212 is located on the needle card support base 211, and the other end is connected to the needle card structure 213. Specifically, one end of the flip-up lifting structure 212 is fixed to the needle card support base 211, and the other end supports the needle card structure 213. The flip-up lifting structure 212 is used to drive the needle card structure 213 to flip and lift. Specifically, the flip-up lifting structure 212 drives the needle card structure 213 to lift and lower in the height direction, so as to move the needle card directly below the needle card chuck 121 on the flip cover plate 120 and align it for installation.

[0058] Please see Figure 2 The motion platform mechanism 220 includes a motion base 221 and a movable base 222.

[0059] Please see Figures 4 to 6 The pin-card carrying mechanism 210 and the movable base 222 are both disposed on the motion base 221. Specifically, the movable base 222 and the pin-card carrying mechanism 210 are arranged along the first direction Y. The movable base 222 is capable of reciprocating along the first direction Y on the motion base 221. The movable base 222 is at least used to drive the pin-card carrying mechanism 210 from a fixed position (i.e., the aforementioned initial installation position) along the first direction Y to the card-attaching position.

[0060] Further optional information can be found in [link to relevant documentation]. Figure 4 and Figure 5 The pin-type clip structure 213 has a folded state and a flipped-out state under the action of the flipping and lifting structure 212. Please refer to... Figure 5 and Figure 6Before the needle clip structure 213 is ready to install the needle clip, the needle clip structure 213 is in a flipped-out state, at which time the needle clip structure 213 is roughly in the horizontal plane to facilitate the installation of the needle clip. After the needle clip is installed, the movable base 222 drives the needle clip carrying mechanism 210 to move from the fixed position (i.e., the aforementioned initial installation position) along the first direction Y to the upper clip position, and aligns the needle clip on the needle clip structure 213 with the needle clip chuck 121 on the flip cover plate 120. The flipping and lifting structure 212 drives the needle clip structure 213 to rise in height, so that the needle clip on the needle clip structure 213 is connected with the needle clip chuck 121 on the flip cover plate 120 and installed and fixed. Of course, after the pin clip is installed, the pin clip structure 213 can be folded under the action of the flip-lift structure 212. The moving base 222 drives the pin clip bearing mechanism 210 to move from the fixed position (i.e. the aforementioned initial installation position) along the first direction Y to the upper clip position. The pin clip structure 213 can be flipped and unfolded under the action of the flip-lift structure 212, so that the pin clip on the pin clip structure 213 is aligned with the pin clip chuck 121 on the flip cover 120. The flip-lift structure 212 drives the pin clip structure 213 to rise in height, so that the pin clip on the pin clip structure 213 is connected to the pin clip chuck 121 on the flip cover 120 and installed and fixed.

[0061] After the pin card on the pin card structure 213 is installed on the pin card chuck 121 on the flip cover plate 120, the pin card structure 213 can be folded under the action of the flip lifting structure 212. The moving base 222 drives the pin card carrying mechanism 210 from the upper card position back to the fixed position (i.e. the aforementioned initial installation position) along the first direction Y.

[0062] Please see Figures 4 to 6 The first detection component 230 includes a first detector 231 and a second detector 232.

[0063] Please see Figure 4 The first detector 231 is located at a first position on the mobile base 222. The first detector 231 moves as the mobile base 222 moves.

[0064] The second detector 232 is disposed on the needle card support base 211, and the second detector 232 moves as the needle card support base 211 moves.

[0065] Please see Figure 5 When the needle card carrier mechanism 210 hooks onto the movable base 222, the second detector 232 and the first detector 231 are at least partially opposite each other, and the first detector 231 and the second detector 232 sense each other. For example, the first detector 231 and the second detector 232 form a capacitive proximity sensor to detect whether the needle card carrier mechanism 210 hooks onto the movable base 222.

[0066] For example, the first detector 231 has at least a first electrode plate, and the second detector 232 has a second electrode plate. When the first detector 231 and the second detector 232 move to be opposite each other and the distance between them is small, the first electrode plate on the first detector 231 and the second electrode plate on the second detector 232 are opposite each other and form a capacitor structure. The controller connecting the first detector 231 and the second detector 232 receives the sensed capacitance signal, and the controller determines whether the first detector 231 and the second detector 232 are opposite each other based on the sensed capacitance signal.

