Six-degree-of-freedom precision motion platform
By designing a six-degree-of-freedom precision motion stage, the stability and cost issues of the lithography machine's motion stage were solved, achieving six-degree-of-freedom control for large stroke requirements and reducing development difficulty and cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-27
- Publication Date
- 2026-03-13
AI Technical Summary
Existing lithography machine motion stages suffer from poor stability and high cost in micro-motion adjustment, especially when large stroke requirements are needed, voice coil motors are difficult to meet the requirements and the cost increases.
A six-degree-of-freedom precision motion stage is adopted, including a macro-motion module, a micro-motion module, and an air-bearing module. The macro-motion module realizes the movement of the base stage in the X and Y directions, the micro-motion module realizes the adjustment of the base stage in the Z, Rx, and Ry directions, and the Rz direction, and the air-bearing module provides stable support to achieve six-degree-of-freedom control.
It improves the stability of the motion table and reduces costs, meets the requirements for large strokes, and reduces development difficulty and cost output.
Smart Images
Figure CN223993042U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photolithography technology, and in particular to a six-degree-of-freedom precision motion stage. Background Technology
[0002] The motion stage subsystem of a lithography machine is a key subsystem, primarily responsible for supporting the silicon wafer and enabling its precise horizontal and vertical movement during exposure. The control accuracy of the motion stage plays a crucial role in the overlay accuracy of the lithography machine and significantly influences whether the production process meets requirements. In particular, high-precision positioning control technology within a small stroke range remains a key factor limiting the performance of lithography machines.
[0003] Existing motion tables mostly use voice coil motors for micro-motion adjustment. While these motors have the advantage of high response speed, they also have poor adjustment stability and high cost. In addition, for situations where a large micro-motion stroke is required, voice coil motors are difficult to achieve the required stroke due to their relatively small output. If the solution is changed, the cost will increase sharply.
[0004] Therefore, this utility model proposes a six-degree-of-freedom precision motion stage. By setting up a micro-motion structure, it solves the problem of poor stability caused by voice coil motor drive, and can meet the large stroke requirements of the micro-motion stage. The cost is also relatively low. While meeting the functional performance of the product, it greatly reduces the development difficulty and cost output. Utility Model Content
[0005] Based on the technical problems existing in the prior art, this utility model proposes a six-degree-of-freedom precision motion stage.
[0006] This invention proposes a six-degree-of-freedom precision motion stage, comprising a base, a macro-motion module, a micro-motion module, an air-bearing module, and a base platform. The macro-motion module includes an X-axis drive module and a Y-axis drive module. The micro-motion module includes a base, a vertical drive module, a rotary drive module, and a transfer module. The air-bearing module includes a left air-bearing component, a right air-bearing component, and a middle air-bearing component. The base platform includes a micro-motion stage and a base suction cup. The macro-motion module realizes the movement of the base platform in the X and Y axes through the X-axis drive module and the Y-axis drive module, respectively. The micro-motion module realizes the adjustment of the base platform in the Z, Rx, and Ry axes, as well as the adjustment in the Rz axis, and the loading and unloading of the base platform through the vertical drive module, the rotary drive module, and the transfer module, respectively, thereby realizing six-degree-of-freedom control of the motion stage.
[0007] Preferably, the base is a marble platform or other structural component that provides support.
[0008] Preferably, the air flotation module provides air flotation support between the macro-motion module and the base.
[0009] Preferably, the X-axis drive module has two parallel motors arranged in the X-axis direction, and the Y-axis drive module has one parallel motor arranged in the Y-axis direction; in this way, movement in the X and Y directions can be achieved through the parallel motors.
[0010] Preferably, the base of the micro-motion module is connected to the vertical drive module and the air flotation intermediate component of the air flotation module at the top and bottom, respectively, and the vertical drive module is located between the base and the base platform.
