Electrode applied to vacuum plasma cleaning machine

Abstract

The utility model belongs to the technical field of vacuum plasma cleaning machines, and discloses an electrode applied to a vacuum plasma cleaning machine, which comprises a plurality of electrode plates which are vertically arranged in parallel, a bearing plate is arranged below the electrode plates, the bottom of each electrode plate is fixedly connected with a mounting insertion block, and the mounting insertion blocks are fixedly connected with the electrode plates. The top of the bearing plate is provided with mounting slots corresponding to the mounting insertion blocks, each electrode plate is inserted into the corresponding mounting slot through the mounting insertion block, and the bottom of the bearing plate is provided with a notch on the right side of each mounting slot. A limiting block is arranged on the inner wall of the left side of each notch in a penetrating mode. According to the scheme, the mounting insertion blocks and the mounting insertion grooves are matched in an inserted mode, the multiple electrode plates are integrally fixed through the limiting blocks, the limiting grooves and the adjusting assemblies, so that the electrode plates are more convenient and rapid to mount and dismount, it is not needed that multiple sets of bolts are used for fixing like a traditional structure, and the electrode maintenance and replacement efficiency is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum plasma cleaning machine technical field more specifically, relate to a kind of electrode applied to vacuum plasma cleaning machine. BACKGROUND

[0002] Plasma is the substance generated by gas molecules in vacuum, discharge and other special occasions. The device for generating plasma in plasma cleaning, etching is to set two kinds of electrode magnetic field in sealed container, and a certain vacuum degree is realized by vacuum pump. As the gas becomes more and more thin, the distance between molecules, the free movement distance of molecules and ions also becomes longer. Under the action of magnetic field, collision occurs, and at the same time, glow is generated. Plasma moves in space in electromagnetic field, and bombards the surface of the object being processed, so as to achieve the effect of surface treatment, cleaning and etching. Plasma cleaning greatly improves the cleaning efficiency, reduces the production cost, protects the cleanliness and sanitation of the environment, and has double economic and social benefits.

[0003] The electrode structure of one kind of flat plate vertical electrode type vacuum plasma cleaning machine includes a plurality of vertically arranged and equally spaced electrode plates. Each electrode plate is connected with a conductive structure. The conductive structure includes a conductive sheet clamped on the top of the electrode plate. The conductive sheet is fixedly connected with the electrode plate. A conductive insertion rod is arranged on the conductive sheet. The conductive insertion rod is inserted into the insertion hole in the conductive cross beam to realize the discharge of plasma. At least two cross beams are fixed on the top of the equipment cavity. The electrode plate is fixedly connected with the cross beam through a plurality of bolts.

[0004] Due to the physical or chemical reaction between plasma and the surface of the material, although most of the gasified things can be pumped away by the vacuum pump, there are also very few substances that can stick to the surface of the electrode. Over time, the electrode surface is easily blocked by pollutants. When the electrode surface cannot meet the cleaning requirements by manual wiping or the electrode surface has a visible pollution layer, the electrode needs to be removed for cleaning or replaced. However, since the electrode plate and the cross beam are fixedly connected by a plurality of bolts, the overall electrode plate in the cavity is removed for cleaning or replacement, which is low in efficiency. Therefore, it needs to be improved. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art and provides an electrode applied to a vacuum plasma cleaning machine.

[0006] To solve the above problems, the utility model adopts the following technical scheme:

[0007] An electrode applied to a vacuum plasma cleaning machine, a plurality of vertically parallel arranged electrode plates, a supporting plate is arranged below the electrode plate, the bottom of each electrode plate is fixedly connected with a mounting plug, the top of the supporting plate is respectively provided with a mounting slot corresponding to each mounting plug, and each electrode plate is inserted into the corresponding mounting slot through the mounting plug;

[0008] The bottom of the supporting plate and the right side of each mounting slot are provided with a notch, a limiting block is arranged on the inner wall of the left side of each notch, a limiting slot is formed in the right side of each mounting plug, the limiting block is inserted into the limiting slot, and the supporting plate is provided with an adjusting assembly for driving all the limiting blocks to move left and right synchronously.

[0009] As a further description of the above technical scheme, the mounting plug is a T-shaped block, and the mounting plug is matched with the mounting slot.

