Wafer horizontal conveying mechanism

Abstract

The utility model relates to the technical field of vacuum coating, and particularly discloses a wafer horizontal conveying mechanism which comprises a vacuum cavity, a transmission assembly and a wafer tray. The transmission assembly comprises a transmission motor, a lead screw, a sliding base, a sliding support and a conveying belt. The sliding seat is arranged in the vacuum cavity in a sliding manner; the sliding support is fixedly connected with the sliding seat; the screw rod is rotatably arranged in the vacuum cavity and is in meshed connection with the sliding seat; the transmission motor is arranged on the vacuum cavity, and the output end of the transmission motor is in transmission connection with the lead screw. A fixed block is fixedly arranged in the vacuum cavity; the conveying belt is movably arranged on the sliding support relative to the sliding support, and the conveying belt is fixedly connected with the fixing block; the wafer tray is fixedly connected with the conveyor belt. According to the scheme, the wafer tray can be driven to move through the transmission assembly, and automatic conveying of the wafer tray is achieved; meanwhile, the sliding support and the conveying belt can convey the wafer trays at the same time, and therefore the conveying efficiency of the wafer trays is further improved.

Description

Technical Field

[0001] This application relates to the field of vacuum coating technology, and more particularly to a wafer horizontal transport mechanism. Background Technology

[0002] Wafers are the basic material for manufacturing semiconductor devices. In the semiconductor manufacturing process, a multi-chamber PVD coating equipment is a device used to deposit thin films on wafers. A multi-chamber PVD coating equipment includes multiple vacuum chambers; each vacuum chamber has its specific function, such as a deposition chamber, a pretreatment chamber, or a transition chamber.

[0003] During the coating process, wafers need to be transferred into the deposition chamber for coating. The existing method is for workers to manually place the wafers onto a tray through a glove box, then manually push the tray into the deposition chamber, and push the tray out after coating. This method has low transfer efficiency. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a wafer horizontal transport mechanism for improving wafer transport efficiency.

[0005] To achieve the above-mentioned technical objectives, this application provides a wafer horizontal transport mechanism, including: a vacuum chamber, a transmission component, and a wafer tray;

[0006] The transmission assembly includes: a transmission motor, a lead screw, a sliding seat, a sliding support, and a conveyor belt;

[0007] The sliding seat is slidably disposed within the vacuum chamber;

[0008] The sliding support is fixedly connected to the sliding seat;

[0009] The lead screw is rotatably disposed within the vacuum cavity and is engaged with the sliding seat;

[0010] The drive motor is mounted on the vacuum chamber, and the output end of the drive motor is connected to the lead screw drive.

[0011] A fixing block is fixedly installed inside the vacuum chamber;

[0012] The conveyor belt is movably mounted on the sliding support relative to the sliding support, and the conveyor belt is fixedly connected to the fixed block;

[0013] The wafer tray is fixedly connected to the conveyor belt.

[0014] Furthermore, the sliding support is provided with a rotatable idler wheel;

[0015] The conveyor belt is engaged with the idler wheel.

[0016] Furthermore, the sliding support is provided with a hollow cavity along the sliding direction;

[0017] The wafer tray is connected to tray rollers;

[0018] The tray rollers are rotatably disposed within the hollow cavity.

[0019] Furthermore, the wafer tray includes: a support plate and a fork plate;

[0020] The support plate is fixedly connected to the conveyor belt, and the support plate is also connected to the pallet rollers;

[0021] The fork plate is fixed to the support plate.

[0022] Furthermore, the drive motor is located outside the vacuum chamber;

[0023] The output end of the drive motor is connected to a drive rod;

[0024] The end of the transmission rod is connected to the lead screw via a bevel gear.

[0025] Furthermore, the output end of the drive motor is connected to the drive rod via a magnetohydrodynamic connection.

[0026] Furthermore, the sliding support is connected to a limit block;

[0027] The limiting block is slidably disposed within the vacuum cavity and cannot slide out of the vacuum cavity.

[0028] Furthermore, the vacuum cavity is provided with openings on both sides along the sliding direction of the sliding seat;

[0029] The transmission component is used to drive the wafer tray through the opening.

[0030] Furthermore, the transmission assembly also includes a guide rod;

[0031] The guide rod is fixed inside the vacuum cavity, and the guide rod is arranged parallel to the lead screw;

[0032] One end of the wafer tray is fixedly connected to the conveyor belt, and the other end of the wafer tray is slidably connected to the guide rod.

