Cleaning device

Abstract

The utility model relates to a cleaning device. The cleaning device comprises a cleaning box, the cleaning box comprises a box body, a door plate and a driving part, the box body is provided with a containing cavity and an opening communicated with the containing cavity, the door plate is installed at the driving end of the driving part, and the driving part is used for driving the door plate to move to the closing position for closing the opening and the opening position for opening the opening; the cleaning tank is arranged in the accommodating cavity; the protective cover is arranged in the containing cavity and fixedly connected with the door plate, the door plate can drive the protective cover to cover the cleaning tank when moving to the closing position, and the door plate can drive the protective cover to open the cleaning tank when moving to the opening position. In this way, the protective cover is fixedly connected to the door plate, so that when the door plate opens the opening, the protective cover also opens the cleaning tank, and when the door plate closes the opening, the protective cover also covers the cleaning tank. Compared with the prior art, it is avoided that a through hole allowing the lifting rod of the air cylinder to penetrate through is formed in the bottom of the cleaning tank, and therefore the risk that liquid medicine in the cleaning tank leaks is eliminated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a cleaning device. BACKGROUND

[0002] In the process of semiconductor production, the wafer usually needs to be cleaned or de-bonded. In the actual cleaning operation, the wafer is first placed in the cleaning tank by the robot, and then the protective cover is placed on the cleaning tank to prevent the cleaning liquid from splashing out. After cleaning, the protective cover is opened again, and the wafer in the cleaning tank is taken out by the robot.

[0003] In the prior art, the protective cover is opened or closed by a pneumatic cylinder. The lifting rod of the pneumatic cylinder penetrates the cleaning tank from the bottom and is connected with the protective cover, so that when the lifting rod of the pneumatic cylinder rises, the protective cover can be lifted to open, and when the lifting rod of the pneumatic cylinder descends, the protective cover can be lowered to close. However, the bottom of the cleaning tank needs to be provided with a through hole for the lifting rod to penetrate, which greatly increases the risk of liquid leakage in the cleaning tank during long-term use. CONTENT OF THE INVENTION

[0004] Therefore, it is necessary to provide a cleaning device which can reduce the risk of liquid leakage in the cleaning tank.

[0005] A cleaning device comprises:

[0006] A cleaning tank comprising a box body, a door plate and a driving member, the box body has a receiving cavity and an opening communicating with the receiving cavity, the door plate is installed on the driving end of the driving member, and the driving member is used to drive the door plate to move to a closed position for closing the opening and an open position for opening the opening;

[0007] A cleaning tank arranged in the receiving cavity and used to contain cleaning liquid; and

[0008] A protective cover arranged in the receiving cavity and fixedly connected with the door plate, the door plate can drive the protective cover to cover the cleaning tank when moving to the closed position, and can drive the protective cover to open the cleaning tank when moving to the open position.

[0009] In some embodiments, the cleaning tank further comprises a door frame installed on the box body, the door frame encloses the opening, and the driving member can drive the door plate to move up and down along the door frame between the closed position and the open position.

[0010] In some embodiments, the door frame comprises two first side frames and a second side frame, both of which are fixedly connected to the cabinet, the two first side frames each extend longitudinally along a vertical direction, and the second side frame is located between the two first side frames and has two ends fixedly connected to the top ends of the two first side frames.

[0011] The door panel is located between the two first side frames and is driven to rise or fall by the driving member; when the door panel falls to the open position, the door panel is spaced apart from the second side frame by a preset distance; and when the door panel rises to the closed position, the door panel is closed with the second side frame.

[0012] In some embodiments, the door frame further comprises two first wedge-shaped plates, both of which are installed on the side of the two first side frames close to each other and extend along the length direction of the first side frames, and the door panel is provided with two second wedge-shaped plates corresponding to the two first wedge-shaped plates.

[0013] When the door panel rises to the closed position, each first wedge-shaped plate and the corresponding second wedge-shaped plate are attached to each other; and when the door panel falls to the open position, each first wedge-shaped plate and the corresponding second wedge-shaped plate are separated from each other.