[0067] Furthermore, the first detector 231 and the second detector 232 can be designed to have a certain height difference along the height direction, and the first detector 231 and the second detector 232 are opposite each other along the height direction. When the first detector 231 and the second detector 232 are opposite each other (including fully opposite or partially opposite), the controller detects that the induced capacitance formed between the first electrode plate and the second electrode plate is greater than a preset amount, and can determine that the needle card carrying mechanism 210 hooks the moving base 222, and then controls the moving base 222 to drive the needle card carrying mechanism 210 to move to a fixed position, thereby realizing the precise docking of the probe card and the needle card transport structure (moving base 222), so as to move to the card-on position through the needle card transport structure, realizing the automated transport, installation and recycling of the needle card structure 213.

[0068] This application provides an automatic needle card loading assembly 200, which includes a needle card carrying mechanism 210, a motion platform mechanism 220, and a first detection component 230. The needle card carrying mechanism 210 includes a needle card carrying base 211, a flip-lifting structure 212, and a needle card structure 213. One end of the flip-lifting structure 212 is disposed on the needle card carrying base 211, and the other end of the flip-lifting structure 212 is connected to the needle card structure 213. The flip-lifting structure 212 is used to drive the needle card structure 213 to flip and lift. The motion platform mechanism 220 includes a motion base 221 and a movable base 222. The needle card carrying mechanism 210 is disposed on the motion base 221, and the movable base 222 and the needle card carrying mechanism 210 are arranged along a first direction Y. The movable base 222 can... The probe card can move on the moving base 221; the moving base 222 is at least used to drive the needle card carrying mechanism 210 to move from a fixed position along the first direction Y to the upper card position; the first detection component 230 includes a first detector 231 and a second detector 232. The first detector 231 is located at a first position on the moving base 222, and the second detector 232 is located on the needle card carrying base 211. When the needle card carrying mechanism 210 hooks onto the moving base 222, the second detector 232 and the first detector 231 are at least partially opposite to each other. The second detector 232 cooperates with the first detector 231 to detect whether the needle card carrying mechanism 210 hooks onto the moving base 222, so that the probe card and the needle card transport structure are accurately docked, so as to move to the upper card position through the needle card transport structure.

[0069] Optional, please refer to Figures 4 to 6 The pin holder support base 211 is provided with a hook 2111. The hook 2111 is installed near the first end of the pin holder support base 211.

[0070] Please see Figures 4 to 6 The hook member 2111 has a first hook portion 2112. The opening of the first hook portion 2112 faces the second direction X. Optionally, the opening of the first hook portion 2112 faces the side where the first end of the pin holder support base 211 is located.

[0071] Please see Figures 4 to 6 A cam follower 2221 is also provided at a first position on the movable base 222. A first detector 231 is disposed on the cam follower 2221. Optionally, the first detector 231 and the cam follower 2221 are arranged along the height direction. The first detector 231 is disposed on the cam follower 2221.

[0072] The second detector 232 is disposed on the hook member 2111. The second detector 232 is directly opposite the first hook groove formed by the first hook portion 2112 in the height direction. Specifically, the second detector 232 can be suspended by a support arm at the position directly opposite the first hook groove.

[0073] Please see Figure 5 and Figure 6 When the first hook portion 2112 hooks the cam follower 2221, the cam follower 2221 is located in the first hook groove, and the first detector 231 on the cam follower 2221 is directly opposite the second detector 232, which is suspended and directly opposite the first hook groove. The second detector 232 and the first detector 231 are directly opposite each other in the height direction. The first detector 231 and the second detector 232 form a capacitive detector. The controller determines that the needle holder carrying mechanism 210 hooks the movable base 222 based on the detection result obtained from the direct alignment of the first detector 231 and the second detector 232.

[0074] Optional, please refer to Figure 4 The automatic needle loading card assembly 200 includes a second detection assembly 240.

[0075] Please see Figure 4 The second detection component 240 includes a third detector 241 and a fourth detector 242.

[0076] The third detector 241 is located at a second position on the motion base 221. The position of the third detector 241 is relatively fixed. The third detector 241, the needle holder support base 211 (hook 2111), and the first detector 231 are arranged sequentially along the first direction Y.