[0033] Furthermore, each of the aforementioned sliding seats, sliding supports, and conveyor belts comprises two units;

[0034] One of the sliding seats is engaged with the lead screw, and the other sliding seat is slidably sleeved on the guide rod;

[0035] The two sliding supports are respectively connected to the two sliding seats;

[0036] The two conveyor belts are respectively mounted on the two sliding supports.

[0037] As can be seen from the above technical solutions, this application provides a wafer horizontal transport mechanism, including: a vacuum chamber, a transmission assembly, and a wafer tray; the transmission assembly includes: a transmission motor, a lead screw, a sliding seat, a sliding support, and a conveyor belt; the sliding seat is slidably disposed in the vacuum chamber; the sliding support is fixedly connected to the sliding seat; the lead screw is rotatably disposed in the vacuum chamber and meshes with the sliding seat; the transmission motor is disposed on the vacuum chamber, and the output end of the transmission motor is drivenly connected to the lead screw; a fixing block is fixedly disposed in the vacuum chamber; the conveyor belt is movably disposed on the sliding support relative to the sliding support, and the conveyor belt is fixedly connected to the fixing block; the wafer tray is fixedly connected to the conveyor belt.

[0038] In this solution, the transmission components can drive the wafer tray to move, realizing the automated transfer of the wafer tray; at the same time, the sliding support and the conveyor belt can transfer the wafer tray simultaneously, thereby further improving the transfer efficiency of the wafer tray. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 A top view of the overall structure of a wafer horizontal transport mechanism provided in an embodiment of this application;

[0041] Figure 2 for Figure 1 Side view sectional view along section BB;

[0042] Figure 3 An internal structural diagram of a wafer horizontal transport mechanism provided in an embodiment of this application;

[0043] Figure 4 for Figure 3 A magnified view of a portion of the image;

[0044] In the diagram: 10. Vacuum cavity; 11. Fixing block; 12. Opening; 20. Transmission assembly; 21. Transmission motor; 211. Transmission rod; 212. Magnetofluid; 241. Idler wheel; 242. Hollow cavity; 243. Limiting block; 22. Lead screw; 23. Sliding seat; 24. Sliding support; 25. Conveyor belt; 26. Guide rod; 30. Wafer tray; 31. Tray roller; 32. Support plate; 33. Fork plate. Detailed Implementation

[0045] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0046] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0047] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0048] Please see Figures 1 to 4 The wafer horizontal transport mechanism provided in this application includes: a vacuum chamber 10, a transmission component 20, and a wafer tray 30.

[0049] The vacuum chamber 10 can serve as a chamber for coating wafers. During application, the wafers can be placed on the wafer tray 30 using existing processes, and then transferred inside the vacuum chamber 10 by the wafer tray 30.

[0050] The transmission assembly 20 includes: a transmission motor 21, a lead screw 22, a sliding seat 23, a sliding support 24, and a conveyor belt 25.

[0051] The sliding seat 23 is slidably disposed within the vacuum chamber 10; in practical applications, the vacuum chamber 10 may be provided with a guide structure such as a guide rail; the sliding seat 23 is slidably placed into the guide rail.

[0052] The sliding support 24 is fixedly connected to the sliding seat 23; thus, when the sliding seat 23 slides, the sliding seat 23 can drive the sliding support 24 to slide synchronously.

[0053] The lead screw 22 is rotatably mounted inside the vacuum chamber 10 and is engaged with the sliding seat 23. The drive motor 21 is mounted on the vacuum chamber 10, and its output end is connected to the lead screw 22. When the drive motor 21 is started, it drives the lead screw 22 to rotate, which in turn drives the sliding seat 23 to slide within the vacuum chamber 10.

[0054] A fixing block 11 is fixedly installed inside the vacuum chamber 10; the conveyor belt 25 is movably installed on the sliding support 24 relative to the sliding support 24, and the conveyor belt 25 is fixedly connected to the fixing block 11; the wafer tray 30 is fixedly connected to the conveyor belt 25.