[0014] In some embodiments, each first wedge-shaped plate has a first inclined surface on the side facing the corresponding second wedge-shaped plate, each second wedge-shaped plate has a second inclined surface on the side facing the corresponding first wedge-shaped plate, the first inclined surface and the second inclined surface are parallel to each other and are both inclined relative to the movement direction of the door panel.

[0015] When the door panel rises to the closed position, the first inclined surface of each first wedge-shaped plate and the second inclined surface of the corresponding second wedge-shaped plate are attached to each other; and when the door panel falls to the open position, the first inclined surface of each first wedge-shaped plate and the second inclined surface of the corresponding second wedge-shaped plate are separated from each other.

[0016] In some embodiments, the protective cover comprises a cover body and a mounting flange fixedly connected to the cover body, the mounting flange extends along the circumferential direction of the cover body.

[0017] The cleaning device further comprises an arc-shaped fixed plate and a fastener, the arc-shaped fixed plate is consistent with the extension direction of the mounting flange, the arc-shaped fixed plate and the mounting flange are attached to each other and are locked and fixed by the fastener, and the arc-shaped fixed plate is fixedly connected to the door panel.

[0018] In some embodiments, the fasteners are arranged in a plurality, and the plurality of fasteners are arranged at intervals along the extension direction of the mounting flange.

[0019] In some embodiments, the arc-shaped fixing plate is provided with an arc-shaped limiting strip on the side that is attached to the mounting flange, the arc-shaped limiting strip extends longitudinally along the extension direction of the mounting flange, and is positioned in cooperation with the circumferential surface of the mounting flange.

[0020] In some embodiments, the arc-shaped fixing plate has a central angle greater than 180°, or the arc-shaped fixing plate is in the shape of a circular ring.

[0021] In some embodiments, the arc-shaped fixing plate has a central angle of 210°.

[0022] In actual use, first, the driving member drives the door plate to move to the open position, so that the opening of the box body is opened, and at the same time the door plate drives the protective cover to open the cleaning tank, so that the wafer can be placed into the cleaning tank. Then, the mechanical hand sends the wafer into the receiving cavity from the opening of the box body and places it into the cleaning tank. Then, the driving member drives the door plate to move from the open position to the closed position, so that the opening of the box body is closed, and at the same time the door plate drives the protective cover to cover the cleaning tank. At this time, the cleaning tank cleans the wafer, and since the protective cover covers the cleaning tank, the cleaning liquid in the cleaning tank can be prevented from splashing out during the cleaning of the wafer. After the wafer cleaning is completed, the driving member drives the door plate to move from the closed position to the open position, so that the opening of the box body is opened, and at the same time the door plate drives the protective cover to open the cleaning tank. Finally, the mechanical hand extends into the receiving cavity of the box body from the opening, and takes out the wafer in the cleaning tank.

[0023] In this way, by fixedly connecting the protective cover to the door plate, the protective cover moves together with the door plate, so that when the door plate opens the opening, the protective cover also opens the cleaning tank, and when the door plate closes the opening, the protective cover also covers the cleaning tank. Compared with the prior art scheme of separately arranging a cylinder to drive the protective cover to move, the through hole for the lifting rod of the cylinder to pass through is avoided in the bottom of the cleaning tank, thereby eliminating the risk of leakage of the cleaning liquid in the cleaning tank. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 FIG. 1 is a structural schematic view of a cleaning device according to an embodiment of the present application (the door plate is in the open position);

[0025] Figure 2 FIG. 2 is a structural schematic view of the cleaning device shown in FIG. 1 (the door plate is in the closed position); Figure 1

[0026] Figure 3 Figure 1 ​​a perspective view of the cleaning device shown;

[0027] Figure 4 for Figure 1 a front view of the cleaning device shown;

[0028] Figure 5 for Figure 1 a schematic view of the position relationship between the first wedge-shaped plate and the second wedge-shaped plate when the door panel of the cleaning device shown is in the open position;