[0010] As a further description of the above technical scheme, the adjusting assembly comprises a threaded rod arranged on the supporting plate in a penetrating mode, the threaded rod is rotationally connected to the supporting plate through a bearing, the limiting block is threadedly connected to the threaded rod, a limiting rod in sliding connection with the limiting block is arranged on the limiting block in a penetrating mode, and two ends of the limiting rod are fixedly connected to two sides of the inner wall of the notch.

[0011] As a further description of the above technical scheme, the electrode plate is made of stainless steel, and an oxidation-resistant coating is arranged on the surface of the electrode plate, and the oxidation-resistant coating is made of a ceramic coating.

[0012] As a further description of the above technical scheme, an anti-skid knob is fixedly connected to the end of the threaded rod and located outside the supporting plate.

[0013] Compared with the prior art, the electrode has the following advantages:

[0014] The mounting plug is matched with the mounting slot, and the limiting block, the limiting slot and the adjusting assembly are used to fix the plurality of electrode plates, so that the electrode plates are more convenient to mount and dismount, without the need of using a plurality of bolts to fix, and the efficiency of electrode maintenance and replacement is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structural schematic view of the utility model;

[0016] Figure 2 It is an explosion view of the utility model; Figure 1

[0017] Figure 3 It is a structural schematic view of the adjusting assembly of the utility model;

[0018] ​Figure 4 It is a structure schematic view of the bearing plate of the utility model.

[0019] Mark explanation in the drawing:

[0020] 1, electrode plate; 2, bearing plate; 3, installation plug-in block; 4, installation slot; 5, notch; 6, limit block; 7, limit slot; 8, adjusting assembly; 81, threaded rod; 82, limit rod; 83, anti-skid knob. Specific implementation

[0021] The technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments; based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0022] Please refer to Figures 1-4 An electrode applied to a vacuum plasma cleaning machine, a plurality of vertically and parallel arranged electrode plates 1, the material of the electrode plate 1 is stainless steel, and the surface of the electrode plate 1 is provided with an oxidation-resistant coating, and the material of the oxidation-resistant coating is a ceramic coating. Adopting stainless steel material and setting ceramic coating not only has good conductivity and corrosion resistance, but also can effectively resist oxidation, prolong the service life of the electrode plate 1, and reduce the maintenance cost of the equipment.

[0023] The lower portion of the bearing plate 2 is provided with a notch 5, and the inner wall on the left side of each notch 5 is provided with a limit block 6, and the right side of each installation plug-in block 3 is provided with a limit slot 7, and the limit block 6 is inserted into the limit slot 7, and the bearing plate 2 is provided with an adjusting assembly 8 for driving all limit blocks 6 to move left and right synchronously. Through the cooperation of the adjusting assembly 8, the limit block 6 and the limit slot 7, all electrode plates 1 can be fixed as a whole, the stability of the electrode is guaranteed, and shaking or displacement during use is prevented. When a single electrode plate 1 needs to be replaced, the limit block 6 is separated from the limit slot 7 by the adjusting assembly 8, and the limitation of the installation plug-in block 3 is cancelled.

[0024] The bottom of the bearing plate 2 and located on the right side of each installation slot 4 is provided with a notch 5, and the inner wall on the left side of each notch 5 is provided with a limit block 6, and the right side of each installation plug-in block 3 is provided with a limit slot 7, and the limit block 6 is inserted into the limit slot 7, and the bearing plate 2 is provided with an adjusting assembly 8 for driving all limit blocks 6 to move left and right synchronously. Through the cooperation of the adjusting assembly 8, the limit block 6 and the limit slot 7, all electrode plates 1 can be fixed as a whole, the stability of the electrode is guaranteed, and shaking or displacement during use is prevented. When a single electrode plate 1 needs to be replaced, the limit block 6 is separated from the limit slot 7 by the adjusting assembly 8, and the limitation of the installation plug-in block 3 is cancelled.