[0055] Specifically, please refer to Figure 3 and Figure 4 In this embodiment, the conveyor belt 25 is vertically arranged, with its plane facing horizontally. The fixing block 11 is fixed inside the vacuum chamber 10 and can also be fixedly connected to the plane of the conveyor belt 25 using bolts or other connecting components. When the sliding support 24 slides, since the conveyor belt 25 is fixedly connected to the fixing block 11, the sliding support 24 pushes the conveyor belt 25 to move along the sliding support 24; therefore, the conveyor belt 25 can drive the wafer tray 30 to slide relative to the vacuum chamber 10, achieving automated conveying control of the wafer tray 30. Simultaneously, because the conveyor belt 25 can slide relative to the sliding support 24, the sliding stroke of the wafer tray 30 is twice that of the sliding support 24, further improving the conveying efficiency of the wafer tray 30.

[0056] In practical applications, the vacuum chamber 10 can be provided with openings 12 on both sides along the sliding direction of the sliding seat 23; the transmission component 20 is used to drive the wafer tray 30 through the openings 12.

[0057] Please see Figure 2The two ends of the vacuum chamber 10 can be sealed to connect to other chambers in a multi-chamber PVD coating equipment. In application, the wafer tray 30 can extend outside the opening 12 on the left side of the vacuum chamber 10, allowing the wafer to be transferred into the wafer tray 30 by a robot in the sealed chamber; then, the transmission assembly 20 drives the wafer tray 30 into the vacuum chamber 10 for coating; after wafer coating, the transmission assembly 20 drives the wafer tray 30 to extend outside the opening 12 on the right side of the vacuum chamber 10, realizing the transfer of the wafer to the sealed chamber required for the next process.

[0058] That is, in this embodiment, the sliding support 24 can slide through the opening 12 on the right side of the vacuum cavity 10 to drive the wafer tray 30 through.

[0059] In one embodiment, a rotatable idler wheel 241 is provided on the sliding support 24; the conveyor belt 25 is engaged with the idler wheel 241; the idler wheel 241 makes it easier for the conveyor belt 25 to slide relative to the sliding support 24.

[0060] Optionally, the sliding support 24 is provided with a hollow cavity 242 along the sliding direction; a tray roller 31 is connected to the wafer tray 30; the tray roller 31 is rotatably disposed in the hollow cavity 242.

[0061] The hollow cavity 242 allows the tray rollers 31 to slide, thereby providing guidance and support for the wafer tray 30, making the sliding of the wafer tray 30 smoother and more stable.

[0062] In applications, the bottom of the sliding support 24 can also be connected to the inner wall of the vacuum chamber 10 via a roller structure.

[0063] In one embodiment, the wafer tray 30 includes a support plate 32 and a fork plate 33; the support plate 32 is fixedly connected to the conveyor belt 25 and is also connected to the tray rollers 31; the fork plate 33 is fixed to the support plate 32.

[0064] The fork plate 33 can be a Y-shaped structure, which can accommodate wafers of various sizes.

[0065] In one embodiment, the drive motor 21 is disposed outside the vacuum chamber 10; the output end of the drive motor 21 is connected to a drive rod 211; the end of the drive rod 211 is connected to a lead screw 22 through a bevel gear meshing.

[0066] The drive motor 21, located outside the vacuum chamber 10, facilitates maintenance and repair by personnel. Simultaneously, the drive rod 211 can convert the vertical drive of the drive motor 21 to a horizontal drive via a bevel gear, allowing the drive motor 21 to be installed at the top or bottom of the vacuum chamber 10, avoiding the location of the opening 12.

[0067] As a further improvement, the output end of the drive motor 21 is connected to the drive rod 211 via a magnetic fluid 212. When the drive motor 21 starts, it can drive the magnetic fluid 212 to rotate as a whole, and drive the drive rod 211 to rotate through the magnetic fluid 212, thereby realizing a sealed transmission connection between the drive motor 21 and the vacuum chamber 10.

[0068] Optionally, the sliding support 24 is connected to a limiting block 243; the limiting block 243 is slidably disposed inside the vacuum chamber 10 and cannot slide out of the vacuum chamber 10.

[0069] In practical applications, the drive motor 21 is connected to a controller. The controller sets a travel limit for the drive motor 21. The limit block 243 further prevents the sliding support 24 from sliding beyond the preset travel.

[0070] Furthermore, the transmission assembly 20 also includes a guide rod 26; the guide rod 26 is fixed inside the vacuum chamber 10 and is arranged parallel to the lead screw 22; one end of the wafer tray 30 is fixedly connected to the conveyor belt 25, and the other end of the wafer tray 30 is slidably connected to the guide rod 26.