[0077] The fourth detector 242 is mounted on the pin card support base 211. The fourth detector 242 is located on the side of the second detector 232 that is away from the movable base 222.

[0078] Please see Figure 4 When the needle card carrier mechanism 210 is in the fixed position, the third detector 241 and the fourth detector 242 are at least partially opposite to each other, and the third detector 241 and the fourth detector 242 sense each other. For example, the third detector 241 and the fourth detector 242 form a capacitive proximity sensor to detect whether the needle card carrier mechanism 210 is in the fixed position.

[0079] For example, the third detector 241 has at least a third electrode plate, and the fourth detector 242 has a fourth electrode plate. When the third detector 241 and the fourth detector 242 move to be opposite each other with a small gap, the third electrode plate on the third detector 241 and the fourth electrode plate on the fourth detector 242 are opposite each other and form a capacitor structure. The controller connecting the third detector 241 and the fourth detector 242 receives the induced capacitance signal, and the controller determines whether the third detector 241 and the fourth detector 242 are opposite each other based on the induced capacitance signal.

[0080] Furthermore, the third detector 241 and the fourth detector 242 can be designed to have a certain height difference along the height direction, and the third detector 241 and the fourth detector 242 are opposite each other along the height direction. When the third detector 241 and the fourth detector 242 are opposite each other (including fully opposite or partially opposite), the controller detects that the induced capacitance formed between the third electrode plate and the fourth electrode plate is greater than a preset amount, and can determine that the needle card carrying mechanism 210 is in a fixed position.

[0081] Please see Figure 7 The hook member 2111 has a second hook portion 2113. The opening of the second hook portion 2113 faces the opposite direction to the second direction X. Optionally, the opening of the second hook portion 2113 faces away from the side where the first end of the pin holder support base 211 is located.

[0082] Please see Figure 7 A positioning post 2211 is also provided at a second position on the motion base 221. The third detector 241 is disposed on the positioning post 2211. Optionally, the third detector 241 and the positioning post 2211 are arranged along the height direction. The third detector 241 is disposed on the positioning post 2211.

[0083] Please see Figure 7 The fourth detector 242 is disposed on the hook member 2111. The fourth detector 242 is directly opposite the second hook groove formed by the second hook portion 2113 in the height direction. Specifically, the fourth detector 242 can be suspended by a support arm at the position directly opposite the second hook groove.

[0084] When the needle holder carrying mechanism 210 is in the fixed position, the positioning post 2211 is located in the second hook groove, and the third detector 241 on the positioning post 2211 is directly opposite the fourth detector 242, which is suspended and directly opposite the second hook groove. The third detector 241 and the fourth detector 242 are directly opposite each other in the height direction. The third detector 241 and the fourth detector 242 form a capacitive detector. The controller determines that the needle holder carrying mechanism 210 is in the fixed position based on the detection result obtained from the direct alignment of the third detector 241 and the fourth detector 242.

[0085] Optional, please refer to Figure 8 and Figure 9 The pin card carrying mechanism 210 also includes a first driving structure 214 and a first driving block 215.

[0086] The first driving structure 214 is disposed at the first end of the pin holder base 211. The first driving structure 214 is disposed along the first direction Y.

[0087] The first drive block 215 is connected to the first drive structure 214. Optionally, the first drive structure 214 may include, but is not limited to, a cylinder.

[0088] Further, please refer to Figure 8 and Figure 9 One end of the first drive block 215 is connected to the cylinder push rod of the first drive structure 214. The first drive block 215 is also slidably connected to the cylinder body of the first drive structure 214. The first drive structure 214 is provided with a second guide rail 2141. The first drive block 215 is embedded in the second guide rail 2141 and slidably connected to the second guide rail 2141.

[0089] Please see Figure 8 and Figure 9 The hook 2111 is mounted on the first drive block 215. When the cylinder body of the first drive structure 214 pushes the first drive block 215 to slide back and forth along the first direction Y via the cylinder push rod, the hook 2111 moves back and forth along the second direction X with the first drive block 215. In other words, the first drive structure 214 is used to drive the first drive block 215 and the hook 2111 to move along the second direction X, so that the hook 2111 moves from the first hook portion 2112 hooking the cam follower 2221 to the second hook portion 2113 hooking the positioning post 2211.

