Product cut-off machine

Abstract

The utility model discloses a product cut-off machine which comprises a machine base with an electrical module, a wafer brush sponge to be cut off is installed on the machine base through a rotating mechanism, the rotating mechanism drives the wafer brush sponge to rotate around a shaft, a recycling box is arranged below the installation position of the wafer brush sponge, and a rotary cutter is installed on the machine base through a rotary cutting mechanism. The rotary cutting mechanism drives the rotary cutter to rotate, and the rotating range of the rotary cutter coincides with the autorotation range of the wafer brush sponge. The round crystal brush sponge is driven by the motor to rotate and is matched with the rotary cutter rotating in the reverse direction to cut off, and finally the round crystal brush sponge falls into the recycling box. The circular crystal brush sponges of different sizes can be conveniently installed and positioned through the link design of rotating the joint pipe, the rotary cutter is adjusted in cooperation with the rotary cutting rod with scale marks, and the cutting-off precision is better; the two ends of the wafer brush sponge are installed in an adjustable three-point positioning mode and a bolt clamping mode, and the installation is scientific and reasonable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a product cutting machine. Background Technology

[0002] Wafer cleaning is a crucial step in semiconductor manufacturing, aiming to remove various contaminants from the wafer surface to ensure subsequent processing steps can be performed on a clean surface. As semiconductor device dimensions continue to shrink and precision requirements increase, the technical demands of wafer cleaning processes are becoming increasingly stringent. Even the smallest particles, organic matter, metal ions, or oxide residues on the wafer surface can significantly impact device performance, thereby affecting semiconductor device yield and reliability.

[0003] Wafer cleaning mainly includes the following steps: chemical dosing and soaking, spraying and brushing, rinsing and washing, and drying. Chemical dosing and soaking: Specific chemical agents, such as acidic hydrogen peroxide and ammonium hydroxide solutions, are added to the cleaning tank. These chemicals react with contaminants on the wafer surface, loosening and partially dissolving them. Spraying and brushing: In a high-pressure spraying system, high-pressure nozzles evenly spray the cleaning solution onto the wafer surface, removing attached contaminants through a combination of mechanical force and chemical action. In a brushing system, brushes rotate, working in conjunction with the cleaning solution to scrub the wafer surface. The chemical components in the cleaning solution react with the contaminants, and the brushes carry the loosened solid contaminants away from the wafer, further removing stubborn contaminants. Rinsing and washing: The wafer is rinsed in a rinsing tank to remove residual cleaning solution and dissolved contaminants, followed by washing to ensure a thorough cleaning of the wafer surface. Drying: The wafer surface is rapidly dried in a drying chamber using hot air or infrared radiation to prevent water stains and effectively remove static electricity from the wafer surface, reducing dust adsorption in subsequent processes.

[0004] During the cleaning process, a wafer cleaning brush is used. This brush is typically a roller brush, which cleans the wafer surface by rotating. The wafer cleaning brush mainly consists of a core rod and an outer brush sponge. The core rod has mounting clips at both ends and washers at the ends. The area between the washers is the mounting rod, whose diameter is smaller than the washers. The outer brush sponge consists of a basic flexible sponge sleeve and irregular protrusions on the sleeve. The outer brush sponge needs to be durable, wear-resistant, and appropriately sized to avoid frequent replacements or excessive wear that could hinder cleaning. It also prevents the sponge from falling off or causing unnecessary wear due to size mismatch with the core rod. The core rod must be straight to prevent the outer brush from over-contacting or failing to contact the designated area. Over-contact can damage the wafer, while under-contact will affect the cleaning effect and product quality. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a product cutting machine to solve one or more of the above-mentioned problems.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] The product cutting machine includes a base with an electrical module. A circular crystal brush sponge to be cut is mounted on the base via a rotating mechanism. The rotating mechanism drives the circular crystal brush sponge to rotate around an axis. A recycling box is provided below the mounting position of the circular crystal brush sponge. A rotary cutting blade is mounted on the base via a rotary cutting mechanism. The rotary cutting mechanism drives the rotary cutting blade to rotate. The rotation range of the rotary cutting blade overlaps with the rotation range of the circular crystal brush sponge.