[0011] Preferably, the vertical drive module includes a vertical motor drive assembly and a transmission assembly. The transmission assembly is connected to the base stage. The vertical drive module of the micro-motion module can adjust the base stage in the Z, Rx, and Ry directions. In this way, the base stage can be driven to move in the Z, Rx, and Ry directions by the vertical motor drive assembly and the transmission assembly, thereby achieving the adjustment effect in the corresponding directions.
[0012] Preferably, the rotary drive module includes a rotary drive component and a rotary table. The rotary drive module is located between the base and the base platform. The rotary drive module of the micro-motion module can realize the adjustment of the base platform in the Rz direction. In this way, the base platform can be driven to move in the Rz direction by the rotary drive component and the rotary table, thereby achieving the adjustment effect in the corresponding direction.
[0013] Preferably, the transfer module includes a transfer drive mechanism and a transfer motion mechanism. The transfer module of the micro-motion module realizes the loading and unloading of the base stage. In this way, the base stage can be driven to move in the vertical direction by the transfer drive mechanism and the transfer motion mechanism, thereby realizing the loading and unloading of the base stage.
[0014] Compared with the prior art, this utility model provides a six-degree-of-freedom precision motion stage, which has the following advantages:
[0015] 1. A six-degree-of-freedom precision motion stage, which, by setting up a macro-motion module, a micro-motion module and an air-bearing module, realizes the movement of the base stage in the X and Y directions through the macro-motion module, and realizes the adjustment of the base stage in the Z, Rx and Ry directions and the Rz direction, as well as the loading and unloading of the base stage through the micro-motion module, thereby realizing the six-degree-of-freedom control of the motion stage.
[0016] 2. A six-degree-of-freedom precision motion stage, by setting a micro-motion module, the micro-motion structure proposed in this utility model solves the problem of poor stability caused by voice coil motor drive, and can meet the large stroke requirements of the micro-motion stage, and the cost is relatively low. While meeting the functional performance of the product, it greatly reduces the development difficulty and cost output. Attached Figure Description
[0017] Figure 1This is a schematic diagram of the overall structure of a six-degree-of-freedom precision motion stage proposed in this utility model;
[0018] Figure 2 This is a schematic diagram of the installation structure of the vertical drive module of a six-degree-of-freedom precision motion stage proposed in this utility model.
[0019] Figure 3 This is a schematic diagram of the installation structure of the air-bearing intermediate component of a six-degree-of-freedom precision motion stage proposed in this utility model.
[0020] Figure 4 This is a side view of the base and base platform of a six-degree-of-freedom precision motion stage proposed in this utility model.
[0021] Figure 5 This is a schematic diagram of the handover module structure of a six-degree-of-freedom precision motion stage proposed in this utility model.
[0022] In the diagram: 1. Base; 2. X-axis drive module; 3. Y-axis drive module; 4. Base; 5. Vertical drive module; 6. Rotation drive module; 7. Transfer module; 8. Left air flotation component; 9. Right air flotation component; 10. Middle air flotation component; 11. Micro-motion stage; 12. Base suction cup. Detailed Implementation
[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0024] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0025] Reference Figures 1-5 A six-degree-of-freedom precision motion stage includes a base 1, a macro-motion module, a micro-motion module, an air-bearing module, and a base stage. The macro-motion module includes an X-axis drive module 2 and a Y-axis drive module 3. The micro-motion module includes a base 4, a vertical drive module 5, a rotary drive module 6, and a transfer module 7. The air-bearing module includes a left air-bearing component 8, a right air-bearing component 9, and a middle air-bearing component 10. The base stage includes a micro-motion stage 11 and a base suction cup 12.
[0026] It should be noted that the macro-motion module realizes the movement of the base stage in the X and Y directions through the X-direction drive module 2 and the Y-direction drive module 3, respectively. The micro-motion module realizes the adjustment of the base stage in the Z, Rx and Ry directions and the Rz direction, as well as the loading and unloading of the base stage, through the vertical drive module 5, the rotation drive module 6 and the transfer module 7, respectively, thereby realizing the six-degree-of-freedom control of the motion stage.