[0090] Specifically, when the hook 2111 is in the third position, the first hook 2112 hooks the cam follower 2221, allowing the needle holder carrying mechanism 210 to move together with the movable base 222. At this time, the positioning post 2211 is located outside the second hook 2113, with the opening of the second hook 2113 facing the positioning post 2211. When the hook 2111 moves to the fourth position along the second direction X, the second hook 2113 hooks the positioning post 2211, causing the needle holder carrying mechanism 210 to be in a fixed position. The cam follower 2221 is located outside the first hook 2112, with the opening of the first hook 2112 facing the cam follower 2221.

[0091] Optional, please refer to Figure 8 , Figures 10 to 12The needle clip carrying mechanism 210 further includes a fixing plate 223. One end of the fixing plate 223 is disposed on the needle clip carrying base 211. The fixing plate 223 is vertically disposed on the needle clip carrying base 211.

[0092] Please see Figure 8 The flipping and lifting structure 212 includes a lifting drive structure 216, a lifting plate 217, a lifting block 218, two sets of first guide rails 219 and two sets of first sliders 2110.

[0093] The lifting drive structure 216 is disposed on the fixed plate 223. Optionally, the lifting drive structure 216 is fixed to the middle portion of the fixed plate 223. The lifting drive structure 216 is arranged along the height direction. The lifting drive structure 216 includes, but is not limited to, a cylinder.

[0094] The lifting plate 217 is disposed opposite to the fixed plate 223. The top of the lifting plate 217 is rotatably connected to the first end of the pin clip structure 213. The bottom of the lifting plate 217 is suspended relative to the pin clip support base 211.

[0095] One side of the lifting block 218 is connected to the lifting drive structure 216, and the other side of the lifting block 218 is fixedly connected to the top of the lifting plate 217. Specifically, one side of the lifting block 218 is located on the cylinder push rod of the lifting drive structure 216, which can drive the lifting block 218 to rise and fall. Furthermore, the lifting drive structure 216 and the lifting block 218 are used to drive the pin clip structure 213 to rise and fall.

[0096] The two sets of first guide rails 219 are respectively disposed on both sides of the fixed plate 223. The two sets of first guide rails 219 are respectively disposed on both sides of the lifting drive structure 216 (along the second direction X). Each set of first guide rails 219 is arranged along the height direction.

[0097] Each set of first sliders 2110 is fixedly connected to the lifting plate 217 and slidably connected to a set of first guide rails 219. In this way, the lifting plate 217 can drive the pin clamp structure 213 to rise and fall along the first guide rails 219 to a suitable height.

[0098] Optional, please refer to Figure 8 The pin-carrying mechanism 210 further includes at least one elastic connector 25. The elastic connector 25 is located on the side of the lifting plate 217 facing the fixed plate 223. The elastic connector 25 is located outside the area enclosed by the fixed plate 223 and the lifting plate 217.

[0099] Optionally, the resilient connector 25 may include, but is not limited to, a spring.

[0100] One end of the elastic connector 25 is connected to the bottom of the lifting plate 217, and the other end of the elastic connector 25 is connected to the pin holder support base 211.

[0101] When the lifting drive structure 216 drives the lifting plate 217 to rise, the elastic connector 25 is stretched as the lifting plate 217 rises; when the lifting drive structure 216 drives the lifting plate 217 to fall, the elastic connector 25 falls as the lifting plate 217 falls; therefore, the lifting plate 217 and the pin clamp structure 213 will not experience problems such as being jammed due to instantaneous impact during the lifting process.

[0102] Please see Figure 8 The lifting block 218 also includes a first lifting block 2181, a buffer 2182 and a second lifting block 2183 arranged in sequence.

[0103] The lifting drive structure 216 is connected to the first lifting block 2181. Specifically, the cylinder push rod of the lifting drive structure 216 is connected to the first lifting block 2181.

[0104] The buffer 2182 abuts between the second lifting block 2183 and the first lifting block 2181. The buffer 2182 is used to form a buffer during the lifting process to avoid problems such as the lifting plate 217 and the pin clamp structure 213 being jammed due to instantaneous impact during the lifting process.

[0105] The second lifting block 2183 is fixedly connected to the top of the lifting plate 217.

[0106] The cylinder body of the lifting drive structure 216 drives the cylinder push rod, which in turn drives the lifting plate 217 to move through the first lifting block 2181, the buffer 2182, and the second lifting block 2183 in sequence.

