Semiconductor bonding equipment part processing and positioning tool

Abstract

The utility model belongs to the technical field of positioning tools, and particularly relates to a semiconductor bonding equipment part machining positioning tool which comprises a base, a supporting table fixed at the lower end of the front side of the base and a clamping seat fixed at the upper end of the front side of the base. A plurality of pressing plates used for clamping the lower end of the front side of a workpiece are arranged on the supporting table through cooperation of threaded holes and bolts, the receding groove is located behind the groove hole, and hinged clamping jaws are symmetrically arranged on the clamping base. The upper end, provided with a slotted hole, of a workpiece can be clamped and positioned through small-area clamping of the lower end of the clamping jaw, the pressing piece for driving the clamping jaw is located above the clamping jaw and avoids machining of the slotted hole, machining work is facilitated, the pressing piece adopts a threaded driving mode, and the clamping jaw has the advantages of being simple in structure, high in reliability, low in cost and the like. When the pressing piece is loosened, the clamping jaw can automatically open the bottom under the action of gravity, and the structure is flexible and reliable.

Description

Technical Field

[0001] This utility model belongs to the field of positioning tooling technology, and in particular relates to a positioning tooling for processing semiconductor bonding equipment components. Background Technology

[0002] Semiconductor bonding equipment component positioning fixtures are devices used to ensure precise positioning of components during semiconductor bonding. Their core function is to guarantee the accurate position and angle of each component during bonding, thereby improving bonding quality and efficiency. These fixtures typically consist of a base, positioning pins / blocks, clamping devices, guiding mechanisms, and adjusting mechanisms. They are manufactured using high-strength alloys, ceramic materials, or composite materials to meet the requirements of high precision, high stability, and resistance to high temperatures and pressures. During processing, precision machining (such as CNC machine tools and EDM), surface treatment (such as plating and polishing), and heat treatment are required to ensure the performance of the fixtures.

[0003] When milling a groove in one of the components on a semiconductor bonding equipment, a large hole needs to be milled on the thin surface of the large extended part on one side. However, the clamping area is limited and the milling cutter needs to be avoided. Existing tooling cannot complete the positioning work simply, reliably and accurately.

[0004] To address the aforementioned issues, this application proposes a semiconductor bonding equipment component processing and positioning fixture. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor bonding equipment component processing and positioning fixture, which solves the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0007] This utility model relates to a semiconductor bonding equipment component processing and positioning fixture, including a base, a support platform fixed to the lower front side of the base, and a clamping seat fixed to the upper front side of the base. A clearance groove is provided in the middle of the front side of the base. Multiple pressure plates for clamping the lower front side of the workpiece are provided on the support platform through threaded holes and bolts. The clearance groove is located behind the slot. The clamping seat is symmetrically provided with hinged jaws. The lower ends of the jaws extend in front of the clearance groove and can clamp the upper end of the workpiece from both sides. A clamping member is provided on the front side of the clamping seat to simultaneously drive the lower ends of the two jaws to form a clamping action.

[0008] Furthermore, the front end of the clamp is provided with a second step for installing the gripper, and the front end of the clamp is also provided with a third step. A support plate is fixed on the third step by bolts. After the bolts pass through the opening groove, they are pressed and fixed to the third step by a screw.

[0009] Furthermore, each of the two grippers has a shaft hole on its outer side at the middle. The shaft hole is supported by bolts and pressed with the second-step thread to form a rotating shaft that supports the grippers.

[0010] Furthermore, the clamping member is higher than the shaft hole, and the clamping seat is provided with a first step for installing the clamping member. The clamping member includes an equilateral trapezoid and a right-angled trapezoid that slides symmetrically on both sides of the equilateral trapezoid along an inclined path, as well as a long screw that passes through the equilateral trapezoid and is threadedly connected to the first step.

[0011] Furthermore, the upper inner sides of both grippers are arc-shaped and contact the outer side of the right-angled trapezoid.

[0012] Furthermore, the bottom inner sides of the two grippers are formed with clamping portions that simultaneously press the upper ends of both sides of the workpiece inward.