[0025] The adjusting assembly 8 comprises a threaded rod 81 which is arranged on the supporting plate 2 and is rotatably connected with the supporting plate 2 through a bearing, the limiting block 6 is threadedly connected with the threaded rod 81, the limiting block 6 is arranged with a limiting rod 82 which is slidably connected with the limiting block 6, and the two ends of the limiting rod 82 are fixedly connected with the two sides of the inner wall of the notch 5. By rotating the threaded rod 81, the limiting block 6 can be moved left and right along the limiting rod 82, so as to realize the insertion or separation of the limiting block 6 and the limiting slot 7, thereby facilitating the installation and disassembly of the electrode plate 1.

[0026] The end of the threaded rod 81 and the outer side of the supporting plate 2 are fixedly connected with an anti-skid knob 83, the anti-skid knob 83 is designed to facilitate the rotation of the threaded rod 81 by the operator, and can increase the friction force during operation to prevent slipping.

[0027] Working principle:

[0028] The installation process of the electrode plate 1 is as follows: the installation plug 3 at the bottom of the electrode plate 1 is aligned with the installation slot 4 at the top of the supporting plate 2, and the installation plug 3 is completely inserted into the installation slot 4.

[0029] The anti-skid knob 83 is rotated, and the anti-skid knob 83 drives the threaded rod 81 to rotate. Since the limiting block 6 is threadedly connected with the threaded rod 81 and can only move left and right under the limitation of the limiting rod 82, the rotation of the threaded rod 81 will cause the limiting block 6 to move to the left until the limiting block 6 is inserted into the limiting slot 7 on the right side of the installation plug 3, thereby completing the installation and fixation of all electrode plates 1.

[0030] The disassembly process of the electrode plate 1 is as follows: when it is necessary to clean or replace the electrode plate 1, the anti-skid knob 83 is reversely rotated, the anti-skid knob 83 drives the threaded rod 81 to reversely rotate, thereby causing the limiting block 6 to move to the right and be pulled out of the limiting slot 7. At this time, the electrode plate 1 loses the limiting fixation, and the electrode plate 1 can be pulled out upward, thereby completing the disassembly of the electrode plate 1.

[0031] In summary, the electrode applied to the vacuum plasma cleaning machine has the advantages of convenient installation and disassembly, simple operation, long service life and high practical value by the reasonable structural design, and solves the problem of low efficiency when the existing electrode structure is taken down for replacement.

[0032] The above describes only the preferred specific embodiments of the present application; however, the protection scope of the present application is not limited thereto. Any skilled person in the art can make equivalent replacements or changes to the technical scheme and improvement concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. An electrode for use in a vacuum plasma cleaner, comprising multiple vertically parallel electrode plates (1), characterized in that: A support plate (2) is provided below the electrode plate (1). Each electrode plate (1) is fixedly connected to a mounting block (3) at its bottom. The top of the support plate (2) is provided with a mounting slot (4) corresponding to each mounting block (3). Each electrode plate (1) is inserted into its corresponding mounting slot (4) through the mounting block (3). The bottom of the support plate (2) and the right side of each mounting slot (4) are provided with a notch (5). A limit block (6) is inserted on the inner wall on the left side of each notch (5). A limit groove (7) is opened on the right side of each mounting block (3). The limit block (6) is inserted into the limit groove (7). The support plate (2) is provided with an adjustment component (8) that drives all the limit blocks (6) to move left and right synchronously.

2. The electrode for use in a vacuum plasma cleaner according to claim 1, characterized in that: The mounting block (3) is a T-shaped block, and the mounting block (3) is adapted to the mounting slot (4).

3. The electrode for use in a vacuum plasma cleaner according to claim 1, characterized in that: The adjustment assembly (8) includes a threaded rod (81) inserted into the support plate (2), the threaded rod (81) being rotatably connected to the support plate (2) via a bearing, the limiting block (6) being threadedly connected to the threaded rod (81), and a limiting rod (82) slidably connected to the limiting block (6), the two ends of the limiting rod (82) being fixedly connected to both sides of the inner wall of the notch (5).

4. The electrode for use in a vacuum plasma cleaner according to claim 1, characterized in that: The electrode plate (1) is made of stainless steel, and the surface of the electrode plate (1) is provided with an anti-oxidation coating, which is made of ceramic coating.

5. An electrode for use in a vacuum plasma cleaner according to claim 3, characterized in that: An anti-slip knob (83) is fixedly connected to the end of the threaded rod (81) and to the outside of the support plate (2).

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