[0107] Optional, please refer to Figure 8 The flipping and lifting structure 212 also includes a flipping drive structure 2121 and a telescopic rod 2122.

[0108] One end of the flip drive structure 2121 is fixedly connected to the bottom of the lifting plate 217, and the other end of the flip drive structure 2121 is rotatably connected to the first end of the pin clip structure 213.

[0109] The tilting drive structure 2121 includes, but is not limited to, a cylinder. The tilting drive structure 2121 is arranged along the height direction. Furthermore, there are two tilting drive structures 2121, which are respectively arranged on both sides of the fixed plate 223.

[0110] One end of the telescopic rod 2122 is rotatably connected to the bottom of the lifting plate 217, and the other end of the telescopic rod 2122 is rotatably connected to the middle edge of the lifting plate 217.

[0111] Optionally, there are two sets of telescopic rods 2122, with the two sets of telescopic rods 2122 located on both sides of the lifting plate 217. The extension direction of the telescopic rods 2122 is inclined relative to the height direction.

[0112] In this embodiment, the first end of the pin clip structure 213 is rotatably connected to the telescopic rod 2122, the lifting plate 217, and the flipping drive structure 2121; the other parts of the pin clip structure 213 (e.g., the second end) are located on the side of the pin clip support mechanism 210 away from the movable base 222.

[0113] When the two sets of telescopic rods 2122 are in the extended state, the other end of the two sets of telescopic rods 2122 is supported on both sides of the lifting plate 217 along the second direction X, the two sets of flipping drive structures 2121 are in the retracted state, and the pin clamp structure 213 is in the flattened state.

[0114] During the folding process of the pin clip structure 213, the two sets of telescopic rods 2122 gradually shorten, and the two sets of flipping drive structures 2121 gradually extend, causing the first end of the pin clip structure 213 to move upward and the second end of the lifting plate 217 to move downward.

[0115] When the two sets of telescopic rods 2122 are in the shortened state, the two sets of flipping drive structures 2121 are in the extended state, and the pin clip structure 213 is in the folded state.

[0116] Optionally, the telescopic rod 2122 can be engaged in a shortened or retracted state via a locking mechanism.

[0117] Optional, please refer to Figures 13 to 15 The pin card structure 213 includes a pin card tray 2131, a pin card 2132, and a pin card mounting chassis 2133.

[0118] Optionally, the pin clip 2132 is disposed on the pin clip tray 2131. The pin clip tray 2131 is generally annular in structure. The pin clip 2132 is generally disc-shaped. The pin clip 2132 is disposed on the pin clip tray 2131.

[0119] Optional, please refer to Figures 13 to 15 The pin tray 2131 is mounted on the pin mounting base 2133. The pin mounting base 2133 is generally ring-shaped to expose the bottom surface of the pin 2132.

[0120] Please see Figures 13 to 15 The pin mounting base 2133 is provided with a first positioning pin 261, a second positioning pin 262 and at least one pressure block hole 263.

[0121] The first positioning pin 261 and the second positioning pin 262 are spaced apart. Furthermore, the first positioning pin 261 and the second positioning pin 262 can be arranged approximately along the diameter direction of the pin holder 2132 disc.

[0122] Please see Figures 13 to 15 The pin tray 2131 is provided with a first positioning hole 264 and a second positioning hole 265. The position of the first positioning hole 264 corresponds to the position of the first positioning pin 261. The position of the second positioning hole 265 corresponds to the position of the second positioning pin 262.

[0123] Optionally, the size of the first positioning hole 264 is larger than the size of the second positioning hole 265.

[0124] The size of the first locating pin 261 is slightly smaller than the size of the first locating hole 264. The first locating pin 261 is inserted into the first locating hole 264.

[0125] The second locating pin 262 is slightly smaller than the second locating hole 265. The second locating pin 262 is inserted into the second locating hole 265.

[0126] The size of the first locating pin 261 is larger than the size of the second locating pin 262.

[0127] Because the first positioning hole 264 and the second positioning hole 265 are of different sizes, the orientation of the pin tray 2131 on the pin mounting base 2133 is unique. This ensures accurate alignment when the pin tray 2131 is installed on the pin mounting base 2133. In other words, the pin tray 2131 has first positioning holes 264 and second positioning holes 265 of different sizes, and the pin mounting base 2133 has first positioning pins 261 and second positioning pins 262 of different sizes, providing a foolproof design during the installation of the pin tray 2131 on the pin mounting base 2133.