[0029] Figure 6 for Figure 1 a schematic view of the position relationship between the first wedge-shaped plate and the second wedge-shaped plate when the door panel of the cleaning device shown is in the closed position. DETAILED DESCRIPTION

[0030] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the scope of the present application, and it is understood that similar modifications can be made by those skilled in the art in the light of the teachings of the present application, therefore the present application is not limited to the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0032] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0033] In the present application, unless specifically defined otherwise, the terms "mounting", "connected", "connecting", "fixed", and the like are used broadly and encompass both direct and indirect mounting, connecting, and / or fixed, as appropriate for the context. Such terms further encompass mechanical mounting, connecting, and / or fixed, electrical mounting, connecting, and / or fixed, as well as the like. Such terms also encompass alternative language such as "coupled", "communicates", "communicating", and the like. Where appropriate, such terms can be used in combination with other terms to denote different types of mounting, connecting, and / or fixed. For example, "fixedly mounted" can be used to denote a direct connection between elements, whereas "coupled" can be used to denote an indirect connection between elements.

[0034] In the present application, unless specifically defined otherwise, a first feature "on" or "under" a second feature can be directly in contact with the second feature, or indirectly in contact with the second feature through an intermediate medium. Also, a first feature "over", "above", and "on top of" a second feature can be directly above or obliquely above the second feature, or simply means that the first feature is higher in horizontal level than the second feature. A first feature "under", "below", and "underneath" a second feature can be directly below or obliquely below the second feature, or simply means that the first feature is lower in horizontal level than the second feature.

[0035] It is noted that when an element is referred to as being "on" or "set on" another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element. The terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar terms as used herein are used for illustration only and are not intended to be limiting.

[0036] Please refer to Figure 1 and Figure 2 , the present application provides a cleaning device, comprising a cleaning box, a cleaning tank (not shown in the figure) and a protective cover 20. The cleaning box comprises a box body (not shown in the figure), a door plate 10 and a driving member 11. The box body has a receiving cavity and an opening A communicating with the receiving cavity. The door plate 10 is installed on the driving end of the driving member 11, so that the driving member 11 can drive the door plate 10 to move to a closed position closing the opening A and an open position opening the opening A. The cleaning tank is arranged in the receiving cavity of the box body and is used for containing cleaning liquid. The protective cover 20 is arranged in the receiving cavity of the box body and is fixedly connected with the door plate 10, so that the protective cover 20 can move together with the door plate 10. When the door plate 10 moves to the closed position under the driving action of the driving member 11 (see Figure 2 ), the protective cover 20 can be covered on the cleaning tank; when the door plate 10 moves to the open position under the driving action of the driving member 11 (see Figure 1 ), the protective cover 20 can open the cleaning tank.

[0037] In actual use, first, the driving member 11 drives the door plate 10 to move to the open position, so that the opening A of the box body is opened, at the same time, the door plate 10 drives the protective cover 20 to open the cleaning tank, so that the wafer can be put into the cleaning tank. Then, the wafer is sent into the receiving cavity from the opening A of the box body by the mechanical arm and put into the cleaning tank. Then, the driving member 11 drives the door plate 10 to move from the open position to the closed position, so that the opening A of the box body is closed, at the same time, the door plate 10 drives the protective cover 20 to cover the cleaning tank. At this time, the cleaning tank cleans the wafer, and since the protective cover 20 covers the cleaning tank, the cleaning liquid in the cleaning tank can be prevented from splashing out during the cleaning of the wafer. After the wafer cleaning is completed, the driving member 11 drives the door plate 10 to move from the closed position to the open position, so that the opening A of the box body is opened, at the same time, the door plate 10 drives the protective cover 20 to open the cleaning tank. Finally, the mechanical arm is used to extend into the receiving cavity of the box body from the opening A, and the wafer in the cleaning tank is taken out.