[0008] Furthermore, the rotating mechanism includes two rotating seats and a transition seat. A rotating motor is provided on one end of the rotating seat, and a three-point locking plate is provided on the other end of the rotating seat. The transition seat is located close to the rotating seat with the rotating motor. A coupling is provided between the transition seat and the rotating seat on that side. A clamping end is provided on the transition seat, and a rotating joint tube is inserted through the clamping end. The rotating motor, the coupling, the clamping end, the rotating joint tube, and the three-point locking plate are connected in sequence.

[0009] Furthermore, the rotating tube is divided into multiple continuous tube sections with links, and the circular crystal brush sponge is sleeved between the corresponding links on the rotating tube, with both ends of the circular crystal brush sponge being abutted by the corresponding links.

[0010] Furthermore, one end of the clamping end is a grooved disc structure, and the other end is a through-hole circular tube structure. The outer side of the circular tube structure has a through-hole clamping opening, and a tightening bolt is inserted through the circular tube structure. One end of the rotating section tube extends into the circular tube structure, and the tightening bolt presses against the end of the rotating section tube.

[0011] Furthermore, the top of the three-point card holder has a notch, and the top of the three-point card holder is also connected to a longitudinally opening and closing upper block via a hinge. The upper block has a top round block on its side, and the three-point card holder has multiple mounting holes on its side. Two horizontally aligned bottom round blocks are provided in the mounting holes, and the distance between the two bottom round blocks and the top round block is adjusted by inserting them into different mounting holes.

[0012] Furthermore, the rotary cutting mechanism includes two rotary cutting seats and a rotary cutting rod with scale lines. The rotary cutting rod is mounted to the two rotary cutting seats by bearings and extends out of the transparent cover of the machine base.

[0013] Furthermore, the end of the rotary cutting rod extending out of the transparent cover of the machine base is provided with a rotary disk or connected to an external motor.

[0014] Furthermore, the blade handle seat of the rotary cutter has an opening at its end, and a through clamping hole is provided on the side of the blade handle seat. The blade handle seat is movably engaged with the rotary cutter rod through the opening and is clamped by bolts.

[0015] In summary, this utility model has the following beneficial effects: the motor drives the circular crystal brush sponge to rotate, which, in conjunction with the counter-rotating rotary cutter, cuts the sponge and ultimately drops it into the recycling box; the rotating tube design facilitates the installation and positioning of circular crystal brush sponges of different sizes, and the rotary cutter, with its graduated rod, allows for better cutting accuracy; the two ends of the circular crystal brush sponge are installed using an adjustable three-point positioning method and a bolt clamping method, which is scientific and reasonable. Attached Figure Description

[0016] Figure 1 A schematic diagram of the overall structure of one embodiment of this utility model;

[0017] Figure 2 A schematic diagram of the main structure (left) in one embodiment of this utility model;

[0018] Figure 3 This is a schematic diagram of the main structure (right) in one embodiment of the present invention.

[0019] In the diagram: 10. Base; 20. Rotating mechanism; 21. Rotating seat; 22. Transition seat; 23. Rotating motor; 24. Coupling; 25. Clamping end; 26. Rotating tube; 27. Tightening bolt; 30. Circular brush sponge; 40. Recycling box; 50. Rotary cutting mechanism; 51. Rotary cutting seat; 52. Rotary cutting rod; 60. Rotary cutting blade; 61. Blade handle seat; 70. Three-point locking plate; 71. Hinge; 72. Upper top block; 73. Top round block; 74. Bottom round block. Detailed Implementation

[0020] Example:

[0021] The following is in conjunction with the appendix Figure 1-3 The present invention will be described in further detail below.

[0022] Product cutting machine, such as Figure 1As shown, the main body is an automated equipment base 10 with an electrical module. The working area of ​​the base 10 is enclosed by a transparent cover. At the center of the working area are a rotating mechanism 20, a collection box 40, a rotary cutting mechanism 50, a rotary cutting blade 60, and a circular crystal brush sponge 30. The electrical module provides power and PLC control for the rotating mechanism 20 and the rotary cutting mechanism 50. The circular crystal brush sponge 30 to be cut is placed on the rotating mechanism 20. A removable collection box 40 is located directly below the circular crystal brush sponge 30 for temporary storage. A rotary cutting mechanism 50 with a rotary cutting blade 60 is located directly in front of the circular crystal brush sponge 30. The rotary cutting mechanism 50 drives the rotary cutting blade 60 to rotate in the opposite direction to the circular crystal brush sponge 30. The rotation range of the rotary cutting blade 60 overlaps with the rotation range of the circular crystal brush sponge 30, which is the basis for cutting.

