Cleaning bracket and furnace tube cleaning machine with same

Abstract

The utility model provides a cleaning bracket and a furnace tube cleaning machine with the same, the cleaning bracket comprises a support beam, a bracket, a cleaning frame and a first positioning pin, a connecting frame is arranged below the support beam, the connecting frame can move along the support beam, and the first positioning pin is arranged on the bracket. The bracket is arranged at the end, away from the supporting cross beam, of the connecting frame, the cleaning frame is arranged on the bracket, and the first positioning pin is arranged on the bracket and located on the side, away from the connecting frame, of the cleaning frame, so that the cleaning frame abuts against the connecting frame. The furnace tube cleaning machine has the advantages that the cleaning bracket can be used for cleaning furnace tubes and quartz boat jigs, multiple purposes are achieved, the compatibility of the furnace tube cleaning machine is improved, the utilization rate of equipment is improved, the cleaning cost is saved, manual work is replaced, automatic cleaning of the quartz boat jigs is achieved, the cleaning difficulty is reduced, and the production efficiency is improved. The working efficiency is improved, the cleaning effect is guaranteed, and potential safety hazards are reduced.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and in particular relates to a cleaning tray and a furnace tube cleaning machine equipped with the cleaning tray. Background Technology

[0002] The diffusion furnace is a crucial piece of equipment in a semiconductor silicon wafer production line. To improve the quality of semiconductor silicon wafers, the furnace tubes, made of quartz, need to be cleaned. During cleaning, the furnace tube is placed on a cleaning tray of a furnace tube cleaning machine, and a robotic arm moves the tray to a chemical cleaning tank. After a set time, it is moved to a water rinsing tank for further cleaning. The cleaning tray can only be used for placing and cleaning the furnace tube. During diffusion, the semiconductor silicon wafers are typically placed on quartz boat fixtures. To ensure effective diffusion, the quartz boat fixtures need to be periodically scrapped. However, to save costs, current technology uses cleaning to periodically clean the quartz boat fixtures. Since the cleaning tray cannot hold the quartz boat fixtures, they are usually manually placed in the chemical cleaning tank of the furnace tube cleaning machine and then manually moved to the water rinsing tank. This process is difficult, inefficient, and poses safety hazards. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a cleaning bracket and a furnace tube cleaning machine equipped with the cleaning bracket, which effectively solves the technical problems of low work efficiency and safety hazards in manual cleaning of quartz boat fixtures, and overcomes the shortcomings of the prior art.

[0004] The technical solution adopted by this utility model is: a cleaning tray, comprising:

[0005] A supporting beam is provided, and a connecting frame is provided below it. The connecting frame can move along the supporting beam.

[0006] A bracket is disposed at the end of the connecting frame away from the supporting crossbeam;

[0007] A cleaning frame is mounted on the bracket;

[0008] A first positioning pin is provided on the bracket, located on the side of the cleaning frame away from the connecting frame, so that the cleaning frame abuts against the connecting frame.

[0009] Furthermore, the bracket is provided with an elongated hole, and the first positioning pin can move along the elongated hole, moving closer to or away from the connecting frame.

[0010] Furthermore, the top of the connecting frame is sleeved on the supporting beam and is fitted with the supporting beam with a clearance. The top of the connecting frame is provided with a second positioning pin, which passes through the connecting frame and abuts against the supporting beam.

[0011] Furthermore, each end of the supporting beam is provided with a connecting arm, and each connecting arm is provided with a drive screw, which can drive the connecting arm to move up and down respectively.

[0012] Furthermore, the drive screw is mounted on a support frame, and the support frame is arranged parallel to the screw.

[0013] Furthermore, a limiting plate is provided on the support frame along the moving direction of the connecting arm.

[0014] Furthermore, a connecting crossbeam is provided between the support frames, and a first drive motor is provided on the connecting crossbeam for driving the lead screw to rotate.

[0015] Furthermore, the bottom of the connecting crossbeam is provided with a rack, which is arranged perpendicular to the connecting crossbeam, and the connecting crossbeam can move horizontally along the rack.

[0016] Furthermore, a second drive motor is provided on the connecting crossbeam, and a drive gear is connected to the second drive motor, the drive gear meshing with the rack.

[0017] This utility model also provides a furnace tube cleaning machine, which is equipped with the cleaning bracket described above.

[0018] The advantages and positive effects of this utility model are as follows: By adopting the above technical solution, the cleaning bracket can clean both furnace tubes and quartz boat fixtures, achieving multiple uses in one machine, improving the compatibility of the furnace tube cleaning machine, increasing the utilization rate of the equipment, saving cleaning costs, replacing manual labor to realize automated cleaning of quartz boat fixtures, reducing cleaning difficulty, improving work efficiency, ensuring cleaning effect, and reducing safety hazards. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of a cleaning bracket structure according to an embodiment of the present invention.