[0038] In this way, by fixedly connecting the protective cover 20 to the door plate 10, the protective cover 20 moves together with the door plate 10, so that when the door plate 10 opens the opening A, the protective cover 20 also opens the cleaning tank, and when the door plate 10 closes the opening A, the protective cover 20 also covers the cleaning tank. Compared with the prior art scheme of separately arranging a cylinder to drive the protective cover 20 to move, the through hole for the lifting rod of the cylinder to pass through is avoided to be arranged at the bottom of the cleaning tank, so that the risk of leakage of the cleaning liquid in the cleaning tank is eliminated.

[0039] It should be noted that the protective cover 20 moves together with the door plate 10, that is, the protective cover 20 shares the same driving member 11 with the door plate 10, which on the one hand saves the number of driving components and is beneficial to reduce the cost of the equipment, and on the other hand is beneficial to simplify the automatic control process and improve the reliability of the equipment operation.

[0040] Optionally, the driving member 11 can be a cylinder, preferably a guide rod type cylinder. In this way, the driving end of the cylinder extends to drive the door plate 10 to rise to the closed position, and the driving end of the cylinder retracts to drive the door plate 10 to descend to the open position. Further, a detection sensor is installed on the cylinder, which is used to detect the position of the driving end of the cylinder, so that the position of the door plate 10 can be determined according to the detection result of the detection sensor.

[0041] In the embodiments of the present application, the cleaning tank further comprises a door frame 12 installed on the tank body, which encloses the opening A. The driving member 11 can drive the door plate 10 to move up and down along the door frame 12 between the closed position and the open position. Specifically, the door frame 12 comprises two first side frames 121 and a second side frame 123, which are fixedly connected to the tank body. The two first side frames 121 extend along the vertical direction and are spaced apart from each other. The second side frame 123 is located between the two first side frames 121, and the two ends of the second side frame 123 are fixedly connected to the top ends of the two first side frames 121. The door plate 10 is located between the two first side frames 121 and is driven by the driving member 11 to move up and down along the two first side frames 121. When the door plate 10 is lowered along the first side frame 121 to the open position, the door plate 10 is spaced apart from the second side frame 123 by a predetermined distance, so that the mechanical hand can pass through the opening A between the door plate 10 and the second side frame 123 to put the wafer into the cleaning tank or take the wafer out of the cleaning tank. When the door plate 10 is raised along the first side frame 121 to the closed position, the door plate 10 is closed with the second side frame 123, and at this time there is no gap between the door plate 10 and the second side frame 123, i.e. the opening A is closed.

[0042] Please refer to Figure 1 、 Figure 2 、 Figure 5 and Figure 6 Further, the door frame 12 further comprises two first wedge-shaped plates 125, which are installed on the sides of the two first side frames 121 close to each other and extend along the length direction of the first side frame 121. The door plate 10 is provided with two second wedge-shaped plates 101 corresponding to the two first wedge-shaped plates 125. When the door plate 10 is raised along the first side frame 121 to the closed position, each first wedge-shaped plate 125 and the corresponding second wedge-shaped plate 101 are attached to each other, ensuring that the door plate 10 and the door frame 12 form a seal to meet the sealing requirements; when the door plate 10 is lowered along the first side frame 121 to the open position, each first wedge-shaped plate 125 and the corresponding second wedge-shaped plate 101 are separated from each other.

[0043] Specifically, each first wedge-shaped plate 125 has a first inclined surface a1 on the side facing the corresponding second wedge-shaped plate 101, and each second wedge-shaped plate 101 has a second inclined surface a2 on the side facing the corresponding first wedge-shaped plate 125. The first inclined surface a1 and the second inclined surface a2 are parallel to each other and are inclined relative to the movement direction of the door plate 10. When the door plate 10 is raised along the first side frame 121 to the closed position (see Figure 6 ), the first inclined surface a1 of each first wedge-shaped plate 125 and the second inclined surface a2 of the corresponding second wedge-shaped plate 101 are attached to each other, ensuring that the door plate 10 and the door frame 12 form a seal to meet the sealing requirements; when the door plate 10 is lowered along the first side frame 121 to the open position (see Figure 5The first inclined surface a1 of each first wedge-shaped plate 125 is separated from the second inclined surface a2 of the corresponding second wedge-shaped plate 101.