[0023] like Figure 2 and Figure 3 As shown, the rotating mechanism 20 consists of two symmetrically arranged rotating seats 21. An additional transition seat 22 is provided on the right side of the left rotating seat 21. The mounting axes of the three base seats must coincide. A rotating motor 23 is located at the left end of the left rotating seat 21, with its output shaft extending to the right through the rotating seat 21. A coupling 24 is located at the left end of the transition seat 22, connecting to the output shaft of the rotating motor 23. A clamping end 25, which connects to the coupling 24, is located at the right end of the transition seat 22, through which a right-hand rotating section tube 26 is inserted. A three-point clamping plate 70 is located at the left end of the right rotating seat 21, adjusting and clamping the right end of the rotating section tube 26 as needed. The rotating section tube 26 is integrally formed from multiple continuous, segmented tube sections. Each segment can be understood as a ring-shaped component outside the tube body. The rotating section tube 26 comes in different diameter models, each matching a corresponding circular crystal brush sponge 30. The circular brush sponge 30 is fitted within the cutting area of ​​the rotating tube 26, specifically within the area where the rotating tube 26 corresponds to the left and right sliding adjustment of the rotary cutter 60. Both ends of the circular brush sponge 30 are held in place by corresponding links, preventing it from shifting during cutting. The left side of the clamping end 25 has a grooved disc structure, designed to allow for better and faster installation into the mounting area of ​​the transition seat 22. The right side of the clamping end 25 has a through-hole circular tube structure for easy connection to the end of the rotating tube 26. For ease of installation, the outer surface of this circular tube structure has a through-hole for clamping. Additionally, the circular tube structure has threaded holes through which tightening bolts 27 are inserted. When one end of the rotating tube 26 is installed into the circular tube structure of the clamping end 25, the tightening bolts 27 are rotated to secure the rotating tube 26.

[0024] like Figure 3As shown, the three-point clamping plate 70 refers to the three circular blocks installed on it that can clamp and position the end of the rotating joint tube 26. The three-point clamping plate 70 has a notch at the top, and a vertically opening and closing top block 72 is installed at the front end via a hinge 71. The top block 72 and the rear end of the three-point clamping plate 70 are respectively equipped with fixing devices to strengthen their connection. A fixed top circular block 73 is provided on the left side of the top block 72, and two rows of mounting holes are opened on the left side of the three-point clamping plate 70. Bottom circular blocks 74 are simultaneously inserted into the two mounting holes at the same horizontal height. This forms a three-point fixed end structure with one top circular block 73 and two bottom circular blocks 74, and this structure can be adjusted according to the size of the rotating joint tube 26.

[0025] like Figure 2 and Figure 3 As shown, the rotary cutting mechanism 50 consists of two symmetrically arranged rotary cutting seats 51 and a rotary cutting rod 52 with graduated lines on its top. The top of the rotary cutting rod 52 can have a certain flatness to facilitate reading the graduations. The corresponding rotary cutting is made by modifying the notch of the blade holder 61 that is attached to it. The axes of the two rotary cutting seats 51 are coincident, and the rotary cutting rod 52 is connected to the two rotary cutting seats 51 through bearings. The right end of the rotary cutting rod 52 passes through the transparent cover of the machine base 10 and is connected to an external motor or directly mounted on a rotary disc for manual rotation. Because the rotary mechanism 20 has already ensured the most basic rotational momentum, the rotary cutting blade 60 can complete the cutting operation even if it remains stationary. The manual rotation method is only to ensure that the rotary cutting blade 60 is removed in the initial and final stages, and to ensure that the circular crystal brush sponge 30 is cut during the cutting process. The blade holder 61 of the rotary cutter 60 has an opening at its end, and the front and rear ends of the blade holder 61 have through clamping holes for installing bolts to clamp and fix the blade holder 61. The blade holder 61 can slide left and right along the rotary cutting rod 52 to ensure that the rotary cutter 60 cuts at the appropriate position and cuts out segments of the appropriate size.