[0020] Figure 2 This is a schematic diagram of the connection between the cleaning bracket connecting frame and the supporting crossbeam according to an embodiment of this utility model.

[0021] Figure 3 This is a left view of a cleaning bracket structure according to an embodiment of this utility model.

[0022] In the picture:

[0023] 1. Support beam 2. Connecting frame 3. Bracket

[0024] 4. Cleaning frame; 5. First positioning pin; 6. Long strip hole

[0025] 7. Second locating pin; 8. Bending part; 9. Fixing block

[0026] 10. Connecting arm; 11. Clamping block; 12. Drive screw

[0027] 13. Support frame; 14. Fixing plate; 15. Slider

[0028] 16. Upper limit plate; 17. Lower limit plate; 18. Connecting crossbar.

[0029] 19. First drive motor; 20. First transmission shaft; 21. Vertical gear

[0030] 22. Horizontal gear; 23. First transmission chain; 24. Rack and pinion.

[0031] 25. Long through hole; 26. Second drive motor; 27. Drive gear

[0032] 28. Second drive shaft; 29. ​​Second drive chain; 30. Medicine tank.

[0033] 31. Washing tank Detailed Implementation

[0034] This utility model provides a cleaning bracket and a furnace tube cleaning machine equipped with the cleaning bracket. The embodiments of this utility model will be described below with reference to the accompanying drawings.

[0035] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0036] like Figure 1 and Figure 2As shown, an embodiment of this utility model provides a cleaning bracket, including a supporting beam 1, a bracket 3, and a cleaning frame 4. A vertically arranged connecting frame 2 is provided below the supporting beam 1, and the connecting frame 2 can move along the supporting beam 1. The bracket 3 is located at the end of the connecting frame 2 away from the supporting beam 1. Preferably, the vertically arranged connecting frame 2 and bracket 3 are L-shaped, and can be integrally arranged or separately fixedly connected. At least two pairs of connecting frames 2 and brackets 3 are provided. The cleaning frame 4 is disposed on the bracket 3. A first positioning pin 5 is disposed on the bracket 3, located on the side of the cleaning frame 4 away from the connecting frame 2, so that the cleaning frame 4 abuts against the connecting frame 2. Preferably, the cleaning frame 4 is divided into multiple cleaning compartments, each of which can hold a quartz boat fixture, allowing multiple quartz boat fixtures to be cleaned simultaneously. Preferably, the supporting beam 1, connecting frame 2, and bracket 3 are configured as a double-layer structure, with an inner metal component and an outer metal isolation layer. The material of the metal isolation layer is not limited, as long as it does not affect the performance of the parts to be cleaned. Preferably, the metal isolation layer is made of PVC material. The cleaning frame 4 is made of PVC. For easy soaking and cleaning, the cleaning frame 4 has a frame structure with a mesh bottom. When cleaning the furnace tube, remove the cleaning frame 4 from the bracket 3 and place the furnace tube directly on the bracket 3. Use the first positioning pin 5 to hold the furnace tube against the connecting frame 2. When cleaning the quartz boat fixture, place multiple quartz boat fixtures in the cleaning compartments of the cleaning frame 4, place the entire cleaning frame 4 on the bracket 3, and use the first positioning pin 5 to hold the cleaning frame 4 against the connecting frame 2. The position of the connecting frame 2 on the supporting beam 1 can be adjusted according to the length of the furnace tube or the cleaning frame 4.

[0037] Preferably, the bracket 3 has an elongated hole 6, and the first positioning pin 5 can move along the elongated hole 6, moving closer to or away from the connecting frame 2. Preferably, the first positioning pin 5 is a positioning bolt made of PVC material. The first positioning pin 5 is set through the elongated hole 6. By adjusting the position of the first positioning pin 5 on the elongated hole 6, furnace tubes of different diameters and cleaning frames 4 of different widths can be positioned.

[0038] Preferably, the top of the connecting frame 2 is fitted onto the supporting beam 1 with a clearance fit. The top of the connecting frame 2 is provided with a second positioning pin 7, which passes through the connecting frame 2 and abuts against the supporting beam 1. In this embodiment, the top of the connecting frame 2 is provided with a bent portion 8, which is located on the top of the supporting beam 1. A fixing block 9 is provided at the bottom of the supporting beam 1 opposite to the bent portion 8. The bent portion 8 and the fixing block 9 are bolted together, fitted onto the outside of the supporting beam 1 with a clearance fit, allowing the connecting frame 2 to move along the supporting beam 1 according to the length of the furnace tube or cleaning frame 4. A second positioning pin 7 is threadedly connected above the bent portion 8, passing through the bent portion 8 and abutting against the supporting beam 1. The second positioning pin 7 is a positioning bolt made of PVC.