[0044] Please refer to Figure 3 and Figure 4 In the embodiment of the present application, the protective cover 20 comprises a cover body 21 and a mounting flange 22 fixedly connected with the cover body 21. The mounting flange 22 extends along the circumference of the cover body 21. The cleaning device further comprises an arc-shaped fixing plate 30 and fasteners 40. The arc-shaped fixing plate 30 is consistent with the extension direction of the mounting flange 22. The arc-shaped fixing plate 30 and the mounting flange 22 are attached to each other and locked and fixed by the fasteners 40. The arc-shaped fixing plate 30 is fixedly connected with the door plate 10, so that the protective cover 20, the arc-shaped fixing plate 30 and the door plate 10 are fixedly connected, and the door plate 10 can drive the protective cover 20 to close or open the cleaning tank when the door plate 10 is lifted between the closed position and the open position. It should be noted that the cover body 21 and the mounting flange 22 can be fixedly connected by welding or other methods, which are not limited here.

[0045] Further, the number of fasteners 40 is multiple, and the multiple fasteners 40 are arranged at intervals along the extension direction of the mounting flange 22, so as to ensure that the mounting flange 22 and the arc-shaped fixing plate 30 are firmly connected. It should be noted that the fasteners 40 can be threaded fasteners, such as screws, etc.

[0046] Further, the side of the arc-shaped fixing plate 30 attached to the mounting flange 22 is provided with an arc-shaped limiting strip 31, which extends longitudinally along the extension direction of the mounting flange 22 and is positioned and matched with the circumferential surface of the mounting flange 22. In this way, when assembling, the arc-shaped fixing plate 30 is attached to the mounting flange 22, and the arc-shaped limiting strip 31 on the arc-shaped fixing plate 30 is used to limit the mounting flange 22, so as to ensure that the arc-shaped fixing plate 30 and the mounting flange 22 are assembled in place. Then, the arc-shaped fixing plate 30 and the mounting flange 22 are locked and fixed by the fasteners 40.

[0047] Alternatively, the arc-shaped fixing plate 30 can be a circular ring, so as to ensure that the attachment area of the arc-shaped fixing plate 30 and the mounting flange 22 is large enough, and further ensure that the stress area between them is large enough, so as to avoid damage to the protective cover 20 due to concentrated stress.

[0048] Of course, the arc-shaped fixing plate 30 is not limited to being a circular ring. In other embodiments, the arc-shaped fixing plate 30 can be a semi-circular ring, and the central angle of the arc-shaped fixing plate 30 is greater than 180°, so as to ensure that the attachment area of the arc-shaped fixing plate 30 and the mounting flange 22 is large enough, and further ensure that the stress area between them is large enough, so as to avoid damage to the protective cover 20 due to concentrated stress. Specifically Figure 3 In the embodiment shown in the figure, the central angle of the arc-shaped fixing plate 30 is 210°.

[0049] Each technical feature of the above-described embodiments can be combined with any other technical feature, and for the sake of brevity, not all possible combinations are described, but it is understood that the scope of the present disclosure encompasses all such possible combinations.

[0050] The above-described embodiments are merely illustrative of several embodiments of the present application, and the description is relatively specific and detailed, but should not be understood as limiting the scope of the patent application. It should be noted that for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the scope of the present application. Therefore, the scope of the patent of the present application should be subject to the appended claims.

Claims

1. A cleaning device, characterized in that, include: A cleaning box includes a box body, a door panel (10), and a drive unit (11). The box body has a receiving cavity and an opening (A) communicating with the receiving cavity. The door panel (10) is installed on the drive end of the drive unit (11). The drive unit (11) is used to drive the door panel (10) to move to a closed position that closes the opening (A) and an open position that opens the opening (A). A cleaning tank, disposed within the receiving cavity, is used to hold cleaning solution; and A protective cover (20) is disposed in the receiving cavity and fixedly connected to the door panel (10). When the door panel (10) moves to the closed position, it can drive the protective cover (20) to cover the cleaning tank, and when it moves to the open position, it can drive the protective cover (20) to open the cleaning tank.