[0027] Among them, base 1 is a marble platform or other structural component that provides support.
[0028] Among them, the air flotation module realizes the air flotation support between the macro-motion module and the base 1.
[0029] Among them, the X-direction drive module 2 has two parallel motors in the X direction, and the Y-direction drive module 3 has one parallel motor in the Y direction.
[0030] It should be noted that this allows for movement in both the X and Y directions using a parallel motor.
[0031] The micro-motion module's base 4 is connected to the vertical drive module 5 and the air flotation intermediate component 10 of the air flotation module, respectively, with the vertical drive module 5 located between the base 4 and the base platform.
[0032] The vertical drive module 5 includes a vertical motor drive assembly and a transmission assembly. The transmission assembly is connected to the base stage. The vertical drive module 5 of the micro-motion module can adjust the base stage in the Z, Rx and Ry directions.
[0033] It should be noted that this allows the base stage to be moved in the Z, Rx, and Ry directions via the vertical motor drive assembly and transmission assembly, thereby achieving the adjustment effect in the corresponding directions.
[0034] The rotary drive module 6 includes a rotary drive assembly and a rotary table. The rotary drive module 6 is located between the base 4 and the base stage. The rotary drive module 6 of the micro-motion module can realize the adjustment of the base stage in the Rz direction.
[0035] It should be noted that this allows the base stage to be moved upwards in the Rz direction by the rotary drive assembly and the rotary table, thereby achieving the adjustment effect in the corresponding direction.
[0036] The handover module 7 includes a handover drive mechanism and a handover motion mechanism. The handover module 7 of the micro-motion module realizes the loading and downloading of the base stage.
[0037] It should be noted that this allows the base station to move vertically via the transfer drive mechanism and the transfer motion mechanism, thereby enabling the base station to be loaded and unloaded.
[0038] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A six-degree-of-freedom precision motion stage comprising a base (1), a macro-motion module, a micro-motion module, an air-floating module and a base table, characterized in that, The macro-motion module comprises an X-direction driving module (2) and a Y-direction driving module (3), the micro-motion module comprises a base (4), a vertical driving module (5), a rotary driving module (6) and an interface module (7), the air-floating module comprises an air-floating left-side assembly (8), an air-floating right-side assembly (9) and an air-floating middle assembly (10), and the base table comprises a micro-motion table (11) and a base chuck (12).
2. The six-degree-of-freedom precision stage of claim 1, wherein, The base (1) is a marble platform for supporting.
3. The six-degree-of-freedom precision stage of claim 1, wherein, The air-floating module realizes air-floating support between the macro-motion module and the base (1).
4. The six-degree-of-freedom precision stage of claim 1, wherein, The X-direction driving module (2) is provided with two parallel motors in the X direction, and the Y-direction driving module (3) is provided with one parallel motor in the Y direction.
5. The six-degree-of-freedom precision stage of claim 1, wherein, The base (4) of the micro-motion module is connected with the vertical driving module (5) and the air-floating middle assembly (10) of the air-floating module respectively.
6. The six-degree-of-freedom precision stage of claim 5, wherein, The vertical driving module (5) comprises a vertical motor driving assembly and a transmission assembly, the transmission assembly is connected with the base table, and the vertical driving module (5) of the micro-motion module can adjust the base table in the Z direction, the Rx direction and the Ry direction.
7. The six-degree-of-freedom precision stage of claim 1, wherein, The rotary driving module (6) comprises a rotary driving assembly and a rotary table, the rotary driving module (6) is located between the base (4) and the base table, and the rotary driving module (6) of the micro-motion module can realize adjustment of the base table in the Rz direction.
8. The six-degree-of-freedom precision stage of claim 1, wherein, The interface module (7) comprises an interface driving mechanism and an interface motion mechanism, and the interface module (7) of the micro-motion module realizes uploading and downloading of the base table.