[0039] Specifically, such as Figure 3 As shown, both ends of the supporting beam 1 are equipped with connecting arms 10, and each connecting arm 10 is equipped with a drive screw 12, which can drive the connecting arm 10 to move up and down respectively. The connecting arm 10 is vertically arranged, and a clamping block 11 is fixed at the bottom. The clamping block 11 is fixedly connected to the supporting beam 1 by bolts. The top of the connecting arm 10 is connected to the slider 15 on the drive screw 12.

[0040] Specifically, such as Figure 1 and Figure 3 As shown, the drive screw 12 is mounted on the support frame 13 and is arranged parallel to the support frame 13. In this embodiment, a fixed plate 14 is provided at the top of the support beam 1, and the connecting arm 10 passes vertically through the fixed plate 14. The vertically arranged support frame 13 is mounted on the fixed plate 14, and the drive screw 12 is arranged parallel to the support frame 13 and rotatably connected to the support frame 13. A slider 15 is provided on the drive screw 12, and the slider 15 is connected to the top of the connecting arm 10. The rotation of the drive screw 12 drives the slider 15 to move up and down, thereby driving the connecting arm 10 to move up and down.

[0041] Preferably, the support frame 13 is provided with a limiting plate along the moving direction of the connecting arm 10, including an upper limiting plate 16 and a lower limiting plate 17. The upper limiting plate 16 is fixed to the upper part of the support frame 13, and the lower limiting plate 17 is fixed to the lower part of the support frame 13. When the slider 15 rises to the upper limiting plate 16, the bottom of the upper limiting plate 16 can abut against the top of the slider 15 for positioning. When the slider 15 falls to the lower limiting plate 17, the top of the lower limiting plate 17 can abut against the bottom of the slider 15 for positioning.

[0042] Specifically, a connecting crossbeam 18 is provided between the support frames 13, and a first drive motor 19 is provided on the connecting crossbeam 18 to drive the drive screw 12 to rotate. In this embodiment, a horizontal connecting crossbeam 18 is fixed between the two support frames 13, and the first drive motor 19 is fixed on the connecting crossbeam 18. A horizontal first transmission shaft 20 is provided above the connecting crossbeam 18, and the first transmission shaft 20 is rotatably connected to the top of the support frame 13. Vertical gears 21 are fixed at both ends of the first transmission shaft 20, and a horizontal gear 22 is connected to the top of the drive screw 12. The vertical gears 21 and the horizontal gears 22 mesh. The first drive motor 19 is connected to the first transmission shaft 20 through a first transmission chain 23, driving the first transmission shaft 20 to rotate. The first transmission shaft 20 drives the vertical gears 21 at both ends to rotate, and the vertical gears 21 drive the horizontal gears 22 to rotate, thereby driving the drive screw 12 to rotate.

[0043] Specifically, the bottom of the connecting crossbeam 18 is provided with a rack 24, which is perpendicular to the connecting crossbeam 18, allowing the connecting crossbeam 18 to move horizontally along the rack 24. In this embodiment, two parallel racks 24 are provided, respectively positioned near the two support frames 13, and the racks 24 are horizontally fixed to the fixing plate 14, perpendicular to the connecting crossbeam 18. A long through hole 25 is provided on the fixing plate 14, parallel to the racks 24, through which the connecting arm 10 passes. The connecting crossbeam 18 can move horizontally along the racks 24, thereby causing the connecting arm 10 to move horizontally along the long through hole 25.

[0044] Specifically, a second drive motor 26 is mounted on the connecting crossbeam 18, and a drive gear 27 is mounted on the second drive motor 26, which meshes externally with the rack 24. In this embodiment, a second transmission shaft 28 is rotatably connected to the bottom of the connecting crossbeam 18, and the drive gear 27 is fixed on the second transmission shaft 28 relative to the rack 24, meshing externally with the rack 24. The second drive motor 26 is fixed on the connecting crossbeam 18, and a second transmission chain 29 is connected to the output end of the second drive motor 26, passing through the connecting crossbeam 18 and connecting to the second transmission shaft 28. The second drive motor 26 drives the second transmission shaft 28 to rotate via the second transmission chain 29, and the second transmission shaft 28 drives the drive gear 27 to move along the rack 24, thereby causing the connecting arm 10 to move horizontally along the elongated through hole 25.