2. The cleaning device according to claim 1, characterized in that, The cleaning box also includes a door frame (12) installed on the box body, the door frame (12) enclosing to form the opening (A), and the driving member (11) can drive the door panel (10) to move up and down along the door frame (12) between the closed position and the open position.

3. The cleaning device according to claim 2, characterized in that, The door frame (12) includes two first side frames (121) and a second side frame (123) that are fixedly connected to the box body. The two first side frames (121) extend longitudinally in the vertical direction. The second side frame (123) is located between the two first side frames (121), and the two ends of the second side frame (123) are fixedly connected to the top ends of the two first side frames (121). The door panel (10) is located between the two first frame sides (121) and rises or falls under the driving action of the driving member (11); when the door panel (10) falls to the open position, the door panel (10) is spaced apart from the second frame side (123) by a preset distance; when the door panel (10) rises to the closed position, the door panel (10) and the second frame side (123) are closed.

4. The cleaning device according to claim 3, characterized in that, The door frame (12) also includes two first wedge plates (125), which are respectively installed on the side of the two first side frames (121) that are close to each other, and both extend along the length direction of the first side frame (121). The door panel (10) is provided with two second wedge plates (101) that correspond one-to-one with the two first wedge plates (125). When the door panel (10) rises to the closed position, each of the first wedge plates (125) and the corresponding second wedge plate (101) are in contact with each other; when the door panel (10) falls to the open position, each of the first wedge plates (125) and the corresponding second wedge plate (101) are separated from each other.

5. The cleaning device according to claim 4, characterized in that, Each of the first wedge plates (125) has a first inclined surface (a1) on the side facing the corresponding second wedge plate (101), and each of the second wedge plates (101) has a second inclined surface (a2) on the side facing the corresponding first wedge plate (125). The first inclined surface (a1) and the second inclined surface (a2) are parallel and are both inclined relative to the direction of movement of the door panel (10). When the door panel (10) rises to the closed position, the first inclined surface (a1) of each first wedge plate (125) and the second inclined surface (a2) of the corresponding second wedge plate (101) are in contact with each other; when the door panel (10) falls to the open position, the first inclined surface (a1) of each first wedge plate (125) and the second inclined surface (a2) of the corresponding second wedge plate (101) are separated from each other.

6. The cleaning apparatus according to any one of claims 1 to 5, characterized in that, The protective cover (20) includes a cover body (21) and a mounting flange (22) fixedly connected to the cover body (21), the mounting flange (22) extending circumferentially along the cover body (21); The cleaning device also includes an arc-shaped fixing plate (30) and fasteners (40). The arc-shaped fixing plate (30) extends in the same direction as the mounting flange (22). The arc-shaped fixing plate (30) and the mounting flange (22) fit together and are locked and fixed by the fasteners (40). The arc-shaped fixing plate (30) is fixedly connected to the door panel (10).

7. The cleaning apparatus according to claim 6, characterized in that, The fasteners (40) are provided in multiples, and the multiple fasteners (40) are arranged at intervals along the extension direction of the mounting flange (22).

8. The cleaning apparatus according to claim 6, characterized in that, The arc-shaped fixing plate (30) has an arc-shaped limiting strip (31) protruding on one side that fits against the mounting flange (22). The arc-shaped limiting strip (31) extends longitudinally along the extension direction of the mounting flange (22) and is positioned and matched with the peripheral surface of the mounting flange (22).

9. The cleaning apparatus according to claim 6, characterized in that, The central angle of the arc-shaped fixing plate (30) is greater than 180°, or the arc-shaped fixing plate (30) is annular.

10. The cleaning apparatus according to claim 6, characterized in that, The central angle of the arc-shaped fixing plate (30) is 210°.

Images