[0013] This utility model has the following beneficial effects:

[0014] This invention uses a small area of ​​clamping at the lower end of the gripper to clamp and position the upper end of the workpiece with a slot. The clamping component that drives the gripper is located above it, avoiding the machining of the slot, which facilitates the machining process. The clamping component uses a threaded drive method, which has the advantages of simple structure, high reliability, and low cost. When the clamping component is released, the gripper can automatically open the bottom under the action of gravity, making the structure flexible and reliable. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall appearance structure of this utility model;

[0017] Figure 2 for Figure 1 A structural diagram viewed from below;

[0018] Figure 3 A schematic diagram showing the disassembled gripper section;

[0019] Figure 4 A schematic diagram of the disassembled clamping component;

[0020] The attached diagram lists the components represented by each number as follows:

[0021] In the diagram: 1. Base; 11. Support platform; 111. Threaded hole; 12. Clearance groove; 2. Clamp; 21. First step; 22. Second step; 23. Third step; 3. Clamping jaw; 31. Shaft hole; 4. Support plate; 41. Opening slot; 42. Support hole; 5. Clamping element; 51. Equilateral trapezoid; 52. Right-angled trapezoid; 53. Long screw; 6. Workpiece; 61. Slot. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] In the description of this utility model, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "around" and other terms indicating orientation or positional relationship are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Please see Figure 1 - Figure 4 As shown, this utility model is a semiconductor bonding equipment component processing and positioning fixture, including a base 1, a support platform 11 fixed to the lower front side of the base 1, and a clamping seat 2 fixed to the upper front side of the base 1. A clearance groove 12 is provided in the middle of the front side of the base 1. Multiple pressure plates for clamping the lower front side of the workpiece 6 are provided on the support platform 11 through threaded holes 111 and bolts. The clearance groove 12 is located behind the slot 61. The clamping seat 2 is symmetrically provided with hinged claws 3. The lower end of the claws 3 extends in front of the clearance groove 12 and can clamp the upper end of the workpiece 6 from both sides. The front side of the clamping seat 2 is provided with a clamping member 5 that simultaneously drives the lower ends of the two claws 3 to form a clamping.

[0025] The clamp 2 has a second step 22 at the front end for mounting the gripper 3, and a third step 23 at the front end. A support plate 4 is fixed on the third step 23 by bolts. After the bolts pass through the opening slot 41, they press and fix the support plate 4 to the third step 23 by a screw. In this embodiment, the third step 23 has a blocking surface on the side near the second step 22 to prevent the lower end of the gripper 3 from opening too wide.

[0026] In this embodiment, the shaft hole 31 is provided on the outer side of the middle part of the two grippers 3. The bolt supports the hole 42 and the shaft hole 31 and is threadedly pressed with the second step 22 to form a rotating shaft supporting the gripper 3. In this embodiment, the shaft hole 31 is set on the side of the gripper 3. As shown in the figure, when the clamping member 5 is unloaded, the gripper 3 can automatically open its lower end under the action of gravity. The bolt that passes through the support hole 42 and the shaft hole 31 has only the front end with a thread that is pressed with the second step 22. It is mainly used to support the gripper 3 and form a rotating shaft.

[0027] The clamping member 5 is higher than the shaft hole 31. The clamping base 2 is provided with a first step 21 for installing the clamping member 5. The clamping member 5 includes an equilateral trapezoid 51 and right-angled trapezoids 52 that slide symmetrically on both sides of the equilateral trapezoid 51 along an inclined path, as well as a long screw 53 that passes through the equilateral trapezoid 51 and is threaded to the first step 21. In this embodiment, the part of the long screw 53 that passes through the right-angled trapezoid 52 is not threaded. As shown in the figure, there is a sliding groove structure between the equilateral trapezoid 51 and the right-angled trapezoid 52. The sliding groove can drive the right-angled trapezoids 52 on both sides to slide along the two horizontal sides when only the equilateral trapezoid 51 is driven, thereby realizing the driving of the gripper 3. The two right-angled trapezoids 52 are always in contact with the first step 21.

[0028] The upper inner sides of the two grippers 3 are both arc-shaped and contact the outer side of the right trapezoid 52. In this embodiment, the force generated by the clamping member 5 can be smoothly transmitted to the grippers 3 by the arc shape contacting the outer side of the equilateral trapezoid 51.

[0029] Among them, the inner bottom of the two grippers 3 has a clamping part that simultaneously presses the upper ends of both sides of the workpiece 6 inward. In this embodiment, the area of ​​the clamping part is small, so that the workpiece 6 can be clamped while avoiding interference with the opening of the slot 61.