[0071] The guide rod 26 provides support for the sliding of the wafer tray 30, thereby improving the stability of the sliding of the wafer tray 30.

[0072] Specifically, each of the two sliding seats 23, the sliding support 24, and the conveyor belt 25 includes two; one sliding seat 23 is engaged with the lead screw 22, and the other sliding seat 23 is slidably sleeved on the guide rod 26; the two sliding supports 24 are respectively connected to the two sliding seats 23; and the two conveyor belts 25 are respectively disposed on the two sliding supports 24.

[0073] In this embodiment, the wafer tray 30 is slidably connected to the guide rod 26 via the sliding support 24 and the conveyor belt 25. Correspondingly, tray rollers 31 can be provided on both sides of the support plate 32, and they extend into the hollow cavities 242 of the two sliding supports 24 respectively.

[0074] The above are merely preferred embodiments of this application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A wafer horizontal transfer mechanism, characterized by, The application relates to a vacuum cavity (10), a transmission assembly (20) and a wafer tray (30). The transmission assembly (20) comprises a transmission motor (21), a screw rod (22), a sliding seat (23), a sliding support (24) and a conveying belt (25). The sliding seat (23) is slidably arranged in the vacuum cavity (10). The sliding support (24) is fixedly connected with the sliding seat (23). The screw rod (22) is rotatably arranged in the vacuum cavity (10) and is in meshing connection with the sliding seat (23). The transmission motor (21) is arranged on the vacuum cavity (10), and the output end of the transmission motor (21) is in transmission connection with the screw rod (22). A fixed block (11) is fixedly arranged in the vacuum cavity (10). The conveying belt (25) is movably arranged on the sliding support (24) relative to the sliding support (24), and the conveying belt (25) is fixedly connected with the fixed block (11). The wafer tray (30) is fixedly connected with the conveying belt (25). A rotatable idler (241) is arranged on the sliding support (24).

2. The wafer level transfer mechanism of claim 1, wherein, The conveying belt (25) is in meshing connection with the idler (241). The sliding support (24) is provided with a hollow cavity (242) along the sliding direction.

3. The wafer level transfer mechanism of claim 2, wherein, The wafer tray (30) is connected with a tray roller (31). The tray roller (31) is rollably arranged in the hollow cavity (242). The wafer tray (30) comprises a support plate (32) and a fork plate (33).

4. The wafer level transfer mechanism of claim 3, wherein, The support plate (32) is fixedly connected with the conveying belt (25), and the support plate (32) is connected with the tray roller (31). The fork plate (33) is fixed on the support plate (32). The transmission motor (21) is arranged outside the vacuum cavity (10).

5. The wafer level transfer mechanism of claim 1, wherein, The output end of the transmission motor (21) is connected with a transmission rod (211). The end of the transmission rod (211) is in meshing connection with the screw rod (22) through a bevel gear. The output end of the transmission motor (21) is connected with the transmission rod (211) through a magnetic fluid (212).

6. The wafer level transfer mechanism of claim 5, wherein, The sliding support (24) is connected with a limiting block (243).

7. The wafer level transfer mechanism of claim 1, wherein, The limiting block (243) is slidably arranged in the vacuum cavity (10) and cannot slide out of the vacuum cavity (10). The vacuum cavity (10) is provided with an opening (12) on both sides along the sliding direction of the sliding seat (23).

8. The wafer level transfer mechanism of claim 1, wherein, The transmission assembly (20) is used for driving the wafer tray (30) to pass through the opening (12). The transmission assembly (20) further comprises a guide rod (26).

9. The wafer level transfer mechanism according to any one of claims 1 to 8, wherein The guide rod (26) is fixed in the vacuum cavity (10), and the guide rod (26) is arranged in parallel with the screw rod (22). One end of the wafer tray (30) is fixedly connected with the conveying belt (25), and the other end of the wafer tray (30) is slidably connected with the guide rod (26). Two sliding seats (23), sliding supports (24) and conveying belts (25) are included.

10. The wafer level transfer mechanism of claim 9, wherein, ​ One of the sliding seats (23) is connected with the lead screw (22), and the other sliding seat (23) is slidably sleeved on the guide rod (26); The two sliding supports (24) are respectively connected with the two sliding seats (23); The two conveying belts (25) are respectively arranged on the two sliding supports (24).

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