[0128] During the process of installing the pin tray 2131 onto the pin mounting chassis 2133, the first positioning pin 261 is aligned with the first positioning hole 264, and the second positioning pin 262 is aligned with the second positioning hole 265.

[0129] Please see Figures 13 to 15 The pin-card structure 213 also includes at least one pressure block 2134, an elastic sensing sheet 2135, and a sensor 2136.

[0130] The sensor 2136 is located on the side of the pin card mounting base 2133 opposite to the pin card tray 2131. One end 2135a of the elastic sensing sheet 2135 is fixed to the side of the pin card mounting base 2133 opposite to the pin card tray 2131. The pressure block 2134 is fixed to the middle part 2135b of the elastic sensing sheet 2135. The pressure block 2134 protrudes from the pin card mounting base 2133 through the pressure block hole 263.

[0131] When the pin tray 2131 is installed on the pin mounting chassis 2133, the pressure block 2134 moves downward under the pressure of the pin tray 2131, thereby causing the other end 2135c of the elastic sensing sheet 2135 to be located within the sensing range of the sensor 2136. At this time, the sensor 2136 detects the sensing signal to determine that the pin tray 2131 is installed on the pin mounting chassis 2133.

[0132] When the needle card tray 2131 detaches from the needle card mounting base 2133, the pressure block 2134 returns to its original position, protruding from the needle card mounting base 2133 through the pressure block hole 263. The other end 2135c of the elastic sensing piece 2135 is outside the sensing range of the sensor 2136. Since the sensor 2136 does not detect a sensing signal, it can be determined that the needle card mounting base 2133 is not mounted on the needle card tray 2131, or that the needle card tray 2131, with the needle card 2132, is mounted on the needle card chuck 121 on the flip cover 120.

[0133] In this embodiment, the needle card 2132 is placed in the needle card tray 2131. The operator needs to perform angle positioning when placing the needle card tray 2131 onto the needle card mounting base 2133, meaning the needle card 2132 needs to be placed at a suitable angle on the needle card mounting base 2133. In this embodiment, the needle card tray 2131 is designed with first positioning holes 264 and second positioning holes 265 of different sizes, and the needle card mounting base 2133 is equipped with first positioning pins 261 and second positioning pins 262 of different sizes. This design prevents mistaken positioning during the installation of the needle card tray 2131 onto the needle card mounting base 2133, ensuring the accuracy of the needle card 2132's installation angle. Accurate positioning, fixing, and control of the needle card tray 2131 placed on the needle card mounting base 2133 achieves the function of the automatic needle card loading assembly 200. Through reasonable structural design, the stability of the automatic needle loading card assembly 200 during movement / stop is ensured. When the automatic needle loading card assembly 200 performs logical actions, it is necessary to ensure information interaction and collaborative work with other components. In this embodiment, multiple sets of detection components (sensors) are designed to determine whether the automatic needle loading card assembly 200 has a fault or suspected fault by the on / off state of I / O, and then alarm, so that production personnel can quickly deal with the problem and prevent serious machine collision accidents.

[0134] The pin tray 2131 is positioned by different positioning pins. After the pin tray 2131 is placed on the pin mounting base 2133, it contacts the pressure block 2134. The pressure block 2134 initially protrudes from the pin mounting base 2133. When the pressure block 2134 bears the weight, it will drive the sensing plate to press down and trigger the sensor 2136 to determine that the pin tray 2131 is properly loaded on the pin mounting base 2133.

[0135] In this embodiment, the automatic needle loading assembly 200 reliably hooks the cam follower 2221 with its first hook portion 2112 and is pulled to the loading position along with the overall movement of the motion platform mechanism 220. Its positioning and fixing method is similar. After reaching the fixed position, the slide cylinder (first drive structure 214) moves, causing the first hook portion 2112 to separate from the cam follower 2221, and the second hook portion 2113 to hook the positioning post 2211. The movement of the slide cylinder achieves simultaneous hooking and separation, thus ensuring that after loading, the needle loading carrier mechanism 210 remains hooked and stationary with the positioning post 2211. The automatic needle loading assembly 200 does not require an additional power source to move from the fixed position to the loading position.