[0026] Reverse the rotary cutting rod 52, remove the rotary cutting blade 60 so that it is out of the range of motion of the rotating tube 26, start the rotating motor 23, and drive the circular crystal brush sponge 30 to be cut and installed on the rotating tube 26 to rotate through the coupling 24, the clamping end 25 and the rotating tube 26 in sequence. Rotate the rotary cutting rod 52 in the forward direction, and the rotary cutting blade 60 enters the rotation range of the rotating tube 26 and begins to cut until different segments are separated. Reverse the rotary cutting rod 52 again, take out the cut circular crystal brush sponge 30 and return it to the equipment.

[0027] It should be noted that this specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. Product cutting machine comprising a base (10) with an electric module, characterized in that: The machine base (10) is provided with a round crystal brush sponge (30) to be cut off through a rotating mechanism (20), the rotating mechanism (20) drives the round crystal brush sponge (30) to rotate around the shaft, a recycling box (40) is arranged below the mounting position of the round crystal brush sponge (30), the machine base (10) is provided with a rotary cutting knife (60) through a rotary cutting mechanism (50), the rotary cutting mechanism (50) drives the rotary cutting knife (60) to rotate, and the rotary range of the rotary cutting knife (60) overlaps with the rotation range of the round crystal brush sponge (30).

2. The product cutter of claim 1, wherein: The rotating mechanism (20) comprises two rotating seats (21) and a transition seat (22), the rotating seat (21) at one end is provided with a rotating motor (23), the rotating seat (21) at the other end is provided with a three-point clamping disc (70), the transition seat (22) is arranged close to the rotating seat (21) provided with the rotating motor (23), a shaft coupling (24) is arranged between the transition seat (22) and the rotating seat (21) on this side, the transition seat (22) is provided with a clamping end head (25), the rotating joint pipe (26) is inserted into the clamping end head (25), and the rotating motor (23), the shaft coupling (24), the clamping end head (25), the rotating joint pipe (26) and the three-point clamping disc (70) are sequentially connected.

3. The product cutter of claim 2, wherein: The rotating joint pipe (26) is divided into a plurality of continuous and ring joint pipe joints, the round crystal brush sponge (30) is sleeved between the corresponding ring joints of the rotating joint pipe (26), and the two ends of the round crystal brush sponge are respectively resisted by the corresponding ring joints.

4. The product cutter of claim 2, wherein: One end of the clamping end head (25) is a disc joint structure with a groove, the other end is a circular pipe structure with a through hole on the end side, a clamping opening is formed on the outer side of the circular pipe structure, a tension bolt (27) is inserted into the circular pipe structure, one end of the rotating joint pipe (26) is inserted into the circular pipe structure, and the tension bolt (27) abuts against the end of the rotating joint pipe (26).

5. The product cutter of claim 2, wherein: The three-point clamping disc (70) is provided with a notch at the top, the three-point clamping disc (70) is further connected with a vertically opening and closing upper top block (72) through a hinge (71), the side surface of the upper top block (72) is provided with a top circular block (73), a plurality of mounting holes are formed in the side surface of the three-point clamping disc (70), two horizontally aligned bottom circular blocks (74) are arranged in the mounting holes, and the distance between the two bottom circular blocks (74) and the top circular block (73) is adjusted by inserting the bottom circular blocks (74) into different mounting holes.

6. The product cutter of claim 1, wherein: The rotary cutting mechanism (50) comprises two rotary cutting seats (51) and a rotary cutting rod (52) provided with a scale line, the rotary cutting rod (52) is installed on the two rotary cutting seats (51) through a bearing, and the rotary cutting rod (52) penetrates through the transparent cover of the machine base (10).

7. The product cutter of claim 6, wherein: The end of the rotary cutting rod (52) extending out of the transparent cover part of the machine base (10) is provided with a rotating disc or an external motor.

8. The product cutter of claim 6, wherein: The handle seat (61) of the rotary cutting knife (60) is provided with an opening at the end, and a through clamping hole is formed in the side of the handle seat (61), the handle seat (61) is movably clamped on the rotary cutting rod (52) through the opening and clamped by a bolt.

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