[0045] A furnace tube cleaning machine includes a chemical solution tank 30 and a water washing tank 31. A cleaning bracket, as described above, is provided above the chemical solution tank 30 and the water washing tank 31. The position of the connecting bracket 2 on the supporting beam 1 is adjusted according to the length of the furnace tube and the cleaning frame 4, and is positioned using a second positioning pin 7. When cleaning the furnace tube, the furnace tube is placed directly on the bracket 3 and positioned using a first positioning pin 5. When cleaning quartz boat fixtures, multiple quartz boat fixtures are placed in the cleaning compartments within the cleaning frame 4, and then the cleaning frame 4 is placed on the bracket 3 and positioned using the first positioning pin 5. After the workpiece to be cleaned is fixed on the bracket 3, the first drive motor 19 drives the first drive shaft 20 to rotate via the first transmission chain 23. The first drive shaft 20 drives the vertical gears 21 at both ends to rotate, and the vertical gears 21 drive the horizontal gears 22 to rotate, thereby driving the drive screw 12 to rotate. The slider 15 drives the connecting arm 10 to move downwards, placing the workpiece to be cleaned into the chemical solution tank 30 for immersion. After soaking, the first drive motor 19 drives the connecting arm 10 to move upward, moving the part to be cleaned above the solution tank 30. During the up-and-down movement of the connecting arm 10, the upper limit plate 16 and the lower limit plate 17 limit its movement. Then, the second drive motor 26 drives the second drive shaft 28 to rotate via the second transmission chain 29. The second drive shaft 28 drives the drive gear 27 to move along the rack 24, thereby causing the connecting arm 10 to move horizontally along the elongated through hole 25, moving the part to be cleaned horizontally above the cleaning tank. The first drive motor 19 then drives the connecting arm 10 to move downward, placing the part to be cleaned into the cleaning tank to complete the cleaning process.

[0046] The advantages and positive effects of this utility model are:

[0047] 1. By setting up a cleaning frame and a first positioning pin, the cleaning bracket can be used for both cleaning furnace tubes and cleaning quartz boat fixtures, achieving multiple uses in one machine, improving the compatibility of the furnace tube cleaning machine, increasing the utilization rate of the equipment, and saving cleaning costs.

[0048] 2. It replaces manual labor, realizes automated cleaning of quartz boat fixtures, reduces cleaning difficulty, improves work efficiency, ensures cleaning effect, and reduces safety hazards.

[0049] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A cleaning carriage, characterized in that, The utility model relates to a cleaning frame, comprising: a support beam, which is provided with a connecting frame below, the connecting frame can move along the support beam; a bracket, which is arranged at one end of the connecting frame away from the support beam; a cleaning frame, which is arranged on the bracket; a first positioning pin, which is arranged on the bracket and located at the side of the cleaning frame away from the connecting frame, so that the cleaning frame is abutted with the connecting frame.

2. A cleaning carriage according to claim 1, wherein: The bracket is provided with a long hole, and the first positioning pin can move along the long hole to approach or move away from the connecting frame.

3. A cleaning carriage according to claim 1 or 2, characterised in that: The top of the connecting frame is sleeved on the support beam and is in gap cooperation with the support beam, and the top of the connecting frame is provided with a second positioning pin, which is abutted with the support beam through the connecting frame.

4. A cleaning carriage according to claim 3, wherein: Both ends of the support beam are provided with connecting arms, and the connecting arms are provided with driving lead screws, which can drive the connecting arms to move up and down respectively.

5. A cleaning carriage according to claim 4, wherein: The driving lead screw is arranged on a support frame, and the support frame is arranged in parallel with the lead screw.

6. A cleaning carriage according to claim 5, wherein: The support frame is provided with a limiting plate along the moving direction of the connecting arm.

7. A cleaning carriage according to claim 5 or 6, characterised in that: Connecting cross frames are arranged between the support frames, and the connecting cross frames are provided with first driving motors for driving the lead screws to rotate.

8. A cleaning carriage according to claim 7, wherein: The bottom of the connecting cross frame is provided with a rack, and the rack is arranged perpendicularly to the connecting cross frame, and the connecting cross frame can move horizontally along the rack.

9. A cleaning carriage according to claim 8, wherein: The connecting cross frame is provided with a second driving motor, and the second driving motor is connected with a driving gear, and the driving gear is externally engaged with the rack.

10. A furnace tube cleaning machine characterized by: The cleaning frame is provided with the cleaning bracket as claimed in any one of claims 1-9.

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