[0136] Of course, the mobile base station 222 on the motion platform mechanism 220 can perform motion independently.

[0137] When the needle card carrier mechanism 210 is in position, the slide cylinder actuates to hook the cam follower 2221 / positioning post 2211. The capacitive proximity sensor on it (the first detector 231 and the second detector 232 form a set of capacitive proximity sensors, and the third detector 241 and the fourth detector 242 form another set of capacitive proximity sensors) will sense the cam follower 2221 / positioning post 2211. After the controller receives the sensing signal, it indicates that the needle card carrier mechanism 210 has been in position and the next process can be carried out.

[0138] The lifting drive structure 216 contacts the adjusting bolt and hydraulic buffer through the lifting block 218, lifting the pin clamp structure 213 to the required height. At this time, the pin clamp structure 213 relies on its own weight and the downward force of the tension spring to tightly press the adjusting bolt against the lifting block 218. After the clamping is completed, the lifting drive structure 216 retracts under no-load, and the pin clamp mounting chassis 2133 and other related parts rely on their own weight and the downward force of the tension spring to reset the lifting drive structure 216. During the movement of the entire mechanism, the mechanism will not produce position changes of the telescopic rod 2122 due to instantaneous impact, preventing screw loosening, reducing noise pollution, and ensuring the stability of the mechanism. It also reduces structural vibration and improves the angular consistency of the pin clamp mounting chassis 2133 after flipping.

[0139] This application designs an automatic pin loading assembly 200 for use in a wafer inspection device 1000. This automatic pin loading assembly 200 reuses the movable base 222 in the motion platform mechanism 220 as a power source, eliminating the need for a separate power source to drive the pin loading mechanism 210, thus simplifying the structure and reducing costs. The foolproof design of the pin loading structure 213 and the reasonable arrangement of the sensors 2136 reduce equipment safety risks. Furthermore, since this structure is an automatic pin loading assembly 200, manual locking and positioning of the pin loading 2132 using clamps is unnecessary, reducing labor costs.

[0140] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application, and such improvements and refinements are also considered to be within the protection scope of this application.

Claims

1. An automatic needle loading card assembly comprising: The automatic needle card loading assembly comprises: a needle card carrying mechanism, comprising a needle card carrying base, a turnover lifting structure and a needle card structure, one end of the turnover lifting structure being arranged on the needle card carrying base, the other end of the turnover lifting structure being connected to the needle card structure; the turnover lifting structure is used to drive the needle card structure to turn over and lift; a movement platform mechanism, the movement platform mechanism comprising a movement base and a moving base, the needle card carrying mechanism being arranged on the movement base, the moving base being arranged in the first direction with the needle card carrying mechanism, the moving base being capable of moving on the movement base; the moving base is used to drive the needle card carrying mechanism to move from a fixed position to an upper card position in the first direction; and a first detection assembly, the first detection assembly comprising a first detector and a second detector, the first detector being arranged on a first position on the moving base, the second detector being arranged on the needle card carrying base, the second detector and the first detector being arranged at least partially opposite to each other when the needle card carrying mechanism hooks the moving base.

2. The automatic needle loading card assembly of claim 1, wherein, The needle card carrying base is provided with a hooking member, the hooking member having a first hooking part, the opening of the first hooking part facing a second direction; the first position on the moving base is further provided with a cam follower, the first detector being arranged on the cam follower, the second detector being arranged on the hooking member, the second detector facing a first hooking groove formed by the first hooking part in the height direction; when the first hooking part hooks the cam follower, the needle card carrying mechanism hooks the moving base, the second detector and the first detector being arranged opposite to each other in the height direction, the first detector and the second detector forming a capacitive detector.

3. The automatic needle loading card assembly of claim 2, wherein, The automatic needle card loading assembly comprises a second detection assembly, the second detection assembly comprising a third detector and a fourth detector, the third detector being arranged on a second position on the movement base, the third detector, the needle card carrying base and the first detector being arranged in sequence, the fourth detector being arranged on the needle card carrying base, the fourth detector being located on the side of the second detector away from the moving base; when the needle card carrying mechanism is located at the fixed position, the third detector and the fourth detector are arranged at least partially opposite to each other.