[0030] One specific application of this embodiment is:

[0031] Assembly: Two right-angled trapezoids 52 and equilateral trapezoids 51 are slidably assembled. A long screw 53 passes through the equilateral trapezoid 51 and is threaded to the first step 21 to place the clamping part 5 in the first step 21. Since the thickness of the clamping part 5 is greater than the height of the first step 21, it can extend to the position of the second step 22. The bolt passes through the support plate 4 and then through the shaft hole 31 and is threaded to the second step 22. The bolt passing through the shaft hole 31 serves as the rotation axis of the clamp 3. Then, the two sides of the support plate 4 are fixed to the third step 23 by the bolt. The bolt passes through the clamping plate and is threaded to the threaded hole 111.

[0032] like Figure 1 - Figure 2The workpiece 6 shown is in a clamped state. The lower end of the workpiece 6 is pressed onto the support platform 11 by bolts and clamps on the threaded hole 111. Bolts and clamps are common clamping and positioning methods for tooling, which are not shown in the figure. The clamping component 5 pushes the upper end of the jaw 3 outward and opens it, thereby clamping and positioning the workpiece 6 through the lower end. The workpiece 6 is positioned by conventional pressure plates and bolts to ensure stability on the base 1.

[0033] When the long screw 53 is screwed outward to loosen, the equilateral trapezoid 51 pulls the two right trapezoids 52 inward. The upper end of the gripper 3 loses the outward pressure of the equilateral trapezoid 51, and the lower end of the gripper 3 automatically opens under the action of gravity, releasing the workpiece 6. Then the clamping plate on the support table 11 is released, and the workpiece 6 is taken out.

[0034] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A semiconductor bonding equipment component processing and positioning fixture, comprising a base (1), a support platform (11) fixed to the lower front end of the base (1), and a clamp (2) fixed to the upper front end of the base (1), wherein a clearance groove (12) is provided in the middle of the front side of the base (1), and the support platform (11) is provided with a plurality of pressure plates for clamping the lower front end of the workpiece (6) through threaded holes (111) and bolts, characterized in that: The avoiding groove (12) is located behind the slot hole (61), the clamping seat (2) is symmetrically provided with the articulated clamping jaw (3), the lower end of the clamping jaw (3) extends in front of the avoiding groove (12) and can clamp the upper end of the workpiece (6) from both sides, and the front side of the clamping seat (2) is provided with the pressing part (5) for simultaneously driving the lower end of the two clamping jaws (3) to form clamping.

2. The semiconductor bonding apparatus component processing and positioning fixture of claim 1, wherein: The front end of the clamping seat (2) is provided with a second step (22) for mounting the clamping jaw (3), and the front end of the clamping seat (2) is further provided with a third step (23), and the third step (23) is fixed with a support plate (4) through bolts, and the bolts pass through the opening groove (41) and are fixed with the third step (23) through the screw to press and fix the support plate (4).

3. The semiconductor bonding apparatus component processing and positioning fixture of claim 2, wherein: The middle part of the two clamping jaws (3) is provided with an axle hole (31) on the outer side, which is supported through the bolt support hole (42) and the axle hole (31) and is screwed with the second step (22) to form a rotating shaft for supporting the clamping jaw (3).

4. The semiconductor bonding apparatus component processing and positioning fixture of claim 3, wherein: The pressing part (5) is higher than the axle hole (31), the clamping seat (2) is provided with a first step (21) for mounting the pressing part (5), the pressing part (5) comprises an isosceles trapezoid (51) and a right trapezoid (52) which is symmetrically slid on both sides of the isosceles trapezoid (51) in an inclined path, and a long screw (53) which penetrates the isosceles trapezoid (51) and is screwed with the first step (21).

5. The semiconductor bonding apparatus component processing and positioning fixture of claim 4, wherein: The inner side upper end of the two clamping jaws (3) is arc-shaped and in contact with the outer side of the right trapezoid (52).

6. The semiconductor bonding apparatus component processing and positioning fixture of claim 1, wherein: The inner side bottom of the two clamping jaws (3) forms a clamping part for simultaneously pressing the upper end of the workpiece (6) on both sides inward.

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