4. The automatic needle loading card assembly of claim 3, wherein, The hooking member has a second hooking part, the opening of the second hooking part facing the opposite direction of the second direction; the second position on the movement base is further provided with a positioning column, the third detector being arranged on the positioning column, the fourth detector being arranged on the hooking member, the fourth detector facing a second hooking groove formed by the second hooking part in the height direction; when the needle card carrying mechanism is located at the fixed position, the second hooking part hooks the positioning column, the fourth detector and the third detector being arranged opposite to each other in the height direction, the third detector and the fourth detector forming a capacitive detector.

5. The automatic needle loading card assembly of claim 4, wherein, The needle card bearing mechanism further comprises a first driving structure and a first driving block, the first driving structure is arranged on the needle card bearing base, the first driving block is connected to the first driving structure, the hook member is arranged on the first driving block, and the first driving structure is used to drive the first driving block and the hook member to move along the second direction, so that the hook member is moved from the first hook part to the second hook part to hook the positioning column.

6. The automatic needle loading card assembly of claim 1, wherein, The needle card bearing mechanism further comprises a fixing plate, and the fixing plate is arranged on the needle card bearing base. The turnover lifting structure comprises: a lifting driving structure, which is arranged on the fixing plate; a lifting plate, which is arranged opposite to the fixing plate, and the top of the lifting plate is rotationally connected to the first end of the needle card structure; a lifting block, one side of the lifting block is connected to the lifting driving structure, and the other side of the lifting block is fixedly connected to the top of the lifting plate, and the lifting driving structure and the lifting block are used to drive the needle card structure to lift; two groups of first guide rails, which are arranged on the two sides of the fixing plate respectively, and each group of the first guide rails is arranged along the height direction; two groups of first sliding blocks, each group of the first sliding blocks is fixedly connected to the lifting plate and slidingly connected to one group of the first guide rails.

7. The automatic needle loading card assembly of claim 6, wherein, The needle card bearing mechanism further comprises at least one elastic connecting member, one end of the elastic connecting member is connected to the bottom of the lifting plate, and the other end of the elastic connecting member is connected to the needle card bearing base; and / or, The lifting block further comprises a first lifting block, a buffer and a second lifting block arranged in sequence, the lifting driving structure is connected to the first lifting block, the buffer is abutted between the second lifting block and the first lifting block, and the second lifting block is fixedly connected to the top of the lifting plate.

8. The automatic needle loading card assembly of claim 6, wherein, The turnover lifting structure further comprises a turnover driving structure and an extension rod, one end of the turnover driving structure is fixedly connected to the bottom of the lifting plate, the other end of the turnover driving structure is rotationally connected to the first end of the needle card structure, one end of the extension rod is rotationally connected to the bottom of the lifting plate, and the other end of the extension rod is rotationally connected to the lifting plate.

9. The automatic needle loading card assembly of claim 1, wherein, The needle card structure comprises a needle card tray, a needle card and a needle card mounting base plate, the needle card is arranged on the needle card tray, the needle card tray is arranged on the needle card mounting base plate, the needle card mounting base plate is provided with a first positioning pin, a second positioning pin and at least one pressing block hole, the needle card tray is provided with a first positioning hole and a second positioning hole, the size of the first positioning hole is larger than that of the second positioning hole, the first positioning pin is inserted into the first positioning hole, and the second positioning pin is inserted into the second positioning hole; The needle card structure further comprises at least one pressing block, an elastic sensing sheet and a sensor, the sensor is arranged on the side of the needle card mounting base plate away from the needle card tray, one end of the elastic sensing sheet is fixed to the side of the needle card mounting base plate away from the needle card tray, the pressing block is fixed to the middle of the elastic sensing sheet, and the pressing block protrudes from the needle card mounting base plate through the pressing block hole. When the needle card tray is installed on the needle card mounting base, the pressing block is moved under the pressing of the needle card tray, and the other end of the elastic induction sheet is located in the induction range of the inductor; When the needle card tray is separated from the needle card mounting base, the pressing block restores to protrude from the needle card mounting base through the pressing block hole, and the other end of the elastic induction sheet is located out of the induction range of the inductor.

10. A wafer inspection apparatus characterized by comprising: The wafer detection device comprises the automatic needle card mounting assembly according to any one of claims 1-9.

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